公开(公告)号：US12120865B2

公开(公告)日：2024-10-15

申请号：US17132981

申请日：2020-12-23

申请人： Intel Corporation

发明人： Cheng-Ying Huang ,  Ashish Agrawal ,  Gilbert Dewey ,  Abhishek A. Sharma ,  Wilfred Gomes ,  Jack Kavalieros

IPC分类号： H10B12/00 ,  H01L21/683 ,  H01L29/06 ,  H01L29/423 ,  H01L29/66 ,  H01L29/786 ,  H10B53/30

CPC分类号： H10B12/30 ,  H01L21/6835 ,  H01L29/0673 ,  H01L29/42392 ,  H01L29/66742 ,  H01L29/78618 ,  H01L29/78696 ,  H10B12/03 ,  H10B12/05 ,  H10B53/30 ,  H01L2221/68363

摘要： Monolithic two-dimensional (2D) arrays of double-sided DRAM cells including a frontside bit cell over a backside bit cell. Each double-sided cell includes a stacked transistor structure having at least a first transistor over a second transistor. Each double-sided cell further includes a first capacitor on a frontside of the stacked transistor structure and electrically coupled to a source/drain of the first transistor. Each double-sided cell further includes a second capacitor on a backside of the stacked transistor structure and electrically coupled to a source/drain of the second transistor. Frontside cell addressing interconnects are electrically coupled to other terminals of at least the first transistor while one or more backside addressing interconnects are electrically coupled to at least one terminal of the second transistor or second capacitor.

公开(公告)号：US11777029B2

公开(公告)日：2023-10-03

申请号：US16455567

申请日：2019-06-27

申请人： Intel Corporation

发明人： Nazila Haratipour ,  I-Cheng Tung ,  Abhishek A. Sharma ,  Arnab Sen Gupta ,  Van Le ,  Matthew V. Metz ,  Jack Kavalieros ,  Tahir Ghani

IPC分类号： H01L29/78 ,  H01L29/423 ,  H01L29/66

CPC分类号： H01L29/7827 ,  H01L29/42364 ,  H01L29/66666

摘要： A vertical transistor structure includes a material stack having a source material, a drain material, and a channel material therebetween. The vertical transistor structure further includes a gate electrode adjacent to a sidewall of the stack, where the sidewall includes the channel material, and at least a partial thickness of both the source material and the drain material. A gate dielectric is present between the sidewall of the stack and the gate electrode. The vertical transistor structure further includes a first metallization over a first area of the stack above the gate dielectric layer, and in contact with the gate electrode on sidewall of the stack. A second metallization is adjacent to the first metallization, where the second metallization is over a second area of the stack, and in contact with the source material or the drain material.

公开(公告)号：US11508577B2

公开(公告)日：2022-11-22

申请号：US16024694

申请日：2018-06-29

申请人： Intel Corporation

发明人： Gilbert Dewey ,  Matthew Metz ,  Willy Rachmady ,  Sean Ma ,  Nicholas Minutillo ,  Cheng-Ying Huang ,  Tahir Ghani ,  Jack Kavalieros ,  Anand Murthy ,  Harold Kennel

IPC分类号： H01L21/02 ,  H01L29/20 ,  H01L29/04 ,  H01L29/78 ,  H01L27/12

摘要： Embodiments herein describe techniques, systems, and method for a semiconductor device. Embodiments herein may present a semiconductor device including a substrate and an insulator layer above the substrate. A channel area may include an III-V material relaxed grown on the insulator layer. A source area may be above the insulator layer, in contact with the insulator layer, and adjacent to a first end of the channel area. A drain area may be above the insulator layer, in contact with the insulator layer, and adjacent to a second end of the channel area that is opposite to the first end of the channel area. The source area or the drain area may include one or more seed components including a seed material with free surface. Other embodiments may be described and/or claimed.

