Method for manufacturing thin-film magnetic head sliders
    2.
    发明授权
    Method for manufacturing thin-film magnetic head sliders 有权
    制造薄膜磁头滑块的方法

    公开(公告)号:US07191508B2

    公开(公告)日:2007-03-20

    申请号:US10917591

    申请日:2004-08-13

    IPC分类号: G11B5/127 H04R31/00

    摘要: A method for manufacturing thin-film magnetic head sliders is disclosed. Initially, an elastic layer, which may be made of poly-dimethyl siloxane (PDMS), is spun on a wafer and is thermally cured. Then, a resist layer is spun on the elastic layer. Both the resist layer and the elastic layer are subsequently peeled off together from the wafer. Next, the peeled resist layer/elastic layer is applied onto a group of magnetic heads with the resist layer in direct contact with the magnetic heads. Finally, the elastic layer is peeled off from the resist layer such that the resist layer remains attaching to the magnetic heads.

    摘要翻译: 公开了一种制造薄膜磁头滑块的方法。 最初,可以由聚二甲基硅氧烷(PDMS)制成的弹性层在晶片上旋转并被热固化。 然后,在弹性层上旋转抗蚀剂层。 抗蚀剂层和弹性层随后从晶片一起剥离。 接下来,将剥离的抗蚀剂层/弹性层施加到一组磁头上,其中抗蚀剂层与磁头直接接触。 最后,弹性层从抗蚀剂层剥离,使得抗蚀剂层保持附着在磁头上。