-
公开(公告)号：US11768362B2
公开(公告)日：2023-09-26
申请号：US16853611
申请日：2020-04-20
申请人： Gigaphoton Inc.
发明人： Akiyoshi Suzuki , Osamu Wakabayashi
IPC分类号： G02B19/00 , G01J1/42 , G02B5/00 , G02B26/08 , G02B27/09 , G02B27/30 , G03F7/20 , H01L21/027 , H01S3/097
CPC分类号： G02B19/0019 , G01J1/4257 , G02B5/001 , G02B19/0047 , G02B26/0816 , G02B27/0927 , G02B27/0955 , G02B27/30 , G03F7/2006 , G03F7/2008 , H01L21/0275 , G01J2001/4261 , H01S3/097
摘要： A laser radiation system according to a viewpoint of the present disclosure includes a first optical system configured to convert a first laser flux into a second laser flux, a multimirror device including mirrors, configured to be capable of controlling the angle of the attitude of each of the mirrors, and configured to divide the second laser flux into laser fluxes and reflect the laser fluxes in directions to produce the divided laser fluxes, a Fourier transform optical system configured to focus the divided laser fluxes, and a control section configured to control the angle of the attitude of each of the mirrors in such a way that the Fourier transform optical system superimposes the laser fluxes, which are divided by the mirrors separate from each other by at least a spatial coherence length of the second laser flux, on one another.
-
公开(公告)号：US10092979B2
公开(公告)日：2018-10-09
申请号：US15962664
申请日：2018-04-25
申请人： GIGAPHOTON INC.
IPC分类号： B23K26/06 , B23K26/073 , G02B26/08 , B23K26/10
摘要： A laser irradiation apparatus may include: an irradiation head section including first and second irradiation heads each configured to perform laser light irradiation on a workpiece; a laser unit section including first and second laser units configured to respectively output first laser light and second laser light; a beam delivery section provided in an optical path between the laser unit section and the irradiation head section, and configured to perform switching of optical paths between optical paths of the first laser light and the second laser light to cause the first or second laser light to enter the first or second irradiation head; a first beam property varying section provided in an optical path between the first laser unit and the irradiation head section; and a second beam property varying section provided in an optical path between the second laser unit and the irradiation head section.
-
3.发明授权公开(公告)号：US10739686B2
公开(公告)日：2020-08-11
申请号：US16028240
申请日：2018-07-05
申请人： Gigaphoton Inc.
发明人： Akiyoshi Suzuki , Osamu Wakabayashi
摘要： The present invention allows more freely setting of the polarization direction of illumination light on an illumination surface of an exposure device. A beam transmission system (121) that transmits, to an exposure device (130), a linearly polarized optical beam (L) output from a free electron laser device (10) includes: an optical beam splitting unit (50) configured to split the optical beam (L) into a first optical beam (L1) and a second optical beam (L2); and a first polarization direction rotating unit (51) configured to rotate the linear polarization direction of the first optical beam (L1).
-
公开(公告)号：US10050408B2
公开(公告)日：2018-08-14
申请号：US15379192
申请日：2016-12-14
申请人： Gigaphoton Inc.
IPC分类号： H01S3/23 , H01S3/081 , H01S3/00 , G02B27/12 , G02B27/10 , H01L21/67 , H01L21/02 , H01L27/12 , B23K26/00
摘要： A laser system may include a plurality of laser apparatuses, a beam delivery device configured to bundle pulse laser beams emitted from respective laser apparatuses of the plurality of laser apparatuses to emit a bundled laser beam, and a controller configured to control operated laser apparatuses of the plurality of laser apparatuses such that, at a change in a number representing how many laser apparatuses are operated, a beam parameter of the bundled laser beam emitted from the beam delivery device approaches a beam parameter of the bundled laser beam emitted before the change.
-
公开(公告)号：US12109648B2
公开(公告)日：2024-10-08
申请号：US17487348
申请日：2021-09-28
申请人： Gigaphoton Inc.
