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公开(公告)号：US20190259575A1
公开(公告)日：2019-08-22
申请号：US16277572
申请日：2019-02-15
发明人： Yanko Sarov , Jan Horn , Ulrich Bihr , Christof Riedesel , Erik Essers
IPC分类号： H01J37/317 , H01J37/24 , H01J37/34 , H01J37/305
摘要： A multi-beam particle beam system includes a multi-aperture plate having a multiplicity of apertures. During operation, one particle beam of the plurality of particle beams passes through each of the apertures. A multiplicity of electrodes are insulated from the second multi-aperture plate to influence the particle beam passing through the aperture. A voltage supply system for the electrodes includes: a signal a generator to generate a serial sequence of digital signals; a D/A converter to convert the digital signals into a sequence of voltages between an output of the D/A converter and the multi-aperture plate; and a controllable changeover system, which feeds the sequence of voltages successively to different electrodes.
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公开(公告)号：US20180040454A1
公开(公告)日：2018-02-08
申请号：US15788338
申请日：2017-10-19
发明人： Ingo Mueller , Nicole Rauwolf , Christof Riedesel , Thomas Kemen , Joerg Jacobi , Arne Thoma , Markus Doering , Dirk Zeidler , Juergen Kynast , Gerd Benner
CPC分类号： H01J37/21 , H01J37/10 , H01J37/28 , H01J2237/0435 , H01J2237/0492 , H01J2237/28 , H01J2237/31764 , H01J2237/31774
摘要： A method for operating a multi-beam particle optical unit comprises includes providing a first setting of effects of particle-optical components, wherein a particle-optical imaging is characterizable by at least two parameters. The method also includes determining a matrix A, and determining a matrix S. The method further includes defining values of parameters which characterize a desired imaging, and providing a second setting of the effects of the components in such a way that the particle-optical imaging is characterizable by the parameters having the defined values.
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公开(公告)号：US20200251301A1
公开(公告)日：2020-08-06
申请号：US16266842
申请日：2019-02-04
发明人： Dirk Zeidler , Thomas Kemen , Christof Riedesel , Ralf Lenke , Joerg Jacobi
摘要： A multi-beam charged particle system includes: a vacuum enclosure having an opening covered by a door; a particle source configured to generate charged particles, wherein the particle source is arranged within the vacuum enclosure; at least one multi-aperture plate module including at least one multi-aperture plate and a base; and a transfer box having an opening covered by a door. The at least one multi-aperture plate includes a plurality of apertures. The base is configured to hold the at least one multi-aperture plate. The base is configured to be fixed relative to the vacuum enclosure such that the multi-aperture plate module is arranged in an interior of the vacuum enclosure such that, during operation of the particle beam system, particles traverse the plural multi-aperture plates through the apertures of the plates.
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公开(公告)号：US09991089B2
公开(公告)日：2018-06-05
申请号：US15788338
申请日：2017-10-19
发明人： Ingo Mueller , Nicole Rauwolf , Christof Riedesel , Thomas Kemen , Joerg Jacobi , Arne Thoma , Markus Doering , Dirk Zeidler , Juergen Kynast , Gerd Benner
CPC分类号： H01J37/21 , H01J37/10 , H01J37/28 , H01J2237/0435 , H01J2237/0492 , H01J2237/28 , H01J2237/31764 , H01J2237/31774
摘要： A method for operating a multi-beam particle optical unit comprises includes providing a first setting of effects of particle-optical components, wherein a particle-optical imaging is characterizable by at least two parameters. The method also includes determining a matrix A, and determining a matrix S. The method further includes defining values of parameters which characterize a desired imaging, and providing a second setting of the effects of the components in such a way that the particle-optical imaging is characterizable by the parameters having the defined values.
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5.发明申请Particle-Optical Systems and Arrangements and Particle-Optical Components for such Systems and Arrangements 有权这种系统和布置的粒子 - 光学系统和布置和粒子 - 光学部件公开(公告)号：US20160155603A1
公开(公告)日：2016-06-02
申请号：US15016743
申请日：2016-02-05
发明人： Dirk Zeidler , Thomas KEMEN , Anger Pascal , Antonio Casares , Christof Riedesel
CPC分类号： H01J37/09 , B82Y10/00 , B82Y40/00 , H01J37/21 , H01J37/28 , H01J37/3177 , H01J2237/0453 , H01J2237/0458 , H01J2237/0492 , H01J2237/1205
摘要： The present invention concerns a charged-particle multi-beamlet system that comprises a source of charged particles (301); a first multi-aperture plate (320) having plural apertures disposed in a charged particle beam path of the system downstream of the source; a first multi-aperture selector plate (313) having plural apertures; a easier (340), wherein the first multi-aperture selector plate is mounted on the carrier; and an actuator (350) configured to move the carrier such that the first multi-aperture selector plate is disposed in the charged particle beam path of the system downstream of the source in a first mode of operation of the system, and such that the first multi-aperture selector plate is disposed outside of the charged particle beam path in a second mode of operation of the system. The source, the first multi-aperture plate and the carrier of the system are arranged such that a first number of charged particle beamlets is generated at a position downstream of both the first multi-aperture plate and the first multi-aperture selector plate in the first mode of operation, and that a second number of charged particle beamlets is generated at the position in the second mode of operation, wherein the first number of beamlets differs from the second number of beamlets.
