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    Sample evaluation/process observation system and method
    1.
    发明授权
    Sample evaluation/process observation system and method 失效
    样本评估/过程观察系统和方法

    公开(公告)号：US5783830A

    公开(公告)日：1998-07-21

    申请号：US873788

    申请日：1997-06-12

    申请人： Hiroshi Hirose ,  Hidemi Koike ,  Shigeto Isakozawa ,  Yuji Sato ,  Mikio Ichihashi ,  Motohide Ukiana

    发明人： Hiroshi Hirose ,  Hidemi Koike ,  Shigeto Isakozawa ,  Yuji Sato ,  Mikio Ichihashi ,  Motohide Ukiana

    IPC分类号： H01J37/305 ,  H01J37/20

    CPC分类号： H01J37/3056 ,  H01J37/265 ,  H01J2237/20 ,  H01J2237/26

    摘要： A sample evaluation/process observation system includes a common sample stage which accommodates a plurality of samples to be processed. The common sample stage is provided with a processing/observing notch and also with a movement mechanism. The movement mechanism functions to sequentially move the plurality of samples to the notch to cause the samples to be exposed to a predetermined processing beam and observing beam. The system further includes a beam processing device in which the common sample stage can be mounted and which functions to irradiate the predetermined processing beam on the plurality of samples through the notch to thereby sequentially perform beam processing operation over the samples. The system further includes a beam observation device in which the common sample stage can be mounted and which functions to irradiate the predetermined observing beam on the plurality of samples through the notch to sequentially observe and evaluate shapes of the plurality of samples. A mark is formed on one sample by a focused ion beam device so that positioning of the mark realizes automatic processing of a part of the sample to be processed. Further, the common sample stage is used in a high-acceleration transmission electron microscope and a high-acceleration scanning electron microscope and focused ion beam device.

    摘要翻译： 样本评估/过程观察系统包括容纳多个待处理样本的公共样本阶段。 公共样品台具有处理/观察凹口，并且还具有移动机构。 移动机构用于将多个样本顺序地移动到凹口，以使样本暴露于预定的处理束和观察波束。 该系统还包括其中可以安装公共样本台的束处理装置，并且其功能是通过凹口对多个采样上的预定处理光束照射，从而顺序地对采样进行光束处理操作。 该系统还包括其中可以安装公共样品台的束观察装置，并且其功能是通过凹口将多个样品上的预定观察光束照射，以依次观察和评估多个样品的形状。 通过聚焦离子束装置在一个样品上形成标记，使得标记的定位实现待处理样品的一部分的自动处理。 此外，普通样品台用于高加速度透射电子显微镜和高加速度扫描电子显微镜和聚焦离子束装置。

    Micro manipulator
    2.
    发明授权
    Micro manipulator 失效
    微机械手

    公开(公告)号：US07146872B2

    公开(公告)日：2006-12-12

    申请号：US10214196

    申请日：2002-08-08

    申请人： Kazuhiro Morita ,  Motohide Ukiana ,  Kazuhiro Fujii ,  Shigeto Isakozawa ,  Hidemi Koike ,  Tamio Tanikawa

    发明人： Kazuhiro Morita ,  Motohide Ukiana ,  Kazuhiro Fujii ,  Shigeto Isakozawa ,  Hidemi Koike ,  Tamio Tanikawa

    IPC分类号： B25J17/00

    CPC分类号： B25J17/0266 ,  B25J7/00 ,  B25J9/0015 ,  Y10T29/53 ,  Y10T74/20335 ,  Y10T74/20341

    摘要： Provision of a 3-DOF micro manipulator easy to operate and capable of executing accurate positioning, wherein the link mechanisms of the micro manipulator whose main operation is parallel 3-DOF operation are implemented by cutting, folding, and moding a sheet of metal plate. Base and end effector are connected by three link mechanisms. The three link mechanisms are manufactured by cutting and folding a flexible plate material, and are equipped with plate-like arm portions each having a spread in the axially peripheral direction of the end effector, with hinge portions that are formed longitudinally across each arm portion in order to function as revolving joints R, and with a hinge portion also formed at the middle position of the arm portion in order to function as revolving joints R. Also, a parallelogrammatic link is formed between one longitudinal end of the arm portion and the middle portion thereof in order to function as a prismatic joint pair P.

    摘要翻译： 提供易于操作并能够执行精确定位的3-DOF微操纵器，其中主操作是平行3自由度操作的微操纵器的连杆机构通过切割，折叠和模制一块金属板来实现。 基本和末端执行器通过三个连杆机构连接。 三连杆机构通过切割和折叠柔性板材来制造，并且配备有在端部执行器的轴向周向方向上具有扩展的板状臂部分，铰链部分纵向跨越每个臂部分形成 为了作为旋转接头R起作用，并且铰链部分也形成在臂部分的中间位置，以起到旋转接头R.而且，臂部分的一个纵向端部与中间部分之间形成一个平行四边形连杆 部分，以便作为棱柱形接头对P.

