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    Apparatus of plural charged-particle beams
    1.
    发明授权
    Apparatus of plural charged-particle beams 有权

    公开(公告)号：US10109456B2

    公开(公告)日：2018-10-23

    申请号：US15633639

    申请日：2017-06-26

    Applicant: Hermes Microvision, Inc.

    Inventor： Weiming Ren ,  Shuai Li ,  Xuedong Liu ,  Zhongwei Chen

    IPC: H01J37/28 ,  H01J37/147 ,  H01J37/12

    Abstract: A multi-beam apparatus for observing a sample with high resolution and high throughput is proposed. In the apparatus, a source-conversion unit changes a single electron source into a virtual multi-source array, a primary projection imaging system projects the array to form plural probe spots on the sample, and a condenser lens adjusts the currents of the plural probe spots. In the source-conversion unit, the image-forming means is on the upstream of the beamlet-limit means, and thereby generating less scattered electrons. The image-forming means not only forms the virtual multi-source array, but also compensates the off-axis aberrations of the plurality of probe spots.

    Energy Filter for Charged Particle Beam Apparatus
    7.
    发明申请
    Energy Filter for Charged Particle Beam Apparatus 有权
    带电粒子束能量滤波器

    公开(公告)号：US20160035533A1

    公开(公告)日：2016-02-04

    申请号：US14800098

    申请日：2015-07-15

    Applicant: Hermes Microvision Inc.

    Inventor： Weiming Ren ,  Joe Wang ,  Shuai Li ,  Zhongwei Chen

    IPC: H01J37/05 ,  H01J37/28 ,  H01J37/10

    CPC classification number: H01J37/05 ,  H01J37/10 ,  H01J37/12 ,  H01J37/244 ,  H01J37/263 ,  H01J37/28 ,  H01J2237/057 ,  H01J2237/12 ,  H01J2237/14

    Abstract: This invention provides two methods for improving performance of an energy-discrimination detection device with an energy filter of reflective type for a charged particle beam. The first method employs a beam-adjusting means to improve the energy-discrimination power, and the second method uses an electron-multiplication means to enhance the image signal without noise raise. A LVSEM with such an improved energy-discrimination detection device can provide variant high-contrast images of interested features on a specimen surface for multiple application purposes.

    Abstract translation: 本发明提供了两种用于利用带电粒子束的反射型能量滤波器来改善能量鉴别检测装置的性能的方法。 第一种方法采用光束调节装置来提高能量鉴别能力，第二种方法使用电子倍增装置来增强图像信号而没有噪声提高。 具有这种改进的能量鉴别检测装置的LVSEM可以在样本表面上提供用于多种应用目的的感兴趣特征的变体高对比度图像。

    Charged particle source
    8.
    发明授权
    Charged particle source 有权

    公开(公告)号：US10468227B2

    公开(公告)日：2019-11-05

    申请号：US16042871

    申请日：2018-07-23

    Applicant: Hermes Microvision, Inc.

    Inventor： Shuai Li

    IPC: H01J37/143 ,  H01J37/28 ,  H01J3/20 ,  H01J37/063 ,  H01J37/065 ,  H01J37/14 ,  H01J37/09

    Abstract: This invention provides a charged particle source, which comprises an emitter and means of generating a magnetic field distribution. The magnetic field distribution is minimum, about zero, or preferred zero at the tip of the emitter, and along the optical axis is maximum away from the tip immediately. In a preferred embodiment, the magnetic field distribution is provided by dual magnetic lens which provides an anti-symmetric magnetic field at the tip, such that magnetic field at the tip is zero.

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