摘要:
In a deposition apparatus according to an embodiment of the present invention, a buffer unit is provided between a vaporizer and a reactor of a vaporization supply system to temporarily store source gas, thus, before and when the source gas is supplied to the reactor, the variations of the internal pressure of the vaporizer can be reduced to supply the constant amount of source gas of to reaction spaces, thereby depositing a thin film having a uniform thin-film thickness.
摘要:
An apparatus and method for fabricating a semiconductor device using a 4-way valve with improved purge efficiency by improving a gas valve system by preventing dead volume from occurring are provided. The apparatus includes a reaction chamber in which a substrate is processed to fabricate a semiconductor device; a first processing gas supply pipe supplying a first processing gas into the reaction chamber; a 4-way valve having a first inlet, a second inlet, a first outlet, and a second outlet and installed at the first processing gas supply pipe such that the first inlet and the first outlet are connected to the first processing gas supply pipe; a second processing gas supply pipe connected to the second inlet of the 4-way valve to supply a second processing gas; a bypass connected to the second outlet of the 4-way valve; and a gate valve installed at the bypass.
摘要:
An apparatus and method for fabricating a semiconductor device using a 4-way valve with improved purge efficiency by improving a gas valve system by preventing dead volume from occurring are provided. The apparatus includes a reaction chamber in which a substrate is processed to fabricate a semiconductor device; a first processing gas supply pipe supplying a first processing gas into the reaction chamber; a 4-way valve having a first inlet, a second inlet, a first outlet, and a second outlet and installed at the first processing gas supply pipe such that the first inlet and the first outlet are connected to the first processing gas supply pipe; a second processing gas supply pipe connected to the second inlet of the 4-way valve to supply a second processing gas; a bypass connected to the second outlet of the 4-way valve; and a gate valve installed at the bypass.
摘要:
Digital image photographing apparatuses and methods of controlling the same to provide location information are disclosed. A disclosed example method includes generating a preview image by photographing an object; detecting the current location of the digital image photographing apparatus; detecting a photographing direction in which the digital image photographing apparatus photographed the object; generating distance information regarding the object; and displaying the distance information regarding the object according to the photographing direction around the current location of the digital image photographing apparatus. Digital image photographing apparatuses disclosed herein are capable of providing location information and/or additional information regardless of its their optical limits.
摘要:
An optical detection device for biochemically analyzing samples of microfluidic chips such as DNA chips or protein chips is provided. The optical detection device includes a light source for generating excitation light to excite a sample, a detection plate having an optical waveguide with the sample mounted thereon, a linear symmetry lens for shaping the excitation light into a desired shape having a uniform intensity distribution and transmitting it to the detection plate, and a detector for detecting radiation from the sample.
摘要:
An e-mail printer having an authentication procedure includes an e-mail receiving unit that includes a storage device to store e-mail which is received in a predetermined memory area allocated to each user and an authentication device to authenticate the user so that the user accesses the storage device.
摘要:
A method to selectively receive mail by an Internet mail apparatus includes receiving and storing mail header information of at least one mail. Mail header information is selected corresponding to a predetermined mail from the at least one mail. A mail transmission command is transmitted to an incoming mail server requesting transmission of the predetermined mail corresponding to the mail header information selected. The Internet mail apparatus, in response to the mail transmission command, receives the predetermined mail.
摘要:
A method to enlarge and change an image displayed by a photographing apparatus, and a photographing apparatus using the same. The enlargement method includes adding guide information regarding a zoom-in area and compensating the guide information based on the zoom-in command.
摘要:
Digital image photographing apparatuses and methods of controlling the same to provide location information are disclosed. A disclosed example method includes generating a preview image by photographing an object; detecting the current location of the digital image photographing apparatus; detecting a photographing direction in which the digital image photographing apparatus photographed the object; generating distance information regarding the object; and displaying the distance information regarding the object according to the photographing direction around the current location of the digital image photographing apparatus. Digital image photographing apparatuses disclosed herein are capable of providing location information and/or additional information regardless of its their optical limits.
摘要:
Provided is an actuator of a disk drive to move a read/write head, for recording and reproducing data, to a predetermined position on a disk. The actuator includes an actuator pivot installed on a base member of the disk drive, a swing arm that is rotatably coupled to the actuator pivot and has a suspension supporting the head at a leading end portion of the swing arm, a coil support portion provided at a rear end portion of the swing arm, a VCM coil coupled to the coil support portion and having four sections having respective particular directions, and magnets arranged to face the VCM coil and having four poles respectively corresponding to the four sections of the VCM coil.