公开(公告)号：US12007451B2

公开(公告)日：2024-06-11

申请号：US17532298

申请日：2021-11-22

申请人： AEHR TEST SYSTEMS

发明人： Jovan Jovanovic ,  Kenneth W. Deboe ,  Steven C. Steps

IPC分类号： G01R31/50 ,  G01R31/00 ,  G01R31/28 ,  H01L21/324 ,  H01L21/66 ,  H01L21/67 ,  H01L21/687 ,  G01R1/04

CPC分类号： G01R31/50 ,  G01R31/003 ,  G01R31/2831 ,  G01R31/2875 ,  H01L21/324 ,  H01L21/67103 ,  H01L21/67109 ,  H01L21/67248 ,  H01L21/68785 ,  H01L22/26 ,  G01R1/0491

摘要： A tester apparatus is provided. Slot assemblies are removably mounted to a frame. Each slot assembly allows for individual heating and temperature control of a respective cartridge that is inserted into the slot assembly. A closed loop air path is defined by the frame and a heater and cooler are located in the closed loop air path to cool or heat the cartridge with air. Individual cartridges can be inserted or be removed while other cartridges are in various stages of being tested or in various stages of temperature ramps.

公开(公告)号：US11635459B2

公开(公告)日：2023-04-25

申请号：US17523646

申请日：2021-11-10

申请人： AEHR TEST SYSTEMS

发明人： Jovan Jovanovic ,  Kenneth W. Deboe ,  Steven C. Steps ,  Scott E. Lindsey

IPC分类号： G01R31/20 ,  G01R31/28 ,  H01L21/687 ,  H05K7/14

摘要： A tester apparatus is described. Various components contribute to the functionality of the tester apparatus, including an insertion and removal apparatus, thermal posts, independent gimbaling, the inclusion of a photo detector, a combination of thermal control methods, a detect circuitry in a socket lid, through posts with stand-offs, and a voltage retargeting.

公开(公告)号：US11209497B2

公开(公告)日：2021-12-28

申请号：US16576555

申请日：2019-09-19

申请人： Aehr Test Systems

发明人： Jovan Jovanovic ,  Kenneth W. Deboe ,  Steven C. Steps

IPC分类号： G01R31/00 ,  G01R31/28 ,  H01L21/67 ,  G01R31/50 ,  H01L21/66 ,  H01L21/324 ,  H01L21/687 ,  G01R1/04

摘要： A tester apparatus is provided. Slot assemblies are removably mounted to a frame. Each slot assembly allows for individual heating and temperature control of a respective cartridge that is inserted into the slot assembly. A closed loop air path is defined by the frame and a heater and cooler are located in the closed loop air path to cool or heat the cartridge with air. Individual cartridges can be inserted or be removed while other cartridges are in various stages of being tested or in various stages of temperature ramps.

公开(公告)号：US20160187416A1

公开(公告)日：2016-06-30

申请号：US15060443

申请日：2016-03-03

申请人： Aehr Test Systems

发明人： Donald P. Richmond, II ,  Kenneth W. Deboe ,  Frank O. Uher ,  Jovan Jovanovic ,  Scott E. Lindsey ,  Thomas T. Maenner ,  Patrick M. Shepherd ,  Jeffrey L. Tyson ,  Mark C. Carbone ,  Paul W. Burke ,  Doan D. Cao ,  James F. Tomic ,  Long V. Vu

IPC分类号： G01R31/28 ,  G06F9/44

CPC分类号： G01R31/287 ,  G01R31/003 ,  G01R31/26 ,  G01R31/2642 ,  G01R31/2851 ,  G01R31/2855 ,  G01R31/2863 ,  G01R31/2868 ,  G01R31/2872 ,  G01R31/2877 ,  G01R31/2886 ,  G01R31/2889 ,  G01R31/2891 ,  G01R31/31924 ,  G06F8/30

摘要： An apparatus is described for burn-in and/or functional testing of microelectronic circuits of unsingulated wafers. A large number of power, ground, and signal connections can be made to a large number of contacts on a wafer. The apparatus has a cartridge that allows for fanning-in of electric paths. A distribution board has a plurality of interfaces that are strategically positioned to provide a dense configuration. The interfaces are connected through flexible attachments to an array of first connector modules. Each one of the first connector modules can be independently connected to a respective one of a plurality of second connector modules, thereby reducing stresses on a frame of the apparatus. Further features include for example a piston that allows for tight control of forces exerted by terminals onto contacts of a wafer.

