Abstract:
A charged particle beam exposure method and apparatus, in which a charged particle beam is shaped based on pattern data and the shaped charged particle beam is irradiated to a desired location on a sample. The method and apparatus includes introducing ozone gas into a chamber through which the charged particle beam is passed, shaped and deflected, to be irradiated to the desired location while the charged particle beam is irradiated through the chamber. The ozone gas concentration in the chamber is maintained so that the concentration downstream along the beam is higher than the concentration upstream along the beam. A charge-up drift due to a contamination material from a resist on a wafer can be avoided by the ozone self cleaning. The ozone oxidation does not occur at the upstream chamber where there is a lower ozone concentration and lower contamination.
Abstract:
A zoom lens barrel having a movable lens barrel which is movable in an optical axis direction, and an opening in which the movable lens barrel is movable in the optical axis direction. The zoom lens barrel further includes a moving frame to which the movable lens barrel is secured to move in the optical axis direction together with the movable lens barrel, and an intermediary member which is positioned between the movable lens barrel and the moving frame. The movable lens barrel is secured to the moving frame through the intermediary member.
Abstract:
The front opening of a lamp body with a bulb disposed therein is covered with a lens. The lens is segmented into a plural number of segmental areas. A first fisheye step group composed of convex fisheye steps and a second fisheye step groups composed of concave fisheye steps are alternatingly formed in the segmental areas. In the first fisheye step group, real images of the light source are formed on the front side of the lens by the convex fisheye steps. In the second fisheye step groups, virtual images are formed on the rear side of the lens by the concave fisheye steps. The distance between the real and virtual images of the light source creates an appearance of depth for the lamp.
Abstract:
A semiconductor memory is provided which includes a voltage converter supplying an internal supply voltage in proportion to the greater one of two reference voltages to a circuit in the semiconductor memory. The voltage converter includes a circuit which is provided for generating a first voltage whose dependency on an external supply voltage is regulated to a predetermined small value, while another circuit is provided for generating a second voltage whose dependency on the external supplying voltage is larger than the dependency of the first voltage. The voltage converter includes MOS transistors and differential amplifiers interconnected with one another, as well as a voltage dividing circuit. The memory also includes a word line booster for boosting the internal supply voltage.
Abstract:
A code reading pattern and an image pickup apparatus are provided for reading a symbol representing significant information, the symbol encoded by the pattern. The code reading pattern is formed by repeated markings of constant pitch on the surface of an object. The markings define area having at least one boundary, the at least one boundary defining an outline of the symbol. The apparatus includes a lighting system for illuminating the code reading pattern with parallel light, an imaging system for imaging light reflected from the pattern, a spatial frequency filtering system, located at the near back focal plane of the imaging system, for blocking regular reflected light and for transmiting diffracted light to project an image of the symbol, and a receiver for receiving the image.
Abstract:
In an apparatus for forming a film of MOCVD, gas source MBE or the like, there is provided a gas supply pipe for supplying gas obtained by gasifying a liquid or solid organic metal raw material to a reaction chamber. A mechanism in which a pressure gauge is fitted in the vicinity of a gas generating source in the gas supply pipe and the gas supply quantity from the gas generating source is regulated based on an indicated value of the pressure gauge so as to suppress variation of the gas pressure is installed in the apparatus for forming a film.There is a heating system for heating the organic metal raw material or an ultrasonic vibrator for applying ultrasonic vibration to the organic metal raw material as the mechanism for regulating the gas supply quantity, and the gasified quantity of the organic metal raw material is varied by regulating the heating temperature of the heating system or by varying the output of the ultrasonic vibrator.
Abstract:
Topical ophthalmic compositions comprising 1-(2-ethoxyethyl)-2-(4-methyl-1-homopiperazinyl)-benzimidazole and its ophthalmically acceptable acid addition salts have been found to be useful in treating allergic conjunctivitis and related ailments.
Abstract:
A method of reducing elevated intraocular pressure which comprises administering the compound of the formula (1): ##STR1## or a pharmaceutically acceptable salt thereof to patients suffering from abnormally elevated intraocular pressure is provided. A pharmaceutical formulation containing the compound of the formula (1) as an essential component is also provided.
Abstract:
An apparatus includes a constant voltage generator for generating a voltage based on a difference between threshold voltages of two MOS transistors, and a voltage sampling device for sampling the output voltage of the constant voltage generator circuit, wherein the voltage sampling device samples the output voltage of the constant voltage generator before an electric source switch for the constant voltage generator is turned off.
Abstract:
A voltage limiter circuit is disposed in a semiconductor IC chip in order to reduce an operating voltage of an internal circuit of a scaled-down element. A small capacitance of a Vcc wiring by the disposition constitutes a resonance circuit together with an inductance of the Vcc wiring. Resonance at the resonance circuit causes large variation of a supply current and noise. An additional capacitance is connected between the Vcc wiring and a Vss wiring in order to suppress the variation and noise. The capacitance is formed by a PN junction and is connected in series to a damping resistance.