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1.发明授权Method for producing polymer, polymer for lithography, resist composition, and method for producing substrate 有权聚合物的制造方法，光刻用的聚合物，抗蚀剂组合物以及基材的制造方法公开(公告)号：US09109060B2
公开(公告)日：2015-08-18
申请号：US13382397
申请日：2010-07-07
IPC分类号： G03F7/039 , C08F224/00 , C08F24/00 , C08F297/02 , C08F2/00 , G03F7/004 , G03F7/085
CPC分类号： C08F24/00 , C08F2/00 , C08F297/026 , C08F2500/06 , G03F7/0045 , G03F7/0046 , G03F7/039 , G03F7/0397 , G03F7/085
摘要： A method for producing a polymer is provided. The polymer improves variations in the content ratio and molecular weights of a copolymer's constitutional units, solvent solubility, and the sensitivity of a resist composition using such a polymer. The method includes polymerizing two or more monomers while adding with a polymerization initiator to obtain the polymer, feeding a first solution containing first composition monomers in an initial polymerization stage, and starting dropwise addition of a second solution containing second composition monomers after or simultaneously with the feeding of the first solution. The second composition is equal to a target composition ratio of the polymer to be obtained. The first composition is calculated in advance based on a target composition ratio and the reactivity of the monomers. The above dropping rate is set to high.
摘要翻译： 提供聚合物的制造方法。 聚合物改善共聚物的结构单元的含量比和分子量的变化，溶剂的溶解度以及使用这种聚合物的抗蚀剂组合物的灵敏度。 该方法包括聚合两种或更多种单体，同时加入聚合引发剂以获得聚合物，在初始聚合阶段中加入含有第一组合物单体的第一溶液，并在第二组合物单体或与其同时开始滴加含有第二组合物单体的第二溶液 喂养第一种方案。 第二组合物等于所得聚合物的目标组成比。 基于目标组成比和单体的反应性，预先计算第一组合物。 上述滴加速度设定为高。
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2.发明申请METHOD FOR PRODUCING POLYMER, POLYMER FOR LITHOGRAPHY, RESIST COMPOSITION, AND METHOD FOR PRODUCING SUBSTRATE 有权生产聚合物的方法，用于平版印刷的聚合物，耐蚀组合物和生产基材的方法公开(公告)号：US20120115086A1
公开(公告)日：2012-05-10
申请号：US13382397
申请日：2010-07-07
IPC分类号： G03F7/20 , G03F7/004 , C08F224/00
CPC分类号： C08F24/00 , C08F2/00 , C08F297/026 , C08F2500/06 , G03F7/0045 , G03F7/0046 , G03F7/039 , G03F7/0397 , G03F7/085
摘要： A method for producing a polymer is provided. The polymer improves variations in the content ratio and molecular weights of a copolymer's constitutional units, solvent solubility, and the sensitivity of a resist composition using such a polymer. The method includes polymerizing two or more monomers while adding with a polymerization initiator to obtain the polymer, feeding a first solution containing first composition monomers in an initial polymerization stage, and starting dropwise addition of a second solution containing second composition monomers after or simultaneously with the feeding of the first solution. The second composition is equal to a target composition ratio of the polymer to be obtained. The first composition is calculated in advance based on a target composition ratio and the reactivity of the monomers. The above dropping rate is set to high.
摘要翻译： 提供聚合物的制造方法。 聚合物改善共聚物的结构单元的含量比和分子量的变化，溶剂的溶解度以及使用这种聚合物的抗蚀剂组合物的灵敏度。 该方法包括聚合两种或更多种单体，同时加入聚合引发剂以获得聚合物，在初始聚合阶段中加入含有第一组合物单体的第一溶液，并在第二组合物单体或与其同时开始滴加含有第二组合物单体的第二溶液 喂养第一种方案。 第二组合物等于所得聚合物的目标组成比。 基于目标组成比和单体的反应性，预先计算第一组合物。 上述滴加速度设定为高。
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公开(公告)号：US09733564B2
公开(公告)日：2017-08-15
申请号：US13879737
申请日：2011-10-14
申请人： Atsushi Yasuda , Tomoya Oshikiri , Hikaru Momose
发明人： Atsushi Yasuda , Tomoya Oshikiri , Hikaru Momose
IPC分类号： G03F7/004 , G03F7/20 , C08F2/00 , G01N24/08 , C08F120/28 , C08F220/28 , G03F7/038 , G03F7/039 , C08F220/18 , C08F220/20
CPC分类号： G03F7/004 , C08F2/00 , C08F120/28 , C08F220/18 , C08F220/20 , C08F220/28 , C08F2220/283 , C08F2400/02 , G01N24/085 , G03F7/0382 , G03F7/0392 , G03F7/0397 , G03F7/20
摘要： A target variable analysis unit (11) calculates the triad fractions of monomer units in the composition of a known polymer sample from the copolymerization reactivity ratios of the monomer units to obtain a target variable. A waveform processing unit (12) processes NMR measurements, signals, etc. An explanatory variable analysis unit (13) obtains explanatory variables from the amount of chemical shift and signal strength in the NMR measurements of the known sample. A model generation unit (14) determines the regression equation of the regression model of the target variable and the explanatory variables by partial least squares regression, and obtains regression model coefficients. A sample analysis unit (15) uses the regression model to calculate the triad fractions for an unknown copolymer sample from the amount of chemical shift and signal strength in the NMR measurements of the unknown copolymer sample. By using a copolymer for lithography in which the total of the triad fractions obtained in this way is not more than 20 mole % in the copolymer, a resist composition with excellent solubility and sensitivity can be manufactured.
