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公开(公告)号：US6165582A
公开(公告)日：2000-12-26
申请号：US823540
申请日：1997-03-25
申请人： Shigenori Hayashi
发明人： Shigenori Hayashi
CPC分类号： G11B5/72 , G11B5/8408 , Y10S428/90 , Y10T428/24355 , Y10T428/265 , Y10T428/30
摘要： A magnetic recording medium having a diamond-like carbon (DLC) film added therein a Group IV element of the periodic table such as silicon, particularly in the vicinity of the boundary between the magnetic material and the formed DLC film. Since a DLC having low friction coefficient can be formed, the centerline average roughness can be reduced to 30 nm or even less. Accordingly, a magnetic recording medium improved in magnetic properties and in lubricity can be obtained.
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公开(公告)号：US5838111A
公开(公告)日：1998-11-17
申请号：US807396
申请日：1997-02-27
申请人： Shigenori Hayashi , Hideo Nakagawa
发明人： Shigenori Hayashi , Hideo Nakagawa
CPC分类号： H01J37/32082 , H01J37/32541 , H05H1/46
摘要： A plasma generator operable in the UHF and VHF bands is adaptable to process substrates having different sizes and shapes. The device includes a plurality of electrodes, a power supply for providing a high frequency signal to at least one of the electrodes, and antennas attached to the plurality of electrodes. Antennas on one electrode are arranged substantially parallel and alternately to antennas attached to another adjacent electrode.
摘要翻译： 可在UHF和VHF频带中操作的等离子体发生器适用于处理具有不同尺寸和形状的基板。 该装置包括多个电极，用于向至少一个电极提供高频信号的电源和附接到多个电极的天线。 一个电极上的天线布置成基本上平行并且交替地布置成附接到另一相邻电极的天线。
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公开(公告)号：US5719740A
公开(公告)日：1998-02-17
申请号：US595240
申请日：1996-02-01
申请人： Shigenori Hayashi , Takeshi Kamada , Hideo Torii , Takashi Hirao
发明人： Shigenori Hayashi , Takeshi Kamada , Hideo Torii , Takashi Hirao
IPC分类号： G01D5/241 , G01L9/00 , G01P15/125 , H01G7/00 , G01L9/12
CPC分类号： G01L9/0072 , G01D5/2417 , G01P15/125 , Y10T29/43
摘要： A small and highly sensitive capacitance type pressure sensor is obtained by filling an alkali halide material such as KBr into a through-hole, forming a conductive thin film on the surface, and dissolving and removing the alkali halide material. An insulating plate disposed with a through-hole in the thickness direction is filled with a molten alkali halide material such as KBr. After forming a conductive thin film on the surface of the alkali halide material filled into the through-hole and the vicinity thereof, the alkali halide material is dissolved by water and removed. In this way, a diaphragm is made of the through-hole and the conductive thin film. A curve of the diaphragm caused by a pressure difference between the both faces of the conductive thin film is detected as a capacitance change between the conductive thin film and the electrode layer.
摘要翻译： 通过将诸如KBr的碱金属卤化物材料填充到通孔中，在表面上形成导电薄膜，并溶解和除去碱金属卤化物材料，获得小而高灵敏度的电容式压力传感器。 在厚度方向上设置有通孔的绝缘板填充有诸如KBr的熔融卤化碱材料。 在填充到通孔及其附近的碱金属卤化物材料的表面上形成导电薄膜之后，碱金属卤化物材料被水溶解并除去。 以这种方式，隔膜由通孔和导电薄膜制成。 由导电薄膜的两面之间的压力差引起的隔膜的曲线被检测为导电薄膜和电极层之间的电容变化。
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公开(公告)号：US5672252A
公开(公告)日：1997-09-30
申请号：US483835
申请日：1995-06-15
申请人： Shigenori Hayashi , Kazuki Komaki , Takeshi Kamada , Masatoshi Kitagawa , Takashi Deguchi , Ryoichi Takayama , Takashi Hirao
发明人： Shigenori Hayashi , Kazuki Komaki , Takeshi Kamada , Masatoshi Kitagawa , Takashi Deguchi , Ryoichi Takayama , Takashi Hirao
IPC分类号： C23C14/00 , C23C14/08 , C23C14/58 , G02F1/00 , H01L21/314 , H01L21/316 , H01L37/02 , H01L41/316 , C23C14/34
