公开(公告)号：US06308567B1

公开(公告)日：2001-10-30

申请号：US09458954

申请日：1999-12-10

申请人： Hirofumi Higuchi ,  Nobuyuki Ohya ,  Tsuyoshi Fukada

发明人： Hirofumi Higuchi ,  Nobuyuki Ohya ,  Tsuyoshi Fukada

IPC分类号： G01P904

CPC分类号： G01C19/56

摘要： A compact angular velocity sensor, which can improve an S/N (signal/noise) ratio. An angular velocity sensor includes an SOI substrate, four oscillatory masses movably supported to the SOI substrate, and four detection electrodes provided outer side of the oscillatory masses for detecting displacements of the oscillatory masses. The oscillatory masses are arranged point-symmetry with respect to a predetermined point K in a flat plane parallel to the SOI substrate. Each of the four oscillatory masses adjacent each other is oscillated in reverse phase in a circumstantial direction about the predetermined point K along the flat plane. When an angular velocity &OHgr; is generated about the predetermined point K, detection weights of the oscillatory masses are displaced along a direction perpendicular to oscillation direction in the flat plane. Capacitance changes between the detection weights and the detection electrodes are processed in a circuit portion so as to output angular velocity detection signal S1 due to Corioli's force with canceling external acceleration and centrifugal force acted to the detection weights of the oscillatory masses.

摘要翻译： 一个紧凑的角速度传感器，可以提高S / N（信号/噪声）比。 角速度传感器包括SOI基板，可移动地支撑到SOI基板的四个振荡块，以及设置在振荡块的外侧的四个检测电极，用于检测振荡质量的位移。 相对于与SOI衬底平行的平面中的预定点K，振荡质量被布置成点对称。 在彼此相邻的四个振荡质量块中的每一个沿着平面在围绕预定点K的环境方向上以相反方向振荡。 当围绕预定点K产生角速度OMEGA时，振荡质量的检测权重沿平面内与振荡方向垂直的方向移位。 在电路部分处理检测权重和检测电极之间的电容变化，以便通过抵消外部加速度和科氏力的角度来输出角速度检测信号S1，该离心力作用于振荡质量的检测重量。

公开(公告)号：US6151966A

公开(公告)日：2000-11-28

申请号：US304849

申请日：1999-05-05

申请人： Minekazu Sakai ,  Yukihiro Takeuchi ,  Kazuhiko Kano ,  Seiji Fujino ,  Tsuyoshi Fukada ,  Hiroshige Sugito ,  Minoru Murata ,  Hiroshi Muto ,  Hirofumi Higuchi ,  Kenichi Ao

发明人： Minekazu Sakai ,  Yukihiro Takeuchi ,  Kazuhiko Kano ,  Seiji Fujino ,  Tsuyoshi Fukada ,  Hiroshige Sugito ,  Minoru Murata ,  Hiroshi Muto ,  Hirofumi Higuchi ,  Kenichi Ao

IPC分类号： G01P15/08 ,  G01P15/125 ,  H01L29/84 ,  G01L1/00

CPC分类号： G01P15/125 ,  G01P15/0802 ,  G01P2015/0814

摘要： A semiconductor accelerometer device is formed on an SOI substrate by micro-machining. A movable unit is supported at both ends, and a weight portion is movable in response to acceleration exerted in the detection direction. A movable electrode is formed in a comb shape integrally with the weight portion. A pair of fixed electrodes in a comb shape are cantilevered and interleaved with the movable electrode to face the movable electrode. A plurality of through holes is provided in the electrodes so that the electrodes have Rahmen structure which is a series of rectangular frames. This structure reduces the weight of each electrode while increasing the strength against twist force. The electrodes are less likely from breaking in response to an acceleration exerted in a direction perpendicular to the normal detection direction because of reduced weight.

