Underlayer composition and method of imaging underlayer

    公开(公告)号:US10191371B2

    公开(公告)日:2019-01-29

    申请号:US14340938

    申请日:2014-07-25

    Abstract: A method of forming a pattern comprises diffusing an acid, generated by irradiating a portion of a photosensitive layer, into an underlayer comprising an acid sensitive copolymer comprising an acid decomposable group and an attachment group, to form an interpolymer crosslink and/or covalently bonded to the surface of the substrate. Diffusing comprises heating the underlayer and photosensitive layer. The acid sensitive group reacts with the diffused acid to form a polar region at the surface, in the shape of the pattern. The photosensitive layer is removed to forming a self-assembling layer comprising a block copolymer having a block with an affinity for the polar region, and a block having less affinity than the first. The first block forms a domain aligned to the polar region, and the second block forms a domain aligned to the first. Removing either the first or second domain exposes a portion of the underlayer.

    DISPERSANT SUITABLE FOR LUBRICANT FORMULATIONS
    2.
    发明申请
    DISPERSANT SUITABLE FOR LUBRICANT FORMULATIONS 审中-公开
    适用于润滑剂配方的分散剂

    公开(公告)号:US20170073603A1

    公开(公告)日:2017-03-16

    申请号:US15124871

    申请日:2015-03-18

    Abstract: A dispersant includes the reaction product of an amine and at least one equivalent of glycidyl ether where the amine is selected from a group consisting of aminoethylpiperazine, bis(2-(piperazin-1-yl)ethyl)amine, 4,4′-methylenebiscyclohexylamine, m-xylenediamine, diethylenetriamine, and triethylenetetramine and where the glycidyl ether has the structure (A), where R is selected from aromatic carbon chains, non-aromatic carbon chains and polyalkylene glycol groups. The dispersant is useful in a lubricant with a base oil for increasing soot dispersibility of the lubricant.

    Abstract translation: 分散剂包括胺和至少一当量缩水甘油醚的反应产物,其中胺选自氨基乙基哌嗪,双(2-(哌嗪-1-基)乙基)胺,4,4'-亚甲基双环己基胺 ,间二甲苯胺和二亚乙基三胺和三亚乙基四胺,其中缩水甘油醚具有结构(A),其中R选自芳族碳链,非芳族碳链和聚亚烷基二醇基团。 分散剂可用于具有增加润滑剂的烟灰分散性的基础油的润滑剂中。

    UNDERLAYER COMPOSITION AND METHOD OF IMAGING UNDERLAYER COMPOSITION
    9.
    发明申请
    UNDERLAYER COMPOSITION AND METHOD OF IMAGING UNDERLAYER COMPOSITION 审中-公开
    底层组合物和成像下层组合物的方法

    公开(公告)号:US20140335455A1

    公开(公告)日:2014-11-13

    申请号:US14341022

    申请日:2014-07-25

    Abstract: A method of forming a pattern comprises diffusing an acid formed by irradiating a portion of a photosensitive layer, into an underlayer comprising an acid sensitive copolymer having acid decomposable groups and attachment groups covalently bonded to the surface of the substrate and/or forming an interpolymer crosslink. Diffusing comprises heating the underlayer and photosensitive layer. The acid sensitive group reacts with the diffused acid to form a polar region on the underlayer, with the shape of the pattern. The photosensitive layer is removed, forming a self-assembling layer comprising a block copolymer having a first block with an affinity for the polar region, and a second block having less affinity for the polar region. The first block forms a domain aligned to the polar region, and the second block forms another domain aligned to the first. Removing either domain exposes a portion of the underlayer.

    Abstract translation: 形成图案的方法包括将通过照射感光层的一部分形成的酸扩散到包含具有酸可分解基团的酸敏感共聚物和共价键合到基材表面的附着基团和/或形成互聚物交联的底层 。 扩散包括加热底层和感光层。 酸敏感基团与扩散的酸反应,在底层上形成具有图案形状的极性区域。 去除感光层,形成包含具有对极性区域具有亲和力的第一嵌段的嵌段共聚物的自组装层和对极性区域具有较小亲和性的第二嵌段。 第一块形成与极性区对准的域,并且第二块形成与第一块对准的另一域。 删除任一域暴露了底层的一部分。

    UNDERLAYER COMPOSITION AND METHOD OF IMAGING UNDERLAYER
    10.
    发明申请
    UNDERLAYER COMPOSITION AND METHOD OF IMAGING UNDERLAYER 审中-公开
    底层组合物和成像方法

    公开(公告)号:US20140335454A1

    公开(公告)日:2014-11-13

    申请号:US14340938

    申请日:2014-07-25

    Abstract: A method of forming a pattern comprises diffusing an acid, generated by irradiating a portion of a photosensitive layer, into an underlayer comprising an acid sensitive copolymer comprising an acid decomposable group and an attachment group, to form an interpolymer crosslink and/or covalently bonded to the surface of the substrate. Diffusing comprises heating the underlayer and photosensitive layer. The acid sensitive group reacts with the diffused acid to form a polar region at the surface, in the shape of the pattern. The photosensitive layer is removed to forming a self-assembling layer comprising a block copolymer having a block with an affinity for the polar region, and a block having less affinity than the first. The first block forms a domain aligned to the polar region, and the second block forms a domain aligned to the first. Removing either the first or second domain exposes a portion of the underlayer.

    Abstract translation: 形成图案的方法包括将通过照射感光层的一部分产生的酸扩散到包含可酸分解基团和连接基团的酸敏感共聚物的底层中,以形成交联和/或共价键合到 衬底的表面。 扩散包括加热底层和感光层。 酸敏感基团与扩散的酸反应,形成表面形状的极性区域。 去除感光层以形成包含具有对极性区域具有亲和性的嵌段的嵌段共聚物的自组装层,以及具有比第一嵌段共聚物亲和性小的嵌段。 第一块形成与极性区对准的域,并且第二块形成与第一块对准的域。 移除第一或第二域暴露底层的一部分。

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