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    Energy efficient lithography laser
    3.
    发明授权
    Energy efficient lithography laser 失效
    节能光刻激光

    公开(公告)号：US06320892B1

    公开(公告)日：2001-11-20

    申请号：US09420297

    申请日：1999-10-18

    申请人： Gamaralalage G. Padmabandu ,  Palash P. Das ,  Tom A. Watson ,  Paolo Zambon

    发明人： Gamaralalage G. Padmabandu ,  Palash P. Das ,  Tom A. Watson ,  Paolo Zambon

    IPC分类号： H01S3223

    CPC分类号： G03F7/70025 ,  G03F7/70041 ,  G03F7/70358 ,  G03F7/70558 ,  G03F7/70575 ,  H01S3/036 ,  H01S3/134 ,  H01S3/225 ,  H01S3/2251 ,  H01S3/2256

    摘要： An excimer laser system with an automatic fluorine control system to permit precise control of the fluorine concentration within an F2 “sweet spot” in a gas discharge laser chamber. This is done with a computer control system which monitors laser parameters, determines &Dgr;E/&Dgr;V, the change of pulse energy with voltage, and automatically and precisely controls the fluorine concentration based on &Dgr;E/&Dgr;V without the need to actually measure the fluorine concentration. The present invention is especially useful in lithography environments in which photo resist having a wide range of sensitivity are used. The present invention permits operation of the laser at substantially maximum efficiency over a wide range of pulse energy outputs.

    摘要翻译： 一种具有自动氟控制系统的准分子激光系统，用于在气体放电激光室中精确控制F2“甜点”内的氟浓度。 这是通过电脑控制系统进行的，该系统监视激光参数，确定DELTAE / DELTAV，脉冲能量随电压的变化，并且可以根据DELTAE / DELTAV自动精确控制氟浓度，而无需实际测量氟浓度。 本发明在使用具有宽灵敏度范围的光刻胶的光刻环境中特别有用。 本发明允许激光器在宽范围的脉冲能量输出上以基本最大的效率进行操作。

    Compact high resolution grating spectrometer
    5.
    发明授权
    Compact high resolution grating spectrometer 有权
    紧凑型高分辨率光栅光谱仪

    公开(公告)号：US6061129A

    公开(公告)日：2000-05-09

    申请号：US236148

    申请日：1999-01-22

    申请人： Alexander I. Ershov ,  Gamaralalage G. Padmabandu ,  Palash P. Das

    发明人： Alexander I. Ershov ,  Gamaralalage G. Padmabandu ,  Palash P. Das

    IPC分类号： G01J3/18 ,  G01J3/22

    CPC分类号： G01J3/22 ,  G01J3/18

    摘要： A compact high resolution grating spectrometer. A beam of expanding light from a light source is collimated and the collimated beam is expanded with a beam expander before illuminating a reflecting grating. The expansion of the beam permits high resolution in a small package. In preferred embodiments mirror arrangements are provided to produce double reflections off the reflecting grating to further improve the resolution of the spectrometer.

    摘要翻译： 紧凑型高分辨率光栅光谱仪。 来自光源的扩展光束被准直，并且在照射反射光栅之前用光束扩展器扩展准直光束。 梁的扩展允许在小包装中的高分辨率。 在优选实施例中，提供反射镜布置以产生离开反射光栅的双反射，以进一步提高光谱仪的分辨率。

    Pulse power generating circuit with energy recovery
    8.
    发明授权
    Pulse power generating circuit with energy recovery 失效
    具有能量回收的脉冲发电电路

    公开(公告)号：US5729562A

    公开(公告)日：1998-03-17

    申请号：US739873

    申请日：1996-10-31

    申请人： Daniel L. Birx ,  Palash P. Das ,  Igor V. Fomenkov ,  William N. Partlo ,  Tom A. Watson

    发明人： Daniel L. Birx ,  Palash P. Das ,  Igor V. Fomenkov ,  William N. Partlo ,  Tom A. Watson

    IPC分类号： H01S3/00 ,  H01S3/097 ,  H01S3/225 ,  H02M9/04 ,  H03K3/57 ,  H03K17/00 ,  H03K17/80 ,  H05H1/06

    CPC分类号： H05H1/06 ,  H01S3/097 ,  H03K17/80 ,  H03K3/57 ,  H01S3/225 ,  H03K2217/0036

    摘要： A high voltage pulse power generating circuit capable of providing energy recovery is disclosed. The energy efficient pulse generating circuit source comprises a high voltage charge storing element which is periodically discharged into a compressor circuit. An energy recovery circuit coupled to the compressor circuit reverses the polarity of energy dissipated by the pulse power generating circuit and transfers the waste energy back to the power source. In a preferred embodiment, the pulse power generating circuit of the present invention utilizes an SCR switch for periodically discharging the charge storing element. This embodiment of the present invention provides pulses consistently and will not provide even a single missed pulse.

    摘要翻译： 公开了一种能够提供能量回收的高压脉冲发生电路。 能量效率脉冲发生电路源包括周期性地排放到压缩机电路中的高电压电荷存储元件。 耦合到压缩机电路的能量恢复电路反转由脉冲发电电路消耗的能量的极性，并将废能转移回电源。 在优选实施例中，本发明的脉冲发生电路利用SCR开关来周期性地对电荷存储元件进行放电。 本发明的该实施例一致地提供脉冲，并且甚至不会提供单个错过的脉冲。

    Fluorine control system with fluorine monitor
    9.
    发明授权
    Fluorine control system with fluorine monitor 有权
    氟监控系统

    公开(公告)号：US06240117B1

    公开(公告)日：2001-05-29

    申请号：US09191446

    申请日：1998-11-12

    申请人： Mengxiong Gong ,  Tom A. Watson ,  Palash P. Das ,  Richard L. Sandstrom ,  Thomas P. Duffey

    发明人： Mengxiong Gong ,  Tom A. Watson ,  Palash P. Das ,  Richard L. Sandstrom ,  Thomas P. Duffey

    IPC分类号： H01S3223

    CPC分类号： G03F7/70558 ,  G03F7/70575 ,  H01S3/036 ,  H01S3/225

    摘要： An excimer laser system with a real time fluorine monitor and an automatic fluorine control system to permit precise control of the fluorine concentration within the laser chamber. Cleaned laser gas is extracted from the laser chamber and directed through an F2 sample cell prior to returning to the chamber through one of the chamber window housings. A UV light beam is directed through the F2 sample cell and the amount of absorption of the light is measured. In preferred embodiments the absorption is measured by detecting with a photo detector the amount of light which passes through the cell. The photo detector provides a feedback signal which is used by a laser controller to automatically control fluorine concentration in the chamber to within desired ranges. In another preferred embodiment an acoustic detector detects acoustic signals resulting from absorbed light pulses. This invention provides a substantially real time measurement of fluorine concentration.

    摘要翻译： 具有实时氟监测器和自动氟控制系统的准分子激光系统，以允许精确控制激光室内的氟浓度。 清洁的激光气体在通过其中一个室窗外壳返回到室之前从激光室中提取并引导通过F2样品池。 UV光束被引导通过F2样品池，并测量光的吸收量。 在优选实施例中，通过用光电检测器检测穿过电池的光量来测量吸收。 光电检测器提供反馈信号，该信号由激光控制器用于将腔室中的氟浓度自动控制在所需范围内。 在另一优选实施例中，声检测器检测由吸收的光脉冲产生的声信号。 本发明提供氟浓度的实质实时测量。