    Method and apparatus for scanning transmission electron microscopy
    3.
    发明授权
    Method and apparatus for scanning transmission electron microscopy 失效
    扫描透射电子显微镜的方法和装置

    公开(公告)号：US06531697B1

    公开(公告)日：2003-03-11

    申请号：US09259334

    申请日：1999-03-01

    申请人： Kuniyasu Nakamura ,  Hiroshi Kakibayashi ,  Mikio Ichihashi ,  Shigeto Isakozawa ,  Yuji Sato ,  Takahito Hashimoto

    发明人： Kuniyasu Nakamura ,  Hiroshi Kakibayashi ,  Mikio Ichihashi ,  Shigeto Isakozawa ,  Yuji Sato ,  Takahito Hashimoto

    IPC分类号： H01J3700

    CPC分类号： H01J37/1471 ,  H01J37/28 ,  H01J2237/2802

    摘要： A scanning transmission electron microscope (STEM) has an electron source for generating a primary electron beam and an electron illuminating lens system for converging the primary electron beam from the electron source onto a specimen for illumination. An electron deflecting system is provided for scanning the specimen with the primary electron beam. The STEM also has a scattered electron detector for detecting scattered electrons transmitted through the specimen. A projection lens system projects the scattered electrons onto a detection surface of the scattered electron detector. An image displaying device displays the scanning transmission electron microscope image of the specimen using a detection signal from the scattered electron detector. A detection angle changing device for establishes the range of the scattering angle of the scattered electrons detected by the scattered electron detector. This structure enhances the contrast of a desired portion of the specimen under observation for a scanning transmitted image by selective establishment of detection angle ranges for the scattered electron detector.

    摘要翻译： 扫描透射电子显微镜（STEM）具有用于产生一次电子束的电子源和用于将来自电子源的一次电子束聚焦到用于照明的样本上的电子照明透镜系统。 提供电子偏转系统用于用一次电子束扫描样本。 STEM还具有散射电子检测器，用于检测通过样品传播的散射电子。 投影透镜系统将散射的电子投射到散射电子检测器的检测表面上。 图像显示装置使用来自散射电子检测器的检测信号来显示样本的扫描透射电子显微镜图像。 一种用于确定由散射电子检测器检测的散射电子的散射角的范围的检测角度改变装置。 该结构通过选择性地建立散射电子检测器的检测角度范围，增强了扫描透射图像观察下的样本的期望部分的对比度。

    Method and apparatus for scanning transmission electron microscopy
    4.
    发明授权
    Method and apparatus for scanning transmission electron microscopy 失效
    扫描透射电子显微镜的方法和装置

    公开(公告)号：US06822233B2

    公开(公告)日：2004-11-23

    申请号：US10346138

    申请日：2003-01-17

    申请人： Kuniyasu Nakamura ,  Hiroshi Kakibayashi ,  Mikio Ichihashi ,  Shigeto Isakozawa ,  Yuji Sato ,  Takahito Hashimoto

    发明人： Kuniyasu Nakamura ,  Hiroshi Kakibayashi ,  Mikio Ichihashi ,  Shigeto Isakozawa ,  Yuji Sato ,  Takahito Hashimoto

    IPC分类号： H01J3704

    CPC分类号： H01J37/1471 ,  H01J37/28 ,  H01J2237/2802

    摘要： A scanning transmission electron microscope (STEM) has an electron source for generating a primary electron beam and an electron illuminating lens system for converging the primary electron beam from the electron source onto a specimen for illumination. An electron deflecting system is provided for scanning the specimen with the primary electron beam. The STEM also has a scattered electron detector for detecting scattered electrons transmitted through the specimen. A projection lens system projects the scattered electrons onto a detection surface of the scattered electron detector. An image displaying device displays the scanning transmission electron microscope image of the specimen using a detection signal from the scattered electron detector. A detection angle changing device for establishes the range of the scattering angle of the scattered electrons detected by the scattered electron detector. This structure enhances the contrast of a desired portion of the specimen under observation for a scanning transmitted image by selective establishment of detection angle ranges for the scattered electron detector.

    摘要翻译： 扫描透射电子显微镜（STEM）具有用于产生一次电子束的电子源和用于将来自电子源的一次电子束聚焦到用于照明的样本上的电子照明透镜系统。 提供电子偏转系统用于用一次电子束扫描样本。 STEM还具有散射电子检测器，用于检测通过样品传播的散射电子。 投影透镜系统将散射的电子投射到散射电子检测器的检测表面上。 图像显示装置使用来自散射电子检测器的检测信号来显示样本的扫描透射电子显微镜图像。 一种用于确定由散射电子检测器检测的散射电子的散射角的范围的检测角度改变装置。 该结构通过选择性地建立散射电子检测器的检测角度范围，增强了扫描透射图像观察下的样本的期望部分的对比度。

    Electron microscope
    6.
    发明授权
    Electron microscope 失效
    电子显微镜

    公开(公告)号：US5552602A

    公开(公告)日：1996-09-03

    申请号：US398684

    申请日：1995-03-06

    申请人： Hiroshi Kakibayashi ,  Yasuhiro Mitsui ,  Hideo Tadokoro ,  Katsuhiro Kuroda ,  Masanari Koguchi ,  Kazutaka Tsuji ,  Tatsuo Makishima ,  Mikio Ichihashi ,  Shigeto Isakozawa

