Embedded flat film molding
    2.
    发明申请
    Embedded flat film molding 有权
    嵌入式平膜成型

    公开(公告)号:US20050161784A1

    公开(公告)日:2005-07-28

    申请号:US11005868

    申请日:2004-12-06

    CPC分类号: G06K9/0002

    摘要: A flat filter layer is received between upper and lower mold portions of a mold for packaging an integrated circuit sensor device, held by the mold over and in contact with the integrated circuit's sensing surface, in light compression between the sensing surface and a mold surface. The filter layer includes slots allowing passage of injected encapsulating material to cover the integrated circuit die, with overlap portions embedded in the encapsulating material, while preventing such encapsulating material from flowing onto the sensing surface. The filter layer may be, for example, a liquid and/or light filter, and may include a protective or supportive backing. The filter is thus affixed to the packaged integrated circuit sensor device, while mold residue is reduced and mold life extended.

    摘要翻译: 在模具的上模具部分和下模具部分之间容纳平坦的过滤层,用于将由模具保持的集成电路传感器装置封装在集成电路的感测表面上并与集成电路的感测表面接触,以在感测表面和模具表面之间的轻压缩。 过滤层包括允许注入的封装材料通过以覆盖集成电路管芯的槽,其中重叠部分嵌入在封装材料中,同时防止这种封装材料流入感测表面。 过滤层可以是例如液体和/或光过滤器,并且可以包括保护性或支撑性背衬。 因此,过滤器被固定到封装的集成电路传感器装置上,同时减少了模具残渣并延长了模具寿命。

    INTEGRATED LID FORMED ON MEMS DEVICE
    3.
    发明申请
    INTEGRATED LID FORMED ON MEMS DEVICE 有权
    集成在MEMS器件上形成

    公开(公告)号:US20060065961A1

    公开(公告)日:2006-03-30

    申请号:US10952183

    申请日:2004-09-28

    IPC分类号: H01L23/02 H01L23/12

    摘要: An integrated lid for micro-electro-mechanical system (MEMS) devices is formed from a nitride layer deposited over a cavity containing movable parts for the device. Pillars are formed through openings within large area movable parts to support the lid over those parts. Slides are formed and moved under large etchant openings through the lid to allow the openings to be sealed by sputtering.

    摘要翻译: 用于微电子机械系统(MEMS)器件的集成盖由沉积在包含用于该器件的可移动部件的空腔的氮化物层上形成。 支柱通过大面积可移动部件内的开口形成,以支撑这些部件上的盖子。 在大的蚀刻剂开口处形成滑动件并通过盖子移动,以允许通过溅射密封开口。