公开(公告)号：US11276694B2

公开(公告)日：2022-03-15

申请号：US16139684

申请日：2018-09-24

申请人： INTEL CORPORATION

发明人： Willy Rachmady ,  Matthew Metz ,  Gilbert Dewey ,  Nicholas Minutillo ,  Cheng-Ying Huang ,  Jack Kavalieros ,  Anand Murthy ,  Tahir Ghani

IPC分类号： H01L27/092 ,  H01L29/06 ,  H01L29/10 ,  H01L29/423 ,  H01L21/8238 ,  H01L29/08 ,  H01L29/78 ,  H01L29/66 ,  H01L29/207

摘要： An integrated circuit with at least one transistor is formed using a buffer structure on the substrate. The buffer structure includes one or more layers of buffer material and comprises indium, gallium, and phosphorous. A ratio of indium to gallium in the buffer structure increases from a lower value to a higher value such that the buffer structure has small changes in lattice constant to control relaxation and defects. A source and a drain are on top of the buffer structure and a body of Group III-V semiconductor material extends between and connects the source and the drain. A gate structure wrapped around the body, the gate structure including a gate electrode and a gate dielectric, wherein the gate dielectric is between the body and the gate electrode.

公开(公告)号：US20210408018A1

公开(公告)日：2021-12-30

申请号：US16914140

申请日：2020-06-26

申请人： Intel Corporation

发明人： Nazila Haratipour ,  Sou-Chi Chang ,  Shriram Shivaraman ,  I-Cheng Tung ,  Tobias Brown-Heft ,  Devin R. Merrill ,  Che-Yun Lin ,  Seung Hoon Sung ,  Jack Kavalieros ,  Uygar Avci ,  Matthew V. Metz

IPC分类号： H01L27/11502 ,  H01L49/02 ,  H01L27/08 ,  H01G4/008 ,  G11C11/22

摘要： An integrated circuit capacitor structure, includes a first electrode includes a cylindrical column, a ferroelectric layer around an exterior sidewall of the cylindrical column and a plurality of outer electrodes. The plurality of outer electrodes include a first outer electrode laterally adjacent to a first portion of an exterior of the ferroelectric layer and a second outer electrode laterally adjacent to a second portion of the exterior of the ferroelectric layer, wherein the second outer electrode is above the first outer electrode.

公开(公告)号：US11017843B2

公开(公告)日：2021-05-25

申请号：US16457617

申请日：2019-06-28

申请人： Intel Corporation

发明人： Abhishek Sharma ,  Gilbert Dewey ,  Willy Rachmady ,  Van Le ,  Matthew Metz ,  Jack Kavalieros

IPC分类号： G11C11/24 ,  G11C11/4091 ,  H01L27/108 ,  H01L27/12 ,  G11C11/4094 ,  G11C11/408

摘要： In memory devices where a memory cell includes a thin film cell select transistor, selection between layers of such memory cells may further comprise another thin film select transistor. Bitline and wordline encoding suitable for a memory device having a single layer of memory cells may be scaled up to a 3D memory device having two or more memory cell layers. In a DRAM device one layer of (1TFT-1C) cells may include a 2D array of metal-insulator-metal capacitors over an array of TFTs. Additional layers of such 1TFT-1C cells may be stacked monolithically to form a 3D array. Memory cells in each layer may be accessed through a wordline and local bitline. A local bitline of one cell layer may be coupled to global bitline applicable to all cell layers through a layer-selected TFT according to a voltage applied to a layer-select gate voltage.

公开(公告)号：US20200335610A1

公开(公告)日：2020-10-22

申请号：US16957667

申请日：2018-02-28

申请人： Intel Corporation

发明人： Cheng-Ying Huang ,  Jack Kavalieros ,  Ian Young ,  Matthew Metz ,  Willy Rachmady ,  Uygar Avci ,  Ashish Agrawal ,  Benjamin Chu-Kung

IPC分类号： H01L29/66 ,  H01L29/06 ,  H01L29/417 ,  H01L29/786

摘要： Tunneling Field Effect Transistors (TFETs) are promising devices in that they promise significant performance increase and energy consumption decrease due to a steeper subthreshold slope (for example, smaller sub-threshold swing). In various embodiments, vertical fin-based TFETs can be fabricated in trenches, for example, silicon trenches. In another embodiment, vertical TFETs can be used on different material systems acting as a substrate and/or trenches (for example, Si, Ge, III-V semiconductors, GaN, and the like). In one embodiment, the tunneling direction in the channel of the vertical TFET can be perpendicular to the Si substrates. In one embodiment, this can be different than the tunneling direction in the channel of lateral TFETs.

