公开(公告)号：US20180019096A1

公开(公告)日：2018-01-18

申请号：US15544958

申请日：2016-01-21

Applicant: Hitachi High-Technologies Corporation

Inventor： Takashi ICHIMURA ,  Hiroyuki ITO ,  Shinichi KATO ,  Hisaya MURAKOSHI ,  Tadashi FUJIEDA ,  Tatsuya MIYAKE ,  Takashi NAITOU ,  Takuya AOYAGI ,  Kenji TANIMOTO

IPC: H01J37/16 ,  H01J37/12 ,  C23D5/02

CPC classification number: H01J37/16 ,  C23D5/02 ,  H01J9/18 ,  H01J37/065 ,  H01J37/12 ,  H01J37/147 ,  H01J37/3178

Abstract: The purpose of the present invention is to provide a charged particle beam device that exhibits high performance due to the use of vanadium glass coatings, and to provide a method of manufacturing a component for a charged particle beam device. Specifically provided is a charged particle beam device using a vacuum component characterized by comprising a metal container, the interior space of which is evacuated to form a high vacuum, and coating layers formed on the surface on the interior space-side of the metal container, wherein the coating layers are vanadium-containing glass, which is to say an amorphous substance. Coating vanadium glass onto walls of a space where it is desirable to form a high vacuum, for example walls in the vicinity of an electron source, reduces gas discharge in the vicinity of the electron source, and the getter effect of the coating layer induces localized evacuation and enables the formation of an extremely high vacuum, even in spaces having a complex structure, without providing a large high-vacuum pump.

公开(公告)号：US20160233049A1

公开(公告)日：2016-08-11

申请号：US15022662

申请日：2014-05-02

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Yuko SASAKI ,  Hiroyuki ITO

IPC: H01J37/153 ,  H01J37/12

CPC classification number: H01J37/153 ,  H01J37/12 ,  H01J37/141 ,  H01J37/147 ,  H01J2237/103 ,  H01J2237/1532 ,  H01J2237/1534

Abstract: Provided is a multifunctional charged particle beam device capable of inclining a beam with little aberration. The aberration is corrected by forming a local divergent field with a multipole, parallel current lines, or the like, matching the beam axis with the local divergent field via a conventional rotationally symmetric lens, deflector or astigmatism corrector, and counteracting an aberration occurring from another rotationally symmetric convex lens field.

Abstract translation: 提供了一种能够使几乎没有像差的光束倾斜的多功能带电粒子束装置。 通过用多极，平行电流线等形成局部发散场，通过常规旋转对称透镜，偏转器或像散校正器将光束轴与局部发散场匹配并抵消从另一个发生的像差来校正像差 旋转对称凸透镜场。

公开(公告)号：US20150102221A1

公开(公告)日：2015-04-16

申请号：US14573965

申请日：2014-12-17

Applicant: Hitachi High-Technologies Corporation

Inventor： Yuko SASAKI ,  Hiroyuki ITO

IPC: H01J37/05 ,  H01J37/26 ,  H01J37/28

CPC classification number: H01J37/05 ,  H01J37/244 ,  H01J37/26 ,  H01J37/263 ,  H01J37/28 ,  H01J2237/057 ,  H01J2237/2446 ,  H01J2237/2448 ,  H01J2237/24485 ,  H01J2237/2801 ,  H01J2237/2806

Abstract: Provided is a charged particle beam device to improve energy solution of its energy filter. In one embodiment, a charged particle beam device includes a deflector to deflect charged particles emitted from a sample to an energy filter, and a change in brightness value with the change of voltage applied to the energy filter is found for each of a plurality of deflection conditions for the deflector, and a deflection condition such that a change in the brightness value satisfies a predetermined condition is set as the deflection condition for the deflector.

Abstract translation: 提供了一种用于改善其能量过滤器的能量解决方案的带电粒子束装置。 在一个实施例中，带电粒子束装置包括偏转器，用于将从样品发射的带电粒子偏转到能量滤波器，并且针对多个偏转中的每一个发现随施加到能量滤波器的电压变化而引起的亮度值的变化 偏转器的条件以及使得亮度值的变化满足预定条件的偏转条件被设定为偏转器的偏转状态。