公开(公告)号：US20150369858A1

公开(公告)日：2015-12-24

申请号：US14833938

申请日：2015-08-24

申请人： AEHR TEST SYSTEMS

发明人： Donald P. Richmond, II ,  Kenneth W. Deboe ,  Frank O. Uher ,  Jovan Jovanovic ,  Scott E. Lindsey ,  Thomas T. Maenner ,  Patrick M. Shepherd ,  Jeffrey L. Tyson ,  Mark C. Carbone ,  Paul W. Burke ,  Doan D. Cao ,  James F. Tomic ,  Long V. Vu

IPC分类号： G01R31/28

CPC分类号： G01R31/287 ,  G01R31/003 ,  G01R31/26 ,  G01R31/2642 ,  G01R31/2851 ,  G01R31/2855 ,  G01R31/2863 ,  G01R31/2868 ,  G01R31/2872 ,  G01R31/2877 ,  G01R31/2886 ,  G01R31/2889 ,  G01R31/2891 ,  G01R31/31924 ,  G06F8/30

摘要： An apparatus is described for burn-in and/or functional testing of microelectronic circuits of unsingulated wafers. A large number of power, ground, and signal connections can be made to a large number of contacts on a wafer. The apparatus has a cartridge that allows for fanning-in of electric paths. A distribution board has a plurality of interfaces that are strategically positioned to provide a dense configuration. The interfaces are connected through flexible attachments to an array of first connector modules. Each one of the first connector modules can be independently connected to a respective one of a plurality of second connector modules, thereby reducing stresses on a frame of the apparatus. Further features include for example a piston that allows for tight control of forces exerted by terminals onto contacts of a wafer.

摘要翻译： 描述了一种用于老化和/或功能测试未调制晶片的微电子电路的装置。 可以对晶片上的大量触点进行大量的电源，接地和信号连接。 该装置具有允许电通路进入的盒。 分配板具有多个接口，其被策略地定位以提供密集配置。 这些接口通过柔性附件连接到第一连接器模块的阵列。 第一连接器模块中的每一个可以独立地连接到多个第二连接器模块中的相应的一个，从而减少装置的框架上的应力。 其他特征包括例如允许对端子施加到晶片的触点上的力的严格控制的活塞。

公开(公告)号：US20240036103A1

公开(公告)日：2024-02-01

申请号：US18485716

申请日：2023-10-12

申请人： Aehr Test Systems

发明人： Jovan Jovanovic ,  Kenneth W. Deboe ,  Steven C. Steps ,  Scott E. Lindsey

IPC分类号： G01R31/28 ,  H01L21/687 ,  H05K7/14

CPC分类号： G01R31/2808 ,  H01L21/687 ,  H05K7/1412 ,  H05K7/1402 ,  H05K7/1417 ,  G01R31/2893

摘要： A tester apparatus is described. Various components contribute to the functionality of the tester apparatus, including an insertion and removal apparatus, thermal posts, independent gimbaling, the inclusion of a photo detector, a combination of thermal control methods, a detect circuitry in a socket lid, through posts with stand-offs, and a voltage retargeting.