公开(公告)号：US20200312976A1

公开(公告)日：2020-10-01

申请号：US16363632

申请日：2019-03-25

申请人： Intel Corporation

发明人： Seung Hoon Sung ,  Jack Kavalieros ,  Ian Young ,  Matthew Metz ,  Uygar Avci ,  Devin Merrill ,  Ashish Verma Penumatcha ,  Chia-Ching Lin ,  Owen Loh

IPC分类号： H01L29/49 ,  H01L29/51 ,  H01L29/78 ,  H01L21/28 ,  H01L29/66

摘要： Techniques and mechanisms to provide electrical insulation between a gate and a channel region of a non-planar circuit device. In an embodiment, the gate structure, and insulation spacers at opposite respective sides of the gate structure, each extend over a semiconductor fin structure. In a region between the insulation spacers, a first dielectric layer extends conformally over the fin, and a second dielectric layer adjoins and extends conformally over the first dielectric layer. A third dielectric layer, adjoining the second dielectric layer and the insulation spacers, extends under the gate structure. Of the first, second and third dielectric layers, the third dielectric layer is conformal to respective sidewalls of the insulation spacers. In another embodiment, the second dielectric layer is of dielectric constant which is greater than that of the first dielectric layer, and equal to or less than that of the third dielectric layer.

公开(公告)号：US20200286686A1

公开(公告)日：2020-09-10

申请号：US16296082

申请日：2019-03-07

申请人： Intel Corporation

发明人： Chia-Ching Lin ,  Sou-Chi Chang ,  Ashish Verma Penumatcha ,  Nazila Haratipour ,  Seung Hoon Sung ,  Owen Y. Loh ,  Jack Kavalieros ,  Uygar E. Avci ,  Ian A. Young

IPC分类号： H01G7/06 ,  H01L49/02 ,  H01L27/108

摘要： Described is a ferroelectric-based capacitor that improves reliability of a ferroelectric memory by using low-leakage insulating thin film. In one example, the low-leakage insulating thin film is positioned between a bottom electrode and a ferroelectric oxide. In another example, the low-leakage insulating thin film is positioned between a top electrode and ferroelectric oxide. In yet another example, the low-leakage insulating thin film is positioned in the middle of ferroelectric oxide to reduce the leakage current and improve reliability of the ferroelectric oxide.

公开(公告)号：US10565138B2

公开(公告)日：2020-02-18

申请号：US16146534

申请日：2018-09-28

申请人： Intel Corporation

发明人： Jack Kavalieros ,  Ram Krishnamurthy ,  Sasikanth Manipatruni ,  Gregory Chen ,  Van Le ,  Amrita Mathuriya ,  Abhishek Sharma ,  Raghavan Kumar ,  Phil Knag ,  Huseyin Sumbul ,  Ian Young

IPC分类号： G11C8/00 ,  G06F13/16 ,  H01L25/18 ,  H03K19/21 ,  G11C11/408 ,  H01L23/522 ,  G11C11/419

摘要： Techniques and mechanisms for providing data to be used in an in-memory computation at a memory device. In an embodiment a memory device comprises a first memory array and circuitry, coupled to the first memory array, to perform a data computation based on data stored at the first memory array. Prior to the computation, the first memory array receives the data from a second memory array of the memory device. The second memory array extends horizontally in parallel with, but is offset vertically from, the first memory array. In another embodiment, a single integrated circuit die includes both the first memory array and the second memory array.