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    Controlling laser polarization
    2.
    发明授权
    Controlling laser polarization 有权
    控制激光极化

    公开(公告)号：US06381259B2

    公开(公告)日：2002-04-30

    申请号：US09770275

    申请日：2001-01-29

    申请人： James J. Cordingley ,  Donald V. Smart ,  Michael Plotkin ,  William Lauer

    发明人： James J. Cordingley ,  Donald V. Smart ,  Michael Plotkin ,  William Lauer

    IPC分类号： H01S310

    CPC分类号： B23K26/0736 ,  B23K26/0624 ,  B23K26/0643 ,  B23K26/0665 ,  B23K2101/38 ,  B23K2103/12

    摘要： A laser polarization control apparatus includes a polarization modifying device and a controller. The polarization modifying device receives a laser beam and modifies the polarization of the laser beam. The controller adjusts an input to the polarization modifying device in order to control modification of the polarization of the laser beam based on alignment of a structure to be processed by the laser beam. The polarization modifying device is configured for incorporation into a laser processing system that produces the laser beam received by the polarization modifying device and that focuses the laser beam modified by the polarization modifying device onto a workpiece that includes the structure to be processed by the laser beam. An analyzer tool receives the laser beam modified by the polarization modification device and measures the modification of the polarization of the laser beam by the polarization modification device. A plurality of inputs are applied to the polarization modifying device to control modification of the polarization of the laser beam, and the laser beam modified by the polarization modification device is analyzed using the analyzer tool in order to measure modification of the polarization of the laser beam by the polarization modification device. The relationship between the inputs to the polarization control device and the modification of the polarization of the laser beam is stored.

    摘要翻译： 激光偏振控制装置包括偏振修正装置和控制器。 偏振改变装置接收激光束并修改激光束的偏振。 控制器调整偏振修正装置的输入，以便基于由激光束处理的结构的对准来控制激光束的偏振的修改。 偏振修改装置被配置成结合到激光处理系统中，该激光处理系统产生由偏振修改装置接收的激光束，并且将由偏振修正装置修改的激光束聚焦在工件上，该工件包括要被激光束处理的结构 。 分析器工具接收由偏振修正装置修改的激光束并且通过偏振修正装置测量激光束的偏振的修改。 多个输入被施加到偏振修改装置以控制激光束的偏振的修改，并且使用分析器工具分析由偏振修正装置修改的激光束，以便测量激光束的偏振的修改 通过偏振改性装置。 存储偏振控制装置的输入与激光束的偏振的修正之间的关系。

    Controlling laser polarization
    3.
    发明授权
    Controlling laser polarization 失效
    控制激光极化

    公开(公告)号：US06181728B2

    公开(公告)日：2001-01-30

    申请号：US09109482

    申请日：1998-07-02

    申请人： James J. Cordingley ,  Donald V. Smart ,  Michael Plotkin ,  William Lauer

    发明人： James J. Cordingley ,  Donald V. Smart ,  Michael Plotkin ,  William Lauer

    IPC分类号： H01S310

    CPC分类号： B23K26/0736 ,  B23K26/0624 ,  B23K26/0643 ,  B23K26/0665 ,  B23K2101/38 ,  B23K2103/12

    摘要： A laser polarization control apparatus includes a polarization modifying device, such as a liquid crystal variable retarder, and a controller. The polarization modifying device receives a laser beam and modifies the polarization of the laser beam. The controller, which is connected to the polarization modifying device, adjusts an input to the polarization modifying device in order to control modification of the polarization of the laser beam based on alignment of a structure to be processed by the laser beam. For example, the polarization of the laser beam may be rotated to correspond with the alignment of a link in a semiconductor device to be cut by the laser beam. The polarization modifying device is configured for incorporation into a laser processing system that produces the laser beam received by the polarization modifying device and that focuses the laser beam modified by the polarization modifying device onto a workpiece that includes the structure to be processed by the laser beam. An analyzer tool receives the laser beam modified by the polarization modification device and measures the modification of the polarization of the laser beam by the polarization modification device.

    摘要翻译： 激光偏振控制装置包括诸如液晶可变延迟器的偏振修正装置和控制器。 偏振改变装置接收激光束并修改激光束的偏振。 连接到偏振修正装置的控制器调整偏振修正装置的输入，以便基于由激光束处理的结构的对准来控制激光束的偏振的改变。 例如，激光束的偏振可以旋转以对应于要被激光束切割的半导体器件中的连接件的对准。 偏振修改装置被配置成结合到激光处理系统中，该激光处理系统产生由偏振修改装置接收的激光束，并且将由偏振修正装置修改的激光束聚焦在工件上，该工件包括要被激光束处理的结构 。 分析器工具接收由偏振修正装置修改的激光束并且通过偏振修正装置测量激光束的偏振的修改。