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公开(公告)号：US07851366B2
公开(公告)日：2010-12-14
申请号：US11854155
申请日：2007-09-12
申请人： Fabrice Casset , Sofiane Soulimane
发明人： Fabrice Casset , Sofiane Soulimane
IPC分类号： H01L21/311
CPC分类号： B81C1/00158 , B81B2203/0109 , B81C1/00103 , B81C2201/0108 , H01G5/011 , H01G5/18
摘要： The invention relates to a method of realization of a sacrificial layer, including the steps of: lithography of a resin deposited on a substrate in order to supply a lithographed resist pattern on a substrate zone, the zone having a given size and a given form, the pattern occupying a given volume, annealed according to a thermal cycle of the lithographed resist pattern, the method being characterised in that it includes, according to the resin, the determination of the size and of the form of said zone of the substrate, and the determination of the volume of the resin deposited on said zone so that the thermal cycle annealing supplies a profile chosen from among the following profiles: a planarising domed profile and a “double air gap” profile.
摘要翻译： 本发明涉及一种实现牺牲层的方法，包括以下步骤：沉积在衬底上的树脂的光刻法，以便在衬底区域上提供光刻抗蚀剂图案，该区域具有给定的尺寸和给定的形式， 所述图案占据给定体积，根据所蚀刻的抗蚀剂图案的热循环退火，所述方法的特征在于，根据所述树脂，所述图案包括所述基材的所述区域的尺寸和形式的确定，以及 确定沉积在所述区域上的树脂的体积，使得热循环退火提供从以下简档中选择的轮廓：平面化圆顶轮廓和“双气隙”轮廓。
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公开(公告)号：US20080090421A1
公开(公告)日：2008-04-17
申请号：US11854155
申请日：2007-09-12
申请人： Fabrice Casset , Sofiane Soulimane
发明人： Fabrice Casset , Sofiane Soulimane
IPC分类号： H01L21/311
CPC分类号： B81C1/00158 , B81B2203/0109 , B81C1/00103 , B81C2201/0108 , H01G5/011 , H01G5/18
摘要： The invention relates to a method of realization of a sacrificial layer, including the steps of: lithography of a resin deposited on a substrate in order to supply a lithographed resist pattern on a substrate zone, the zone having a given size and a given form, the pattern occupying a given volume, annealed according to a thermal cycle of the lithographed resist pattern, the method being characterised in that it includes, according to the resin, the determination of the size and of the form of said zone of the substrate, and the determination of the volume of the resin deposited on said zone so that the thermal cycle annealing supplies a profile chosen from among the following profiles: a planarising domed profile and a “double air gap” profile.
摘要翻译： 本发明涉及一种实现牺牲层的方法，包括以下步骤：沉积在衬底上的树脂的光刻法，以便在衬底区域上提供光刻抗蚀剂图案，该区域具有给定的尺寸和给定的形式， 所述图案占据给定体积，根据所蚀刻的抗蚀剂图案的热循环退火，所述方法的特征在于，根据所述树脂，所述图案包括所述基材的所述区域的尺寸和形式的确定，以及 确定沉积在所述区域上的树脂的体积，使得热循环退火提供从以下简档中选择的轮廓：平面化圆顶轮廓和“双气隙”轮廓。
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公开(公告)号：US20070087513A1
公开(公告)日：2007-04-19
申请号：US11512731
申请日：2006-08-30
申请人： Guillaume Bouche , Fabrice Casset , Pascal Ancey
发明人： Guillaume Bouche , Fabrice Casset , Pascal Ancey
CPC分类号： H01G5/16 , Y10T29/435 , Y10T29/49002 , Y10T29/4913 , Y10T29/49139 , Y10T29/49147 , Y10T29/49165 , Y10T83/0476 , Y10T83/0505 , Y10T83/051 , Y10T83/0577
摘要： A method for forming a variable capacitor including a conductive strip covering the inside of a cavity, and a flexible conductive membrane placed above the cavity, the cavity being formed according to the steps of: forming a recess in the substrate; placing a malleable material in the recess; having a stamp bear against the substrate at the level of the recess to give the upper part of the malleable material a desired shape; hardening the malleable material; and removing the stamp.
