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180 条记录 (耗时 0.025 秒)

    Three-dimensional surface analyzing method
    82.
    发明申请
    Three-dimensional surface analyzing method 审中-公开
    三维表面分析方法

    公开(公告)号：US20050092920A1

    公开(公告)日：2005-05-05

    申请号：US10949523

    申请日：2004-09-27

    申请人： Jae-cheol Lee ,  Igor Asanov

    发明人： Jae-cheol Lee ,  Igor Asanov

    IPC分类号： G01N21/31 ,  G01N23/227 ,  H01J37/252 ,  H01J40/00 ,  H01J47/00

    CPC分类号： G01N23/2273

    摘要： Provided is a method of analyzing a surface three-dimensionally in which compositions of a surface and an inner of a specimen are analyzed in three dimensions in a device having a beam source; a monochromator which separates a specific-wavelength beam from a multi-wavelength beam emitted from the beam source and irradiates the detected specific-wavelength beam into the specimen; a detector which analyzes energy of photoelectrons that are excited and escaped from the specimen, the method comprising: irradiating the specific-wavelength beam into one region of the surface of the specimen to measure intensities of the excited photoelectrons depending on escape angles between a normal line to the surface of the specimen and the escape directions of the excited photoelectrons, and detecting a composition distribution depending on a depth of the one region of the specimen by using data on the intensities that are measured depending on the escape angles of the excited photoelectrons; changing an incident position of the specific-wavelength beam for the specimen to detect the composition distribution depending on the depth at each of positions of the surface of the specimen; and collecting data on the composition distribution depending on the depth at each of the positions of the specimen to analyze the compositions of the specimen in the three dimensions.

    摘要翻译： 本发明提供一种在具有光束源的装置中分析三维表面三维分析表面和内部的表面的方法， 将特定波长光束与从光束源发射的多波长光束分离并将检测到的特定波长光束照射到样本中的单色仪; 分析从样品被激发和逸出的光电子的能量的检测器，所述方法包括：将特定波长光束照射到样品表面的一个区域中，以根据法线之间的逃逸角度来测量激发的光电子的强度 通过使用关于根据被激发的光电子的逸出角测量的强度的数据来检测取决于样品的一个区域的深度的组成分布; 改变样品的特定波长光束的入射位置，以根据样品表面的每个位置处的深度检测组成分布; 并根据样本的每个位置的深度收集关于组成分布的数据，以分析三维中样本的组成。

    Method and apparatus for inspecting defects
    83.
    发明授权
    Method and apparatus for inspecting defects 有权
    检查缺陷的方法和装置

    公开(公告)号：US06879392B2

    公开(公告)日：2005-04-12

    申请号：US10115880

    申请日：2002-04-02

    申请人： Kaoru Sakai ,  Shunji Maeda ,  Takafumi Okabe ,  Masahiro Watanabe

    发明人： Kaoru Sakai ,  Shunji Maeda ,  Takafumi Okabe ,  Masahiro Watanabe

    IPC分类号： G01B11/30 ,  G01B21/30 ,  G01N21/94 ,  G01N21/95 ,  G01N21/956 ,  G01N23/04 ,  G01N23/06 ,  G01N23/225 ,  G01N23/227 ,  G06T1/00 ,  H01L21/66 ,  G01N21/88

    CPC分类号： G01N23/227 ,  G01N21/94 ,  G01N21/9501

    摘要： In a defect inspecting apparatus, having contrast, brightness and appearance of a target for inspection and detection sensitivity of a defect changed depending on optical system conditions, and adapted to perform inspection by selecting an optimal test condition, even an unskilled user can easily select an optimal optical condition by quantitatively displaying evaluation values side by side when optical system conditions are changed. Moreover, by selecting an evaluation item having highest satisfaction based on a result of a series of test inspection, an optimal test condition can be automatically selected.

    摘要翻译： 在缺陷检查装置中，根据光学系统条件具有对象的检查目标的检查和检测灵敏度的对比度，亮度和外观变化，并且适于通过选择最佳测试条件进行检查，即使是非熟练的用户也可以容易地选择 当光学系统条件改变时，通过定量地显示评估值来获得最佳光学条件。 此外，通过基于一系列检查结果的结果选择具有最高满意度的评价项目，可以自动选择最佳检测条件。

    Analytical method of auger electron spectroscopy for insulating sample
    85.
    发明授权
    Analytical method of auger electron spectroscopy for insulating sample 失效
    绝缘样品螺旋电子能谱分析方法

    公开(公告)号：US5889282A

    公开(公告)日：1999-03-30

    申请号：US919154

    申请日：1997-08-28

    申请人： Hee Seok Yang ,  Taek Jin Lim ,  Jae Sung Han

    发明人： Hee Seok Yang ,  Taek Jin Lim ,  Jae Sung Han

    IPC分类号： H01L21/66 ,  G01N23/227 ,  G01Q30/00 ,  H01J37/256 ,  H01J37/00

    CPC分类号： G01N23/2276 ,  H01J2237/2511

    摘要： A method of Auger Electron Spectroscopic (AES) analysis for a surface of an insulating sample. The method is characterized by performing an AES analysis after depositing a conductive layer of a designated thickness on the surface of a sample containing an insulating layer by means of an ion beam sputtering for the purpose of the preventing charge accumulation. The conductive layer preferably is deposited to have a thickness of at least 6 .ANG. to 50 .ANG. and a beam voltage used for applying the conductive layer is at least 3 Kev. The conductive layer is made of any of iridium(Ir), chrome(Cr) and gold(Au). Because any electron charge generated on the sample is discharged via the conductive layer, the AES analysis can be performed for a sample containing an insulating layer.

