PACKAGING SUBSTRATE WITH RELIABLE VIA STRUCTURE
    4.
    发明申请
    PACKAGING SUBSTRATE WITH RELIABLE VIA STRUCTURE 审中-公开
    通过结构可靠地包装基板

    公开(公告)号:US20130313720A1

    公开(公告)日:2013-11-28

    申请号:US13481173

    申请日:2012-05-25

    IPC分类号: H01L23/498 H01L21/768

    摘要: A packaging substrate includes a high reliability via structure that extends through multiple layers of the packaging substrate. The via structure includes an opening formed through multiple layers of the packaging substrate and an electrically conductive layer that is deposited in the opening. The opening is formed in a single material removal process and the conductive layer is formed in a single deposition process. Because the conductive layer is formed in a single deposition process, the conductive layer provides an interface-free conductive path between the multiple layers.

    摘要翻译: 包装衬底包括延伸穿过包装衬底的多层的高可靠性通孔结构。 通孔结构包括通过封装衬底的多层形成的开口和沉积在开口中的导电层。 开口形成在单一的材料去除工艺中,并且导电层在单个沉积工艺中形成。 因为导电层是在单个沉积工艺中形成的,所以导电层在多层之间提供无界面的导电路径。