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    CO2 laser output power control during warm-up
    1.
    发明授权
    CO2 laser output power control during warm-up 失效
    预热期间CO2激光输出功率控制

    公开(公告)号：US08116346B2

    公开(公告)日：2012-02-14

    申请号：US12752266

    申请日：2010-04-01

    申请人： Gongxue Hua ,  Lanny Laughman

    发明人： Gongxue Hua ,  Lanny Laughman

    IPC分类号： H01S3/22

    CPC分类号： H01S3/134 ,  H01S3/0315 ,  H01S3/0401 ,  H01S3/0407 ,  H01S3/041 ,  H01S3/09702 ,  H01S3/0971 ,  H01S3/2232

    摘要： A CO2 gas discharge laser includes a housing enclosing spaced-apart electrodes and a lasing gas. A laser resonator extends between the spaced-apart electrodes. An RF power supply provides RF power for creating a discharge in the lasing gas, causing laser radiation to be delivered by the laser resonator. The power of the output radiation is directly dependent on the RF power provided to the electrodes and inversely dependent of the temperature of the gas discharge. A signal representative of the discharge-temperature is used to adjust the RF power supplied to the electrodes such that the power of the output radiation is about constant.

    摘要翻译： CO 2气体放电激光器包括封闭间隔开的电极和激光气体的壳体。 激光谐振器在间隔开的电极之间延伸。 RF电源提供RF功率，用于在激光气体中产生放电，使激光辐射由激光谐振器输送。 输出辐射的功率直接取决于提供给电极的RF功率，并且与气体放电的温度成反比。 使用表示放电温度的信号来调节提供给电极的RF功率，使得输出辐射的功率大约恒定。

    Molecular fluorine laser system
    3.
    发明授权
    Molecular fluorine laser system 失效
    分子氟激光系统

    公开(公告)号：US06690703B1

    公开(公告)日：2004-02-10

    申请号：US10211971

    申请日：2002-08-02

    申请人： Klaus Wolfgang Vogler ,  Sergei V. Govorkov ,  Gongxue Hua ,  Frank Voss ,  Elko Bergmann

    发明人： Klaus Wolfgang Vogler ,  Sergei V. Govorkov ,  Gongxue Hua ,  Frank Voss ,  Elko Bergmann

    IPC分类号： H01S3225

    CPC分类号： H01S3/225 ,  H01S3/08 ,  H01S3/2308 ,  H01S3/2366

    摘要： A molecular fluorine laser includes a discharge chamber filled with a gas mixture including molecular fluorine and a buffer gas and not including a laser active rare gas, multiple electrodes within the discharge chamber defining a discharge region therebetween connected to a pulsed discharge circuit for applying discharge pulses to the electrodes for energizing the gas mixture, and a resonator including the discharge chamber for generating an oscillator laser beam at a wavelength around 157 nm and a bandwidth of less than 0.6 pm. The laser further includes a power amplifier for increasing the energy of the attenuated oscillator laser beam to a second predetermined energy for lithographic processing, a line-narrowing unit for reducing the bandwidth, a low intensity suppressor module to suppress the weaker lines of the F2-laser, and a synchronization unit to synchronize the oscillator and amplifier.

    摘要翻译： 分子氟激光器包括：填充有分子氟和缓冲气体并且不包括激光活性稀有气体的气体混合物的放电室，放电室内的多个电极限定其间连接到脉冲放电电路的放电区域，用于施加放电脉冲 到用于激励气体混合物的电极，以及包括用于产生波长约157nm和带宽小于0.6μm的振荡器激光束的放电室的谐振器。 激光器还包括用于将衰减振荡器激光束的能量增加到用于光刻处理的第二预定能量的功率放大器，用于减小带宽的线窄变换单元，用于抑制F2- 激光器和同步单元来同步振荡器和放大器。

    PARTICLE DAMAGE PROTECTION FOR HIGH POWER CO2 SLAB LASER MIRRORS
    5.
    发明申请
    PARTICLE DAMAGE PROTECTION FOR HIGH POWER CO2 SLAB LASER MIRRORS 有权
    大功率CO2 SLAS激光镜的颗粒损伤保护