发明人： Satoshi Tanaka , Akiyoshi Suzuki , Hideo Hoshino
IPC分类号： B23K26/082 , B23K26/0622 , B23K101/40
CPC分类号： B23K26/082 , B23K26/0622 , B23K2101/40
摘要： Provided is a laser annealing apparatus causing laser light to be radiated to processing receiving areas arranged, out of a first direction and a second direction perpendicular to the first direction, along at least the second direction and move a batch radiation area and a workpiece in the first direction, and the laser annealing apparatus includes an energy density measuring apparatus measuring the energy density at, out of first and second ends of the batch radiation area in the second direction, at least the second end, an energy density adjusting apparatus adjusting the energy density at the first end, and a controller controlling the energy density adjusting apparatus. The energy density at the first end when (N+1)-th scanning is performed is so adjusted that the energy density at the first end in an (N+1)-th scan area approaches the energy density at the second end in the N-th scan area.
-
公开(公告)号：US09966721B2
公开(公告)日：2018-05-08
申请号：US15350284
申请日：2016-11-14
申请人： Gigaphoton Inc.
发明人： Kouji Kakizaki , Masaki Arakawa , Kouji Ashikawa , Yasuhiro Kamba , Akiyoshi Suzuki , Osamu Wakabayashi
IPC分类号： H01S3/10 , H01S3/00 , H01S3/105 , H01S3/23 , H01S3/081 , H01S3/225 , H01S3/13 , G02B27/12 , G02B27/09
CPC分类号： H01S3/005 , G02B27/0955 , G02B27/123 , H01S3/0071 , H01S3/081 , H01S3/105 , H01S3/1305 , H01S3/225 , H01S3/2251 , H01S3/2253 , H01S3/2255 , H01S3/2256 , H01S3/2366
摘要： The laser system may include first and second laser apparatuses and a beam delivery device. The first laser apparatus may be provided so as to emit a first laser beam to the beam delivery device in a first direction. The second laser apparatus may be provided so as to emit a second laser beam to the beam delivery device in a direction substantially parallel to the first direction. The beam delivery device may be configured to bundle the first and second laser beams and to emit the first and second laser beams from the beam delivery device to a beam delivery direction different from the first direction.
-
公开(公告)号：US09791780B2
公开(公告)日：2017-10-17
申请号：US14983962
申请日：2015-12-30
申请人： Gigaphoton Inc.
CPC分类号： G03F7/70058 , G03F7/7035 , G03F7/70408 , G03F7/70575
摘要： An exposure apparatus may include a laser light source capable of varying a wavelength of a laser beam that is emitted from the laser light source, a mask on which a pattern is formed, the pattern being configured to generate diffracted light by being irradiated with the laser beam, and a controller configured to control, in accordance with a distance between the mask and a substrate, the wavelength of the laser beam that is emitted from the laser light source, wherein the mask is irradiated with the laser beam emitted from the laser light source to perform proximity exposure on a surface of the substrate.
-
公开(公告)号：US20180236602A1
公开(公告)日：2018-08-23
申请号：US15962664
申请日：2018-04-25
申请人： GIGAPHOTON INC.
CPC分类号： B23K26/10 , B23K26/00 , B23K26/073 , G02B26/08 , H01L21/20 , H01L21/268 , H01S3/00 , H01S3/10
摘要： A laser irradiation apparatus may include: an irradiation head section including first and second irradiation heads each configured to perform laser light irradiation on a workpiece; a laser unit section including first and second laser units configured to respectively output first laser light and second laser light; a beam delivery section provided in an optical path between the laser unit section and the irradiation head section, and configured to perform switching of optical paths between optical paths of the first laser light and the second laser light to cause the first or second laser light to enter the first or second irradiation head; a first beam property varying section provided in an optical path between the first laser unit and the irradiation head section; and a second beam property varying section provided in an optical path between the second laser unit and the irradiation head section.
-
-
-
-
-
-
-
搜索结果
8 条记录 (耗时 0.013 秒)
