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    Energy efficient lithography laser
    3.
    发明授权
    Energy efficient lithography laser 失效
    节能光刻激光

    公开(公告)号：US06320892B1

    公开(公告)日：2001-11-20

    申请号：US09420297

    申请日：1999-10-18

    申请人： Gamaralalage G. Padmabandu ,  Palash P. Das ,  Tom A. Watson ,  Paolo Zambon

    发明人： Gamaralalage G. Padmabandu ,  Palash P. Das ,  Tom A. Watson ,  Paolo Zambon

    IPC分类号： H01S3223

    CPC分类号： G03F7/70025 ,  G03F7/70041 ,  G03F7/70358 ,  G03F7/70558 ,  G03F7/70575 ,  H01S3/036 ,  H01S3/134 ,  H01S3/225 ,  H01S3/2251 ,  H01S3/2256

    摘要： An excimer laser system with an automatic fluorine control system to permit precise control of the fluorine concentration within an F2 “sweet spot” in a gas discharge laser chamber. This is done with a computer control system which monitors laser parameters, determines &Dgr;E/&Dgr;V, the change of pulse energy with voltage, and automatically and precisely controls the fluorine concentration based on &Dgr;E/&Dgr;V without the need to actually measure the fluorine concentration. The present invention is especially useful in lithography environments in which photo resist having a wide range of sensitivity are used. The present invention permits operation of the laser at substantially maximum efficiency over a wide range of pulse energy outputs.

    摘要翻译： 一种具有自动氟控制系统的准分子激光系统，用于在气体放电激光室中精确控制F2“甜点”内的氟浓度。 这是通过电脑控制系统进行的，该系统监视激光参数，确定DELTAE / DELTAV，脉冲能量随电压的变化，并且可以根据DELTAE / DELTAV自动精确控制氟浓度，而无需实际测量氟浓度。 本发明在使用具有宽灵敏度范围的光刻胶的光刻环境中特别有用。 本发明允许激光器在宽范围的脉冲能量输出上以基本最大的效率进行操作。

    Pulse power generating circuit with energy recovery
    5.
    发明授权
    Pulse power generating circuit with energy recovery 失效
    具有能量回收的脉冲发电电路

    公开(公告)号：US5729562A

    公开(公告)日：1998-03-17

    申请号：US739873

    申请日：1996-10-31

    申请人： Daniel L. Birx ,  Palash P. Das ,  Igor V. Fomenkov ,  William N. Partlo ,  Tom A. Watson

    发明人： Daniel L. Birx ,  Palash P. Das ,  Igor V. Fomenkov ,  William N. Partlo ,  Tom A. Watson

    IPC分类号： H01S3/00 ,  H01S3/097 ,  H01S3/225 ,  H02M9/04 ,  H03K3/57 ,  H03K17/00 ,  H03K17/80 ,  H05H1/06

    CPC分类号： H05H1/06 ,  H01S3/097 ,  H03K17/80 ,  H03K3/57 ,  H01S3/225 ,  H03K2217/0036

    摘要： A high voltage pulse power generating circuit capable of providing energy recovery is disclosed. The energy efficient pulse generating circuit source comprises a high voltage charge storing element which is periodically discharged into a compressor circuit. An energy recovery circuit coupled to the compressor circuit reverses the polarity of energy dissipated by the pulse power generating circuit and transfers the waste energy back to the power source. In a preferred embodiment, the pulse power generating circuit of the present invention utilizes an SCR switch for periodically discharging the charge storing element. This embodiment of the present invention provides pulses consistently and will not provide even a single missed pulse.

    摘要翻译： 公开了一种能够提供能量回收的高压脉冲发生电路。 能量效率脉冲发生电路源包括周期性地排放到压缩机电路中的高电压电荷存储元件。 耦合到压缩机电路的能量恢复电路反转由脉冲发电电路消耗的能量的极性，并将废能转移回电源。 在优选实施例中，本发明的脉冲发生电路利用SCR开关来周期性地对电荷存储元件进行放电。 本发明的该实施例一致地提供脉冲，并且甚至不会提供单个错过的脉冲。

    Fluorine control system with fluorine monitor
    6.
    发明授权
    Fluorine control system with fluorine monitor 有权
    氟监控系统

    公开(公告)号：US06240117B1

    公开(公告)日：2001-05-29

    申请号：US09191446

    申请日：1998-11-12

    申请人： Mengxiong Gong ,  Tom A. Watson ,  Palash P. Das ,  Richard L. Sandstrom ,  Thomas P. Duffey

    发明人： Mengxiong Gong ,  Tom A. Watson ,  Palash P. Das ,  Richard L. Sandstrom ,  Thomas P. Duffey

    IPC分类号： H01S3223

    CPC分类号： G03F7/70558 ,  G03F7/70575 ,  H01S3/036 ,  H01S3/225

    摘要： An excimer laser system with a real time fluorine monitor and an automatic fluorine control system to permit precise control of the fluorine concentration within the laser chamber. Cleaned laser gas is extracted from the laser chamber and directed through an F2 sample cell prior to returning to the chamber through one of the chamber window housings. A UV light beam is directed through the F2 sample cell and the amount of absorption of the light is measured. In preferred embodiments the absorption is measured by detecting with a photo detector the amount of light which passes through the cell. The photo detector provides a feedback signal which is used by a laser controller to automatically control fluorine concentration in the chamber to within desired ranges. In another preferred embodiment an acoustic detector detects acoustic signals resulting from absorbed light pulses. This invention provides a substantially real time measurement of fluorine concentration.