    摘要翻译： 绝缘样品表面的俄歇电子能谱（AES）分析方法。 该方法的特征在于，为了防止电荷累积，通过离子束溅射，在含有绝缘层的样品的表面上沉积指定厚度的导电层之后进行AES分析。 导电层优选沉积为具有至少6安培至50埃的厚度，并且用于施加导电层的束电压为至少3Kev。 导电层由铱（Ir），铬（Cr）和金（Au）中的任一种制成。 因为在样品上产生的任何电子电荷通过导电层放电，所以可以对含有绝缘层的样品进行AES分析。

    Hybrid photomultiplier tube with high sensitivity
    87.
    发明授权
    Hybrid photomultiplier tube with high sensitivity 失效
    混合光电倍增管，灵敏度高

    公开(公告)号：US5374826A

    公开(公告)日：1994-12-20

    申请号：US91764

    申请日：1993-07-14

    申请人： Ross A. LaRue ,  Kenneth A. Costello ,  Verle W. Aebi

    发明人： Ross A. LaRue ,  Kenneth A. Costello ,  Verle W. Aebi

    IPC分类号： G01N23/225 ,  G01N23/227 ,  G01T1/28 ,  H01J37/073 ,  H01J43/24 ,  H01J43/28 ,  H01J49/06 ,  H01J31/30

    CPC分类号： H01J43/246 ,  G01N23/2273 ,  G01T1/28 ,  H01J43/28

    摘要： A focused electron/bombarded (FEB) ion detector comprising an MCP, focusing means, and a collection anode disposed in a detector body. The collector anode includes a diode for receiving the focused output electron beam from the MCP. The gain between the input ion current to the MCP and the detector output signal from the diode is on the order of 1-100 million, depending on the device configuration and applied biasing voltages. A hybrid photomultiplier tube includes a photocathode, a photodiode for collecting and multiplying electrons emitted by the photocathode and providing an output signal and electrodes for focusing the electrons on the photodiode. A vacuum envelope encloses a vacuum region between photocathode and the detector. A conductor disposed on or adjacent to a sidewall of the vacuum envelope reduces the effect of electrical charges on the inside wall of the vacuum envelope on the trajectories of the electrons.

    摘要翻译： 聚焦电子/轰击（FEB）离子检测器，包括MCP，聚焦装置和设置在检测器主体中的收集阳极。 集电极阳极包括用于从MCP接收聚焦的输出电子束的二极管。 根据器件配置和施加的偏置电压，MCP输入离子电流与二极管的检测器输出信号之间的增益约为1-100亿。 混合光电倍增管包括光电阴极，用于收集和乘积由光电阴极发射的电子并提供输出信号的光电二极管和用于将电子聚焦在光电二极管上的电极。 真空封套包围光电阴极和检测器之间的真空区域。 设置在真空外壳的侧壁上或与真空外壳的侧壁相邻的导体减小了在电子轨迹上的电荷对真空外壳的内壁的影响。

    Process and apparatus for monitoring monocrystalline structures with images of Kikuchi pseudo-lines
    89.
    发明授权
    Process and apparatus for monitoring monocrystalline structures with images of Kikuchi pseudo-lines 失效
    用菊池伪线图像监测单晶结构的方法和装置

    公开(公告)号：US5016266A

    公开(公告)日：1991-05-14

    申请号：US482791

    申请日：1990-02-21

    申请人： Michel Meurtin

    发明人： Michel Meurtin

    IPC分类号： G01N23/20 ,  G01N23/227 ,  G01Q30/00

    CPC分类号： G01N23/227

    摘要： An object (12) is irradiated by means of a divergent and polychromatic beam of X-rays for producing a diagram composed of Kikuchi pseudo-lines. An X-ray generator (4) is mounted on a stand (1), and an automatic handler (13) presents the objects (12) in confronting relation to the microfocus (F) of the generator. An intensity amplifier (6) and a video camera (7) record the obtained diagrams composed of the pseudo-lines. The handler apparatus is controlled by an electronic device (17).

    摘要翻译： 通过X射线的发散和多色光束照射物体（12），以产生由菊池伪线构成的图。 X射线发生器（4）安装在支架（1）上，并且自动处理器（13）以与发生器的微焦点（F）相对的方式呈现物体（12）。 强度放大器（6）和摄像机（7）记录由伪线构成的获得的图。 处理装置由电子装置（17）控制。