公开(公告)号：US07820293B2

公开(公告)日：2010-10-26

申请号：US12063927

申请日：2006-07-13

申请人： Erik Dekempeneer

发明人： Erik Dekempeneer

IPC分类号： B32B9/00

CPC分类号： C23C28/044 ,  C23C28/046 ,  C23C28/321 ,  C23C28/322 ,  C23C28/343 ,  C23C28/347 ,  Y10T428/12625 ,  Y10T428/30 ,  Y10T428/31678

摘要： The invention relates to a metal substrate (11) coated at least partially with a layered structure. The layered structure comprises an intermediate layer (14) deposited on said substrate (11) and a tetrahedral carbon layer (16) deposited on said intermediate layer. The intermediate layer comprises at least one amorphous carbon layer having a Young's modulus lower than 200 GPa and the tetrahedral carbon layer has a Young's modulus higher than 200 GPa. The invention further relates to a method to improve the adhesion of a tetrahedral carbon layer to a substrate and to a method to bridge the gap in Young's modulus of the metal substrate and the Young's modulus of a tetrahedral carbon coating deposited on said metal substrate.

摘要翻译： 本发明涉及至少部分地涂覆有层状结构的金属基材（11）。 层状结构包括沉积在所述衬底（11）上的中间层（14）和沉积在所述中间层上的四面体碳层（16）。 中间层包含至少一个杨氏模量低于200GPa的非晶碳层，四面体碳层的杨氏模量高于200GPa。 本发明还涉及一种提高四面体碳层与基材的粘附性的方法，以及一种桥接金属基材的杨氏模量的间隙的方法和沉积在所述金属基材上的四面体碳涂层的杨氏模量。

公开(公告)号：US20080220257A1

公开(公告)日：2008-09-11

申请号：US12063932

申请日：2006-07-13

申请人： Erik Dekempeneer

发明人： Erik Dekempeneer

IPC分类号： B32B9/04 ,  C09D7/00

CPC分类号： C23C16/26 ,  C23C16/0272 ,  C23C28/322 ,  C23C28/343 ,  C23C28/347 ,  C23C28/42 ,  Y10T428/2495 ,  Y10T428/30

摘要： The invention relates to a metal substrate coated at least partially with a layered structure. The layered structure comprises an intermediate layer deposited on the metal substrate and an amorphous carbon layer deposited on the intermediate layer. The amorphous carbon layer has a Young's modulus lower than 200 GPa. The intermediate layer comprises a tetrahedral carbon layer having a Young's modulus higher than 200 GPa. The invention further relates to a method to reduce the wear on a counterbody of a metal substrate coated with a tetrahedral carbon coating.

摘要翻译： 本发明涉及至少部分地涂覆有层状结构的金属基底。 层状结构包括沉积在金属基底上的中间层和沉积在中间层上的无定形碳层。 无定形碳层的杨氏模量低于200GPa。 中间层包含杨氏模量高于200GPa的四面体碳层。 本发明还涉及一种减少涂覆有四面体碳涂层的金属基底的反向体的磨损的方法。

公开(公告)号：US08759884B2

公开(公告)日：2014-06-24

申请号：US13002981

申请日：2009-07-07

申请人： Jeroen van den Brand ,  Andreas Heinrich Dietzel ,  Edward Willem Albert Young ,  Herbert Lifka ,  Erik Dekempeneer

发明人： Jeroen van den Brand ,  Andreas Heinrich Dietzel ,  Edward Willem Albert Young ,  Herbert Lifka ,  Erik Dekempeneer

IPC分类号： H01L29/20

CPC分类号： H01L27/3202 ,  H01L27/3204 ,  H01L51/0024 ,  H01L51/448 ,  H01L51/5203 ,  H01L51/524 ,  H01L2251/5361

摘要： An electronic device comprises a functional stack (10) and a cover (50) coupled thereto by an insulating adhesive layer (30). The functional stack (10) comprises a first transparent and electrically conductive layer (22), a second electrically conductive layer (24) and a functional structure (26), comprising at least one layer, sandwiched between said first and second conductive layer.The cover (50) includes a substrate (52) and at least a first conductive structure (66, 68) that is arranged in a first plane between the adhesive layer (28) and the substrate (52). First and second transverse electrical conductors (32, 34) transverse to the first plane (61) electrically interconnect the first and the second electrically conductive layer (22, 24) with the first and the second conductive structure (66, 68) in the first plane (61).

