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    Sample evaluation/process observation system and method
    1.
    发明授权
    Sample evaluation/process observation system and method 失效
    样本评估/过程观察系统和方法

    公开(公告)号：US5783830A

    公开(公告)日：1998-07-21

    申请号：US873788

    申请日：1997-06-12

    申请人： Hiroshi Hirose ,  Hidemi Koike ,  Shigeto Isakozawa ,  Yuji Sato ,  Mikio Ichihashi ,  Motohide Ukiana

    发明人： Hiroshi Hirose ,  Hidemi Koike ,  Shigeto Isakozawa ,  Yuji Sato ,  Mikio Ichihashi ,  Motohide Ukiana

    IPC分类号： H01J37/305 ,  H01J37/20

    CPC分类号： H01J37/3056 ,  H01J37/265 ,  H01J2237/20 ,  H01J2237/26

    摘要： A sample evaluation/process observation system includes a common sample stage which accommodates a plurality of samples to be processed. The common sample stage is provided with a processing/observing notch and also with a movement mechanism. The movement mechanism functions to sequentially move the plurality of samples to the notch to cause the samples to be exposed to a predetermined processing beam and observing beam. The system further includes a beam processing device in which the common sample stage can be mounted and which functions to irradiate the predetermined processing beam on the plurality of samples through the notch to thereby sequentially perform beam processing operation over the samples. The system further includes a beam observation device in which the common sample stage can be mounted and which functions to irradiate the predetermined observing beam on the plurality of samples through the notch to sequentially observe and evaluate shapes of the plurality of samples. A mark is formed on one sample by a focused ion beam device so that positioning of the mark realizes automatic processing of a part of the sample to be processed. Further, the common sample stage is used in a high-acceleration transmission electron microscope and a high-acceleration scanning electron microscope and focused ion beam device.

    摘要翻译： 样本评估/过程观察系统包括容纳多个待处理样本的公共样本阶段。 公共样品台具有处理/观察凹口，并且还具有移动机构。 移动机构用于将多个样本顺序地移动到凹口，以使样本暴露于预定的处理束和观察波束。 该系统还包括其中可以安装公共样本台的束处理装置，并且其功能是通过凹口对多个采样上的预定处理光束照射，从而顺序地对采样进行光束处理操作。 该系统还包括其中可以安装公共样品台的束观察装置，并且其功能是通过凹口将多个样品上的预定观察光束照射，以依次观察和评估多个样品的形状。 通过聚焦离子束装置在一个样品上形成标记，使得标记的定位实现待处理样品的一部分的自动处理。 此外，普通样品台用于高加速度透射电子显微镜和高加速度扫描电子显微镜和聚焦离子束装置。

    Method and apparatus for scanning transmission electron microscopy
    2.
    发明授权
    Method and apparatus for scanning transmission electron microscopy 失效
    扫描透射电子显微镜的方法和装置

    公开(公告)号：US06531697B1

    公开(公告)日：2003-03-11

    申请号：US09259334

    申请日：1999-03-01

    申请人： Kuniyasu Nakamura ,  Hiroshi Kakibayashi ,  Mikio Ichihashi ,  Shigeto Isakozawa ,  Yuji Sato ,  Takahito Hashimoto

    发明人： Kuniyasu Nakamura ,  Hiroshi Kakibayashi ,  Mikio Ichihashi ,  Shigeto Isakozawa ,  Yuji Sato ,  Takahito Hashimoto

    IPC分类号： H01J3700

    CPC分类号： H01J37/1471 ,  H01J37/28 ,  H01J2237/2802

    摘要： A scanning transmission electron microscope (STEM) has an electron source for generating a primary electron beam and an electron illuminating lens system for converging the primary electron beam from the electron source onto a specimen for illumination. An electron deflecting system is provided for scanning the specimen with the primary electron beam. The STEM also has a scattered electron detector for detecting scattered electrons transmitted through the specimen. A projection lens system projects the scattered electrons onto a detection surface of the scattered electron detector. An image displaying device displays the scanning transmission electron microscope image of the specimen using a detection signal from the scattered electron detector. A detection angle changing device for establishes the range of the scattering angle of the scattered electrons detected by the scattered electron detector. This structure enhances the contrast of a desired portion of the specimen under observation for a scanning transmitted image by selective establishment of detection angle ranges for the scattered electron detector.

