Method of manufacturing nitride-based semiconductor light emitting diode
    1.
    发明申请
    Method of manufacturing nitride-based semiconductor light emitting diode 失效
    制造氮化物基半导体发光二极管的方法

    公开(公告)号:US20080293177A1

    公开(公告)日:2008-11-27

    申请号:US11889392

    申请日:2007-08-13

    IPC分类号: H01L33/00

    CPC分类号: H01L33/40 H01L33/32 H01L33/42

    摘要: Provided is a method of manufacturing a nitride-based semiconductor LED including sequentially forming an n-type nitride semiconductor layer, an active layer, and a p-type nitride semiconductor layer on a substrate; forming a Pd/Zn alloy layer on the p-type nitride semiconductor layer; heat-treating the p-type nitride semiconductor layer on which the Pd/Zn alloy layer is formed; removing the Pd/Zn alloy layer formed on the p-type nitride semiconductor layer; mesa-etching portions of the p-type nitride semiconductor layer, the active layer, and the n-type nitride semiconductor layer such that a portion of the upper surface of the n-type nitride semiconductor layer is exposed; and forming an n-electrode and a p-electrode on the exposed n-type nitride semiconductor layer and the p-type nitride semiconductor layer, respectively.

    摘要翻译: 本发明提供一种在基板上依次形成n型氮化物半导体层,有源层和p型氮化物半导体层的氮化物系半导体LED的制造方法。 在p型氮化物半导体层上形成Pd / Zn合金层; 热处理形成有Pd / Zn合金层的p型氮化物半导体层; 去除形成在p型氮化物半导体层上的Pd / Zn合金层; p型氮化物半导体层,有源层和n型氮化物半导体层的台面蚀刻部分,使得n型氮化物半导体层的上表面的一部分露出; 以及在暴露的n型氮化物半导体层和p型氮化物半导体层上分别形成n电极和p电极。

    Gallium nitride-based semiconductor light-emitting device
    2.
    发明授权
    Gallium nitride-based semiconductor light-emitting device 有权
    氮化镓系半导体发光元件

    公开(公告)号:US07135716B2

    公开(公告)日:2006-11-14

    申请号:US10911562

    申请日:2004-08-05

    IPC分类号: H01L29/22

    CPC分类号: H01L33/12 H01L33/02 H01L33/32

    摘要: A gallium nitride-based semiconductor light-emitting device includes a sapphire substrate having a nitridated upper surface; a polarity conversion layer formed on the sapphire substrate and made of MgN-based single ciystals; a first conductive gallium nitride-based semiconductor layer formed on the polarity conversion layer; an active layer formed on the first conductive gallium nitride-based semiconductor layer; and a second conductive gallium nitride-based semiconductor layer formed on the active layer.

    摘要翻译: 氮化镓系半导体发光元件包括具有氮化上表面的蓝宝石衬底; 在蓝宝石衬底上形成的由MgN基单晶构成的极性转换层; 形成在极性转换层上的第一导电氮化镓基半导体层; 形成在第一导电氮化镓基半导体层上的有源层; 以及形成在有源层上的第二导电氮化镓基半导体层。

    Fabrication method of nitride semiconductors and nitride semiconductor structure fabricated thereby
    3.
    发明授权
    Fabrication method of nitride semiconductors and nitride semiconductor structure fabricated thereby 失效
    由此制造氮化物半导体的制造方法和氮化物半导体结构

    公开(公告)号:US07018912B2

    公开(公告)日:2006-03-28

    申请号:US10806432

    申请日:2004-03-23

    IPC分类号: H01L21/00

    摘要: Disclosed is a method of fabricating nitride semiconductors in a MOCVD reactor. GaN is first deposited on an inner wall of the MOCVD reactor, and a sapphire substrate is loaded into the MOCVD reactor. The sapphire substrate is heated and etching gas is injected into the MOCVD reactor. NH3 gas is injected into the MOCVD reactor to nitrify the surface of the sapphire substrate. A nitride semiconductor layer is grown on the nitrified sapphire substrate. By surface-reforming the sapphire substrate and then growing the nitride semiconductor layer on the surface-reformed sapphire substrate via MOCVD without formation of a low temperature buffer layer, an excellent nitride semiconductor structure can be realized. In this circumstance, the nitride semiconductor layer for example of GaN can be grown effectively on the surface-treated sapphire substrate because GaN deposition occurs on the sapphire substrate while it is etched.

