公开(公告)号：US06900949B2

公开(公告)日：2005-05-31

申请号：US10761318

申请日：2004-01-22

申请人： Shuichi Takeuchi ,  Koichi Maruyama ,  Daisuke Koreeda

发明人： Shuichi Takeuchi ,  Koichi Maruyama ,  Daisuke Koreeda

IPC分类号： G02B3/02 ,  G02B13/00 ,  G02B13/18 ,  G11B3/74 ,  G11B7/00 ,  G11B7/135 ,  G11B7/20

CPC分类号： G11B7/1353 ,  G11B7/1374 ,  G11B7/1378 ,  G11B7/13922 ,  G11B2007/0006

摘要： An optical system of an optical pick-up for a plurality of types of optical discs with a corresponding plurality of light sources. A first coupling lens that is used at least for the first optical disc, and an objective lens that is used for the plurality of types of optical discs. A beam for the first optical disc emitted by the plurality of light sources passes through the first coupling lens and is incident on the objective lens as a diverging beam. The diverging beam being given spherical aberration by the coupling lens. When the objective lens shift occurs, a coma component relating to the spherical aberration of the diverging beam which is shifted with respect to the objective lens due to the shift of the objective lens is canceled by a coma generated by the objective lens and the cover layer of the first optical disc.

摘要翻译： 一种用于具有相应多个光源的多种类型的光盘的光学拾取器的光学系统。 至少用于第一光盘的第一耦合透镜和用于多种类型的光盘的物镜。 用于由多个光源发射的第一光盘的光束穿过第一耦合透镜并作为发散光束入射在物镜上。 发散光束由耦合透镜给出球面像差。 当发生物镜偏移时，由于物镜的偏移而相对于物镜偏移的发散光束的球面像差的彗差成分被物镜和覆盖层产生的彗形消除 的第一光盘。

公开(公告)号：US06898025B2

公开(公告)日：2005-05-24

申请号：US10452236

申请日：2003-06-03

申请人： Shuichi Takeuchi ,  Yutaka Takakubo

发明人： Shuichi Takeuchi ,  Yutaka Takakubo

IPC分类号： G02B13/14 ,  G03F7/20 ,  G02B17/00

CPC分类号： G03F7/70225 ,  G02B13/143 ,  G03F7/70241

摘要： A projection optical system, which is telecentric with respect to an object side and an image side, projects a pattern onto an image plane, which is substantially parallel with the pattern, at a substantial equi-magnification. The projecting optical system is provided with first and second condenser lenses having a common (first) optical axis which is perpendicular to the pattern and the image plane. The projection optical system further includes an imaging lens having a second optical axis that intersects with the first optical axis at an intermediate position between the first and second condenser lenses. A first mirror reflects a beam from the pattern and passed through the first condenser lens toward the imaging lens. A second mirror reflects the beam passed through the imaging lens to the imaging lens, and a third mirror reflects the beam passed through the imaging lens toward the second condenser lens.

摘要翻译： 相对于物体侧和图像侧是远心的投影光学系统以基本上等倍的方式将图案投影到基本上与图案平行的图像平面上。 投影光学系统设置有具有垂直于图案和图像平面的公共（第一）光轴的第一和第二聚光透镜。 投影光学系统还包括具有在第一和第二聚光透镜之间的中间位置处与第一光轴相交的第二光轴的成像透镜。 第一反射镜反射来自图案的光束并且经过第一聚光透镜朝向成像透镜。 第二反射镜将通过成像透镜的光束反射到成像透镜，并且第三反射镜将通过成像透镜的光束反射到第二聚光透镜。

公开(公告)号：US06873475B2

公开(公告)日：2005-03-29

申请号：US10790737

申请日：2004-03-03

申请人： Shuichi Takeuchi

发明人： Shuichi Takeuchi

IPC分类号： G02B13/00 ,  G02B3/02 ,  G02B13/18 ,  G11B7/00 ,  G11B7/135

CPC分类号： G11B7/1378 ,  G11B7/1353 ,  G11B7/1374 ,  G11B2007/0006

摘要： An objective lens for a plurality of types of optical discs is provided with a diffracting structure on at least one surface thereof. The surface includes an inner area including the optical axis and an outer area. The outer area includes at least one special annular zone. Part of a first beam (having a first wavelength for a first optical disc of lower data density) passed through the zone will be substantially in antiphase with part of the first beam passed through the inner area. The convergence angle θ of part of the first beam incident on the outermost part of the inner area measured after emerging from the objective lens and a design numerical aperture NAref of the first optical disc satisfy: 1.0