    摘要翻译： 扫描透射电子显微镜（STEM）具有用于产生一次电子束的电子源和用于将来自电子源的一次电子束聚焦到用于照明的样本上的电子照明透镜系统。 提供电子偏转系统用于用一次电子束扫描样本。 STEM还具有散射电子检测器，用于检测通过样品传播的散射电子。 投影透镜系统将散射的电子投射到散射电子检测器的检测表面上。 图像显示装置使用来自散射电子检测器的检测信号来显示样本的扫描透射电子显微镜图像。 一种用于确定由散射电子检测器检测的散射电子的散射角的范围的检测角度改变装置。 该结构通过选择性地建立散射电子检测器的检测角度范围，增强了扫描透射图像观察下的样本的期望部分的对比度。

    Method and apparatus for scanning transmission electron microscopy
    3.
    发明授权
    Method and apparatus for scanning transmission electron microscopy 失效
    扫描透射电子显微镜的方法和装置

    公开(公告)号：US06822233B2

    公开(公告)日：2004-11-23

    申请号：US10346138

    申请日：2003-01-17

    申请人： Kuniyasu Nakamura ,  Hiroshi Kakibayashi ,  Mikio Ichihashi ,  Shigeto Isakozawa ,  Yuji Sato ,  Takahito Hashimoto

    发明人： Kuniyasu Nakamura ,  Hiroshi Kakibayashi ,  Mikio Ichihashi ,  Shigeto Isakozawa ,  Yuji Sato ,  Takahito Hashimoto

    IPC分类号： H01J3704

    CPC分类号： H01J37/1471 ,  H01J37/28 ,  H01J2237/2802

    摘要： A scanning transmission electron microscope (STEM) has an electron source for generating a primary electron beam and an electron illuminating lens system for converging the primary electron beam from the electron source onto a specimen for illumination. An electron deflecting system is provided for scanning the specimen with the primary electron beam. The STEM also has a scattered electron detector for detecting scattered electrons transmitted through the specimen. A projection lens system projects the scattered electrons onto a detection surface of the scattered electron detector. An image displaying device displays the scanning transmission electron microscope image of the specimen using a detection signal from the scattered electron detector. A detection angle changing device for establishes the range of the scattering angle of the scattered electrons detected by the scattered electron detector. This structure enhances the contrast of a desired portion of the specimen under observation for a scanning transmitted image by selective establishment of detection angle ranges for the scattered electron detector.

    摘要翻译： 扫描透射电子显微镜（STEM）具有用于产生一次电子束的电子源和用于将来自电子源的一次电子束聚焦到用于照明的样本上的电子照明透镜系统。 提供电子偏转系统用于用一次电子束扫描样本。 STEM还具有散射电子检测器，用于检测通过样品传播的散射电子。 投影透镜系统将散射的电子投射到散射电子检测器的检测表面上。 图像显示装置使用来自散射电子检测器的检测信号来显示样本的扫描透射电子显微镜图像。 一种用于确定由散射电子检测器检测的散射电子的散射角的范围的检测角度改变装置。 该结构通过选择性地建立散射电子检测器的检测角度范围，增强了扫描透射图像观察下的样本的期望部分的对比度。

    Electron microscope
    5.
    发明授权
    Electron microscope 失效
    电子显微镜

    公开(公告)号：US5552602A

    公开(公告)日：1996-09-03

    申请号：US398684

    申请日：1995-03-06

    申请人： Hiroshi Kakibayashi ,  Yasuhiro Mitsui ,  Hideo Tadokoro ,  Katsuhiro Kuroda ,  Masanari Koguchi ,  Kazutaka Tsuji ,  Tatsuo Makishima ,  Mikio Ichihashi ,  Shigeto Isakozawa

    发明人： Hiroshi Kakibayashi ,  Yasuhiro Mitsui ,  Hideo Tadokoro ,  Katsuhiro Kuroda ,  Masanari Koguchi ,  Kazutaka Tsuji ,  Tatsuo Makishima ,  Mikio Ichihashi ,  Shigeto Isakozawa

    IPC分类号： G01N23/04 ,  G01R31/305 ,  H01J37/26

    CPC分类号： G01R31/305 ,  G01N23/046 ,  G01N2223/419 ,  H01J2237/226

    摘要： 3-dimensional observation on the atomic arrangement and atomic species in a thin-film specimen as well as conventional electron microscope observations is carried out at high speed and accuracy by an electron microscope which measures electrons emitted at high angle from the specimen. For that purpose, the present invention provides a scanning transmission electron microscope having an electron detection device comprising a scintillator converting electrons detected thereby to photons, a photoconductive-film converting photons from the scintillator detected thereby to c.a. 1000 times as many electron-hole pairs as these photons (i.d. avalanche multiplication), an electron gun emitting an electron beam toward the photoconductive-film to detect the holes generated therein, and electron deflector electrodes deflecting the electron beam on the photoconductive-film. Avalanche multiplication in the photoconductive-film amplifies the signal of these photons at so high signal-to-noise ratio that the electron microscope in this invention can detect such weak electrons as emitted at high angle from the specimen at high sensitivity and resolution. Therefore this invention enables a scanning transmission electron microscope to obtain for example 3-dimensional image of point defects and impurity elements existing in joint interfaces and contacts in a ULSI device rapidly and accurately.