    公开(公告)号：US20100172386A1

    公开(公告)日：2010-07-08

    申请号：US12487730

    申请日：2009-06-19

    申请人： Gongxue Hua

    发明人： Gongxue Hua

    IPC分类号： H01S3/00 ,  H01S3/22

    CPC分类号： H01S3/0346 ,  H01S3/0315 ,  H01S3/038 ,  H01S3/0401 ,  H01S3/09713 ,  H01S3/2232

    摘要： A CO2 gas discharge laser includes elongated planar live and ground electrodes vertically spaced and electrically insulated from each. The electrodes are spaced apart by ceramic spacer strips arranged along the edges of the electrodes. An auxiliary electrode is located at each end of the live electrode, co-planar with the live electrode, longitudinally spaced part from the live electrode vertically spaced apart from, but electrically connected to, the ground electrode. The auxiliary electrode has two raised portions spaced apart by a distance less than the distance between inside edges of the ceramic strips. The raised portions of the auxiliary electrode prevent erosion of the ceramic strips by laser radiation generated in the resonator when the laser is operating.

    摘要翻译： 二氧化碳气体放电激光器包括垂直间隔开并与之电隔离的细长平面带电和接地电极。 电极通过沿着电极边缘布置的陶瓷隔离片隔开。 辅助电极位于活电极的每个端部，与带电电极共平面，与从接地电极垂直间隔开但电连接的带电电极的纵向间隔开的部分。 辅助电极具有间隔开距离小于陶瓷条的内边缘之间的距离的两个凸起部分。 当激光器工作时，辅助电极的凸起部分防止在谐振器中产生的激光辐射对陶瓷带的侵蚀。

    RF shielded, series inductor, high RF power impedance matching interconnector for CO2 slab laser
    6.
    发明授权
    RF shielded, series inductor, high RF power impedance matching interconnector for CO2 slab laser 有权
    RF屏蔽，串联电感，CO2射频功率阻抗匹配互连器，用于CO2平板激光器

    公开(公告)号：US07540779B2

    公开(公告)日：2009-06-02

    申请号：US12051232

    申请日：2008-03-19

    申请人： Adrian Papanide ,  Frederick W. Hauer ,  Leon A. Newman ,  Thomas V. Hennessey, Jr. ,  Christian J. Shackleton ,  Joel Fontanella ,  Gongxue Hua

    发明人： Adrian Papanide ,  Frederick W. Hauer ,  Leon A. Newman ,  Thomas V. Hennessey, Jr. ,  Christian J. Shackleton ,  Joel Fontanella ,  Gongxue Hua

    IPC分类号： H01R13/66

    CPC分类号： H01S3/041 ,  H01R24/44 ,  H01R2103/00 ,  H01S3/02 ,  H01S3/032 ,  H01S3/038 ,  H01S3/04 ,  H01S3/0407 ,  H01S3/09702 ,  H01S3/09705 ,  H01S3/0971 ,  H01S3/2232 ,  H03H7/38

    摘要： A RF shielded, series inductor, high power impedance matching network interconnector is provided for connecting an RF power supply to electrodes contained in the shielded, hermetically sealed laser tube housing of a slab laser system. The impedance matching interconnector comprises a short length of co-axial conductor and an impedance matching network that includes two L shaped networks. The inner conductor of the co-axial conductor is connected between the power supply output and the impedance matching network. The outer conductor of the co-axial conductor is grounded. The co-axial conductor has an impedance characteristic to match the power supply output impedance. The first L-shaped network includes a first inductor having a first end connected to the inner conductor of the co-axial conductor and a first capacitor connected to the second end of the first inductor and a second plate connected to ground. The second L shaped network includes a second inductor having a first end connected to the common connection between the second end of the first inductor and the first plate of the first capacitor and a second capacitor having a first plate connected to the second end of the second inductor and a second plate connected to ground. The common connection between the second end of the second inductor and the first plate of the second capacitor is connected through the shielded, hermetically sealed laser tube housing to the electrodes of the slab laser system. The two L-shaped networks may be implemented in a “single capacitor” configuration for lower power applications or in a “multi-capacitor” configuration for higher power applications.

