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    Resist image reversal by means of spun-on-glass
    2.
    发明授权
    Resist image reversal by means of spun-on-glass 失效
    通过旋转玻璃抵抗图像反转

    公开(公告)号：US06221562B1

    公开(公告)日：2001-04-24

    申请号：US09192137

    申请日：1998-11-13

    申请人： Diane C. Boyd ,  Toshiharu Furukawa ,  Steven J. Holmes ,  William H. Ma ,  Paul A. Rabidoux ,  David V. Horak

    发明人： Diane C. Boyd ,  Toshiharu Furukawa ,  Steven J. Holmes ,  William H. Ma ,  Paul A. Rabidoux ,  David V. Horak

    IPC分类号： G03F700

    CPC分类号： H01L21/0337 ,  G03F7/40 ,  H01L21/0274 ,  H01L21/32139

    摘要： An image reversal method of turning hybrid photoresist spaces into resist lines for sub-feature size applications. The sub-feature size space width of the high resolution hybrid photoresist is largely independent of the lithographic process and mask reticles. These sub-feature size spaces formed by the hybrid resist are then turned into sub-feature size lines using Spin-On-Glass, SOG. The SOG is first coated over the entire patterned hybrid resist to fill in the hybrid spaces and cover the photoresist. SOG is then recessed back to expose the photoresist layer. The exposed photoresist is then removed. The sub-feature size lines are then left behind as a mask to pattern the same onto the underlying films on the substrate.

    摘要翻译： 将混合光致抗蚀剂空间转换成用于子特征尺寸应用的抗蚀剂线的图像反转方法。 高分辨率混合光致抗蚀剂的子特征尺寸空间宽度在很大程度上独立于光刻工艺和掩模掩模版。 然后，使用旋转玻璃，SOG将由混合抗蚀剂形成的这些子特征尺寸空间变成子特征尺寸线。 SOG首先涂覆在整个图案化的混合抗蚀剂上以填充混合空间并覆盖光致抗蚀剂。 然后将SOG凹进来露出光致抗蚀剂层。 然后除去曝光的光致抗蚀剂。 然后将子特征尺寸线作为掩模留下以将其图案化到衬底上的下面的膜上。

    Ultra-thin body super-steep retrograde well (SSRW) FET devices
    4.
    发明授权
    Ultra-thin body super-steep retrograde well (SSRW) FET devices 有权
    超薄体超陡逆行井（SSRW）FET器件

    公开(公告)号：US07002214B1

    公开(公告)日：2006-02-21

    申请号：US10710736

    申请日：2004-07-30

    申请人： Diane C. Boyd ,  Judson R. Holt ,  MeiKei Ieong ,  Renee T. Mo ,  Zhibin Ren ,  Ghavam G. Shahidi

    发明人： Diane C. Boyd ,  Judson R. Holt ,  MeiKei Ieong ,  Renee T. Mo ,  Zhibin Ren ,  Ghavam G. Shahidi

    IPC分类号： H01L27/12

    CPC分类号： H01L27/1203 ,  H01L21/76283 ,  H01L21/823892 ,  H01L21/84 ,  H01L29/66772 ,  H01L29/78609 ,  H01L29/78618 ,  H01L29/78696

    摘要： A method of manufacture of a Super Steep Retrograde Well Field Effect Transistor device starts with an SOI layer formed on a substrate, e.g. a buried oxide layer. Thin the SOI layer to form an ultra-thin SOI layer. Form an isolation trench separating the SOI layer into N and P ground plane regions. Dope the N and P ground plane regions formed from the SOI layer with high levels of N-type and P-type dopant. Form semiconductor channel regions above the N and P ground plane regions. Form FET source and drain regions and gate electrode stacks above the channel regions. Optionally form a diffusion retarding layer between the SOI ground plane regions and the channel regions.