摘要翻译： 用于多种类型的光盘的物镜在其至少一个表面上设置有衍射结构。 表面包括包括光轴和外部区域的内部区域。 外部区域包括至少一个特殊的环形区域。 穿过该区域的第一光束（具有较低数据密度的第一光盘的第一波长）的部分将基本上与第一光束的一部分通过内部区域反相。 入射到从物镜出射后测量的内部区域的最外部分的第一光束的部分的会聚角θ和第一光盘的设计数值孔径NAref满足：第一光束的物镜的有效NA 基本上等于设计数值孔径NAref。

公开(公告)号：US20050024702A1

公开(公告)日：2005-02-03

申请号：US10890232

申请日：2004-07-14

申请人： Shuichi Takeuchi ,  Takashi Iizuka

发明人： Shuichi Takeuchi ,  Takashi Iizuka

IPC分类号： B41J2/44 ,  G02B13/00 ,  G02B26/10 ,  G02B26/12 ,  H04N1/036 ,  H04N1/113 ,  G02B26/08

CPC分类号： G02B26/123

摘要： An scanning optical system includes a light source having a plurality of light emitting points each of which emits a beam, a first optical system that collimates the beams emitted by the light emitting points in regard to a main scanning direction while converging the beams in an auxiliary scanning direction, a deflecting system that dynamically deflects the beams simultaneously in the main scanning direction, and a second optical system that converges the deflected beams on the scan target surface. Further, the second optical system includes a magnification adjustment element whose magnification mS in the main scanning direction on an optical axis thereof is approximately +1 and whose magnification mP in the auxiliary scanning direction on the optical axis thereof is approximately −1.

摘要翻译： 扫描光学系统包括具有发射光束的多个发光点的光源，第一光学系统，其将由发光点发射的光束相对于主扫描方向准直，同时将光束会聚在辅助光 扫描方向，在主扫描方向上同时动态地偏转光束的偏转系统以及将偏转的光束会聚在扫描目标表面上的第二光学系统。 此外，第二光学系统包括其光轴上的主扫描方向上的放大率mS大约为+1并且其在其轴上的辅助扫描方向上的倍率mP大约为-1的倍率调节元件。

公开(公告)号：US20050001014A1

公开(公告)日：2005-01-06

申请号：US10816915

申请日：2004-04-05

申请人： Shuichi Takeuchi ,  Hidehiko Kira ,  Kenji Kobae ,  Norio Kainuma ,  Hiroshi Kobayashi ,  Takayoshi Matsumura ,  Shigeo Matsunuma ,  Tomohisa Yagi

发明人： Shuichi Takeuchi ,  Hidehiko Kira ,  Kenji Kobae ,  Norio Kainuma ,  Hiroshi Kobayashi ,  Takayoshi Matsumura ,  Shigeo Matsunuma ,  Tomohisa Yagi

IPC分类号： B23K1/00 ,  B23K1/06 ,  B23K1/20 ,  B23K3/06 ,  H01L21/56 ,  H01L21/60 ,  H01L21/607 ,  H05K3/32 ,  H05K3/34 ,  B23K20/10 ,  B23K31/02

CPC分类号： H01L21/563 ,  B23K1/0016 ,  B23K1/06 ,  B23K1/203 ,  B23K3/0607 ,  H01L24/29 ,  H01L24/81 ,  H01L2224/05568 ,  H01L2224/05573 ,  H01L2224/16225 ,  H01L2224/73203 ,  H01L2224/73204 ,  H01L2224/81205 ,  H01L2224/81801 ,  H01L2224/83192 ,  H01L2924/00014 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01015 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/0105 ,  H01L2924/01074 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/01082 ,  H01L2924/014 ,  H05K3/328 ,  H05K3/3457 ,  H05K3/3489 ,  H05K2201/10674 ,  H05K2201/10977 ,  H05K2203/0285 ,  H01L2224/05599

摘要： The method of mounting an electronic part is capable of securely mounting the electronic part having fine solder bumps without excessively heating the part. The method of comprises the steps of: applying flux-fill, which acts as flux and under-filling resin, on a surface of a mount board, in which electrodes are formed; respectively connecting solder bums of the electronic part with the electrodes; and simultaneously filling a gap between the electronic part and the mount board with the flux-fill, wherein the solder bumps are made contact with the electrodes, and ultrasonic vibration energy is applied to contact portions of the solder bumps and the electrodes in the connecting step.

