摘要:
Disclosed is a plasma processing apparatus that processes a processing target substrate using microwave plasma within a processing container. The plasma processing apparatus includes a placing table provided in the processing container, and configured to place the processing target substrate thereon; and an antenna provided above the placing table to face the placing table, and including a dielectric plate, the antenna being configured to radiate microwaves into the processing container through the dielectric plate to generate plasma of a processing gas supplied into the processing container. The dielectric plate includes a flat plate portion provided on a bottom surface of the antenna, and formed in a flat shape at least on a surface facing the placing table; and a rib formed on a surface of the flat plate portion that is opposite to the surface facing the placing table.
摘要:
Disclosed is a plasma processing apparatus that processes a processing target substrate using microwave plasma within a processing container. The plasma processing apparatus includes a placing table provided in the processing container, and configured to place the processing target substrate thereon; and an antenna provided above the placing table to face the placing table, and including a dielectric plate, the antenna being configured to radiate microwaves into the processing container through the dielectric plate to generate plasma of a processing gas supplied into the processing container. The dielectric plate includes a flat plate portion provided on a bottom surface of the antenna, and formed in a flat shape at least on a surface facing the placing table; and a rib formed on a surface of the flat plate portion that is opposite to the surface facing the placing table.
摘要:
An apparatus for producing a mixed solution, comprising a mixing vessel for preparing an aqueous mixed solution containing a dicarboxylic acid and a Nb compound and a filter for the aqueous mixed solution connected to the mixing vessel via a pipe, the mixing vessel being anticorrosive and equipped with a stirring unit, a heating unit and a cooling unit for the aqueous mixed solution, wherein the aqueous mixed solution prepared in the mixing vessel is fed to the filter via the pipe and filtered in the filter under increased pressure.
摘要:
It is an object of the present invention to provide a mixed catalyst for a vapor-phase catalytic oxidation or a vapor-phase catalytic ammoxidation reaction of propane, or isobutene, capable of providing a corresponding unsaturated acid or unsaturated nitrile at high yield from propane or isobutene.
摘要:
Disclosed is a complex oxide catalyst composed of catalyst particles containing Mo, V, a component X and a silica-containing carrier. The component X is at least one element selected from alkaline earth metal elements and rare earth elements. The complex oxide catalyst is supported by the carrier, and the component X is uniformly distributed in the catalyst particles.
摘要:
It is an object of the present invention to provide a mixed catalyst for a vapor-phase catalytic oxidation or a vapor-phase catalytic ammoxidation reaction of propane or isobutane, capable of providing a corresponding unsaturated acid or unsaturated nitrile at high yield from propane or isobutane. A mixed catalyst for a vapor-phase catalytic oxidation reaction or a vapor-phase catalytic ammoxidation reaction of propane or isobutane comprises:(a) a composite oxide represented by the following composition formula (1): Mo1VaNbbSbcWdZeOn (1) wherein Z represents at least one element selected from the group consisting of La, Ce, Pr, Yb, Y, Sc, Sr, and Ba; each of a, b, c, d, e, and n represents an atomic ratio of each element based on Mo atom; a is in a range of 0.01≦a≦1; b is in a range of 0.01≦b≦1; c is in a range of 0.01≦c≦1; d is in a range of 0.001≦d≦1; e is in a range of 0≦e≦1; and n represents a number determined by the valence of a component metal; and(b) a tungsten compound at a ratio of the following formula (2): 0.001
摘要:
A semiconductor device includes: a semiconductor chip with a plurality of electrode pads disposed at a top surface thereof; a plurality of thin film terminals set apart from one another via respective separator portions, which are located below a bottom surface of the semiconductor chip; an insulating layer disposed between the semiconductor chip and the thin-film terminals; connecting members that connect the electrode pads at the semiconductor chip with the thin-film terminals respectively and a resin layer disposed so as to cover the semiconductor chip, the plurality of thin-film terminals exposed at the semiconductor chip, the separator portions and the connecting members.
摘要:
An automatic transmission is provided having appropriately spaced gear ratios for eight forward speeds to be capable of obtaining a shift feeling in all of the eight speeds, and is reduced in size and weight. Rotation of an input shaft is transmitted to an output shaft at a speed selected from a plurality of shift speeds by first and second clutches selectively transmitting the rotation of the input shaft to first and second compound planetary gears, and by first to fourth brakes selectively fixing each element of the first and second compound planetary gears, the first compound planetary gear includes first and second sun gears, a common carrier rotatably supporting a long pinion and a pinion, and a common ring gear that meshes with the first sun gear through the long pinion or the pinion and also meshes with the second sun gear through the long pinion and the pinion.
摘要:
An automatic transmission is provided that has appropriately spaced gear ratios for eight forward speeds to be capable of obtaining a shift feeling in all of the eight speeds, and that can be reduced in size and weight.In the automatic transmission that transmits rotation of an input shaft to an output shaft at a speed selected from a plurality of shift speeds by first and second clutches selectively transmitting the rotation of the input shaft to first and second compound planetary gears, and by first to fourth brakes selectively fixing each element of the first and second compound planetary gears, the first compound planetary gear includes first and second sun gears, a common carrier rotatably supporting a long pinion and a pinion, and a common ring gear that meshes with the first sun gear through the long pinion or the pinion and also meshes with the second sun gear through the long pinion and the pinion.
摘要:
[Object] To provide an automatic transmission capable of providing a sufficient feeling of acceleration with a clear shift feeling at the time of shifting with acceleration by properly allocating step ratios between shift stages.[Means for Solution] In single pinion planetary gear mechanisms 21 and 22, a second sun gear S1 is linked to an input shaft 14 in a power-transmissible manner, a first sun gear S0 is linked to a third control brake B-3, and a first carrier C0 and a second ring gear R1 which are linked to each other are linked to a first control brake B-1. In single pinion planetary gear mechanisms 23 and 24, a third sun gear S2 and a fourth sun gear S3 which are linked to each other are linked to the input shaft 14 disengageably by a first control clutch C-1, and a third ring gear R2 and a fourth ring gear R3 are linked to a second control brake B-2 and a fourth control brake B-4, respectively. Furthermore, in the single pinion planetary gear mechanisms 23 and 24, a third carrier C2 is linked to the input shaft 14 disengageably by a second control clutch C-2 and a fourth carrier C3 is linked to an output shaft 17.