摘要:
An elementary plasma source for generating plasma is provided. In the elementary plasma source, first and second magnets are shaped like a hollow cylinder, and the second magnet surrounds the first magnet, for forming a magnetic trap between the first and second magnets. A guide provides microwaves to a space between the first and second magnets.
摘要:
An elementary plasma source for generating plasma is provided. In the elementary plasma source, first and second magnets are shaped like a hollow cylinder, and the second magnet surrounds the first magnet, for forming a magnetic trap between the first and second magnets. A guide provides microwaves to a space between the first and second magnets.
摘要:
Disclosed is an apparatus for generating inductively-coupled plasma (ICP). The ICP generation apparatus includes a source region where an ICP antenna coil is mounted, the ICP antenna coil generating inductive electric fields for generating plasma and having a serially-connected concentric circle-type structure, the total number of windings of the ICP antenna coil being greater than 2, the ICP antenna coil having a structure in which at least one circular winging closest to the center of the concentric circle is wound in a direction opposite to that of the other windings; a sealed chamber in which a predetermined process is performed on a sample placed on a chuck therein through a reaction between plasma ions and reactive radicals; and a radio frequency (RF) power supply for providing RF electric power of a predetermined frequency to the ICP antenna coil in the source region.
摘要:
A sputtering apparatus includes a sputtering chamber, a target disposed in the sputtering chamber, and a magnetic field generator for generating a rotating magnetic field at the front of the target. The magnetic field generator includes a main magnetic field-generating part that faces the back of the target and is horizontally (laterally) offset from a vertical line passing through the center of the target. A magnetic annulus of the main magnetic field-generating part forms a magnetic enclosure having openings therethrough at locations faced in the directions of the central and peripheral portions of the target. The magnetic field-generating part thus produces a magnetic field having a non-uniform distribution at the front of the target. A substrate is positioned within the sputtering chamber facing the front of the target. A metal layer is formed by sputtering atoms from the front of the target onto the substrate. The behavior of the sputtered atoms can be effectively controlled by the magnetic field.
摘要:
A filament member, ion source, and an ion implantation apparatus. The filament member may have a plate shape, and the thermoelectron emitter may include slots and a plurality of conductive paths disposed around the slots to emit thermoelectrons.
摘要:
An apparatus and method for transmitting and receiving an image in a communication system are provided. The apparatus includes an identifying unit, an extractor, and a communication unit. The identifying unit identifies information on a display size of a reception stage. The extractor extracts from image data as much image data as a size corresponding to the display size and inserts information on a size of whole image data into the extracted image data. The communication unit transmits the extracted image data.
摘要:
An apparatus and method for establishing a call connection when two parties try to simultaneously call each other are provided, in which, a simultaneous signal comparator determines, upon receipt of a call connection request, whether a calling terminal and a called terminal are trying to call each other simultaneously, and if the calling terminal and the called terminal are busy when calling each other simultaneously, requests rejection of a call connection request from at least one of the calling terminal and the called terminal, and setup a call connection between the calling terminal and the called terminal. A switch rejects the call connection request from the at least one of the calling terminal and the called terminal, and establishes the call connection between the calling terminal and the called terminal according to the request of the simultaneous signal comparator.
摘要:
An apparatus and method for network address allocation are provided, in which an interface module performs wireless communications through an antenna, and a protocol controller performs wireless communications using a predetermined protocol and performs a network address acquisition procedure during network entry.
摘要:
An apparatus and method for transmitting an advanced image are provided. The apparatus includes: an encoder for encoding image data according to a frequency component of the image data; a fragmenter for selecting a part of the encoded image data based on a fragmentation position calculated using PSNR value; and a transmitter for transmitting the selected image data and information on a size of the encoded image.