METHOD AND SYSTEM EMPLOYING A SOLUTION CONTACT FOR MEASUREMENT
    3.
    发明申请
    METHOD AND SYSTEM EMPLOYING A SOLUTION CONTACT FOR MEASUREMENT 审中-公开
    使用解决方案联系人进行测量的方法和系统

    公开(公告)号:US20130314093A1

    公开(公告)日:2013-11-28

    申请号:US13900177

    申请日:2013-05-22

    CPC classification number: G01N17/02 G01N27/416

    Abstract: An inline metrology method and system using an electrolytic cell for measuring electrical characteristics of a semiconductor device, such as a photovoltaic device, during manufacture.

    Abstract translation: 在制造期间使用用于测量诸如光伏器件的半导体器件的电特性的电解池的在线测量方法和系统。

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