    摘要翻译： 提供RF屏蔽串联电感器，高功率阻抗匹配网络互连器，用于将RF电源连接到平板激光系统的屏蔽密封激光管外壳中包含的电极。 阻抗匹配互连器包括短长度的同轴导体和包括两个L形网络的阻抗匹配网络。 同轴导体的内导体连接在电源输出和阻抗匹配网络之间。 同轴导体的外导体接地。 同轴导体具有匹配电源输出阻抗的阻抗特性。 第一L形网络包括第一电感器，其具有连接到同轴导体的内导体的第一端和连接到第一电感器的第二端的第一电容器和连接到地的第二板。 第二L形网络包括第二电感器，第二电感器具有连接到第一电感器的第二端和第一电容器的第一板之间的公共连接的第一端和第二电容器，第二电容器具有连接到第二电感器的第二端的第一板 电感器和连接到地的第二板。 第二电感器的第二端和第二电容器的第一板之间的公共连接通过屏蔽密封的激光管外壳连接到板式激光系统的电极。 两个L形网络可以用于较低功率应用的“单电容器”配置或用于较高功率应用的“多电容器”配置中。

    Method and apparatus for measuring amplified stimulated emission in the output of a master oscillator power amplifier system
    9.
    发明授权
    Method and apparatus for measuring amplified stimulated emission in the output of a master oscillator power amplifier system 失效
    用于测量主振荡器功率放大器系统的输出中的放大的受激发射的方法和装置

    公开(公告)号：US07088450B2

    公开(公告)日：2006-08-08

    申请号：US10806847

    申请日：2004-03-23

    申请人： Sergei V. Govorkov ,  Tamas Nagy ,  Gongxue Hua

    发明人： Sergei V. Govorkov ,  Tamas Nagy ,  Gongxue Hua

    IPC分类号： G01B9/02

    CPC分类号： G01J9/0246 ,  G01J1/4257

    摘要： A method for measuring amplified spontaneous emission (ASE) content in a beam of laser radiation emitted by a laser master oscillator power-amplifier system comprises directing the beam of light into a two-beam interferometer having unequal beam path lengths. The two beams interfering in the interferometer have equal amplitude and form a pattern of interference fringes. The beam-path difference is arranged to be greater than the coherence length of the ASE so that the ASE content of the beam does not form interference fringes but provides a background level of light in the interference pattern. This enables the ASE content of the beam to be determined from measurements of the maximum intensity of a bright fringe and the minimum energy of a dark fringe in the interference pattern.

    摘要翻译： 用于测量由激光主振荡器功率放大器系统发射的激光束中的放大的自发发射（ASE）含量的方法包括将光束引导到具有不等的光束路径长度的双光束干涉仪。 干涉仪干涉的两束光束具有相等的幅度并形成干涉条纹图案。 光束路径差被设置为大于ASE的相干长度，使得光束的ASE内容不形成干涉条纹，而是提供干涉图案中的背景光。 这使得能够通过亮度条纹的最大强度和干涉图案中的暗条纹的最小能量的测量来确定光束的ASE内容。

    Reduced-maintenance excimer laser with oil-free solid state pulser
    10.
    发明授权
    Reduced-maintenance excimer laser with oil-free solid state pulser 失效
    使用无油固态脉冲发生器的减少维护准分子激光器

    公开(公告)号：US06999492B2

    公开(公告)日：2006-02-14

    申请号：US10713583

    申请日：2003-11-14

    申请人： Hubertus von Bergmann ,  Spencer Merz ,  Gongxue Hua ,  Sergei V. Govorkov

    发明人： Hubertus von Bergmann ,  Spencer Merz ,  Gongxue Hua ,  Sergei V. Govorkov

    IPC分类号： H01S3/097

    CPC分类号： H01S3/097 ,  H01S3/225

    摘要： An oil-free pulser design can be used to produce an excimer or molecular fluorine laser system that is lighter, cheaper to produce, and simpler than existing systems. Such designs allow a relatively low DC voltage to be applied to a main transformer, allowing the pulser to be run without oil cooling. This relatively low voltage can be increased to the necessary voltage level, such as on the order to 12 kV to 15 kV, needed to drive the laser system. This transference can be accomplished using standard components, such as a pair of capacitor elements that are pulse-charged in parallel, but can be discharged in series following a reversal of charge on one of the capacitor elements.

    摘要翻译： 无油脉冲发生器设计可用于生产更轻，生产成本更低，比现有系统简单的准分子或分子氟激光系统。 这样的设计允许将相对较低的DC电压施加到主变压器，允许脉冲发生器在没有油冷却的情况下运行。 该相对低的电压可以增加到驱动激光系统所需的所需电压水平，例如达到12kV至15kV。 可以使用诸如并联脉冲充电的一对电容器元件之类的标准组件来实现该转移，但是可以在其中一个电容器元件上的电荷反转之后串联放电。