    摘要翻译： 超陡逆行井场效应晶体管器件的制造方法从形成在衬底上的SOI层开始。 掩埋氧化层。 使SOI层变薄以形成超薄SOI层。 形成将SOI层分离成N和P接地平面区域的隔离沟槽。 用高水平的N型和P型掺杂剂掺杂由SOI层形成的N和P接地平面区域。 在N和P接地平面区域之上形成半导体沟道区。 在沟道区域上方形成FET源极和漏极区域以及栅极电极堆叠。 可选地，在SOI接地平面区域和沟道区域之间形成扩散延迟层。

    High performance CMOS device structure with mid-gap metal gate
    5.
    发明授权
    High performance CMOS device structure with mid-gap metal gate 失效
    高性能CMOS器件结构，具有中间间隙金属栅极

    公开(公告)号：US06762469B2

    公开(公告)日：2004-07-13

    申请号：US10127196

    申请日：2002-04-19

    申请人： Anda C. Mocuta ,  Meikei Ieong ,  Ricky S. Amos ,  Diane C. Boyd ,  Dan M. Mocuta ,  Huajie Chen

    发明人： Anda C. Mocuta ,  Meikei Ieong ,  Ricky S. Amos ,  Diane C. Boyd ,  Dan M. Mocuta ,  Huajie Chen

    IPC分类号： H01L2976

    CPC分类号： H01L21/823807 ,  H01L21/823828

    摘要： High performance (surface channel) CMOS devices with a mid-gap work function metal gate are disclosed wherein an epitaxial layer is used for a threshold voltage Vt adjust/decrease for the PFET area, for large Vt reductions (˜500 mV), as are required by CMOS devices with a mid-gap metal gate. The present invention provides counter doping using an in situ B doped epitaxial layer or a B and C co-doped epitaxial layer, wherein the C co-doping provides an additional degree of freedom to reduce the diffusion of B (also during subsequent activation thermal cycles) to maintain a shallow B profile, which is critical to provide a surface channel CMOS device with a mid-gap metal gate while maintaining good short channel effects. The B diffusion profiles are satisfactorily shallow, sharp and have a high B concentration for devices with mid-gap metal gates, to provide and maintain a thin, highly doped B layer under the gate oxide.

    摘要翻译： 公开了具有中间间隙功函数金属栅极的高性能（表面沟道）CMOS器件，其中外延层用于PFET区域的阈值电压Vt调整/减小，用于大的Vt降低（〜500mV），如 需要具有中间间隙金属栅极的CMOS器件。 本发明提供了使用原位B掺杂外延层或B和C共掺杂外延层的反掺杂，其中C共掺杂提供了额外的自由度以减少B的扩散（也在随后的激活热循环期间） ）以保持浅的B剖面，这对于提供具有中间间隙金属栅极的表面沟道CMOS器件而言是至关重要的，同时保持良好的短沟道效应。 对于具有中间间隙金属栅极的器件，B扩散曲线令人满意地浅，尖锐且具有高B浓度，以在栅极氧化物下提供并保持薄的高掺杂B层。

    Anisotropic nitride etch process with high selectivity to oxide and photoresist layers in a damascene etch scheme
    6.
    发明授权
    Anisotropic nitride etch process with high selectivity to oxide and photoresist layers in a damascene etch scheme 失效
    各向异性氮化物蚀刻工艺，在镶嵌蚀刻方案中对氧化物和光致抗蚀剂层具有高选择性

    公开(公告)号：US06461529B1

    公开(公告)日：2002-10-08

    申请号：US09299137

    申请日：1999-04-26

    申请人： Diane C. Boyd ,  Stuart M. Burns ,  Hussein I. Hanafi ,  Waldemar W. Kocon ,  William C. Wille ,  Richard Wise

    发明人： Diane C. Boyd ,  Stuart M. Burns ,  Hussein I. Hanafi ,  Waldemar W. Kocon ,  William C. Wille ,  Richard Wise

    IPC分类号： H01L213215

    CPC分类号： H01L29/66583 ,  H01L21/31116 ,  H01L21/76224 ,  H01L21/823481

    摘要： A process and etchant gas composition for anisotropically etching a trench in a silicon nitride layer of a multilayer structure. The etchant gas composition has an etchant gas including a polymerizing agent, a hydrogen source, an oxidant, and a noble gas diluent. The oxidant preferably includes a carbon-containing oxidant component and an oxidant-noble gas component. The fluorocarbon gas is selected from CF4, C2F6, and C3F8; the hydrogen source is selected from CHF3, CH2F2, CH3F, and H2; the oxidant is selected from CO, CO2, and O2; and the noble gas diluent is selected from He, Ar, and Ne. The constituents are added in amounts to achieve an etchant gas having a high nitride selectivity to silicon oxide and photoresist. A power source, such as an RF power source, is applied to the structure to control the directionality of the high density plasma formed by exciting the etchant gas. The power source that controls the directionality of the plasma is decoupled from the power source used to excite the etchant gas. The etchant gas can be used during a nitride etch step in a process for making a metal oxide semiconductor field effect transistor.