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公开(公告)号：US09840568B2
公开(公告)日：2017-12-12
申请号：US14122801
申请日：2012-05-30
申请人： Tomoya Oshikiri , Atsushi Yasuda
发明人： Tomoya Oshikiri , Atsushi Yasuda
IPC分类号： C08F2/38 , G03F7/039 , C08F220/18 , C08F20/18 , C08F4/04
CPC分类号： C08F2/38 , C08F4/04 , C08F20/18 , C08F220/18 , C08F2438/03 , G03F7/0392 , G03F7/0397
摘要： The time when at least a monomer and a chain transfer agent are supplied in a reactor and the solution temperature in the reactor has reached a predetermined polymerization temperature is set as starting time (T0), and the time when a process to terminate the polymerization is started is set as ending time (T1). A polymerization initiator is supplied into the reactor between (T0) and just before [(T1)−(T0)/2] and between [(T1)−(T0)/2] and (T1). The total mass of the polymerization initiator supplied to the reactor between (T0) and (T1) is set as (IA), and the total mass of the polymerization initiator supplied between [(T0−T1)/2] and (T1) is set as (IB). The (IA) is set 50 to 100 mass % of the entire polymerization initiator. Using a production method in which 0.50
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公开(公告)号：US20140114034A1
公开(公告)日：2014-04-24
申请号：US14122801
申请日：2012-05-30
申请人： Tomoya Oshikiri , Atsushi Yasuda
发明人： Tomoya Oshikiri , Atsushi Yasuda
CPC分类号： C08F2/38 , C08F4/04 , C08F20/18 , C08F220/18 , C08F2438/03 , G03F7/0392 , G03F7/0397
摘要： The time when at least a monomer and a chain transfer agent are supplied in a reactor and the solution temperature in the reactor has reached a predetermined polymerization temperature is set as starting time (T0), and the time when a process to terminate the polymerization is started is set as ending time (T1). A polymerization initiator is supplied into the reactor between (T0) and just before [(T1)−(T0)/2] and between [(T1)−(T0)/2] and (T1). The total mass of the polymerization initiator supplied to the reactor between (T0) and (T1) is set as (IA), and the total mass of the polymerization initiator supplied between [(T0−T1)/2] and (T1) is set as (IB). The (IA) is set 50 to 100 mass % of the entire polymerization initiator. Using a production method in which 0.50
摘要翻译： 将反应器中至少提供单体和链转移剂并将反应器中的溶液温度达到预定聚合温度的时间设定为起始时间（T0），并且终止聚合的时间为 开始设置为结束时间（T1）。 在（T0）和[（T1） - （T0）/ 2]之间以及[（T1） - （T0）/ 2]和（T1）之间，在反应器内提供聚合引发剂。 在（T0）和（T1）之间供给到反应器中的聚合引发剂的总质量设定为（IA），在[（T0-T1）/ 2]和（T1）之间供应的聚合引发剂的总质量为 设为（IB）。 （IA）设定为整个聚合引发剂的50〜100质量％。 使用其中满足0.50 <（IB）/（IA）<1.00的制备方法，以高聚合速率制备聚合物，其显示出较小的分子量变化并且在末端残留的链转移剂残留量较少 聚合物链。
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6.发明申请COPOLYMERS FOR LITHOGRAPHY AND METHOD FOR PRODUCING SAME, RESIST COMPOSITION, METHOD FOR PRODUCING SUBSTRATE WITH PATTERN FORMED THEREUPON, METHOD FOR EVALUATING COPOLYMERS, AND METHOD FOR ANALYZING COPOLYMER COMPOSITIONS 有权用于制备它的共聚物及其制备方法，耐蚀组合物，用于形成图案的基板的生产方法，用于评价共聚物的方法和分析共聚物组合物的方法公开(公告)号：US20130224654A1
公开(公告)日：2013-08-29
申请号：US13879737
申请日：2011-10-14