摘要翻译： 电子设备包括功能堆叠（10）和通过绝缘粘合剂层（30）与其耦合的盖（50）。 功能堆叠（10）包括第一透明和导电层（22），第二导电层（24）和功能结构（26），其包括夹在所述第一和第二导电层之间的至少一层。 盖（50）包括衬底（52）和布置在粘合剂层（28）和衬底（52）之间的第一平面中的至少第一导电结构（66,68）。 横向于第一平面（61）的第一和第二横向电导体（32,34）将第一和第二导电层（22,24）与第一和第二导电结构（66,68）在第一和第二导电结构 平面（61）。

公开(公告)号：US08507899B2

公开(公告)日：2013-08-13

申请号：US13056418

申请日：2009-08-05

申请人： Cristina Tanase ,  Erik Dekempeneer ,  Herbert Lifka ,  Ike de Vries ,  Antonius Maria Bernardus van Mol

发明人： Cristina Tanase ,  Erik Dekempeneer ,  Herbert Lifka ,  Ike de Vries ,  Antonius Maria Bernardus van Mol

IPC分类号： H01L31/00 ,  H01L51/00 ,  H01L21/00 ,  H01L29/08

CPC分类号： H01L51/5203 ,  H01L2251/5338 ,  H01L2251/5361

摘要： An electric transport component may include a substrate provided with a barrier structure with a first inorganic layer, an organic decoupling layer and a second inorganic layer, wherein the organic decoupling layer is sandwiched between the first and the second inorganic layer, and at least one electrically conductive structure distributed in a plane defined by the organic decoupling layer, and that is accommodated in at least one trench in the organic decoupling layer. A method of manufacturing an electric transport component may include the steps of providing a first inorganic layer, providing a first organic decoupling layer, forming at least one trench in the organic decoupling layer, depositing an electrically conductive material in the at least one trench, and providing a second inorganic layer. The component may be applied for example in opto-electrical and electro-optical devices.

摘要翻译： 电输送部件可以包括设置有具有第一无机层，有机解耦层和第二无机层的阻挡结构的基板，其中有机解耦层夹在第一和第二无机层之间，并且至少一个电 导电结构分布在由有机解耦层限定的平面中，并且被容纳在有机解耦层中的至少一个沟槽中。 制造电输送部件的方法可以包括以下步骤：提供第一无机层，提供第一有机解耦层，在有机解耦层中形成至少一个沟槽，在至少一个沟槽中沉积导电材料;以及 提供第二无机层。 该组件可以应用于例如光电和电光器件中。

公开(公告)号：US20060182895A1

公开(公告)日：2006-08-17

申请号：US10565265

申请日：2004-07-01

申请人： Jurgen Denul ,  Erik Dekempeneer ,  Wilmert De Bosscher

发明人： Jurgen Denul ,  Erik Dekempeneer ,  Wilmert De Bosscher

IPC分类号： C23C16/24

CPC分类号： F16C33/14 ,  C23C16/0272 ,  C23C16/26 ,  C23C28/322 ,  C23C28/34 ,  C23C28/341 ,  C23C28/343 ,  C23C28/347 ,  C23C28/36 ,  F16C2223/60 ,  Y10T428/30

摘要： The invention relates to a substrate covered at least partially with a layered coating. The layered coating comprises an intermediate coating and a hard carbon coating. The intermediate coating comprises a first metal layer deposited on the substrate, the first metal layer comprising at least one element of group IVB, group VB or group VIB; a nitride layer deposited on the first metal layer, the nitride layer comprising at least one nitride of an element of group IVB, group VB or group VIB; a second metal layer deposited on the nitride layer, the second metal layer comprising at least one element of group IVB, group VB or group VIB; a transition layer deposited on the second metal layer, the transition layer comprising at least one carbide of an element of group IVB, group VB or group VIB.

摘要翻译： 本发明涉及至少部分地覆盖有层状涂层的基底。 分层涂层包括中间涂层和硬碳涂层。 中间涂层包括沉积在基底上的第一金属层，第一金属层包含IVB族，VB族或VIB族的至少一种元素; 沉积在第一金属层上的氮化物层，所述氮化物层包含至少一种IVB族，VB族或VIB族元素的氮化物; 沉积在氮化物层上的第二金属层，第二金属层包含IVB族，VB族或VIB族的至少一种元素; 沉积在第二金属层上的过渡层，所述过渡层包含至少一种第IVB族，VB族或VIB族元素的碳化物。

公开(公告)号：US09539615B2

公开(公告)日：2017-01-10

申请号：US13394271

申请日：2010-09-06

申请人： Edward Willem Albert Young ,  Erik Dekempeneer ,  Antonius Maria Bernardus van Mol ,  Herbert Lifka ,  Peter van de Weijer ,  Bernhard Sailer ,  Emilie Galand ,  Richard Frantz ,  Dimiter Lubomirov Kotzev ,  Mohammed Zoubair Cherkaoui

发明人： Edward Willem Albert Young ,  Erik Dekempeneer ,  Antonius Maria Bernardus van Mol ,  Herbert Lifka ,  Peter van de Weijer ,  Bernhard Sailer ,  Emilie Galand ,  Richard Frantz ,  Dimiter Lubomirov Kotzev ,  Mohammed Zoubair Cherkaoui

