摘要:
A silicon-containing film-forming material includes at least one organosilane compound shown by the following general formula (1). wherein R1 to R6 individually represent a hydrogen atom, an alkyl group having 1 to 4 carbon atoms, a vinyl group, a phenyl group, a halogen atom, a hydroxyl group, an acetoxy group, a phenoxy group, or an alkoxy group, provided that at least one of R1 to R6 represents a halogen atom, a hydroxyl group, an acetoxy group, a phenoxy group, or an alkoxy group, and n represents an integer from 0 to 3.
摘要翻译:含硅成膜材料包含至少一种由以下通式(1)表示的有机硅烷化合物。 其中R1至R6各自表示氢原子,具有1至4个碳原子的烷基,乙烯基,苯基,卤原子,羟基,乙酰氧基,苯氧基或烷氧基, R 1〜R 6中的至少一个表示卤素原子,羟基,乙酰氧基,苯氧基或烷氧基,n表示0〜3的整数。
摘要:
A method of producing a silicon compound shown by the following general formula (7) includes reacting an organomagnesium compound shown by the following general formula (1) with an organosilane compound shown by the following general formula (2) in a solvent that contains at least one compound selected from a compound shown by the following general formula (3), a compound shown by the following general formula (4), a compound shown by the following general formula (5), and a compound shown by the following general formula (6).
摘要:
An insulating-film-forming composition for a semiconductor device comprising an organic silica sol with a carbon atom content of 11 to 17 atom % and an organic solvent is disclosed. The organic silica sol comprises a hydrolysis-condensation product P1 and a hydrolysis-condensation product P2. The hydrolysis-condensation product P1 is obtained by hydrolyzing and condensing (A) a silane monomer comprising a hydrolyzable group and (B) a polycarbosilane comprising a hydrolyzable group in the presence of (C) a basic catalyst, and the hydrolysis-condensation product P2 is obtained by hydrolyzing and condensing (D) a silane monomer comprising a hydrolyzable group.
摘要:
An insulating-film-forming composition for a semiconductor device comprising an organic silica sol with a carbon atom content of 11 to 17 atom % and an organic solvent is disclosed. The organic silica sol comprises a hydrolysis-condensation product P1 and a hydrolysis-condensation product P2. The hydrolysis-condensation product P1 is obtained by hydrolyzing and condensing (A) a silane monomer comprising a hydrolyzable group and (B) a polycarbosilane comprising a hydrolyzable group in the presence of (C) a basic catalyst, and the hydrolysis-condensation product P2 is obtained by hydrolyzing and condensing (D) a silane monomer comprising a hydrolyzable group.
摘要:
A method of producing an organosilicon compound includes substituting at least an OR1 group of a compound shown by the following general formula (1) to obtain a compound shown by the following general formula (2), Si(OR1)3-mY1m—R2—Si(OR3)3-nY2n (1) Si(OR4)3-mY1m—R2—Si(OR4)3-nY2n (2).
摘要:
A method of producing an organosilicon compound includes substituting at least an OR1 group of a compound shown by the following general formula (1) to obtain a compound shown by the following general formula (2), Si(OR1)3-mY1m—R2—Si(OR3)3-nY2n (1) Si(OR4)3-mY1m—R2—Si(OR4)3-nY2n (2).
摘要:
Disclosed is a silicon-containing film-forming material which contains an organosilane compound represented by the following general formula (1). (In the formula, R1-R4 may be the same or different and represent a hydrogen atom, an alkyl group having 1-4 carbon atoms, a vinyl group or a phenyl group; R5 represents an alkyl group having 1-4 carbon atoms, an acetyl group or a phenyl group; n represents an integer of 1-3; and m represents an integer of 1-2.)
摘要翻译:公开了含有由以下通式(1)表示的有机硅烷化合物的含硅成膜材料。 (式中,R 1 -R 4可以相同或不同,表示氢原子,具有1-4个碳原子的烷基,乙烯基或苯基; R 5表示具有1-4个碳原子的烷基, 乙酰基或苯基; n表示1-3的整数,m表示1-2的整数。)
摘要:
A chemical vapor deposition material includes an organosilane compound shown by the following general formula (1). wherein R1 and R2 individually represent a hydrogen atom, an alkyl group having 1 to 4 carbon atoms, a vinyl group, or a phenyl group, R3 and R4 individually represent an alkyl group having 1 to 4 carbon atoms, an acetyl group, or a phenyl group, m is an integer from 0 to 2, and n is an integer from 1 to 3.
摘要:
A management system manages use of management object provided in facilities by using an information storage medium of a user. An entrance management apparatus, provided in the vicinity of an entrance of the facilities, stores use permission information for permitting the use of the management object on an information storage medium when the user enters the facilities. In the facilities, a use management apparatus, provided for each management object, controls availability or unavailability of the management object based on the use permission information stored on the information storage medium. Additionally, the use management apparatus stores, in the information storage medium, use information showing that the management object is used. Further, a room leaving management apparatus, provided in the vicinity of an exit of the facilities, manages leaving of the user based on the use information stored on the information storage medium. When the user leaves the facilities, it is controlled whether or not the user can leave the facilities, and use history information is stored, based on the use information.
摘要:
A polycarbosilane has a main chain in which silicon atoms and carbon atoms are alternately repeated, and includes a structural unit shown by the following general formula (1), a structural unit shown by the following general formula (2), a structural unit shown by the following general formula (3), and a structural unit shown by the following general formula (4).