申请人： Atsushi Yasuda , Tomoya Oshikiri , Hikaru Momose
发明人： Atsushi Yasuda , Tomoya Oshikiri , Hikaru Momose
IPC分类号： G03F7/004
CPC分类号： G03F7/004 , C08F2/00 , C08F120/28 , C08F220/18 , C08F220/20 , C08F220/28 , C08F2220/283 , C08F2400/02 , G01N24/085 , G03F7/0382 , G03F7/0392 , G03F7/0397 , G03F7/20
摘要： A target variable analysis unit (11) calculates the triad fractions of monomer units in the composition of a known polymer sample from the copolymerization reactivity ratios of the monomer units to obtain a target variable. A waveform processing unit (12) processes NMR measurements, signals, etc. An explanatory variable analysis unit (13) obtains explanatory variables from the amount of chemical shift and signal strength in the NMR measurements of the known sample. A model generation unit (14) determines the regression equation of the regression model of the target variable and the explanatory variables by partial least squares regression, and obtains regression model coefficients. A sample analysis unit (15) uses the regression model to calculate the triad fractions for an unknown copolymer sample from the amount of chemical shift and signal strength in the NMR measurements of the unknown copolymer sample. By using a copolymer for lithography in which the total of the triad fractions obtained in this way is not more than 20 mole % in the copolymer, a resist composition with excellent solubility and sensitivity can be manufactured.
摘要翻译： 目标可变分析单元（11）根据单体单元的共聚反应性比率计算已知聚合物样品的组成中单体单元的三单元组分数，以获得目标变量。 波形处理单元（12）处理NMR测量，信号等。解释变量分析单元（13）从已知样本的NMR测量中的化学位移和信号强度的量中获得解释变量。 模型生成单元（14）通过偏最小二乘回归确定目标变量回归模型的回归方程和解释变量，得到回归模型系数。 样品分析单元（15）使用回归模型从未知共聚物样品的NMR测量中的化学位移和信号强度的量来计算未知共聚物样品的三单元组分数。 通过使用共聚物，其中在共聚物中以这种方式获得的三单元组分数的总和不超过20摩尔％，可以制造出具有优异的溶解度和灵敏度的抗蚀剂组合物。
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7.发明申请ALCOHOL COMPOUND AND METHOD FOR PRODUCING SAME, METHOD FOR PRODUCING LACTONE COMPOUND, (METH)ACRYLATE ESTER AND METHOD FOR PRODUCING SAME, POLYMER AND METHOD FOR PRODUCING SAME, AND RESIST COMPOSITION AND METHOD FOR PRODUCING SUBSTRATE USING SAME 有权醇类化合物及其生产方法，（甲基）丙烯酸酯，（甲基）丙烯酸酯及其制备方法，聚合物及其生产方法，以及耐磨组合物及其制造方法公开(公告)号：US20140134539A1
公开(公告)日：2014-05-15
申请号：US14125727
申请日：2012-06-14
CPC分类号： G03F7/004 , C07D307/93 , C07D493/08 , C07D493/18 , G03F7/0041 , G03F7/0392 , G03F7/0397 , G03F7/20 , G03F7/38
摘要： To provide an alcohol compound containing fewer impurities at a high yield by conducting the following steps: a hydroboration process in which a reaction mixture is obtained by reacting in a solvent a compound represented by formula (C) and a boron agent selected from a group of diborane and borane complexes; and an oxidation process in which the pH of the reaction mixture is set at 0.5 to 4, which is conducted after treating the reaction mixture with hydrogen peroxide. In the formula, A1 to A6 are each independently a hydrogen atom, methyl group or ethyl group, and X is an oxygen atom, sulfur atom, methylene group or ethylene group.
