Nano-drive for high resolution positioning and for positioning of a multi-point probe
    3.
    发明授权
    Nano-drive for high resolution positioning and for positioning of a multi-point probe 有权
    用于高分辨率定位和定位多点探头的纳米驱动器

    公开(公告)号:US07304486B2

    公开(公告)日:2007-12-04

    申请号:US10098969

    申请日:2002-03-14

    Abstract: The multi-point probe comprises a supporting body defining a first surface, a first multitude of conductive probe arms each of the probe arms defining a proximal end and a distal end being positioned in co-planar relationship with the first surface of the supporting body. The probe arms are connected to the supporting body at the proximal ends thereof and have the distal ends freely extending from the supporting body, giving individually flexible motion to the first multitude of probe arms. The probe arms originate from a process of producing the probe arms on a wafer body in facial contact with the wafer body and removal of a part of the wafer body providing the supporting body and providing the probe arms freely extending therefrom. The multi-point probe further comprises a third multitude of tip elements extending from the distal end of the first multitude of probe arms. The tip elements originate from a process of metallization of electron beam depositions on the probe arms at the distal ends thereof.

    Abstract translation: 多点探针包括限定第一表面的支撑体,第一多个导电探针臂,每个探针臂限定近端,远端与支撑体的第一表面以共面关系定位。 探针臂在其近端处连接到支撑体,并且远端从支撑体自由延伸,给予第一多个探针臂独立的柔性运动。 探针臂起源于在晶片体上与晶片体面接触地产生探针臂的过程,并且移除提供支撑体的晶片体的一部分并且提供从其自由延伸的探针臂。 多点探针还包括从第一多个探针臂的远端延伸的第三多个尖端元件。 尖端元件源于探针臂在其远端处的电子束沉积的金属化过程。

    PRODUCTION OF SATURATED AMMONIA STORAGE MATERIALS
    5.
    发明申请
    PRODUCTION OF SATURATED AMMONIA STORAGE MATERIALS 审中-公开
    生产饱和的氨氮储存材料

    公开(公告)号:US20120039788A1

    公开(公告)日:2012-02-16

    申请号:US13260455

    申请日:2010-04-13

    CPC classification number: C09K5/04 C01C1/006

    Abstract: A process for saturating a solid material capable of binding ammonia by ad- or absorption and initially free of ammonia or partially saturated with ammonia comprises treating said solid material under a pressure and associated temperature located on the vapor pressure curve of ammonia with an amount of liquid ammonia sufficient to saturate said solid material and an additional amount of a cooling agent selected from liquid ammonia, liquid or solid CO2, hydrocarbons and hydrohalocarbons that have a higher vapour pressure than ammonia, ethyl ether, methyl formate, methyl amine and ethyl amine, such that |Qabs|≦|Qevap|+Qext, wherein Qabs is the amount of heat released from said solid material when it absorbs ammonia from the liquid phase thereof to the point where it is saturated with ammonia, Qevap is the amount of heat absorbed by said cooling agent when it evaporates, and Qext is the amount of heat exchanged with the surroundings and is positive, if heat is removed from the process by external cooling, and negative, if heat is added to the process from the surroundings.

    Abstract translation: 使能够通过吸收和吸收结合氨并且最初不含氨或部分被氨饱和的固体材料饱和的方法包括在氨的蒸气压曲线下的压力和相关温度下处理所述固体材料,其量为一定量的液体 足以使所述固体材料饱和的氨和额外量的选自液态氨,液体或固体CO 2,烃和氢卤素的冷却剂,其具有比氨,乙醚,甲酸甲酯,甲胺和乙胺更高的蒸气压, 其中Q abs是从其液相吸收氨到氨被氨饱和的点时从所述固体物质释放的热量,Qevap是吸收的热量 当所述冷却剂蒸发时,Qext是与周围环境交换的热量并且是正的,如果从工艺中除去热量 通过外部冷却,如果从周围环境中加入热量,则为负值。

    Method for storing and delivering ammonia from solid storage materials using a vacuum pump
    9.
    发明授权
    Method for storing and delivering ammonia from solid storage materials using a vacuum pump 有权
    使用真空泵从固体储存材料中储存和输送氨的方法

    公开(公告)号:US08551219B2

    公开(公告)日:2013-10-08

    申请号:US13257195

    申请日:2010-03-18

    Abstract: In a method of storing and releasing gaseous ammonia from solid storage materials a first solid storage material (14) capable of releasing ammonia by desorption in a first container (10) and a second solid storage material (24) capable of ad- or absorbing ammonia reversibly and having a higher affinity for ammonia than the first storage material (14) in a second container (20) smaller than said first container (10) are in fluid communication. The pressure in at least the first container (10) is kept below the equilibrium pressure between ammonia and the storage material contained therein by means of a pump (28). When the pressure in the first container (10) is below a pressure threshold where the first storage material (14) does not release an amount of ammonia required by an ammonia consuming device connected with the containers via the vacuum pump (28), the second storage material (24) is heated such that the ammonia pressure of the second material (24) is higher than the ammonia pressure of the first material (14). The ammonia released by the second material (24) is continuously pumped off so as to deliver sufficient ammonia to said ammonia consuming unit. A device for carrying out the method is also described.

    Abstract translation: 在从固体储存材料储存和释放气态氨的方法中,能够通过在第一容器(10)中解吸而释放氨的第一固体储存材料(14)和能够吸附或吸收氨的第二固态储存材料(24)的方法 在比第一容器(10)小的第二容器(20)中可逆地并且具有比第一存储材料(14)更高的氨的亲和力是流体连通的。 至少第一容器(10)中的压力通过泵(28)保持在氨和容纳在其中的储存材料之间的平衡压力以下。 当第一容器(10)中的压力低于第一储存材料(14)不经由真空泵(28)释放与容器连接的氨消耗装置所需的氨的量的压力阈值时,第二容器 储存材料(24)被加热,使得第二材料(24)的氨压力高于第一材料(14)的氨压力。 由第二材料(24)释放的氨被连续泵送,以便向氨消耗单元输送足够的氨。 还描述了用于执行该方法的装置。

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