Methods of fabricating electrode sensor
    2.
    发明授权
    Methods of fabricating electrode sensor 有权
    电极传感器的制作方法

    公开(公告)号:US09173281B2

    公开(公告)日:2015-10-27

    申请号:US13944715

    申请日:2013-07-17

    摘要: Provide are an electrode sensor and a method of fabricating the same. the method may include providing a substrate with a first electrode, forming a resist layer on the substrate to cover the first electrode, patterning the resist layer to expose a portion of the first electrode, forming an insulating layer on the substrate, removing the insulating layer on the resist layer and the resist layer to form a well in the insulating layer, and forming a second electrode in the well to be electrically connected to the first electrode. According to the method, it is possible to prevent the first electrode from being damaged. In addition, the second electrode may be configured have an increased surface area, and thus, the electrode can have low impedance.

    摘要翻译: 提供电极传感器及其制造方法。 该方法可以包括提供具有第一电极的衬底,在衬底上形成抗蚀剂层以覆盖第一电极,图案化抗蚀剂层以暴露第一电极的一部分,在衬底上形成绝缘层,去除绝缘层 在所述抗蚀剂层和所述抗蚀剂层上,在所述绝缘层中形成阱,以及在所述阱中形成电连接到所述第一电极的第二电极。 根据该方法,可以防止第一电极被损坏。 此外,第二电极可以被配置为具有增加的表面积,因此电极可以具有低阻抗。