    摘要翻译： 具有实时氟监测器和自动氟控制系统的准分子激光系统，以允许精确控制激光室内的氟浓度。 清洁的激光气体在通过其中一个室窗外壳返回到室之前从激光室中提取并引导通过F2样品池。 UV光束被引导通过F2样品池，并测量光的吸收量。 在优选实施例中，通过用光电检测器检测穿过电池的光量来测量吸收。 光电检测器提供反馈信号，该信号由激光控制器用于将腔室中的氟浓度自动控制在所需范围内。 在另一优选实施例中，声检测器检测由吸收的光脉冲产生的声信号。 本发明提供氟浓度的实质实时测量。

    Laser having improved beam quality and reduced operating cost
    8.
    发明授权
    Laser having improved beam quality and reduced operating cost 失效
    激光器具有改善的光束质量和降低的操作成本

    公开(公告)号：US5748656A

    公开(公告)日：1998-05-05

    申请号：US583302

    申请日：1996-01-05

    申请人： Tom A. Watson ,  William N. Partlo ,  Donald G. Larson ,  Igor V. Fomenkov ,  Anthony J. de Ruyter ,  Palash P. Das

    发明人： Tom A. Watson ,  William N. Partlo ,  Donald G. Larson ,  Igor V. Fomenkov ,  Anthony J. de Ruyter ,  Palash P. Das

    IPC分类号： H01S3/03 ,  H01S3/036 ,  H01S3/04 ,  H01S3/041 ,  H01S3/225 ,  H01S3/045

    CPC分类号： H01S3/036 ,  H01S3/04 ,  H01S3/041 ,  F28D2021/0077 ,  H01S3/225

    摘要： Disclosed is a laser useful in, e.g., photolithography or medical surgery. In one embodiment, the laser comprises a discharge chamber and heat-generating electronics that are enclosed in a baffled enclosure that requires less cooling air to reliably cool the components in the enclosure than previous unbaffled enclosures. A method of reducing the amount of conditioned air is also provided. In a further embodiment, the laser has a heat-exchange system that acts quickly in response to changes in laser gas temperature by adjusting a flow-proportioning valve regulating water flow through a heat exchanger, thereby providing a continuously variable rate of heat exchange through the heat exchanger to maintain the lasing gas temperature constant. Methods of providing a laser beam and of improving the uniformity of a laser beam are disclosed, as are photolithography methods utilizing a laser and method of this invention.

    摘要翻译： 公开了一种可用于例如光刻或医疗手术中的激光。 在一个实施例中，激光器包括放电室和发热电子器件，其封闭在挡板外壳中，其需要较少的冷却空气以可靠地冷却外壳中的部件比先前的未封闭的外壳。 还提供了减少调节空气量的方法。 在另一个实施例中，激光器具有热交换系统，其响应于激光气体温度的变化而快速作用，通过调节调节通过热交换器的水流的流量比例阀，由此通过所述热交换系统提供连续可变的热交换速率 热交换器保持激光温度恒定。 公开了提供激光束并提高激光束的均匀性的方法，以及利用激光的光刻方法和本发明的方法。

    Alignment of laser resonator
    10.
    发明授权
    Alignment of laser resonator 失效
    激光谐振器的对准

    公开(公告)号：US5812584A

    公开(公告)日：1998-09-22

    申请号：US689865

    申请日：1996-08-15

    申请人： Tom A. Watson ,  Peter J. Bailey ,  Philip J. Marusek

    发明人： Tom A. Watson ,  Peter J. Bailey ,  Philip J. Marusek

    IPC分类号： H01S3/02 ,  H01S3/08 ,  H01S3/086

    CPC分类号： H01S3/086 ,  H01S3/08081 ,  H01S3/025

    摘要： A method for aligning reflective surfaces in an unstable laser resonator is provided herein. By providing the outwardly facing side of the front mirror of the resonator with a reflective positioning surface (46) having an optical axis (80) coincident with the optical axis (82) of the front mirror (44), alignment procedures are greatly simplified. The alignment method comprises the steps of fabricating a support surface having a support plate (42) and a front reflective surface (44) on its inner surface, the front reflective surface having a primary optical axis (82). A positioning reflective surface (46) is affixed to an outer surface of the support plate, the positioning reflective surface having a secondary optical axis (80) coincident with the primary optical axis. The support plate also has means for securing the support surface to the laser resonator. The method also comprises positioning a laser emitter in a predetermined orientation with the laser resonator and placing a rear reflective surface in a substantially perpendicular orientation to the laser emitter. The laser emitter transmits a laser beam, and the rear reflective surface is aligned such that the laser beam is reflected off the rear reflective surface and back upon itself. The method also comprises securing the support surface to the laser resonator and applying the laser beam from the laser emitter to the positioning reflective surface. Finally, the resonator is adjusted such that the laser beam is reflected off the positioning reflective surface back upon itself, providing alignment of both laser reflective surfaces.

    摘要翻译： 本文提供了一种用于对准不稳定激光谐振器中的反射表面的方法。 通过提供具有与前反射镜（44）的光轴（82）重合的光轴（80）的反射定位表面（46）的谐振器的前反射镜的朝外侧，对准过程被大大简化。 对准方法包括以下步骤：在其内表面上制造具有支撑板（42）和前反射表面（44）的支撑表面，所述前反射表面具有主光轴（82）。 定位反射表面（46）固定到支撑板的外表面，定位反射表面具有与主光轴重合的次光轴（80）。 支撑板还具有用于将支撑表面固定到激光谐振器的装置。 该方法还包括将激光发射器与激光谐振器定位成预定取向，并将后反射表面放置在与激光发射器基本垂直的方向上。 激光发射器传输激光束，并且后反射表面对准，使得激光束从后反射表面反射并且背靠自身。 该方法还包括将支撑表面固定到激光谐振器并将来自激光发射器的激光束施加到定位反射表面。 最后，谐振器被调整成使得激光束从定位反射表面反射回自身，从而提供两个激光反射表面的对准。