摘要翻译： 安装电子部件的方法能够牢固地安装具有细焊锡凸块的电子部件，而不会过度加热该部件。 所述方法包括以下步骤：在其中形成电极的安装板的表面上施加用作助熔剂和未充填树脂的焊剂填充物; 分别将电子部件的焊料焊接与电极连接; 并且同时用助焊剂填充电子部件和安装板之间的间隙，其中焊料凸块与电极接触，并且在连接步骤中将超声波振动能量施加到焊料凸块和电极的接触部分 。

公开(公告)号：US06791934B2

公开(公告)日：2004-09-14

申请号：US10076663

申请日：2002-02-19

申请人： Takeshi Shimano ,  Tetsuo Ariyoshi ,  Kazuo Shigematsu ,  Koichi Maruyama ,  Shuichi Takeuchi

发明人： Takeshi Shimano ,  Tetsuo Ariyoshi ,  Kazuo Shigematsu ,  Koichi Maruyama ,  Shuichi Takeuchi

IPC分类号： G11B700

CPC分类号： G11B7/1378 ,  G11B7/093 ,  G11B7/0935 ,  G11B7/0943 ,  G11B7/13927

摘要： When it is intended to realize a lens having a large NA with one lens, an adjustment precision between both surfaces of the lens is very strict. Accordingly an objective lens having an NA of 0.8 or more was usually realized by two lenses. However, a working distance is small, and collision of the objective lens with a disc is apt to occur. A coma corrector for compensating coma caused by decentering of both surfaces in realizing the high NA lens with one lens is added. However, in this case, astigmatism occurs when the objective lens decenters from the coma corrector relatively accompanied with a tracking operation. The objective lens and the coma corrector are fixed to a mirror barrel so as to be unified with each other, and driven by a two-dimensional lens actuator. With such a constitution, decentering of the objective lens and the coma corrector does not occur, and hence astigmatism does not occur.

摘要翻译： 当想要实现具有一个透镜的具有大NA的透镜时，透镜的两个表面之间的调节精度非常严格。 因此，通常通过两个透镜实现NA为0.8以上的物镜。 然而，工作距离小，容易发生物镜与盘的碰撞。 添加了一个用于补偿由两个表面偏心造成的实现具有一个透镜的高NA透镜的昏迷校正器。 然而，在这种情况下，当物镜相对于跟踪操作相对于昏迷校正器偏离时，发生散光。 物镜和彗差校正器被固定到镜筒上，以便彼此一体化，并由二维透镜致动器驱动。 通过这样的结构，不会发生物镜和昏迷校正器的偏心，因此不发生散光。

公开(公告)号：US06734890B2

公开(公告)日：2004-05-11

申请号：US10173769

申请日：2002-06-19

申请人： Shuichi Takeuchi ,  Daisuke Koreeda

发明人： Shuichi Takeuchi ,  Daisuke Koreeda

IPC分类号： G02B2608

CPC分类号： B41J2/473 ,  G02B26/123

摘要： A scanning optical system that emits a plurality of beams to a plurality of surfaces to be scanned, respectively. The scanning optical system includes a light source and a polygonal mirror. The plurality of beams incident on the polygonal mirror are inclined with respect each other in an auxiliary scanning direction. The scanning optical system further includes an imaging optical system that converges the deflected beams on the plurality of surfaces, respectively. The imaging optical system includes a front lens group and a plurality of rear lens groups. All the beams are incident on the front lens group, and then incident on the respective rear lens groups. Each of the plurality of rear lens groups has a shape which is designed in accordance with an angle of a beam incident thereon with respect to an optical axis of the front lens group.

摘要翻译： 一种扫描光学系统，其分别将多个光束发射到要被扫描的多个表面。 扫描光学系统包括光源和多面镜。 入射在多面镜上的多个光束在辅助扫描方向上相对倾斜。 扫描光学系统还包括成像光学系统，其将偏转的光束分别会聚在多个表面上。 成像光学系统包括前透镜组和多个后透镜组。 所有的光束入射在前透镜组上，然后入射到各个后透镜组上。 多个后透镜组中的每一个具有根据相对于前透镜组的光轴入射的光束的角度而设计的形状。