    摘要翻译： 一种用于各向异性蚀刻多层结构的氮化硅层中的沟槽的工艺和蚀刻剂气体组合物。 蚀刻剂气体组合物具有包括聚合剂，氢源，氧化剂和惰性气体稀释剂的蚀刻剂气体。 氧化剂优选包括含碳氧化剂组分和氧化剂 - 惰性气体组分。 碳氟化合物气体选自CF4，C2F6和C3F8; 氢源选自CHF 3，CH 2 F 2，CH 3 F和H 2; 氧化剂选自CO，CO 2和O 2; 惰性气体稀释剂选自He，Ar和Ne。 添加成分以达到对氧化硅和光致抗蚀剂具有高氮化物选择性的蚀刻剂气体。 将诸如RF电源的电源施加到结构以控制通过激发蚀刻剂气体形成的高密度等离子体的方向性。 控制等离子体方向性的电源与用于激发蚀刻剂气体的电源脱耦。 在制造金属氧化物半导体场效应晶体管的工艺中的氮化物蚀刻步骤期间可以使用蚀刻剂气体。

    Hetero-integrated strained silicon n- and p-MOSFETs
    7.
    发明授权
    Hetero-integrated strained silicon n- and p-MOSFETs 有权
    异质集成应变硅n和p-MOSFET

    公开(公告)号：US07396747B2

    公开(公告)日：2008-07-08

    申请号：US11840029

    申请日：2007-08-16

    申请人： Diane C. Boyd ,  Juan Cai ,  Kevin K. Chan ,  Patricia M. Mooney ,  Kern Rim

    发明人： Diane C. Boyd ,  Juan Cai ,  Kevin K. Chan ,  Patricia M. Mooney ,  Kern Rim

    IPC分类号： H01L21/265 ,  H01L21/00 ,  H01L21/84

    CPC分类号： H01L29/1054 ,  H01L21/02378 ,  H01L21/02381 ,  H01L21/02532 ,  H01L21/02664 ,  H01L21/26506 ,  H01L21/26513 ,  H01L21/823807 ,  H01L29/7842 ,  Y10S438/938

    摘要： The present invention provides semiconductor structures and a method of fabricating such structures for application of MOSFET devices. The semiconductor structures are fabricated in such a way so that the layer structure in the regions of the wafer where n-MOSFETs are fabricated is different from the layer structure in regions of the wafers where p-MOSFETs are fabricated. The structures are fabricated by first forming a damaged region with a surface of a Si-containing substrate by ion implanting of a light atom such as He. A strained SiGe alloy is then formed on the Si-containing substrate containing the damaged region. An annealing step is then employed to cause substantial relaxation of the strained SiGe alloy via a defect initiated strain relaxation. Next, a strained semiconductor cap such as strained Si is formed on the relaxed SiGe alloy.

    摘要翻译： 本发明提供半导体结构和制造用于施加MOSFET器件的这种结构的方法。 以这样的方式制造半导体结构，使得制造n-MOSFET的晶片区域中的层结构不同于制造p-MOSFET的晶片的区域中的层结构。 通过首先通过离子注入诸如He的光原子形成具有含Si衬底的表面的损伤区域来制造结构。 然后在含有受损区域的含Si衬底上形成应变SiGe合金。 然后采用退火步骤通过缺陷引发的应变弛豫引起应变SiGe合金的显着松弛。 接下来，在弛豫的SiGe合金上形成诸如应变Si的应变半导体盖。

    Field effect transistors with improved implants and method for making such transistors
    8.
    发明授权
    Field effect transistors with improved implants and method for making such transistors 失效
    具有改进的植入物的场效应晶体管和制造这种晶体管的方法

    公开(公告)号：US6143635A

    公开(公告)日：2000-11-07

    申请号：US374519

    申请日：1999-08-16

    申请人： Diane C. Boyd ,  Stuart M. Burns ,  Hussein I. Hanafi ,  Yuan Taur ,  William C. Wille

    发明人： Diane C. Boyd ,  Stuart M. Burns ,  Hussein I. Hanafi ,  Yuan Taur ,  William C. Wille