摘要翻译： 一种形成可变电容器的方法，所述可变电容器包括覆盖空腔内部的导电条和位于所述空腔上方的柔性导电膜，所述空腔根据以下步骤形成：在所述基板中形成凹部; 将可延展材料放置在凹槽中; 在凹部的水平处具有抵靠基板的印模，以使可延展材料的上部具有期望的形状; 硬化可延展材料; 并移除邮票。
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4.发明申请Microelectromechanical system comprising a beam that undergoes flexural deformation 审中-公开微机电系统包括经受弯曲变形的梁公开(公告)号：US20070035200A1
公开(公告)日：2007-02-15
申请号：US11388213
申请日：2006-03-23
申请人： Fabrice Casset , Karim Segueni , Arnaud De Grave , Nicolas Abele
发明人： Fabrice Casset , Karim Segueni , Arnaud De Grave , Nicolas Abele
CPC分类号： H03H9/2463 , B81B3/007 , B81B2201/016 , B81B2201/0271 , B81B2203/0118 , H03H3/0076 , H03H9/2447
摘要： A microelectromechanical system comprises a beam and an electrode coupled to the beam via electrostatic interaction. The beam is designed to undergo elastic flexural deformation and has an approximately constant cross section. The beam consists of several flat faces that extend over the length of the beam, each having a thickness of less than an external dimension of the cross section. A flexural vibration frequency of the beam is then increased compared with a solid beam of the same external dimensions. Such a microelectromechanical system is suitable for applications requiring very short transition times, or for producing high-frequency oscillators and resonators.
摘要翻译： 微机电系统包括通过静电相互作用耦合到束的光束和电极。 梁被设计成经历弹性弯曲变形并且具有大致恒定的横截面。 梁包括在梁的长度上延伸的多个平面，每个平面具有小于横截面的外部尺寸的厚度。 然后与相同外部尺寸的实心束相比，梁的弯曲振动频率增加。 这样的微机电系统适用于需要非常短的转换时间或用于产生高频振荡器和谐振器的应用。
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公开(公告)号：US08519806B2
公开(公告)日：2013-08-27
申请号：US12794037
申请日：2010-06-04
申请人： Fabrice Casset , Cédric Durand
发明人： Fabrice Casset , Cédric Durand
CPC分类号： H03H3/0077 , H03H3/0076 , H03H9/2463 , H03H2009/02496
摘要： A method for forming a resonator including a resonant element, the resonant element being at least partly formed of a body at least partly formed of a first conductive material, the body including open cavities, this method including the steps of measuring the resonator frequency; and at least partially filling said cavities.
摘要翻译： 一种用于形成包括谐振元件的谐振器的方法，所述谐振元件至少部分地由至少部分地由第一导电材料形成的主体形成，所述主体包括开放空腔，该方法包括以下步骤：测量谐振器频率; 并且至少部分地填充所述空腔。
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6.发明申请VIBRATING NANO-SCALE OR MICRO-SCALE ELECTROMECHANICAL COMPONENT WITH ENHANCED DETECTION LEVEL 有权具有增强检测水平的振动纳米级或微型电子元件公开(公告)号：US20100289096A1
公开(公告)日：2010-11-18
申请号：US12680687
申请日：2008-10-08
申请人： Fabrice Casset , Cedric Durand
发明人： Fabrice Casset , Cedric Durand
IPC分类号： H01L29/84
CPC分类号： H03H9/02259 , H03H3/0072 , H03H9/2436 , H03H9/2463 , H03H2009/02496 , H03H2009/02503
摘要： A vibrating nano-scale or micro-scale electromechanical component including a vibrating mechanical element that cooperates with at least one detection electrode. The detection electrode is flexible and is configured to vibrate in phase opposition relative to the vibrating mechanical element. Such a component may find, for example, application to resonators or motion sensors.
摘要翻译： 振动纳米尺度或微尺度机电部件，其包括与至少一个检测电极配合的振动机械元件。 检测电极是柔性的并且被配置成相对于振动机械元件相对振动。 这样的组件可以发现例如应用于谐振器或运动传感器。
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公开(公告)号：US07565725B2
公开(公告)日：2009-07-28
申请号：US11512731
申请日：2006-08-30
申请人： Guillaume Bouche , Fabrice Casset , Pascal Ancey
发明人： Guillaume Bouche , Fabrice Casset , Pascal Ancey
IPC分类号： H01G7/00
CPC分类号： H01G5/16 , Y10T29/435 , Y10T29/49002 , Y10T29/4913 , Y10T29/49139 , Y10T29/49147 , Y10T29/49165 , Y10T83/0476 , Y10T83/0505 , Y10T83/051 , Y10T83/0577
摘要： A method for forming a variable capacitor including a conductive strip covering the inside of a cavity, and a flexible conductive membrane placed above the cavity, the cavity being formed according to the steps of: forming a recess in the substrate; placing a malleable material in the recess; having a stamp bear against the substrate at the level of the recess to give the upper part of the malleable material a desired shape; hardening the malleable material; and removing the stamp.