摘要翻译： 本发明涉及一种带电粒子多子束系统，其包括带电粒子源（301）; 第一多孔板（320），其具有设置在所述源的下游的所述系统的带电粒子束路径中的多个孔; 具有多个孔的第一多孔选择板（313） 更容易（340），其中所述第一多孔径选择器板安装在所述载体上; 以及构造成移动所述载体的致动器（350），使得所述第一多孔径选择器板在所述系统的第一操作模式中被布置在所述源的下游的系统的带电粒子束路径中，并且使得所述第一 多孔径选择器板在系统的第二操作模式中设置在带电粒子束路径的外部。 源极，第一多孔板和系统的载体被布置成使得在第一多孔径板和第一多孔径选择器板的下游位置处产生第一数量的带电粒子子束 第一操作模式，并且在第二操作模式的位置处产生第二数量的带电粒子子束，其中第一数量的子束与第二数量的子束不同。
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公开(公告)号：US10147582B2
公开(公告)日：2018-12-04
申请号：US15411538
申请日：2017-01-20
发明人： Dirk Zeidler , Thomas Kemen , Christof Riedesel , Ralf Lenke
摘要： Particle beam system comprising a particle source; a first multi-aperture plate with a multiplicity of openings downstream of which particle beams are formed; a second multi-aperture plate with a multiplicity of openings which are penetrated by the particle beams; an aperture plate with an opening which is penetrated by all the particles which also penetrate the openings in the first and the second multi-aperture plate; a third multi-aperture plate with a multiplicity of openings which are penetrated by the particle beams, and with a multiplicity of field generators which respectively provide a dipole field or quadrupole field for a beam; and a controller for feeding electric potentials to the multi-aperture plates and the aperture plate so that the second openings in the second multi-aperture plate respectively act as a lens on the particle beams 3 and feed adjustable excitations to the field generators.
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公开(公告)号：US09552957B2
公开(公告)日：2017-01-24
申请号：US14724432
申请日：2015-05-28
发明人： Dirk Zeidler , Thomas Kemen , Christof Riedesel , Ralf Lenke
CPC分类号： H01J37/10 , H01J37/09 , H01J37/12 , H01J37/24 , H01J37/26 , H01J37/28 , H01J2237/0453 , H01J2237/1202
摘要： Particle beam system comprising a particle source; a first multi-aperture plate with a multiplicity of openings downstream of which particle beams are formed; a second multi-aperture plate with a multiplicity of openings which are penetrated by the particle beams; an aperture plate with an opening which is penetrated by all the particles which also penetrate the openings in the first and the second multi-aperture plate; a third multi-aperture plate with a multiplicity of openings which are penetrated by the particle beams, and with a multiplicity of field generators which respectively provide a dipole field or quadrupole field for a beam; and a controller for feeding electric potentials to the multi-aperture plates and the aperture plate so that the second openings in the second multi-aperture plate respectively act as a lens on the particle beams and feed adjustable excitations to the field generators.
