摘要:
A transistor integration process provides a damascene method for the formation of gate electrodes and gate dielectric layers. An interlayer-dielectric film is deposited prior to the gate electrode formation to avoid the demanding gap fill requirements presented by adjacent gates. A trench is formed in the interlayer-dielectric film followed by the deposition of the gate material in the trench. This process avoids the potential for damage to high-k gate dielectric layers caused by high thermal cycles and also reduces or eliminates the problematic formation of voids in the dielectric layers filling the gaps between adjacent gates.
摘要:
A method of diverting void diffusion in an integrated circuit includes steps of forming an electrical conductor having a boundary in a first electrically conductive layer of an integrated circuit, forming a via inside the boundary of the electrical conductor in a dielectric layer between the first electrically conductive layer and a second electrically conductive layer of the integrated circuit, and forming a slot between the via and the boundary of the electrical conductor for diverting void diffusion in the electrical conductor away from the via.
摘要:
A method and apparatus for redirecting void diffusion away from vias in an integrated circuit design includes steps of forming an electrical conductor in a first electrically conductive layer of an integrated circuit design, forming a via between a distal end of the electrical conductor and a second electrically conductive layer of the integrated circuit design, and reducing tensile stress in the electrical conductor to divert void diffusion away from the via.
摘要:
A transistor integration process provides a damascene method for the formation of gate electrodes and gate dielectric layers. An interlayer-dielectric film is deposited prior to the gate electrode formation to avoid the demanding gap fill requirements presented by adjacent gates. A trench is formed in the interlayer-dielectric film followed by the deposition of the gate material in the trench. This process avoids the potential for damage to high-k gate dielectric layers caused by high thermal cycles and also reduces or eliminates the problematic formation of voids in the dielectric layers filling the gaps between adjacent gates.
摘要:
A transistor integration process provides a damascene method for the formation of gate electrodes and gate dielectric layers. An interlayer-dielectric film is deposited prior to the gate electrode formation to avoid the demanding gap fill requirements presented by adjacent gates. A trench is formed in the interlayer-dielectric film followed by the deposition of the gate material in the trench. This process avoids the potential for damage to high-k gate dielectric layers caused by high thermal cycles and also reduces or eliminates the problematic formation of voids in the dielectric layers filling the gaps between adjacent gates.
摘要:
The present invention is directed to a method of fabricating a local interconnect. A disclosed method involves forming two separate cavities in the ILD above two electrical contacts of a transistor. A first cavity extend down to an underlying etch stop layer. The first cavity is then filled with a protective layer. The second cavity is then formed adjacent to the first cavity and extends down to expose the underlying etch stop layer. The protective layer is removed to form an expanded cavity including the first and second cavities which expose the underlying etch stop layer in the expanded cavity. The etch stop material in the expanded cavity is also removed to expose an underlying gate contact and expose one of a source or drain contact. The gate contact is then electrically connected with one of the exposed source or drain contacts to form a local interconnect.
摘要:
The method and apparatus relates to providing a slit, perforation, line of weakness or similar structure in a flange of a zipper for a reclosable package or bag, including a high-capacity zipper. The slit, perforation, line of weakness or similar structure provides an opening for filling the reclosable package or bag without the need to separate the zipper profiles from each other. After filling, the opening is sealed and the cosmetic appearance of the reclosable package or bag is maintained.
摘要:
A method of forming an integrated circuit includes forming first structures in a first portion of the integrated circuit and forming second structures, which are arranged more densely than the first structures, in a second portion. The first and second structures are defined by lithography processes using photomasks. At least one of the photomasks includes both openings in a first region for supporting the definition of the first structures and openings in a second region for supporting the definition of the second structures.
摘要:
Provided is a method for separating two or more analytes in a fluid, which method comprises: (a) binding each different analyte to a different functional particle in one or more binding zones, to produce two or more bound analytes; (b) allowing the bound analytes to move through a separating conduit to two or more separate functional zones; wherein, each different functional particle has, or can be controlled to have, a different function in the fluid as compared with the other functional particles; and wherein the separating conduit separates into two or more functional conduits, such that the separating conduit serves to separate the bound analytes into the separate functional conduits by means of the different functions of the different functional particles. Also provided is an apparatus for separating two or more analytes in a fluid, which apparatus comprises: (a) a binding zone; (b) two or more functional conduits; (c) a separating conduit connecting the binding zone to the two or more functional conduits; (d) a transporter for transporting the analyte through the separating conduit from the binding zone to the two or more functional conduits; and (e) optionally one or more concentrating zones in connection with at least one of the functional conduits.
摘要:
Provided is a label for an analyte, which label is attached to a magnetic or magnetizable substance, the label comprising: (a) a recognition moiety for attaching the label to the analyte; and (b) a moiety for binding or encapsulating the magnetic or magnetizable substance; wherein the moiety for binding or encapsulating the magnetic or magnetizable substance comprises a metal-binding protein, polypeptide, or peptide.