CPC分类号： C23C14/5853 , C23C14/0078 , C23C14/088 , H01L21/02197 , H01L21/02266 , H01L21/314 , H01L21/31691 , H01L37/025 , H01L41/1875 , H01L41/316 , G02F1/0027
摘要： A method whereby perovskite type oxide dielectric thin films with ABO.sub.3 structure are able to be formed with such features as good stability, uniformity, reproducibility, or the like, with high through-put by having a deposition process, wherein the thin films are deposited on a substrate, and a stabilization process, where no deposition of the thin films takes place, repeated alternatingly while the substrate temperature being kept near the temperature at which perovskite type oxide dielectric thin films are formed. Also, by employing (i) a processing method wherein a decomposing excitation of a reactive gas due to plasma takes place on or near the deposition surface in a gaseous atmosphere comprising a gas that reacts with the elements composing the thin films, (ii) a processing method wherein an oxidation reaction takes place on the deposition surface in a gaseous atmosphere comprising at least ozone (O.sub.3), and (iii) a processing method wherein light of short wave length is irradiated on the deposition surface in a gaseous atmosphere comprising at least reactive elements in the non-deposition process, the oxygen concentration in the deposited thin films is adjusted and dielectric thin films of good quality and an extremely low defect content are realized.
摘要翻译： 具有ABO3结构的钙钛矿型氧化物电介质薄膜能够通过具有沉积工艺的高通量形成具有良好的稳定性，均匀性，再现性等特性的方法，其中薄膜沉积在 基板和稳定化处理，其中不存在薄膜的沉积，在衬底温度保持接近形成钙钛矿型氧化物电介质薄膜的温度的同时交替重复。 此外，通过采用以下处理方法：（i）在包含与组成薄膜的元素反应的气体的气体气氛中，在等离子体发生的反应性气体的分解激发发生在沉积表面上或其附近的处理方法，（ii） 处理方法，其中在至少包含臭氧（O 3）的气体气氛中在沉积表面上发生氧化反应，和（iii）其中在至少包括至少包含臭氧（O 3）的气体气氛中在沉积表面上照射短波长的光的处理方法 在非沉积工艺中的非活性元素，沉积的薄膜中的氧浓度被调节，并且实现了良好质量和极低缺陷含量的介电薄膜。
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公开(公告)号：US5648000A
公开(公告)日：1997-07-15
申请号：US308296
申请日：1994-09-19
IPC分类号： H01L21/302 , G03F7/42 , H01L21/027 , H01L21/3065 , H01L21/311
CPC分类号： H01L21/31138 , G03F7/427 , Y10S438/906
摘要： Ashing processing is performed using an atmosphere pressure discharge apparatus for stably producing discharge at an atmosphere pressure. Dielectric substance is arranged in a space between a pair of electrodes. A rare gas is flowed into the space. An electric field is generated in the space, thereby to produce plasma. A gas for providing oxygen to a rare gas is used as a reactive gas. The concentration of the reactive gas is 3% or less, in particular, 1% or less. Therefore, A resist film or the like formed on a substrate is removed (peeled).
摘要翻译： 使用用于在大气压下稳定地产生放电的气氛压力排放装置进行灰化处理。 电介质物质被布置在一对电极之间的空间中。 稀有气体流入空间。 在空间中产生电场，从而产生等离子体。 将用于向稀有气体提供氧气的气体用作反应气体。 反应气体的浓度为3％以下，特别优选为1％以下。 因此，除去（剥离）形成在基板上的抗蚀剂膜等。
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公开(公告)号：US5637373A
公开(公告)日：1997-06-10
申请号：US154009
申请日：1993-11-18
申请人： Shigenori Hayashi
发明人： Shigenori Hayashi
CPC分类号： G11B5/72 , G11B5/8408 , Y10S428/90 , Y10T428/24355 , Y10T428/265 , Y10T428/30
摘要： A magnetic recording medium having a diamond-like carbon (DLC) film added therein a Group IV element of the periodic table such as silicon, particularly in the vicinity of the boundary between the magnetic material and the formed DLC film. Since a DLC having low friction coefficient can be formed, the centerline average roughness can be reduced to 30 nm or even less. Accordingly, a magnetic recording medium improved in magnetic properties and in lubricity can be obtained.
