Method of protecting a non-planar feature using compressive pads and apparatus thereof
    3.
    发明授权
    Method of protecting a non-planar feature using compressive pads and apparatus thereof 失效
    使用压缩垫保护非平面特征的方法及其装置

    公开(公告)号:US06179951B2

    公开(公告)日:2001-01-30

    申请号:US09263965

    申请日:1999-03-05

    CPC classification number: B32B37/0023 B32B37/26 B32B2315/02 H01L21/4857

    Abstract: The present invention relates generally to a new apparatus and method for forming non-planar surfaces in substrates. More particularly, the invention encompasses an apparatus and a method for fabricating non-planar surfaces in semiconductor substrates wherein at least one zero compression set pad, such as a closed cell porous pad in combination with at least one elastic pad is placed over the non-planar surface prior to lamination and is caused to conform to the contour of the non-planar surface, thus preventing collapse of, or damage to, the non-planar features, such as, shelves or corners during the lamination process. After the lamination process, the zero compression set pad are conveniently removed from the non-planar surface area without causing any damage to the non-planar surface features, such as, shelves or corners or having any paste pull-outs. These zero compression set pads can be reused multiple number of times to form these MLC cavity substrates or similar other structures or features.

    Abstract translation: 本发明一般涉及用于在基片中形成非平面表面的新装置和方法。 更具体地说,本发明包括一种用于在半导体衬底中制造非平面表面的装置和方法,其中至少一个零压缩固定衬垫,例如与至少一个弹性衬垫组合的闭孔多孔垫, 平坦表面,并且使其符合非平面表面的轮廓,从而防止在层压过程期间非平面特征(例如,搁板或角部)的塌陷或损坏。 在层压过程之后,零压缩固定垫可以方便地从非平面表面区域移除,而不会对非平面表面特征(例如,搁板或角落)或具有任何糊状物拉出造成任何损坏。 这些零压缩设定焊盘可以重复使用多次以形成这些MLC腔体衬底或类似的其他结构或特征。

Patent Agency Ranking