摘要翻译： 通过微加工在SOI衬底上形成半导体加速度计装置。 可移动单元被支撑在两端，并且重量部分可响应于沿检测方向施加的加速度而移动。 可动电极与配重部一体地形成为梳形。 一对梳状的固定电极是悬臂式的，与可动电极交错而面对可动电极。 多个通孔设置在电极中，使得电极具有Rahmen结构，其是一系列矩形框架。 这种结构减小了每个电极的重量，同时增加了抗扭力的强度。 由于重量减轻，电极响应于垂直于正常检测方向的方向的加速度而不太可能破裂。

公开(公告)号：US06718824B2

公开(公告)日：2004-04-13

申请号：US10013508

申请日：2001-12-13

申请人： Takeshi Ito ,  Kazushi Asami ,  Tsuyoshi Fukada ,  Hirofumi Higuchi

发明人： Takeshi Ito ,  Kazushi Asami ,  Tsuyoshi Fukada ,  Hirofumi Higuchi

IPC分类号： G01P1500

CPC分类号： B81C1/00666 ,  B81B2201/025 ,  G01C19/5719 ,  G01L9/0042 ,  G01P15/0802 ,  G01P15/125 ,  G01P2015/0814 ,  G01P2015/0828

摘要： A semiconductor dynamic quantity sensor, for example, an acceleration sensor is formed on a SOI substrate having an activation layer and a supporting layer with an oxide film interposed therebetween. A structure for the sensor is formed in the activation layer. An opening is formed in the supporting layer and the oxide film to expose the structure. In this sensor, stress layer is formed in the activation layer at a side contacting the oxide film. The stress layer is removed at a region facing the opening to prevent the structure from cambering.

摘要翻译： 半导体动态量传感器例如加速度传感器形成在具有活化层的SOI衬底和具有氧化膜的支撑层之间。 在激活层中形成传感器的结构。 在支撑层和氧化物膜中形成开口以暴露结构。 在该传感器中，在与氧化膜接触的一侧的活化层中形成应力层。 在面向开口的区域处去除应力层以防止结构弯曲。

公开(公告)号：US20050054153A1

公开(公告)日：2005-03-10

申请号：US10936539

申请日：2004-09-09

申请人： Kazushi Asami ,  Junji Oohara ,  Hiroshi Muto ,  Kazuhiko Sugiura ,  Tsuyoshi Fukada ,  Yukihiro Takeuchi

发明人： Kazushi Asami ,  Junji Oohara ,  Hiroshi Muto ,  Kazuhiko Sugiura ,  Tsuyoshi Fukada ,  Yukihiro Takeuchi

IPC分类号： B81C1/00 ,  H01L21/306 ,  H01L29/80 ,  H05K3/06

CPC分类号： B81C1/00619 ,  B81C2201/0112

摘要： A method for manufacturing a semiconductor device having a movable portion includes the steps of: forming a trench on a semiconductor layer so that the trench reaches an insulation layer; and forming a movable portion by etching a sidewall of the trench so that the semiconductor layer is separated from the insulation layer. The steps of forming the trench and forming the movable portion are performed by a reactive ion etching method. The insulation layer disposed on the bottom of the trench is prevented from charging positively in the step of forming the trench. The insulation layer disposed on the bottom of the trench is charged positively in the step of forming the movable portion.

摘要翻译： 一种制造具有可移动部分的半导体器件的方法包括以下步骤：在半导体层上形成沟槽，使得沟槽到达绝缘层; 以及通过蚀刻沟槽的侧壁形成可动部分，使得半导体层与绝缘层分离。 通过反应离子蚀刻方法进行形成沟槽并形成可动部的步骤。 在形成沟槽的步骤中，防止设置在沟槽底部的绝缘层被正面地充电。 设置在沟槽底部的绝缘层在形成可移动部分的步骤中被正向地充电。

公开(公告)号：US06444543B2

公开(公告)日：2002-09-03

申请号：US09866709

申请日：2001-05-30

申请人： Minekazu Sakai ,  Hiroshige Sugito ,  Hiroshi Muto ,  Motoki Ito ,  Tsuyoshi Fukada

发明人： Minekazu Sakai ,  Hiroshige Sugito ,  Hiroshi Muto ,  Motoki Ito ,  Tsuyoshi Fukada

IPC分类号： H01L21301

CPC分类号： B81C1/00896 ,  G01P15/0802 ,  G01P15/125 ,  G01P2015/0814

摘要： Plural semiconductor chips such as acceleration sensor chips formed on the first surface of a substrate are separated into individual pieces by dicing the substrate from the second surface thereof. A groove surrounding each sensor chip, along which the sensor chip is diced out, is formed at the same time the sensor chip is formed on the first surface. Before dicing, a protecting sheet covering the first surface is pasted along the sidewalls and the bottom wall of the groove. The groove is made sufficiently wide to ensure that the protecting sheet is bent along the walls of the groove without leaving a space between the groove and the protecting sheet. Thus, dicing dusts generated in the dicing process are prevented from being scattered and entering the sensor chip.