    摘要翻译: 公开了一种在MOCVD反应器中制造氮化物半导体的方法。 首先将GaN沉积在MOCVD反应器的内壁上,并将蓝宝石衬底装载到MOCVD反应器中。 将蓝宝石衬底加热并将蚀刻气体注入到MOCVD反应器中。 将NH 3气体注入到MOCVD反应器中以使蓝宝石衬底的表面硝化。 在氮化蓝宝石衬底上生长氮化物半导体层。 通过表面改性蓝宝石衬底,然后通过MOCVD在表面改性的蓝宝石衬底上生长氮化物半导体层,而不形成低温缓冲层,可以实现优异的氮化物半导体结构。 在这种情况下,可以在表面处理的蓝宝石衬底上有效地生长例如GaN的氮化物半导体层,因为在蚀刻时在蓝宝石衬底上发生GaN沉积。

    Semiconductor light emitting device having patterned substrate and manufacturing method of the same
    4.
    发明授权
    Semiconductor light emitting device having patterned substrate and manufacturing method of the same 有权
    具有图案化衬底的半导体发光器件及其制造方法

    公开(公告)号:US08372669B2

    公开(公告)日:2013-02-12

    申请号:US13176712

    申请日:2011-07-05

    IPC分类号: H01L21/00

    摘要: There is provided a semiconductor light emitting device having a patterned substrate and a manufacturing method of the same. The semiconductor light emitting device includes a substrate; a first conductivity type nitride semiconductor layer, an active layer and a second conductivity type nitride semiconductor layer sequentially formed on the substrate, wherein the substrate is provided on a surface thereof with a pattern having a plurality of convex portions, wherein out of the plurality of convex portions of the pattern, a distance between a first convex portion and an adjacent one of the convex portions is different from a distance between a second convex portion and an adjacent one of the convex portions.

    摘要翻译: 提供了具有图案化衬底的半导体发光器件及其制造方法。 半导体发光器件包括衬底; 在基板上依次形成第一导电型氮化物半导体层,有源层和第二导电型氮化物半导体层,其中,在其表面上设置有具有多个凸部的图案,其中, 图案的凸部,第一凸部与相邻的凸部之间的距离与第二凸部与相邻的凸部之间的距离不同。

    SEMICONDUCTOR LIGHT-EMITTING DEVICE WITH IMPROVED LIGHT EXTRACTION EFFICIENCY
    5.
    发明申请
    SEMICONDUCTOR LIGHT-EMITTING DEVICE WITH IMPROVED LIGHT EXTRACTION EFFICIENCY 有权
    具有改进的光提取效率的半导体发光器件

    公开(公告)号:US20120043557A1

    公开(公告)日:2012-02-23

    申请号:US13286881

    申请日:2011-11-01

    IPC分类号: H01L33/02 H01L33/22

    CPC分类号: H01L33/22

    摘要: The present invention provides a semiconductor light-emitting device. The light-emitting device comprises a first conductive clad layer, an active layer, and a second conductive clad layer sequentially formed on a substrate. In the light-emitting device, the substrate has one or more side patterns formed on an upper surface thereof while being joined to one or more edges of the upper surface. The side patterns consist of protrusions or depressions so as to scatter or diffract light to an upper portion or a lower portion of the light-emitting device.