IPC分类号： C23C16/44 ,  B05D7/04 ,  B05C9/06 ,  C23C14/56 ,  C23C16/34 ,  C23C16/54 ,  H01J37/18 ,  H01J37/32 ,  B05D3/04

CPC分类号： B05D7/04 ,  B05C9/06 ,  B05D3/0493 ,  B05D2252/02 ,  C23C14/56 ,  C23C16/345 ,  C23C16/545 ,  H01J37/185 ,  H01J37/3277

摘要： An apparatus is described for coating a flexible substrate with at least a first organic layer and a first inorganic layer. The apparatus comprises a first and a second chamber and an atmosphere decoupling slot between the first and the second chamber. A printing facility is arranged in the first chamber, for printing the flexible substrate with a mixture comprising at least one precursor for a polymer, oligomer or a polymer network and a polymerization initiator. A curing facility is arranged in the first chamber, for curing the deposited mixture, therewith forming the at least first organic layer. A vapor deposition facility is arranged in the second chamber, for depositing the at least first inorganic layer at the substrate provided with the at least first organic layer. The apparatus comprises a facility for guiding the flexible substrate along the printing facility, along the curing facility and via the atmosphere decoupling slot along the vapor deposition facility.

摘要翻译： 描述了用至少第一有机层和第一无机层涂覆柔性基板的装置。 该装置包括第一和第二室以及在第一和第二室之间的大气分离槽。 打印设备布置在第一室中，用于用包含聚合物，低聚物或聚合物网络的至少一种前体和聚合引发剂的混合物印刷柔性基材。 固化设备布置在第一室中，用于固化沉积的混合物，从而形成至少第一有机层。 在第二室中布置有气相沉积设备，用于在设置有至少第一有机层的基板处沉积至少第一无机层。 该设备包括用于沿着印刷设备沿着固化设备引导柔性基底并沿着气相沉积设备经由大气分离槽引导柔性基底的设备。

公开(公告)号：US09082595B2

公开(公告)日：2015-07-14

申请号：US12293891

申请日：2007-03-14

申请人： Erik Dekempeneer ,  Wilmert De Bosscher ,  Pascal Verheyen

发明人： Erik Dekempeneer ,  Wilmert De Bosscher ,  Pascal Verheyen

IPC分类号： C23C14/00 ,  C25B11/00 ,  C25B13/00 ,  H01J37/34 ,  C23C14/34 ,  C23C14/56

CPC分类号： H01J37/3405 ,  C23C14/34 ,  C23C14/56 ,  H01J37/3447

摘要： A coating apparatus is revealed that is designed to coat substrates by means of a physical vacuum deposition process or a chemical vacuum deposition process or a combination thereof. Said coating apparatus is particular in that it uses a rotatable magnetron (14) that is coverable with an axially moveable shutter (18). Such an arrangement enables to keep the magnetron target clean or to clean the target in between or even during subsequent coating steps. The shutter further provides for a controllable gas atmosphere in the vicinity of the target. The arrangement wherein the magnetron is centrally placed is described. Substrates are then exposed to the sputtering source from all angles by hanging them on a planetary carousel (24) that turns around the magnetron.

摘要翻译： 揭示了一种涂布设备，其被设计成通过物理真空沉积工艺或化学真空沉积工艺或其组合来涂覆基底。 所述涂覆装置的特征在于它使用可旋转的磁控管（14），该磁控管可利用轴向可移动的挡板（18）覆盖。 这种布置使得能够在磁控管目标之间或在随后的涂覆步骤之间或之后保持目标清洁或清洁目标。 闸门还提供了目标附近的可控气体气氛。 描述了磁控管中心放置的布置。 然后通过将衬底悬挂在围绕磁控管的行星转盘（24）上将衬底从各个角度暴露于溅射源。

公开(公告)号：US20120276299A1

公开(公告)日：2012-11-01

申请号：US13394271

申请日：2010-09-06

申请人： Edward Willem Albert Young ,  Erik Dekempeneer ,  Antonius Maria Bernardus van Mol ,  Herbert Lifka ,  Peter van de Weijer ,  Bernhard Sailer ,  Emilie Galand ,  Richard Frantz ,  Dimiter Lubomirov Kotzev ,  Mohammed Zoubair Cherkaoui

发明人： Edward Willem Albert Young ,  Erik Dekempeneer ,  Antonius Maria Bernardus van Mol ,  Herbert Lifka ,  Peter van de Weijer ,  Bernhard Sailer ,  Emilie Galand ,  Richard Frantz ,  Dimiter Lubomirov Kotzev ,  Mohammed Zoubair Cherkaoui

IPC分类号： C23C16/44 ,  C23C16/56

CPC分类号： B05D7/04 ,  B05C9/06 ,  B05D3/0493 ,  B05D2252/02 ,  C23C14/56 ,  C23C16/345 ,  C23C16/545 ,  H01J37/185 ,  H01J37/3277