摘要翻译： 通过从基板的第二表面切割基板，形成在基板的第一表面上的加速度传感器芯片的多个半导体芯片被分离成单独的部件。 在传感器芯片形成在第一表面上的同时形成围绕传感器芯片的每个传感器芯片周围的凹槽，该传感器芯片被切出。 在切割之前，覆盖第一表面的保护片沿着凹槽的侧壁和底壁粘贴。 所述凹槽被制成足够宽以确保保护片沿着凹槽的壁弯曲，而不会在凹槽和保护片之间留下空间。 因此，防止在切割工艺中产生的切割粉尘被散射并进入传感器芯片。

公开(公告)号：US5622901A

公开(公告)日：1997-04-22

申请号：US284292

申请日：1994-08-02

申请人： Tsuyoshi Fukada

发明人： Tsuyoshi Fukada

IPC分类号： G01L9/04 ,  G01L1/22 ,  G01L9/00 ,  G01L23/18 ,  H01L29/84 ,  H01L21/77

CPC分类号： G01L1/2262 ,  G01L1/2293 ,  G01L23/18 ,  G01L9/0055

摘要： In a semiconductor strain sensor, for example, using resistors of a polycrystalline semiconductor material such as polycrystalline silicon as strain gauges, the sum of the temperature coefficient of resistance (TCR) of the resistor and the temperature coefficient of strain sensitivity (TCK) is adjusted not by controlling the impurity carrier concentration but by controlling the resistivity, thereby an output fluctuation due to a change in the temperature can be suppressed.

摘要翻译： 在半导体应变传感器中，例如使用多晶硅等多晶半导体材料的电阻作为应变计，调整电阻器的温度系数（TCR）与应变灵敏度的温度系数（TCK）之和 不是通过控制杂质载流子浓度而是通过控制电阻率，从而可以抑制由于温度变化引起的输出波动。

公开(公告)号：US4671615A

公开(公告)日：1987-06-09

申请号：US688505

申请日：1985-01-03

申请人： Tsuyoshi Fukada ,  Yasutoshi Suzuki ,  Hiroshi Itoh ,  Shinya Ohmi ,  Kunihiko Hara

发明人： Tsuyoshi Fukada ,  Yasutoshi Suzuki ,  Hiroshi Itoh ,  Shinya Ohmi ,  Kunihiko Hara

IPC分类号： G02B5/08 ,  B60R1/04 ,  B60R1/08 ,  G02F1/13 ,  G02B17/00

CPC分类号： B60R1/088

摘要： A control apparatus for a dazzle-free reflection mirror of a vehicle is disclosed. The control apparatus is provided with a rear light sensor and a circuit for driving the reflection mirror into a dazzle-free condition in accordance with an intensity of a rear light detected by said rear light sensor when a light switch is turned on. The control apparatus is further provided with a winker manipulation detecting switch, a reverse position detecting switch and a steering wheel detecting switch for detecting a change in the moving direction of the vehicle. When one of them detects the change in the vehicle moving direction, the dazzle-free operation of the reflection mirror is disabled even if intensive light is incident to the reflection mirror from the rear of the vehicle.

摘要翻译： 公开了一种用于车辆的无眩光反射镜的控制装置。 控制装置设置有后光传感器和电路，用于当开关灯开启时，根据由所述后光传感器检测到的后光的强度将反射镜驱动到无眩光状态。 控制装置还设有方向指示操作检测开关，倒档位置检测开关和用于检测车辆移动方向变化的方向盘检测开关。 当其中一个检测到车辆移动方向的变化时，即使强光从车辆的后部入射到反射镜，反射镜的无眩光操作也被禁用。

公开(公告)号：US4623222A

公开(公告)日：1986-11-18

申请号：US593946

申请日：1984-03-27

申请人： Hiroshi Itoh ,  Shinya Ohmi ,  Yasutoshi Suzuki ,  Tsuyoshi Fukada ,  Kunihiko Hara