    IPC分类号： H01L21/76 ,  H01L21/336 ,  H01L21/762 ,  H01L21/8234 ,  H01L27/08 ,  H01L29/78 ,  H01L21/3205 ,  H01L21/4763

    CPC分类号： H01L29/66583 ,  H01L21/76224 ,  H01L21/823412 ,  H01L21/823481 ,  H01L29/66537

    摘要： Metal oxide semiconductor field effect transistor (MOSFET) including a drain region and a source region adjacent to a channel region. A gate oxide is situated on the channel region and a gate conductor with vertical side walls is placed on the gate oxide. The MOSFET further includes a threshold adjust implant region and/or punch through implant region being aligned with respect to the gate conductor and limited to an area underneath the gate conductor. Such a MOSFET can be made using the following method: forming a dielectric stack on a semiconductor structure; defining an etch window on the dielectric stack having the lateral size and shape of a gate hole to be formed; defining the gate hole in the dielectric stack by transferring the etch window into the dielectric stack using a reactive ion etching (RIE) process; implanting threshold adjust dopants and/or punch through dopants through the gate hole; depositing a gate conductor such that it fills the gate hole; removing the gate conductor covering portions of the semiconductor structure surrounding the gate hole; and removing at least part of the dielectric stack.

    摘要翻译： 金属氧化物半导体场效应晶体管（MOSFET）包括漏极区域和与沟道区域相邻的源极区域。 栅极氧化物位于沟道区域上，并且具有垂直侧壁的栅极导体被放置在栅极氧化物上。 MOSFET还包括阈值调整注入区域和/或冲孔穿入注入区域，其相对于栅极导体对齐并且限制在栅极导体下方的区域。 这样的MOSFET可以使用以下方法制造：在半导体结构上形成介电堆叠; 在所述电介质堆叠上限定具有要形成的栅极孔的横向尺寸和形状的蚀刻窗口; 通过使用反应离子蚀刻（RIE）工艺将蚀刻窗口转移到电介质堆叠中来限定电介质叠层中的栅极孔; 植入阈值调节掺杂剂和/或穿过掺杂剂通过栅极孔; 沉积栅极导体，使其填充栅极孔; 去除覆盖围绕门孔的半导体结构的部分的栅极导体; 以及去除所述电介质叠层的至少一部分。

    Method for making field effect transistors having sub-lithographic gates with vertical side walls
    9.
    发明授权
    Method for making field effect transistors having sub-lithographic gates with vertical side walls 失效
    用于制造具有垂直侧壁的子光刻栅的场效应晶体管的方法

    公开(公告)号：US6040214A

    公开(公告)日：2000-03-21

    申请号：US26261

    申请日：1998-02-19

    申请人： Diane C. Boyd ,  Stuart M. Burns ,  Hussein I. Hanafi ,  Yuan Taur ,  William C. Wille

    发明人： Diane C. Boyd ,  Stuart M. Burns ,  Hussein I. Hanafi ,  Yuan Taur ,  William C. Wille

    IPC分类号： H01L21/033 ,  H01L21/28 ,  H01L21/336 ,  H01L21/762 ,  H01L29/423 ,  H01L21/8242 ,  H01L21/20

    CPC分类号： H01L29/66583 ,  H01L21/0337 ,  H01L21/0338 ,  H01L21/28123 ,  H01L21/76224 ,  H01L29/42372

    摘要： A method for the formation of field effect transistors (FETs), and more particularly metal oxide field effect transistors (MOSFETs), comprising the steps of: forming a dielectric stack on a semiconductor structure; defining an etch window on the dielectric stack; defining a gate hole in the dielectric stack by transferring the etch window into the dielectric stack using a reactive ion etching (RIE) process; depositing a side wall layer; removing the side wall layer from horizontal surfaces of the dielectric stack and gate hole such that side wall spacers remain which reduce the lateral size of the gate hole; depositing a gate conductor such that it fills the gate hole; removing the gate conductor covering the portions of the semiconductor structure surrounding the gate hole; removing at least part of the dielectric stack; and removing the side wall spacers.

    摘要翻译： 一种形成场效应晶体管（FET）的方法，特别是金属氧化物场效应晶体管（MOSFET），包括以下步骤：在半导体结构上形成电介质叠层; 在电介质堆叠上限定蚀刻窗口; 通过使用反应离子蚀刻（RIE）工艺将蚀刻窗口转移到电介质堆叠中来在电介质叠层中限定栅极孔; 沉积侧壁层; 从介质堆叠和门孔的水平表面去除侧壁层，使得保留侧壁间隔物，这减小了闸门孔的横向尺寸; 沉积栅极导体，使其填充栅极孔; 去除覆盖围绕栅极孔的半导体结构的部分的栅极导体; 去除所述电介质叠层的至少一部分; 并移除侧壁间隔物。