Composition for dielectric thin film, metal oxide dielectric thin film using the same and preparation method thereof
    81.
    发明授权
    Composition for dielectric thin film, metal oxide dielectric thin film using the same and preparation method thereof 有权
    电介质薄膜的组成,使用其的金属氧化物电介质薄膜及其制备方法

    公开(公告)号:US07989361B2

    公开(公告)日:2011-08-02

    申请号:US11831380

    申请日:2007-07-31

    Abstract: This invention pertains to a composition for a dielectric thin film, which is capable of being subjected to a low-temperature process. Specifically, the invention is directed to a metal oxide dielectric thin film formed using the composition, a preparation method thereof, a transistor device comprising the dielectric thin film, and an electronic device comprising the transistor device. The electronic device to which the dielectric thin film has been applied exhibits excellent electrical properties, thereby satisfying both a low operating voltage and a high charge mobility.

    Abstract translation: 本发明涉及能够进行低温处理的电介质薄膜用组合物。 具体地,本发明涉及使用该组合物形成的金属氧化物电介质薄膜,其制备方法,包括该电介质薄膜的晶体管器件和包括晶体管器件的电子器件。 已经施加了电介质薄膜的电子器件表现出优异的电性能,从而满足低工作电压和高电荷迁移率。

    Transistor, electronic device including a transistor and methods of manufacturing the same
    84.
    发明申请
    Transistor, electronic device including a transistor and methods of manufacturing the same 审中-公开
    晶体管,包括晶体管的电子器件及其制造方法

    公开(公告)号:US20100321279A1

    公开(公告)日:2010-12-23

    申请号:US12591914

    申请日:2009-12-04

    CPC classification number: H01L29/7869 H01L27/3272

    Abstract: Disclosed are a transistor, an electronic device and methods of manufacturing the same, the transistor including a photo relaxation layer between a channel layer and a gate insulating layer in order to suppress characteristic variations of the transistor due to light. The photo relaxation layer may be a layer of a material capable of suppressing variations in a threshold voltage of the transistor due to light. The photo relaxation layer may contain a metal oxide such as aluminum (Al) oxide. The channel layer may contain an oxide semiconductor.

    Abstract translation: 公开了晶体管,电子器件及其制造方法,晶体管包括沟道层和栅极绝缘层之间的光弛豫层,以抑制由于光引起的晶体管的特性变化。 光弛豫层可以是能够抑制由于光引起的晶体管的阈值电压的变化的材料层。 光弛豫层可以含有氧化铝(Al)等金属氧化物。 沟道层可以含有氧化物半导体。

    Method of fabricating thin film transistor
    86.
    发明授权
    Method of fabricating thin film transistor 有权
    制造薄膜晶体管的方法

    公开(公告)号:US07834352B2

    公开(公告)日:2010-11-16

    申请号:US11972847

    申请日:2008-01-11

    Abstract: A method of fabricating a thin film transistor, in which source and drain electrodes are formed through a solution process, even all stages which include formation of electrodes on a substrate, formation of an insulator layer, and formation of an organic semiconductor layer are conducted through the solution process. In the method, the fabrication is simplified and a fabrication cost is reduced. It is possible to apply the organic thin film transistor to integrated circuits requiring high speed switching because of high charge mobility.

    Abstract translation: 制造薄膜晶体管的方法,其中源极和漏极通过溶液处理形成,甚至包括在衬底上形成电极的所有阶段,形成绝缘体层以及形成有机半导体层通过 解决过程。 在该方法中,简化了制造并降低了制造成本。 由于高电荷迁移率,有机薄膜晶体管可能需要高速切换的集成电路。

    Methods of manufacturing an oxide semiconductor thin film transistor
    89.
    发明授权
    Methods of manufacturing an oxide semiconductor thin film transistor 有权
    制造氧化物半导体薄膜晶体管的方法

    公开(公告)号:US07767505B2

    公开(公告)日:2010-08-03

    申请号:US12153651

    申请日:2008-05-22

    CPC classification number: H01L29/7869 H01L29/66969

    Abstract: Methods of manufacturing an oxide semiconductor thin film transistor are provided. The methods include forming a gate on a substrate, and a gate insulating layer on the substrate to cover the gate. A channel layer, which is formed of an oxide semiconductor, may be formed on the gate insulating layer. Source and drain electrodes may be formed on opposing sides of the channel layer. The method includes forming supplying oxygen to the channel layer, forming a passivation layer to cover the source and drain electrodes and the channel layer, and performing an annealing process after forming the passivation layer.

    Abstract translation: 提供了制造氧化物半导体薄膜晶体管的方法。 所述方法包括在衬底上形成栅极,以及在衬底上形成栅极绝缘层以覆盖栅极。 可以在栅极绝缘层上形成由氧化物半导体形成的沟道层。 源极和漏极可以形成在沟道层的相对侧上。 所述方法包括:向所述沟道层形成供氧,形成钝化层以覆盖所述源漏电极和所述沟道层,以及在形成所述钝化层之后进行退火处理。

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