CMP PAD DRESSERS WITH HYBRIDIZED ABRASIVE SURFACE AND RELATED METHODS

    公开(公告)号:US20210308827A1

    公开(公告)日:2021-10-07

    申请号:US14755838

    申请日:2015-06-30

    申请人: Chien-Min Sung

    发明人: Chien-Min Sung

    IPC分类号: B24B53/017 B24D3/00

    摘要: A CMP pad conditioner comprises a plurality of abrasive segments. Each abrasive segment includes a segment blank and an abrasive layer attached to the segment blank, the abrasive layer including a superhard abrasive material. A pad conditioner substrate is also provided. Each of the plurality of abrasive segments is permanently affixed to the pad conditioner substrate in an orientation that enables removal of material from a CMP pad by the abrasive layer as the pad conditioner and the CMP pad are moved relative to one another.

    COMPOSITE CONDITIONER AND ASSOCIATED METHODS

    公开(公告)号:US20190091832A1

    公开(公告)日:2019-03-28

    申请号:US15926901

    申请日:2018-03-20

    申请人: Chien-Min Sung

    发明人: Chien-Min Sung

    摘要: CMP pad dressers having leveled tips and associated methods are provided. In one aspect, for example, a composite conditioner can include a base plate and a plurality of polishing units secured to a surface of the base plate by an adhesive layer, where each polishing unit includes a plurality of polishing tips secured in a binding layer. Additionally, a height difference between a first highest polishing tip and a second highest polishing tip is less than or equal to about 10 μm, a height difference between the first highest polishing tip and a tenth highest polishing tip is less than or equal to about 20 μm, and a height difference between the first highest polishing tip and a 100th highest polishing tip is less than or equal to about 40 μm. Furthermore, the first highest polishing tip protrudes from the binding layer to a height of greater than or equal to about 50 μm.

    COMPOSITE CONDITIONER AND ASSOCIATED METHODS

    公开(公告)号:US20170232577A1

    公开(公告)日:2017-08-17

    申请号:US15362464

    申请日:2016-11-28

    申请人: Chien-Min Sung

    发明人: Chien-Min Sung

    IPC分类号: B24B53/017 B24D18/00

    摘要: CMP pad dressers having leveled tips and associated methods are provided. In one aspect, for example, a composite conditioner can include a base plate and a plurality of polishing units secured to a surface of the base plate by an adhesive layer, where each polishing unit includes a plurality of polishing tips secured in a binding layer. Additionally, a height difference between a first highest polishing tip and a second highest polishing tip is less than or equal to about 10 μm, a height difference between the first highest polishing tip and a tenth highest polishing tip is less than or equal to about 20 μm, and a height difference between the first highest polishing tip and a 100th highest polishing tip is less than or equal to about 40 μm. Furthermore, the first highest polishing tip protrudes from the binding layer to a height of greater than or equal to about 50 μm.

    SEMICONDUCTOR DEVICE HAVING ASYMMETRIC FIN-SHAPED PATTERN
    7.
    发明申请
    SEMICONDUCTOR DEVICE HAVING ASYMMETRIC FIN-SHAPED PATTERN 有权
    具有不对称精细形状图案的半导体器件

    公开(公告)号:US20160211379A1

    公开(公告)日:2016-07-21

    申请号:US14983904

    申请日:2015-12-30

    摘要: Semiconductor devices are provided including a first fin-shaped pattern having first and second sidewalls facing one another and a field insulating film contacting at least a portion of the first fin-shaped pattern. The first fin-shaped pattern includes a lower portion of the first fin-shaped pattern contacting the field insulating film; an upper portion of the first fin-shaped pattern not contacting the field insulating film; a first boundary between the lower portion of the first fin-shaped pattern and the upper portion of the first fin-shaped pattern; and a first fin center line perpendicular to the first boundary and meeting the top of the upper portion of the first fin-shaped pattern. The first sidewall of the upper portion of the first fin-shaped pattern and the second sidewall of the upper portion of the first fin-shaped pattern are asymmetric with respect to the first fin center line.

    摘要翻译: 提供半导体器件,其包括具有彼此面对的第一和第二侧壁的第一鳍状图案和与第一鳍状图案的至少一部分接触的场绝缘膜。 第一鳍状图案包括与场绝缘膜接触的第一鳍状图案的下部; 所述第一鳍状图案的上部不与所述场绝缘膜接触; 第一鳍状图案的下部与第一鳍状图案的上部之间的第一边界; 以及垂直于第一边界并且满足第一鳍状图案的上部的顶部的第一鳍中心线。 第一鳍状图案的上部的第一侧壁和第一鳍状图案的上部的第二侧壁相对于第一翅片中心线是不对称的。

    Diamond tools and methods for making the same
    10.
    发明授权
    Diamond tools and methods for making the same 有权
    钻石工具和制作方法

    公开(公告)号:US09221154B2

    公开(公告)日:2015-12-29

    申请号:US13633082

    申请日:2012-10-01

    申请人: Chien-Min Sung

    发明人: Chien-Min Sung

    IPC分类号: B24B53/017 B24D18/00

    摘要: Superabrasive tools and methods for the making thereof are disclosed and described. In one aspect, superabrasive particles are chemically bonded to a matrix support material according to a predetermined pattern by a braze alloy. The brazing alloy may be provided as a powder, thin sheet, or sheet of amorphous alloy. A template having a plurality of apertures arranged in a predetermined pattern may be used to place the superabrasive particles on a given substrate or matrix support material.

    摘要翻译: 公开和描述了超研磨工具及其制造方法。 在一个方面,超磨料颗粒通过钎焊合金根据预定图案化学键合到基质载体材料上。 钎焊合金可以提供为粉末,薄片或非晶合金片。 可以使用具有以预定图案布置的多个孔的模板来将超研磨颗粒放置在给定的基底或基质支撑材料上。