    摘要翻译: 本发明提供一种半导体发光装置。 发光器件包括顺序地形成在衬底上的第一导电覆盖层,有源层和第二导电覆层。 在发光装置中,基板在其上表面形成有一个或多个侧图案,同时连接到上表面的一个或多个边缘。 侧面图案由突起或凹陷组成,以将光散射或衍射到发光器件的上部或下部。

    Semiconductor light-emitting device with improved light extraction efficiency
    6.
    发明授权
    Semiconductor light-emitting device with improved light extraction efficiency 有权
    具有提高光提取效率的半导体发光器件

    公开(公告)号:US08071994B2

    公开(公告)日:2011-12-06

    申请号:US12624106

    申请日:2009-11-23

    IPC分类号: H01L33/00

    CPC分类号: H01L33/22

    摘要: The present invention provides a semiconductor light-emitting device. The light-emitting device comprises a first conductive clad layer, an active layer, and a second conductive clad layer sequentially formed on a substrate. In the light-emitting device, the substrate has one or more side patterns formed on an upper surface thereof while being joined to one or more edges of the upper surface. The side patterns consist of protrusions or depressions so as to scatter or diffract light to an upper portion or a lower portion of the light-emitting device.

    摘要翻译: 本发明提供一种半导体发光装置。 发光器件包括顺序地形成在衬底上的第一导电覆盖层,有源层和第二导电覆层。 在发光装置中,基板在其上表面形成有一个或多个侧图案,同时连接到上表面的一个或多个边缘。 侧面图案由突起或凹陷组成,以将光散射或衍射到发光器件的上部或下部。

    Semiconductor light emitting device having patterned substrate
    7.
    发明授权
    Semiconductor light emitting device having patterned substrate 有权
    具有图案化衬底的半导体发光器件

    公开(公告)号:US07999272B2

    公开(公告)日:2011-08-16

    申请号:US12273512

    申请日:2008-11-18

    摘要: There is provided a semiconductor light emitting device having a patterned substrate and a manufacturing method of the same. The semiconductor light emitting device includes a substrate; a first conductivity type nitride semiconductor layer, an active layer and a second conductivity type nitride semiconductor layer sequentially formed on the substrate, wherein the substrate is provided on a surface thereof with a pattern having a plurality of convex portions, wherein out of the plurality of convex portions of the pattern, a distance between a first convex portion and an adjacent one of the convex portions is different from a distance between a second convex portion and an adjacent one of the convex portions.

    摘要翻译: 提供了具有图案化衬底的半导体发光器件及其制造方法。 半导体发光器件包括:衬底; 在基板上依次形成第一导电型氮化物半导体层,有源层和第二导电型氮化物半导体层,其中,在其表面上设置有具有多个凸部的图案,其中, 图案的凸部,第一凸部与相邻的凸部之间的距离与第二凸部与相邻的凸部之间的距离不同。

    Nitride semiconductor light emitting device
    8.
    发明授权
    Nitride semiconductor light emitting device 有权
    氮化物半导体发光器件

    公开(公告)号:US07902544B2

    公开(公告)日:2011-03-08

    申请号:US12787910

    申请日:2010-05-26

    IPC分类号: H01L33/00

    CPC分类号: H01L33/06 B82Y20/00 H01L33/32

    摘要: The invention provides a highly reliable nitride semiconductor light emitting device improved in electrostatic discharge withstand voltage. In the light emitting device, an n-type nitride semiconductor layer, an active layer and a p-type nitride semiconductor layer are sequentially formed on a substrate. The active layer features a multiple quantum well structure including a plurality of multiple quantum barrier layers and quantum well layers. At least one of the quantum barrier layers has a band-gap modulated multilayer structure.

    摘要翻译: 本发明提供了一种改进了静电放电耐受电压的高度可靠的氮化物半导体发光器件。 在发光器件中,在衬底上依次形成n型氮化物半导体层,有源层和p型氮化物半导体层。 有源层具有包括多个多量子势垒层和量子阱层的多量子阱结构。 至少一个量子势垒层具有带隙调制多层结构。