METHOD FOR PROCESSING A SEMICONDUCTOR WAFER, SEMICONDUCTOR WAFER, CLIP AND SEMICONDUCTOR DEVICE

    公开(公告)号:US20210305198A1

    公开(公告)日:2021-09-30

    申请号:US17202990

    申请日:2021-03-16

    IPC分类号: H01L23/00

    摘要: A method for processing a semiconductor wafer is provided. A semiconductor wafer includes a first main surface and a second main surface. Defects are generated inside the semiconductor wafer to define a detachment plane parallel to the first main surface. Processing the first main surface defines a plurality of electronic semiconductor components. A glass structure is provided which includes a plurality of openings. The glass structure is attached to the processed first main surface, each of the plurality of openings leaving a respective area of the plurality of electronic semiconductor components uncovered. A polymer layer is applied to the second main surface and the semiconductor wafer is split into a semiconductor slice and a remaining semiconductor wafer by cooling the polymer layer beneath its glass transition temperature along the detachment plane. The semiconductor slice includes the plurality of electronic semiconductor components.

    Power Semiconductor Device with Temperature Protection
    6.
    发明申请
    Power Semiconductor Device with Temperature Protection 审中-公开
    具有温度保护功能的半导体器件

    公开(公告)号:US20160133620A1

    公开(公告)日:2016-05-12

    申请号:US14920374

    申请日:2015-10-22

    摘要: A temperature protected power semiconductor device has a substrate which includes a power field effect transistor (FET) and a thermosensitive element. The power FET has a gate electrode connected to a gate, a drift region, and first and second terminals for a load current. The load current is controllable during operation by a voltage applied between the gate and the first terminal. The thermosensitive element has a first contact connected to one of the gate electrode and first terminal of the power FET, and a second contact connected to the other one of the gate electrode and first terminal. The thermosensitive element is located close to the power FET and thermally coupled thereto. The thermosensitive element is configured to cause the power FET to reduce the load current in case of an exceedance of a limit temperature of the power FET, by interconnecting the gate and first terminal.

    摘要翻译: 温度保护功率半导体器件具有包括功率场效应晶体管(FET)和热敏元件的衬底。 功率FET具有连接到栅极,漂移区域的栅极电极和用于负载电流的第一和第二端子。 通过施加在栅极和第一端子之间的电压在工作期间负载电流是可控的。 热敏元件具有连接到功率FET的栅极电极和第一端子中的一个的第一触点,以及连接到栅电极和第一端子中的另一个的第二触点。 热敏元件靠近功率FET并与其热耦合。 热敏元件被配置为通过互连栅极和第一端子而使功率FET在功率FET的极限温度超过的情况下减小负载电流。