摘要： An apparatus is described for coating a flexible substrate with at least a first organic layer and a first inorganic layer. The apparatus comprises a first and a second chamber and an atmosphere decoupling slot between the first and the second chamber. A printing facility is arranged in the first chamber, for printing the flexible substrate with a mixture comprising at least one precursor for a polymer, oligomer or a polymer network and a polymerization initiator. A curing facility is arranged in the first chamber, for curing the deposited mixture, therewith forming the at least first organic layer. A vapor deposition facility is arranged in the second chamber, for depositing the at least first inorganic layer at the substrate provided with the at least first organic layer. The apparatus comprises a facility for guiding the flexible substrate along the printing facility, along the curing facility and via the atmosphere decoupling slot along the vapor deposition facility.

摘要翻译： 描述了用至少第一有机层和第一无机层涂覆柔性基板的装置。 该装置包括第一和第二室以及在第一和第二室之间的大气分离槽。 打印设备布置在第一室中，用于用包含聚合物，低聚物或聚合物网络的至少一种前体和聚合引发剂的混合物印刷柔性基材。 固化设备布置在第一室中，用于固化沉积的混合物，从而形成至少第一有机层。 在第二室中布置有气相沉积设备，用于在设置有至少第一有机层的基板处沉积至少第一无机层。 该设备包括用于沿着印刷设备沿着固化设备引导柔性基底并沿着气相沉积设备经由大气分离槽引导柔性基底的设备。

公开(公告)号：US07927700B2

公开(公告)日：2011-04-19

申请号：US10565265

申请日：2004-07-01

申请人： Jurgen Denul ,  Erik Dekempeneer ,  Wilmert De Bosscher

发明人： Jurgen Denul ,  Erik Dekempeneer ,  Wilmert De Bosscher

IPC分类号： B32B9/00

CPC分类号： F16C33/14 ,  C23C16/0272 ,  C23C16/26 ,  C23C28/322 ,  C23C28/34 ,  C23C28/341 ,  C23C28/343 ,  C23C28/347 ,  C23C28/36 ,  F16C2223/60 ,  Y10T428/30

摘要： The invention relates to a substrate covered at least partially with a layered coating. The layered coating comprises an intermediate coating and a hard carbon coating. The intermediate coating comprises a first metal layer deposited on the substrate, the first metal layer comprising at least one element of group IVB, group VB or group VIB; a nitride layer deposited on the first metal layer, the nitride layer comprising at least one nitride of an element of group IVB, group VB or group VIB; a second metal layer deposited on the nitride layer, the second metal layer comprising at least one element of group IVB, group VB or group VIB; a transition layer deposited on the second metal layer, the transition layer comprising at least one carbide of an element of group IVB, group VB or group VIB.

摘要翻译： 本发明涉及至少部分地覆盖有层状涂层的基底。 分层涂层包括中间涂层和硬碳涂层。 中间涂层包括沉积在基底上的第一金属层，第一金属层包含IVB族，VB族或VIB族的至少一种元素; 沉积在第一金属层上的氮化物层，所述氮化物层包含至少一种IVB族，VB族或VIB族元素的氮化物; 沉积在氮化物层上的第二金属层，第二金属层包含IVB族，VB族或VIB族的至少一种元素; 沉积在第二金属层上的过渡层，所述过渡层包含至少一种第IVB族，VB族或VIB族元素的碳化物。

公开(公告)号：US08772776B2

公开(公告)日：2014-07-08

申请号：US13142595

申请日：2009-12-29

申请人： Antonius Maria Bernardus van Mol ,  Joanne Sarah Wilson ,  Chia-Chen Fan ,  Herbert Lifka ,  Erik Dekempeneer ,  Edward Willem Albert Young

发明人： Antonius Maria Bernardus van Mol ,  Joanne Sarah Wilson ,  Chia-Chen Fan ,  Herbert Lifka ,  Erik Dekempeneer ,  Edward Willem Albert Young

IPC分类号： H01L29/04

CPC分类号： H01L51/0096 ,  H01L51/52 ,  H01L51/5203 ,  H01L51/5212 ,  H01L51/5246 ,  H01L51/5256 ,  H01L51/5271 ,  H01L2251/5338 ,  H01L2251/5361 ,  Y02E10/549 ,  Y02P70/521

摘要： An electro-optic device may include a substrate that supports a first and a second electrode, a functional structure including at least one functional layer that is electrically coupled to the electrodes, and an etched metal structure electrically coupled to at least one of the electrodes.

摘要翻译： 电光装置可以包括支撑第一和第二电极的基板，包括电耦合到电极的至少一个功能层的功能结构以及电耦合到至少一个电极的蚀刻金属结构。