发明人： Hiroshi Itoh ,  Shinya Ohmi ,  Yasutoshi Suzuki ,  Tsuyoshi Fukada ,  Kunihiko Hara

IPC分类号： B60R1/08 ,  G02F1/133 ,  G02B17/00

CPC分类号： B60R1/088

摘要： A liquid crystal type dazzle-free reflection mirror arrangement which changes reflectivity of the incident light by way of changing the transmittivity of the incident light through a liquid crystal provided within a frame body is disclosed. A semitransparent mirror is positioned behind the liquid crystal and a photo sensor is positioned behind the semitransparent mirror. When the photo sensor detects that the intensity of the incident light passing through the semitransparent mirror, an alternating current electric field is applied to the liquid crystal which responsively decreases the transmittivity of the incident light. A heater for heating the liquid crystal is activated when a door of an automobile is opened and the temperature of the liquid crystal is low.

摘要翻译： 公开了一种通过改变入射光通过设置在框架体内的液晶的透射率来改变入射光的反射率的液晶型无眩光反射镜装置。 半透明镜位于液晶后面，光传感器位于半透明镜后面。 当光传感器检测到透过半透明反射镜的入射光的强度时，对液晶施加交流电场，从而响应地降低入射光的透射率。 当汽车的门打开并且液晶的温度低时，用于加热液晶的加热器被激活。

公开(公告)号：US20100005877A1

公开(公告)日：2010-01-14

申请号：US12458272

申请日：2009-07-07

申请人： Ryuichirou Abe ,  Tsuyoshi Fukada ,  Keisuke Suzui

发明人： Ryuichirou Abe ,  Tsuyoshi Fukada ,  Keisuke Suzui

IPC分类号： G01F1/68 ,  H01L21/30

CPC分类号： B81B7/0012 ,  B81B2201/0214 ,  G01F1/6845 ,  G01F1/692

摘要： A sensor includes: a silicon substrate having a hollow portion, which is arranged on a backside of the substrate; an insulation film disposed on a front side of the substrate and covering the hollow portion; a heater disposed on the insulation film, made of a semiconductor layer, and configured to generate heat; and an anti-stripping film for protecting the insulation film from being removed from the silicon substrate. The silicon substrate, the insulation film and the. semiconductor layer provide a SOI substrate. The hollow portion has a sidewall and a bottom. The anti-stripping film covers at least a boundary between the sidewall and the bottom of the hollow portion.

摘要翻译： 传感器包括：具有中空部分的硅衬底，其设置在衬底的背面; 绝缘膜，设置在所述基板的前侧并覆盖所述中空部; 设置在绝缘膜上的加热器，由半导体层制成，并且被配置为产生热量; 以及用于保护绝缘膜不被从硅衬底移除的防剥离膜。 硅衬底，绝缘膜和。 半导体层提供SOI衬底。 中空部分具有侧壁和底部。 防剥离膜至少覆盖中空部分的侧壁和底部之间的边界。

公开(公告)号：US20050216361A1

公开(公告)日：2005-09-29

申请号：US10951641

申请日：2004-09-29

申请人： Tsuyoshi Fukada

发明人： Tsuyoshi Fukada

IPC分类号： G06Q30/06 ,  G06Q50/00 ,  G06F17/60

CPC分类号： G06Q30/06 ,  G06Q30/0635

摘要： A business transaction processing system includes a server into which a purchasing information of a stockist, at a time when goods are supplied to a stockist from a plurality of suppliers, is inputted, and a supplier side terminal unit connected to the server through cable communication or wireless communication. The server is provided with a conversion unit for extracting purchasing data relating to an optional supplier of the suppliers from the purchasing information of the stockist and converting the extracted purchasing data into supply information of the optional supplier, and the supply information in the server is indicated on the supplier side terminal unit.

摘要翻译： 商业交易处理系统包括：服务器，其输入从多个供应商向库存商提供货物时的库存商的采购信息;以及通过有线通信连接到服务器的供应商侧终端单元， 无线通信。 服务器具有转换单元，用于从库存商的购买信息中提取与供应商的可选供应商有关的购买数据，并将所提取的采购数据转换为可选供应商的供应信息，并且指示服务器中的供应信息 在供应商侧终端单元。