摘要翻译： 一种形成可变电容器的方法，所述可变电容器包括覆盖空腔内部的导电条和位于所述空腔上方的柔性导电膜，所述空腔根据以下步骤形成：在所述基板中形成凹部; 将可延展材料放置在凹槽中; 在凹部的水平处具有抵靠基板的印模，以使可延展材料的上部具有期望的形状; 硬化可延展材料; 并移除邮票。
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公开(公告)号：US20060114638A1
公开(公告)日：2006-06-01
申请号：US10999211
申请日：2004-11-29
IPC分类号： H01G5/00
CPC分类号： H01H59/0009 , H01G5/16 , H01G5/18 , H01H2059/0081 , Y10T29/43 , Y10T29/435 , Y10T29/49 , Y10T29/49002 , Y10T29/49105 , Y10T29/49156
摘要： A variable capacitor having a groove portion formed in an insulating substrate, two upper portions of the substrate located on either side of the groove portion forming two lateral edges, a conductive layer covering the inside of the groove portion, a flexible conductive membrane, placed above the groove portion by bearing on the edges, a dielectric layer covering the conductive layer or the membrane to insulate the conductive layer and the membrane, and terminals of application of a voltage between the conductive layer and the membrane, and such that the depth of the groove portion continuously increases from one of the edges to the bottom of the groove portion, and that the conductive layer covers the inside of the groove portion at least to reach one of the two edges, that it may cover.
摘要翻译： 一种可变电容器，其具有形成在绝缘基板中的槽部，位于形成两个侧边缘的槽部的任一侧的基板的两个上部，覆盖所述槽部的内部的导电层，位于上方的柔性导电膜 沟槽部分通过承载在边缘上，覆盖导电层或膜的电介质层以使导电层和膜绝缘，以及在导电层和膜之间施加电压的端子，并且使得 凹槽部分从凹槽部分的一个边缘到底部连续地增加，并且导电层至少覆盖凹槽部分的内部至少可以覆盖两个边缘中的一个。
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9.发明授权Integrated circuit comprising a device with a vertical mobile element integrated in a support substrate and method for producing the device with a mobile element 有权集成电路包括具有集成在支撑衬底中的垂直移动元件的装置和用于利用移动元件制造该装置的方法公开(公告)号：US08766381B2
公开(公告)日：2014-07-01
申请号：US13230035
申请日：2011-09-12
申请人： Fabrice Casset , Lionel Cadix , Perceval Coudrain , Alexis Farcy , Laurent-Luc Chapelon , Yacine Felk , Pascal Ancey
发明人： Fabrice Casset , Lionel Cadix , Perceval Coudrain , Alexis Farcy , Laurent-Luc Chapelon , Yacine Felk , Pascal Ancey
IPC分类号： H01L29/06
CPC分类号： B81C1/00246 , B81B2201/014 , B81B2201/0235 , B81B2201/0271 , B81B2203/0353 , B81B2207/012 , B81C1/005 , G01P15/125 , G01P2015/082 , H01L2924/0002 , H03H3/0073 , H03H9/2426 , H01L2924/00
摘要： The integrated circuit comprises a support substrate having opposite first and second main surfaces. A cavity passes through the support substrate and connects the first and second main surfaces. The integrated circuit comprises a device with a mobile element, the mobile element and a pair of associated electrodes of which are included in a cavity. An anchoring node of the mobile element is located at the level of the first main surface. The integrated circuit comprises a first elementary chip arranged at the level of the first main surface and electrically connected to the device with a mobile element.
摘要翻译： 集成电路包括具有相对的第一和第二主表面的支撑基板。 空腔通过支撑基板并连接第一和第二主表面。 集成电路包括具有移动元件的装置，移动元件和一对相关联的电极包括在空腔中。 移动元件的锚定节点位于第一主表面的水平面上。 集成电路包括布置在第一主表面的电平处的第一基本芯片，并与移动元件电连接到该装置。
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10.发明授权Method of adjusting the resonance frequency of a micro-machined vibrating element 有权调整微加工振动元件的共振频率的方法公开(公告)号：US08669687B2
公开(公告)日：2014-03-11
申请号：US13436262
申请日：2012-03-30
IPC分类号： H01L41/08
CPC分类号： H03H3/0077 , H03H9/02377 , H03H9/2436 , H03H9/2463 , H03H2009/02511
摘要： The present disclosure relates to a method of adjusting the resonance frequency of a vibrating element, comprising measuring the resonance frequency of the vibrating element, determining, using abacuses and as a function of the resonance frequency measured, a dimension and a position of at least one area of modified thickness to be formed on the vibrating element so that the resonance frequency thereof corresponds to a setpoint frequency, and forming on the vibrating element, an area of modified thickness of the determined dimension and position.
摘要翻译： 本公开涉及一种调节振动元件的谐振频率的方法，包括测量振动元件的谐振频率，使用可笑度和所测得的谐振频率的函数来确定至少一个振动元件的尺寸和位置 要在振动元件上形成改变厚度的区域，使得其谐振频率对应于设定点频率，并且在振动元件上形成所确定的尺寸和位置的改进厚度的区域。
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