Abstract:
An atomic layer deposition (ALD) apparatus includes a first process chamber in which a substrate is accommodated, a plasma generating unit provided on the outside of the first process chamber, a source gas supply unit provided on an upper portion of the plasma generating unit, and configured to supply a plurality of source gases, a purge gas supply unit configured to supply a purge gas to the first process chamber, and a gas control unit configured to control the supply of the source gases and the purge gas, wherein the plasma generating unit includes a second process chamber providing a space in which plasma is generated and a plasma antenna inducing a magnetic field in the second process chamber, and the source gases are supplied to the first process chamber through the plasma generating unit.
Abstract:
The present invention relates to a large-sized vinyl chloride seed with an average particle size of 0.65 to 1.5 μm, a vinyl chloride resin with improved low-viscosity properties, and preparation methods thereof. The preparation of the large-sized vinyl chloride seed includes adding a vinyl chloride monomer, an emulsifier, and a polymerization initiator to an aqueous medium; homogenizing the mixed solution using a rotor-stator type homogenizer; and subjecting the resultant monomer droplets to a polymerization reaction.
Abstract:
Example embodiments of the present invention relate to methods of manufacturing a semiconductor device. Other example embodiments of the present invention relate to methods of manufacturing a semiconductor device having a gate electrode. In the method of manufacturing the semiconductor device, a gate electrode may be formed on a semiconductor substrate. Damage in the semiconductor substrate and a sidewall of the gate electrode may be cured, or repaired, by a radical re-oxidation process to form an oxide layer on the semiconductor substrate and the gate electrode. The radical re-oxidation process may be performed by providing a nitrogen gas onto the semiconductor substrate while increasing a temperature of the semiconductor substrate to a first temperature to passivate a surface of the gate electrode under a nitrogen gas atmosphere, providing an oxygen gas onto the semiconductor substrate while increasing the temperature from a first temperature to a second temperature to perform a first oxidation process and/or performing a second oxidation process at the second temperature.
Abstract:
Example embodiments relate to a capacitor including p-type doped silicon germanium and a method of manufacturing the capacitor. The capacitor may include a lower electrode, a dielectric layer, an upper electrode, a barrier layer and a capping layer. The lower electrode may have a cylindrical shape. The dielectric layer may be on the lower electrode. The dielectric layer may have a uniform thickness. The upper electrode may be on the dielectric layer. The upper electrode may have a more uniform thickness. The capping layer may be on the upper electrode. The capping layer may include a silicon germanium layer doped with p-type impurities. The barrier layer may be between the upper electrode and the capping layer to prevent (or reduce) the p-type impurities from infiltrating into the dielectric layer.
Abstract:
The present invention relates to a method and system for preventing reverse rotation operation of an engine using a system that includes a crank angle sensor (CAS), a cam position sensor (CPS), and an engine control unit for receiving signals from the CAS and the CPS to perform engine control. The method includes determining if a piston in a specific cylinder is at a predetermined location using a level of a CPS signal at a leading edge and a trailing edge of a CAS signal; determining if the engine is rotating in reverse using the CPS signal level at the leading edge and trailing edge of the CAS signal in the case where it is determined that the piston of the specific cylinder is at the predetermined location; and discontinuing operation of the engine if it is determined that the engine is undergoing reverse rotation.
Abstract:
The disclosure relates to a system for controlling devices and information on a network by hand gestures, and more particularly, to a system for controlling devices and information on a network by hand gestures in which a device or a file to be controlled is selected by a user and a display device is pointed so that information and data can be shared and that various devices can be coupled to each other easily and can be controlled easily.The system for controlling devices and information on a network by hand gestures can remarkably improve the interaction between various input and display devices and a user under a ubiquitous computing environment.
Abstract:
Provided are a vinyl chloride-based resin formed by polymerization of vinyl chloride-based small seed particles having an average particle diameter range of 0.15 μm to 0.5 μm prepared by emulsion polymerization and vinyl chloride-based large seed particles having an average particle diameter range of 0.51 μm to 0.8 μm prepared by micro-suspension polymerization, in which a content ratio(weight ratio) of the large seed particles to the small seed particles is in a range of 1 to 2, and a method of preparing the vinyl chloride-based resin. Excellent low viscosity characteristics of the vinyl chloride resin at high and low shear rates may be obtained by controlling the particle size of the small seed prepared by emulsion polymerization.
Abstract:
A composition for detecting a marker for the diagnosis or prognosis of liver cancer is disclosed. The composition includes an agent capable of assessing the expression level of UQCRH (ubiquinol-cytochrome c reductase hinge protein). In addition, a kit having the composition, a microarray for the diagnosis of liver cancer using the marker, and a method for detecting the marker, and predicting recurrence following surgery in liver cancer patients are disclosed. The marker is able to contribute to the early diagnosis of liver cancer and prediction of recurrence following surgery and survival of liver cancer patients who have undergone hepatic resection, and also is significant for being a promising therapeutic target for liver cancer.
Abstract:
A data line driver includes a first driver cell configured to drive a first data line connected to a first output pad. The first driver cell includes a first data register configured to latch first image data in response to a first latch clock signal, a first level shifter connected to the first data register, a first digital-analog converter (DAC) connected to the first level shifter, and a first amplifier connected between the first DAC and the first output pad. The first data register and the first amplifier are arranged in a first direction. The first level shifter and the first DAC are arranged adjacent to each other in a second direction and are arranged between the first data register and the first amplifier, and the second direction is perpendicular to the first direction.
Abstract:
The disclosure relates to a system for controlling devices and information on a network by hand gestures, and more particularly, to a system for controlling devices and information on a network by hand gestures in which a device or a file to be controlled is selected by a user and a display device is pointed so that information and data can be shared and that various devices can be coupled to each other easily and can be controlled easily.The system for controlling devices and information on a network by hand gestures can remarkably improve the interaction between various input and display devices and a user under a ubiquitous computing environment.