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    Capacitive gas sensor and method of fabricating the same
    1.
    发明授权
    Capacitive gas sensor and method of fabricating the same 有权
    电容式气体传感器及其制造方法

    公开(公告)号：US07816681B2

    公开(公告)日：2010-10-19

    申请号：US12502824

    申请日：2009-07-14

    申请人： Jaehyun Moon ,  Su Jae Lee ,  Jin Ah Park ,  Tae Hyoung Zyung

    发明人： Jaehyun Moon ,  Su Jae Lee ,  Jin Ah Park ,  Tae Hyoung Zyung

    IPC分类号： H01L21/28 ,  H01L29/22

    CPC分类号： G01N27/227 ,  Y10S977/921

    摘要： A capacitive gas sensor and a method of fabricating the same are provided. The capacitive gas sensor includes an insulating substrate, a metal electrode and a micro thin-film heater wire integrally formed on the same plane of the insulating substrate, and an oxide detection layer coated on the metal electrode and the micro thin-film heater wire. The fabrication method includes depositing a metal layer on an insulating substrate, etching the metal layer so that a metal electrode and a micro thin-film heater wire form an interdigital transducer on the same plane, and forming a nano crystal complex oxide thin film or a complex oxide nano fiber coating layer on the metal electrode and the micro thin-film heater wire as a detecting layer. The capacitive gas sensor can be easily fabricated and can have excellent characteristics such as high sensitivity, high selectivity, high stability, and low power consumption.

    摘要翻译： 提供了一种电容式气体传感器及其制造方法。 电容性气体传感器包括绝缘基板，金属电极和整体形成在绝缘基板的同一平面上的微薄膜加热丝，以及涂覆在金属电极和微薄膜加热丝上的氧化物检测层。 该制造方法包括在绝缘基板上沉积金属层，蚀刻金属层，使得金属电极和微薄膜加热丝线在同一平面上形成叉指式换能器，并形成纳米晶体复合氧化物薄膜或 金属电极上的复合氧化物纳米纤维涂层和微薄膜加热丝作为检测层。 电容气体传感器可以容易地制造，并且可以具有优异的特性，例如高灵敏度，高选择性，高稳定性和低功耗。

    METHOD OF FABRICATING SEMICONDUCTOR OXIDE NANOFIBERS FOR SENSOR AND GAS SENSOR USING THE SAME
    2.
    发明申请
    METHOD OF FABRICATING SEMICONDUCTOR OXIDE NANOFIBERS FOR SENSOR AND GAS SENSOR USING THE SAME 审中-公开
    使用该传感器和气体传感器制造半导体氧化物纳米纤维的方法

    公开(公告)号：US20100155691A1

    公开(公告)日：2010-06-24

    申请号：US12536664

    申请日：2009-08-06

    申请人： Su Jae LEE ,  Jin Ah Park ,  Jaehyun Moon ,  Tae Hyoung Zyung

    发明人： Su Jae LEE ,  Jin Ah Park ,  Jaehyun Moon ,  Tae Hyoung Zyung

    IPC分类号： H01L29/66 ,  H01L21/36

    CPC分类号： H01L21/02628 ,  G01N27/127 ,  H01L21/0242 ,  H01L21/02422 ,  H01L21/02565 ,  H01L21/02603

    摘要： A gas sensor for detecting environmentally harmful gases is provided. The sensor includes an insulating substrate, a metal electrode formed on the insulating substrate, and a sensing layer formed on the metal electrode and including a semiconductor oxide (Lan+1NinO3n+1(n=1,2,3)) nanofiber. Therefore, a semiconductor oxide (Lan+1NinO3n+1(n=1,2,3)) has an ABO3-type basic crystalline structure and thus is stable in structure, and is a representative material having a nonstoichiometric composition due to oxygen defects. Since the semiconductor oxide has great oxygen defects on its surface, a great change in electrical resistance may be exhibited due to reactive gas adsorption and oxidation/reduction reaction on the oxide surface. Also, a method of fabricating the gas sensor is provided.

    摘要翻译： 提供了一种用于检测环境有害气体的气体传感器。 传感器包括绝缘基板，形成在绝缘基板上的金属电极和形成在金属电极上的包含半导体氧化物（Lan + 1NinO3n + 1（n = 1,2,3））纳米纤维的感测层。 因此，半导体氧化物（Lan + 1NinO3n + 1（n = 1,2,3））具有ABO 3型碱性结晶结构，因此结构稳定，是由于氧缺陷而具有非化学计量组成的代表性材料。 由于半导体氧化物在其表面上具有大的氧缺陷，所以由于氧化物表面上的反应性气体吸附和氧化/还原反应，可能会发生很大的电阻变化。 另外，提供了一种制造气体传感器的方法。