    发明人： Hiroshi Kakibayashi ,  Yasuhiro Mitsui ,  Hideo Tadokoro ,  Katsuhiro Kuroda ,  Masanari Koguchi ,  Kazutaka Tsuji ,  Tatsuo Makishima ,  Mikio Ichihashi ,  Shigeto Isakozawa

    IPC分类号： G01N23/04 ,  G01R31/305 ,  H01J37/26

    CPC分类号： G01R31/305 ,  G01N23/046 ,  G01N2223/419 ,  H01J2237/226

    摘要： 3-dimensional observation on the atomic arrangement and atomic species in a thin-film specimen as well as conventional electron microscope observations is carried out at high speed and accuracy by an electron microscope which measures electrons emitted at high angle from the specimen. For that purpose, the present invention provides a scanning transmission electron microscope having an electron detection device comprising a scintillator converting electrons detected thereby to photons, a photoconductive-film converting photons from the scintillator detected thereby to c.a. 1000 times as many electron-hole pairs as these photons (i.d. avalanche multiplication), an electron gun emitting an electron beam toward the photoconductive-film to detect the holes generated therein, and electron deflector electrodes deflecting the electron beam on the photoconductive-film. Avalanche multiplication in the photoconductive-film amplifies the signal of these photons at so high signal-to-noise ratio that the electron microscope in this invention can detect such weak electrons as emitted at high angle from the specimen at high sensitivity and resolution. Therefore this invention enables a scanning transmission electron microscope to obtain for example 3-dimensional image of point defects and impurity elements existing in joint interfaces and contacts in a ULSI device rapidly and accurately.

    摘要翻译： 通过电子显微镜以高速和准确的方式对薄膜样品中的原子排列和原子种类进行3维观察，以及常规的电子显微镜观察，测量从样品以高角度发射的电子。 为此目的，本发明提供了一种具有电子检测装置的扫描透射电子显微镜，该电子检测装置包括将由此检测的电子转化为光子的闪烁体，从其检测的闪烁体的光电导膜转换光子至c.a. 与这些光子（i.d.雪崩乘法）一样多的电子 - 空穴对的1000倍，向光电导膜发射电子束以检测其中产生的空穴的电子枪以及偏转电子束在光电导膜上的电子偏转器电极。 光电导膜中的雪崩乘法以如此高的信噪比放大了这些光子的信号，使得本发明的电子显微镜能够以高灵敏度和分辨率从样品中以高角度检测出这样的弱电子。 因此，本发明能够使扫描透射电子显微镜能够快速，准确地获得例如存在于ULSI装置的接合界面和触点中的点缺陷和杂质元素的3维图像。

    Inspection of circuit patterns for defects and analysis of defects using a charged particle beam
    9.
    发明授权
    Inspection of circuit patterns for defects and analysis of defects using a charged particle beam 有权
    使用带电粒子束检查缺陷的电路图案和缺陷分析

    公开(公告)号：US06566654B1

    公开(公告)日：2003-05-20

    申请号：US09697773

    申请日：2000-10-27

    申请人： Ryuichi Funatsu ,  Shigeto Isakozawa ,  Hidemi Koike

    发明人： Ryuichi Funatsu ,  Shigeto Isakozawa ,  Hidemi Koike

    IPC分类号： G03F900

    CPC分类号： H01J37/28 ,  H01J2237/2817 ,  H01J2237/3174

    摘要： The present invention is intended to detect defects in a circuit pattern formed on a semiconductor wafer by a circuit pattern forming process, to facilitates the extraction and observation of the defects, to improve the accuracy of analysis of the causes of the defects, and to determine the causes of the defects and to take measures to eliminate the causes of the defects in a greatly reduced time after the formation of the defects. A method of inspecting a circuit pattern for defects and analyzing defects, comprising locating a defect in a circuit pattern formed on a wafer by using an electron beam, specifying a chip having the defect on the basis of position data on the defect, cutting out the chip from the semiconductor wafer, thinning a portion of the chip to form a thin portion, and observing the thin portion of the chip under a transmission electron microscope to determine the causes of the defect.

    摘要翻译： 本发明旨在通过电路图案形成处理来检测在半导体晶片上形成的电路图案中的缺陷，以便于提取和观察缺陷，提高对缺陷原因的分析准确性，并确定 造成缺陷的原因，并在形成缺陷后大幅度缩短的时间内采取措施消除缺陷的原因。 一种用于检查缺陷的电路图案和分析缺陷的方法，包括通过使用电子束将形成在晶片上的电路图案中的缺陷定位在缺陷上，根据缺陷的位置数据指定具有缺陷的芯片， 从半导体晶片切片，使芯片的一部分变薄以形成薄的部分，并且在透射电子显微镜下观察芯片的薄部分以确定缺陷的原因。