摘要翻译： 通过进行以下步骤提供含有较少杂质的醇化合物：通过在溶剂中使式（C）表示的化合物与选自以下的硼剂的溶剂反应获得反应混合物的硼氢化方法： 乙硼烷和硼烷络合物; 以及将反应混合物的pH设定为0.5〜4的氧化方法，其在用过氧化氢处理反应混合物后进行。 在该式中，A1至A6各自独立地为氢原子，甲基或乙基，X为氧原子，硫原子，亚甲基或亚乙基。
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公开(公告)号：US09823563B2
公开(公告)日：2017-11-21
申请号：US14125727
申请日：2012-06-14
IPC分类号： G03F7/004 , G03F7/20 , C07D493/08 , C07D493/18 , C07D307/93 , G03F7/38 , G03F7/039
CPC分类号： G03F7/004 , C07D307/93 , C07D493/08 , C07D493/18 , G03F7/0041 , G03F7/0392 , G03F7/0397 , G03F7/20 , G03F7/38
摘要： To provide an alcohol compound containing fewer impurities at a high yield by conducting the following steps: a hydroboration process in which a reaction mixture is obtained by reacting in a solvent a compound represented by formula (C) and a boron agent selected from a group of diborane and borane complexes; and an oxidation process in which the pH of the reaction mixture is set at 0.5 to 4, which is conducted after treating the reaction mixture with hydrogen peroxide. In the formula, A1 to A6 are each independently a hydrogen atom, methyl group or ethyl group, and X is an oxygen atom, sulfur atom, methylene group or ethylene group.
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公开(公告)号：US07008023B2
公开(公告)日：2006-03-07
申请号：US10733334
申请日：2003-12-12
申请人： Nobuyuki Nakashima , Atsushi Yasuda
发明人： Nobuyuki Nakashima , Atsushi Yasuda
IPC分类号： B60T8/44
CPC分类号： B60T8/4081 , B60T8/38 , B60T13/142 , B60T13/18 , B60T13/686
摘要： A hydraulic brake apparatus includes a brake master cylinder having a rod piston moving in response to a brake pedal; a separation valve provided in a hydraulic brake circuit in order to establish and shut off communication between the brake master cylinder and the brake wheel cylinders; a pressure control valve unit for controlling fluid pressure to be supplied from an external fluid-pressure supply source to the brake wheel cylinders while the separation valve is in a shutoff condition; and a stroke simulator mechanism for allowing an idle stroke of the rod piston so as to ensure a stroke of the brake pedal in accordance with an input load to the brake pedal. An orifice is provided in a passage which establishes, during the idle stroke of the rod piston, communication between a pressure chamber and an atmospheric pressure chamber which are defined within the brake master cylinder by means of the rod piston.
摘要翻译： 液压制动装置包括制动主缸，其具有响应于制动踏板而移动的杆式活塞; 设置在液压制动回路中的分离阀，以便建立和切断制动主缸和制动轮缸之间的连通; 压力控制阀单元，用于在分离阀处于关闭状态的同时，控制从外部流体压力供给源向制动轮缸供给的流体压力; 以及行程模拟器机构，用于允许杆活塞的空转行程，以便根据对制动踏板的输入负载来确保制动踏板的行程。 在通道中设置有孔，该通道在杆活塞的空转行程期间通过杆活塞在制动主缸内限定的压力室和大气压力室之间建立连通。
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公开(公告)号：US5743600A
公开(公告)日：1998-04-28
申请号：US703813
申请日：1996-08-27
申请人： Atsushi Yasuda , Toshihiro Nakano
发明人： Atsushi Yasuda , Toshihiro Nakano
CPC分类号： B60T8/32 , B60T13/686 , B60T8/4275
摘要： The invention is directed to a wheel braking system having a master cylinder and a wheel brake cylinder which is communicated with the master cylinder through a brake fluid supply passage, and which is operatively mounted on a wheel for applying a braking force to the wheel. A suction device, such as a fluid pump, is provided for producing a negative pressure in the wheel brake cylinder. An initial pressure supply device, such as an accumulator, is also provided for supplying a predetermined amount of the brake fluid into the wheel brake cylinder when the braking operation is initiated. Accordingly, brake pads for braking the wheel may be separated from a brake rotor or brake drum respectively with a predetermined clearance, and the amount of the brake fluid which is consumed by the master cylinder when the braking operation is initiated, is not increased.
摘要翻译： 本发明涉及一种具有主缸和车轮制动缸的车轮制动系统，其通过制动液供应通道与主缸连通，并且其可操作地安装在用于向车轮施加制动力的车轮上。 提供诸如流体泵的抽吸装置，用于在车轮制动缸中产生负压。 还提供了诸如蓄能器的初始压力供应装置，用于当制动操作开始时将预定量的制动流体供应到车轮制动缸中。 因此，用于制动车轮的刹车片可以分别与制动转子或制动鼓以预定的间隙分离，并且在制动操作开始时由主缸消耗的制动流体的量不增加。
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