    摘要翻译： 通过电子显微镜以高速和准确的方式对薄膜样品中的原子排列和原子种类进行3维观察，以及常规的电子显微镜观察，测量从样品以高角度发射的电子。 为此目的，本发明提供了一种具有电子检测装置的扫描透射电子显微镜，该电子检测装置包括将由此检测的电子转化为光子的闪烁体，从其检测的闪烁体的光电导膜转换光子至c.a. 与这些光子（i.d.雪崩乘法）一样多的电子 - 空穴对的1000倍，向光电导膜发射电子束以检测其中产生的空穴的电子枪以及偏转电子束在光电导膜上的电子偏转器电极。 光电导膜中的雪崩乘法以如此高的信噪比放大了这些光子的信号，使得本发明的电子显微镜能够以高灵敏度和分辨率从样品中以高角度检测出这样的弱电子。 因此，本发明能够使扫描透射电子显微镜能够快速，准确地获得例如存在于ULSI装置的接合界面和触点中的点缺陷和杂质元素的3维图像。

    Electron lens
    8.
    发明授权
    Electron lens 失效
    电子透镜

    公开(公告)号：US5442182A

    公开(公告)日：1995-08-15

    申请号：US145161

    申请日：1993-11-03

    申请人： Toshiro Kubo ,  Toshiyuki Ohashi ,  Mikio Ichihashi ,  Yuji Sato

    发明人： Toshiro Kubo ,  Toshiyuki Ohashi ,  Mikio Ichihashi ,  Yuji Sato

    IPC分类号： G01Q30/02 ,  G01Q30/20 ,  H01J37/141

    CPC分类号： H01J37/141

    摘要： An electron lens comprising a first exciting coil, a second exciting coil, a casing for encompassing the first and second exciting coils, and an excitation control apparatus for controlling the excitation state of at least the first exciting coil independently of the second exciting coil. The excitation control apparatus independently controls currents applied to the first and second exciting coils, respectively. At this time, exothermy of each coil can be kept constant and thermal deformation of the casing can be prevented by keeping the sum of the absolute values of the currents applied to the coils.

    摘要翻译： 一种电子透镜，包括第一激励线圈，第二激励线圈，用于包围第一和第二激励线圈的壳体，以及用于独立于第二激励线圈来控制至少第一励磁线圈的激励状态的励磁控制装置。 励磁控制装置分别独立地控制施加到第一和第二励磁线圈的电流。 此时，可以通过保持施加到线圈的电流的绝对值的总和来保持每个线圈的放热恒定并且可以防止壳体的热变形。

    Beam irradiation device
    9.
    发明授权
    Beam irradiation device 失效
    光束照射装置

    公开(公告)号：US07351944B2

    公开(公告)日：2008-04-01

    申请号：US11283999

    申请日：2005-11-22

    申请人： Masato Yamada ,  Hitoshi Terasaki ,  Yoichi Tsuchiya ,  Shuichi Ichiura ,  Masahiro Higuchi ,  Mikio Ichihashi ,  Youichiro Goto ,  Yoshiaki Maeno

    发明人： Masato Yamada ,  Hitoshi Terasaki ,  Yoichi Tsuchiya ,  Shuichi Ichiura ,  Masahiro Higuchi ,  Mikio Ichihashi ,  Youichiro Goto ,  Yoshiaki Maeno

    IPC分类号： G01J1/32 ,  G02B27/40 ,  G02B26/08 ,  H01J3/14 ,  B41J2/47

    CPC分类号： G01S17/42 ,  G01S7/4811 ,  G01S7/4817 ,  G01S7/491 ,  G01S17/48

    摘要： In a beam irradiation device of the present invention, laser beams emitted from a semiconductor laser impinge on an irradiation lens supported by a lens actuator. The laser beams that have passed through the irradiation lens change in outgoing angle in the direction of a y-z plane as the lens actuator is driven. A laser beam scan in the target region is thus performed. A part of the laser beams that have passed through the irradiation lens is reflected and separated by a beam splitter. The separated beams are converged on a PSD through a converging lens. A DSP control circuit monitors a scan position of the laser beams that have passed through the irradiation lens based on a signal from the PSD. When an irradiation position has deviated from a scan trajectory, the DSP control circuit controls an actuator driving circuit to draw the irradiation position back onto the scan trajectory. This beam irradiation device can realize a smooth and stable beam scan operation with a simple construction.

    摘要翻译： 在本发明的光束照射装置中，从半导体激光器发射的激光束照射在由透镜致动器支撑的照射透镜上。 当透镜致动器被驱动时，穿过照射透镜的激光束在y-z平面的方向上以出射角度改变。 因此执行目标区域中的激光束扫描。 已经通过照射透镜的激光束的一部分被分束器反射和分离。 分离的光束通过会聚透镜会聚在PSD上。 DSP控制电路基于来自PSD的信号监视已经通过照射透镜的激光束的扫描位置。 当照射位置偏离扫描轨迹时，DSP控制电路控制致动器驱动电路将照射位置反射回扫描轨迹。 该光束照射装置能够以简单的结构实现平稳稳定的束扫描操作。