公开(公告)号：US5973813A

公开(公告)日：1999-10-26

申请号：US95939

申请日：1998-06-12

申请人： Shuichi Takeuchi

发明人： Shuichi Takeuchi

IPC分类号： G02B26/12 ,  G02B26/08

CPC分类号： G02B26/126

摘要： A reflection type optical scanning system includes a cylindrical lens having positive power in the sub-scanning direction, a deflector, an image forming curved reflection mirror, and an anamorphic lens between the curved reflection mirror and an object surface to be scanned and having at least one toroidal surface with positive power in the sub-scanning direction, along a light path in this order from a light source side. The deflector is arranged so that light emitted from the cylindrical lens is made incident thereupon at a predetermined incident angle in the sub-scanning direction. The curved reflection mirror is made of a barrel-shaped toroidal surface, a cross-sectional in the main scanning direction being a concave arc having a single center of curvature or an arc and a cross-sectional shape in the sub-scanning direction being an arc having a single center of curvature, with respect to the incident light. The position of the center of curvature varies depending on the image height in the main scanning direction. The curved reflection mirror is inclined so that the light incident thereupon from the deflector is reflected by the curved reflection mirror in the sub-scanning direction at a predetermined angle toward the object surface. The axis of the anamorphic lens is deviated from the optical axis of the optical scanning system in the sub-scanning direction.

摘要翻译： 反射型光扫描系统包括在副扫描方向上具有正功率的柱面透镜，偏转器，成像弯曲反射镜和弯曲反射镜与待扫描物体表面之间的变形透镜，并且至少具有 在副扫描方向上具有正功率的一个环形表面，沿着来自光源侧的顺序沿着光路。 偏转器被布置成使得从柱面透镜发射的光在副扫描方向上以预定的入射角入射到其上。 弯曲反射镜由筒状环形面构成，主扫描方向的截面为具有单个曲率中心或圆弧的凹弧，副扫描方向的截面形状为 具有相对于入射光的单个曲率中心的弧。 曲率中心的位置根据主扫描方向上的图像高度而变化。 弯曲反射镜倾斜，使得从偏转器入射的光在副扫描方向上以预定角度朝向物体表面被弯曲反射镜反射。 变形透镜的轴在副扫描方向上偏离光学扫描系统的光轴。

公开(公告)号：US20140124367A1

公开(公告)日：2014-05-08

申请号：US14128646

申请日：2012-04-25

申请人： Shuichi Takeuchi ,  Hisayuki Takasu ,  Asako Kaneko

发明人： Shuichi Takeuchi ,  Hisayuki Takasu ,  Asako Kaneko

IPC分类号： H01J37/30 ,  H01J37/16 ,  H01J37/305

CPC分类号： H01J37/3005 ,  G01N1/286 ,  G01N1/32 ,  H01J37/16 ,  H01J37/20 ,  H01J37/3056 ,  H01J2237/31 ,  H01J2237/31745

摘要： There is provided an apparatus as well as a method for polishing, observing, and additionally polishing a sample in a vacuum with a charged particle beam apparatus furnished with no other apparatus.The charged particle beam apparatus has a vacuum chamber equipped with a liquid bath containing an ion liquid and a supersonic vibration means. With the ion liquid kept in contact with a polishing target area of the sample, supersonic vibration is propagated in the ion liquid to polish the sample.Because the charged particle beam apparatus permits polishing, observation, and additional polishing of the sample in a vacuum without being furnished with any additional apparatus, throughput is improved and the effects of the atmosphere on the sample are prevented.

摘要翻译： 提供了一种装置以及用没有其他装置的带电粒子束装置在真空中抛光，观察和附加抛光样品的方法。 带电粒子束装置具有配备有含有离子液体和超音速振动装置的液体浴的真空室。 当离子液体与样品的抛光目标区域保持接触时，在离子液体中传播超音速振动以抛光样品。 由于带电粒子束装置允许在没有任何附加装置的情况下在真空中抛光，观察和附加抛光样品，因此提高了生产能力并防止了样品对样品的影响。

公开(公告)号：US08570849B2

公开(公告)日：2013-10-29

申请号：US13096337

申请日：2011-04-28

申请人： Satoshi Inoue ,  Shuichi Takeuchi

发明人： Satoshi Inoue ,  Shuichi Takeuchi

IPC分类号： G11B7/00

CPC分类号： G11B7/0956 ,  G11B7/13927 ,  G11B2007/0013

摘要： A method for adjusting a tilt angle of an objective lens with respect to one of a multilayer optical disc having a plurality of recording layers and an optical axis of an optical information recording/reproducing apparatus, wherein a use wavelength λ and a numerical aperture NA are defined by conditions: 390

摘要翻译： 一种用于调整物镜相对于具有多个记录层的多层光盘和光信息记录/再现装置的光轴之一的倾斜角的方法，其中使用波长λ和数值孔径NA为 由条件限定：390 <λ<420和0.75