摘要翻译： 具有类金刚石碳（DLC）薄膜的磁记录介质，其中添加了诸如硅的周期表的IV族元素，特别是在磁性材料和形成的DLC膜之间的边界附近。 由于可以形成具有低摩擦系数的DLC，因此中心线平均粗糙度可以降低到30nm甚至更小。 因此，可以获得磁性能和润滑性提高的磁记录介质。
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公开(公告)号：US5238705A
公开(公告)日：1993-08-24
申请号：US380328
申请日：1989-07-17
CPC分类号： C23C16/274 , C23C16/278 , C30B25/105
摘要： Diamond films are formed by chemical vapor reation. Nitrogen or halogen compound gas is inputted to the reaction chamber together with a reactive gas of hydrocarbon. The resistivity, transparency and hardness of the deposited films can be controlled by adjusting the introduction rate of the halogen or nitrogen.
摘要翻译： 金刚石膜由化学气相形成。 氮气或卤素化合物气体与烃的反应性气体一起输入到反应室。 沉积膜的电阻率，透明度和硬度可以通过调节卤素或氮的导入速率来控制。
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公开(公告)号：US5198724A
公开(公告)日：1993-03-30
申请号：US777708
申请日：1991-10-21
IPC分类号： C23F4/00 , B29C47/12 , B29C59/14 , H01J37/305 , H01J37/32 , H01L21/302 , H01L21/3065 , H05H1/26 , H05H1/46
CPC分类号： H01J37/32009 , B29C47/12 , B29C59/14 , H01J37/32532 , H05H1/46 , B29C47/0021 , B29K2079/08
摘要： A plasma generating device includes a central conductor, a peripheral cylindrical conductor surrounding the central conductor, an insulating cylinder interposed between the central conductor and the peripheral conductor in order to prevent direct arc discharge from occurring between the central conductor and the peripheral conductor. The central and peripheral conductors and the insulating cylinder are coaxially arranged in order to define a cylindrical discharging space therein. By applying a high frequency energy to the central conductor, glow discharge is caused between the central and peripheral conductors. A reactive gas is introduced from one end of the discharging space, excited by the glow discharge and goes out from the other end as an excited plasma to a working place where a work piece is processed by the plasma.
摘要翻译： 等离子体产生装置包括中心导体，围绕中心导体的外围圆柱形导体，插入在中心导体和外围导体之间的绝缘圆筒，以便防止在中心导体和外围导体之间发生直接电弧放电。 中心和周边导体和绝缘筒同轴地布置以便在其中限定圆柱形放电空间。 通过向中心导体施加高频能量，在中心导体和外围导体之间产生辉光放电。 从放电空间的一端引入反应性气体，由辉光放电激发，并作为激发的等离子体从另一端排出到等离子体处理工件的工作场所。
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公开(公告)号：US5185179A
公开(公告)日：1993-02-09
申请号：US417311
申请日：1989-10-05
申请人： Shunpei Yamazaki , Shigenori Hayashi , Noriya Ishida , Mari Sasaki , Junichi Takeyama , Kenji Itou , Masahiro Kojima , Masaya Kadono
发明人： Shunpei Yamazaki , Shigenori Hayashi , Noriya Ishida , Mari Sasaki , Junichi Takeyama , Kenji Itou , Masahiro Kojima , Masaya Kadono
CPC分类号： C23C16/345 , C23C16/26
摘要： Carbonaceous films are coated on a surface by chemical vapor reation. In advance of the deposition of carbonaceous film, a silicon nitride film as coated on the surface to prevent interdiffusion between the carbonaceous film and the underlying surface.
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公开(公告)号：US5120625A
公开(公告)日：1992-06-09
申请号：US587659
申请日：1990-09-26
IPC分类号： C23C16/26
CPC分类号： C23C16/26
摘要： An electrophotographic member and method of using same where the electrophotographic member includes an organic photosensitive member and a passivation film formed on the organic photosensitive member where the film includes a first carbon containing layer including halogen atoms and being in direct contact with the organic photosensitive member and a second carbon containing layer including halogen atoms and formed on the first carbonaceous layer, wherein the concentration of halogen atoms in the first layer is lower than that in the second layer and the thickness of the first layer is substantially less than that of the second layer.
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