摘要翻译： 粒子束系统，包括粒子源; 第一多孔板，其上形成有多个开口，其上形成有粒子束; 第二多孔板，其具有被粒子束穿透的多个开口; 具有开口的孔板，所述开口由穿过第一和第二多孔板中的开口的所有颗粒穿透; 具有由粒子束穿透的多个开口的第三多孔板，以及分别为梁提供偶极场或四极场的多个场发生器; 以及用于将电位馈送到多孔板和孔板的控制器，使得第二多孔板中的第二开口分别用作粒子束上的透镜并将可调节的激发馈送到场发生器。
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公开(公告)号：US09536702B2
公开(公告)日：2017-01-03
申请号：US14724541
申请日：2015-05-28
发明人： Uwe Lang , Christian Crueger , Nico Kaemmer , Christof Riedesel
IPC分类号： H01J37/26 , H01J37/00 , H01J37/22 , H01J37/28 , H01J37/244
CPC分类号： H01J37/261 , H01J37/222 , H01J37/244 , H01J37/28 , H01J2237/0453 , H01J2237/063 , H01J2237/1205 , H01J2237/22 , H01J2237/221 , H01J2237/226 , H01J2237/2443 , H01J2237/2447 , H01J2237/2448 , H01J2237/2806
摘要： A multi-beam particle microscope includes first particle optics in order to direct particle beams onto an object, a detector with detection regions, with a transducer being assigned to each detection region, and a data acquisition system, which has a control computer system, image recording computer systems and a screen. The image recording computer systems receive electrical signals from the transducers and generates a first file, which represents a high resolution image, and a second file, which represents a low resolution image. The control computer system maintains a data structure which represents an assignment of transducers to two-dimensional spatial vectors and depicts the images on the screen, wherein a reference point in each image is arranged on the screen in a coordinate system of the screen at a location which is defined by a sum of a leading vector, which is the same for all images, and the spatial vector.
摘要翻译： 多光束粒子显微镜包括第一粒子光学器件，用于将粒子束引导到物体上，检测器具有检测区域，传感器被分配给每个检测区域，以及数据采集系统，其具有控制计算机系统，图像 录制计算机系统和屏幕。 图像记录计算机系统从换能器接收电信号并产生代表高分辨率图像的第一文件和表示低分辨率图像的第二文件。 控制计算机系统保持数据结构，其表示将换能器分配给二维空间矢量并且描绘屏幕上的图像，其中每个图像中的参考点被布置在屏幕的坐标系中的屏幕的位置 其由对于所有图像相同的前导向量和空间矢量的和来定义。
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公开(公告)号：US20150348749A1
公开(公告)日：2015-12-03
申请号：US14724541
申请日：2015-05-28
发明人： Uwe Lang , Christian Crueger , Nico Kaemmer , Christof Riedesel
CPC分类号： H01J37/261 , H01J37/222 , H01J37/244 , H01J37/28 , H01J2237/0453 , H01J2237/063 , H01J2237/1205 , H01J2237/22 , H01J2237/221 , H01J2237/226 , H01J2237/2443 , H01J2237/2447 , H01J2237/2448 , H01J2237/2806
摘要： A multi-beam particle microscope includes first particle optics in order to direct particle beams onto an object, a detector with detection regions, with a transducer being assigned to each detection region, and a data acquisition system, which has a control computer system, image recording computer systems and a screen. The image recording computer systems receive electrical signals from the transducers and generates a first file, which represents a high resolution image, and a second file, which represents a low resolution image. The control computer system maintains a data structure which represents an assignment of transducers to two-dimensional spatial vectors and depicts the images on the screen, wherein a reference point in each image is arranged on the screen in a coordinate system of the screen at a location which is defined by a sum of a leading vector, which is the same for all images, and the spatial vector.
摘要翻译： 多光束粒子显微镜包括第一粒子光学器件，用于将粒子束引导到物体上，检测器具有检测区域，传感器被分配给每个检测区域，以及数据采集系统，其具有控制计算机系统，图像 录制计算机系统和屏幕。 图像记录计算机系统从换能器接收电信号并产生代表高分辨率图像的第一文件和表示低分辨率图像的第二文件。 控制计算机系统保持数据结构，其表示将换能器分配给二维空间矢量并且描绘屏幕上的图像，其中每个图像中的参考点被布置在屏幕的坐标系中的屏幕的位置 其由对于所有图像相同的前导向量和空间矢量的和来定义。
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公开(公告)号：US10600613B2
公开(公告)日：2020-03-24
申请号：US16196081
申请日：2018-11-20
发明人： Dirk Zeidler , Thomas Kemen , Christof Riedesel , Ralf Lenke
摘要： Particle beam system comprising a particle source; a first multi-aperture plate with a multiplicity of openings downstream of which particle beams are formed; a second multi-aperture plate with a multiplicity of openings which are penetrated by the particle beams; an aperture plate with an opening which is penetrated by all the particles which also penetrate the openings in the first and the second multi-aperture plate; a third multi-aperture plate with a multiplicity of openings which are penetrated by the particle beams, and with a multiplicity of field generators which respectively provide a dipole field or quadrupole field for a beam; and a controller for feeding electric potentials to the multi-aperture plates and the aperture plate so that the second openings in the second multi-aperture plate respectively act as a lens on the particle beams 3 and feed adjustable excitations to the field generators.
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