Resin bonded carbonaceous brush and method of manufacturing the same

    公开(公告)号:US10903613B2

    公开(公告)日:2021-01-26

    申请号:US15305839

    申请日:2015-04-07

    Abstract: A carbonaceous material is fabricated by kneading of carbon powder and a binder. The carbonaceous material is granulated such that an average particle diameter of the carbonaceous material is 0.3 mm or more. A brush material is fabricated by mixing of the granulated carbonaceous material and metallic powder. A ratio of the metallic powder to a total weight of the brush material is adjusted to 1% by weight or more and 30% by weight or less. Pressure molding is performed on the fabricated brush material, and thermal processing is further performed on the brush material at a temperature at which a resin in the brush material is not carbonized.

    Heat treatment vessel for single-crystal silicon carbide substrate and etching method

    公开(公告)号:US10665485B2

    公开(公告)日:2020-05-26

    申请号:US15766191

    申请日:2016-10-06

    Abstract: A heat treatment container (1) is provided with support members (6) for supporting a disc-shaped SiC substrate (2), which is an object, at a time of an etching treatment of the SiC substrate (2). Each of the support members (6) has an inclined surface (6F) for supporting a lower surface end (2E) of the SiC substrate (2), the inclined surface being inclined so as to increasingly approach the centerline of the SiC substrate (2) going downward. More specifically, each of the support members (6) is formed in a conical shape with a diameter that increases going downward, and a conical surface which is the peripheral surface of each supporting member forms the inclined surface (6F). A vertically-middle section of the inclined surface (6F) contacts the lower surface end (2E) of the SiC substrate (2).

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