公开(公告)号：US11860221B2

公开(公告)日：2024-01-02

申请号：US17574300

申请日：2022-01-12

申请人： AEHR TEST SYSTEMS

发明人： Donald P. Richmond, II ,  Kenneth W. Deboe ,  Frank O. Uher ,  Jovan Jovanovic ,  Scott E. Lindsey ,  Thomas T. Maenner ,  Patrick M. Shepherd ,  Jeffrey L. Tyson ,  Mark C. Carbone ,  Paul W. Burke ,  Doan D. Cao ,  James F. Tomic ,  Long V. Vu

IPC分类号： G01R31/28 ,  G01R31/26 ,  G01R31/00 ,  G06F8/30 ,  G01R31/319

CPC分类号： G01R31/287 ,  G01R31/003 ,  G01R31/26 ,  G01R31/2642 ,  G01R31/2851 ,  G01R31/2863 ,  G01R31/2868 ,  G01R31/2872 ,  G01R31/2877 ,  G01R31/2886 ,  G01R31/2889 ,  G01R31/2891 ,  G06F8/30 ,  G01R31/2855 ,  G01R31/31924

摘要： An apparatus is described for burn-in and/or functional testing of microelectronic circuits of unsingulated wafers. A large number of power, ground, and signal connections can be made to a large number of contacts on a wafer. The apparatus has a cartridge that allows for fanning-in of electric paths. A distribution board has a plurality of interfaces that are strategically positioned to provide a dense configuration. The interfaces are connected through flexible attachments to an array of first connector modules. Each one of the first connector modules can be independently connected to a respective one of a plurality of second connector modules, thereby reducing stresses on a frame of the apparatus. Further features include for example a piston that allows for tight control of forces exerted by terminals onto contacts of a wafer.

公开(公告)号：US10976362B2

公开(公告)日：2021-04-13

申请号：US16899246

申请日：2020-06-11

申请人： AEHR TEST SYSTEMS

发明人： Steven C. Steps ,  Scott E. Lindsey ,  Kenneth W. Deboe ,  Donald P. Richmond, II ,  Alberto Calderon

IPC分类号： G01R31/28 ,  G01R1/04

摘要： The invention relates to a tester apparatus of the kind including a portable supporting structure for removably holding and testing a substrate carrying a microelectronic circuit. An interface on the stationary structure is connected to the first interface when the portable structure is held by the stationary structure and is disconnected from the first interface when the portable supporting structure is removed from the stationary structure. An electrical tester is connected through the interfaces so that signals may be transmitted between the electrical tester and the microelectronic circuit to test the microelectronic circuit.

公开(公告)号：US20200300908A1

公开(公告)日：2020-09-24

申请号：US16899246

申请日：2020-06-11

申请人： AEHR TEST SYSTEMS

发明人： Steven C. Steps ,  Scott E. Lindsey ,  Kenneth W. Deboe ,  Donald P. Richmond, II ,  Alberto Calderon

IPC分类号： G01R31/28 ,  G01R1/04

摘要： The invention relates to a tester apparatus of the kind including a portable supporting structure for removably holding and testing a substrate carrying a microelectronic circuit. An interface on the stationary structure is connected to the first interface when the portable structure is held by the stationary structure and is disconnected from the first interface when the portable supporting structure is removed from the stationary structure. An electrical tester is connected through the interfaces so that signals may be transmitted between the electrical tester and the microelectronic circuit to test the microelectronic circuit.

公开(公告)号：US10649022B2

公开(公告)日：2020-05-12

申请号：US15906620

申请日：2018-02-27

申请人： AEHR TEST SYSTEMS

发明人： Jovan Jovanovic ,  Kenneth W. Deboe ,  Steven C. Steps ,  Scott E. Lindsey

IPC分类号： G01R31/20 ,  G01R31/28 ,  H01L21/687 ,  H05K7/14

摘要： A tester apparatus is described. Various components contribute to the functionality of the tester apparatus, including an insertion and removal apparatus, thermal posts, independent gimbaling, the inclusion of a photo detector, a combination of thermal control methods, a detect circuitry in a socket lid, through posts with stand-offs, and a voltage retargeting.