公开(公告)号：US5936726A

公开(公告)日：1999-08-10

申请号：US913392

申请日：1997-09-09

申请人： Kazuo Takeda ,  Hidetsugu Ishida ,  Atsushi Hiraiwa

发明人： Kazuo Takeda ,  Hidetsugu Ishida ,  Atsushi Hiraiwa

IPC分类号： G01N21/94 ,  G01N21/00

CPC分类号： G01N21/94

摘要： An inspection method and apparatus for discriminating the foreign particles on the surface of a sample from the foreign particles or defects within the sample, and a semiconductor-device producing method using the inspection method and apparatus. The inspection apparatus includes a light source, a first optical system that causes the light from the source to be directed to the sample, a second optical system for condensing the light coming back from the sample, a polarizing prism for separating the condensed light into polarized components, and optical detectors, for detecting the polarized components. The two optical systems, are arranged for their optical axes to make an angle of 50.degree. to 120.degree. relative to each other. The foreign particles on the surface of the sample and the foreign particles or defects within the sample are respectively discriminated from each other as side scattered light and backward scattered light by utilizing the difference between the intensity ratios of the polarized light components.

摘要翻译： PCT No.PCT / JP95 / 00398 Sec。 371日期1997年9月9日 102（e）日期1997年9月9日PCT 1996年3月10日PCT公布。 第WO96 / 28721号公报 日期1996年9月19日一种用于鉴别样品表面上的异物与样品中的异物或缺陷的检查方法和装置，以及使用检查方法和装置的半导体器件制造方法。 检查装置包括光源，使来自源的光被引导到样本的第一光学系统，用于聚集从样品回来的光的第二光学系统，用于将聚光分离成偏振光的偏光棱镜 组件和光学检测器，用于检测偏振分量。 两个光学系统被布置成使它们的光轴相对于彼此成50°到120°的角度。 通过利用偏振光分量的强度比之间的差异，将样品表面上的杂质颗粒和样品中的异物或缺陷分别彼此区分为侧向散射光和反向散射光。

公开(公告)号：US10101261B2

公开(公告)日：2018-10-16

申请号：US13521947

申请日：2011-01-11

申请人： Kazuo Takeda

发明人： Kazuo Takeda

IPC分类号： G01N15/14 ,  G01N21/53 ,  B01L3/00 ,  G01N15/10

摘要： The object of the present invention is to provide (1) a cell sorter, (2) a flow cytometer capable of detecting sideward scattered light, (3) a method for accurately measuring cell concentration, (4) a method for multicolor staining analysis without a fluorescence correction, and the like, which satisfy requirements that carry-over and cross contamination of samples do not occur.The object can be solved by an apparatus for separating particles comprising: a flow cell wherein a flow path is formed in a flat substrate, an illumination unit configured to illuminate the particles in a sample liquid flowing through the flow path, a detection unit configured to detect particles of interest by detecting scattered light or fluorescence from the particle when the particle is illuminated, and identifying the particle based on its signal intensity, a constant-pressure pump which applies a pressure pulse to the particles in the sample liquid flowing through the flow path in the flow cell, and an electromagnetic valve connected thereto, and a control unit configured to control the movement of the electromagnetic valve based on the signal from the detection unit.

公开(公告)号：US20100253220A1

公开(公告)日：2010-10-07

申请号：US12819053

申请日：2010-06-18

申请人： Kazuo Takeda ,  Hiroji Morimoto

发明人： Kazuo Takeda ,  Hiroji Morimoto

IPC分类号： H01J17/16

CPC分类号： H01J61/34 ,  H01J5/56 ,  H01J61/50 ,  H01J61/52 ,  H01J61/82 ,  H01J61/827

摘要： A metal vapor discharge lamp and a lighting fixture are downsized without causing breakage of an outer tube because of optimization of a positional relation among the outer tube (34), an inner tube (32), and an arc tube (40). The metal vapor discharge lamp has the arc tube, the inner tube housing the arc tube, and the outer tube housing the inner tube. The positional relation satisfies the relation of 2×A+B≧1.06. In a cross section of the lamp (the cross section of the arc tube is unshown for convenience), A (mm) represents the shortest distance between the arc tube and the inner tube along a line in a radial direction of the inner tube, and B (mm) represents a distance between the inner tube and the outer tube on a line segment C that is extension of the line.

摘要翻译： 由于外管（34），内管（32）和电弧管（40）之间的位置关系的优化，金属蒸汽放电灯和照明器具小型化而不会导致外管破裂。 金属蒸汽放电灯具有电弧管，内管容纳电弧管，外管容纳内管。 位置关系满足2×A +B≥1.06的关系。 在灯的横截面（为了方便起见，电弧管的横截面未示出），A（mm）表示沿着内管的径向的弧线与内管之间的最短距离， B（mm）表示作为线路延伸的线段C上的内管与外管之间的距离。

公开(公告)号：US20100077600A1

公开(公告)日：2010-04-01

申请号：US12559327

申请日：2009-09-14

申请人： Takateru Seki ,  Zhou Wenjun ,  Kazuo Takeda ,  Takefumi Kubota

发明人： Takateru Seki ,  Zhou Wenjun ,  Kazuo Takeda ,  Takefumi Kubota

IPC分类号： G11B5/187 ,  G11B5/31

CPC分类号： G11B5/3166 ,  G11B5/3169 ,  G11B5/3173 ,  G11B5/3906 ,  Y10T29/49036 ,  Y10T29/49041 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： According to one embodiment, a method for manufacturing a thin film magnetic head includes forming on a substrate magnetic head portions having a magnetoresistive element and resistance detection elements for measuring an amount of polishing; slicing the substrate to form at least one row bar; polishing the ABS of each row bar; forming rails on the polished ABS; and cutting each row bar to separate each magnetic head portion. The step of polishing the ABS includes measuring a resistance of each resistance detection element and a resistance of each magnetoresistive element; calculating an offset value between the resistance detection element and the magnetoresistive element; and calculating a final resistance of the resistance detection element by using the calculated offset value. When the resistance of the resistance detection element reaches the final resistance, polishing of the ABS of the row bar is terminated. Other methods are presented as well.

摘要翻译： 根据一个实施例，一种制造薄膜磁头的方法包括在基板上形成具有磁阻元件的磁头部分和用于测量抛光量的电阻检测元件; 将基板切片以形成至少一排排条; 抛光每排行的ABS; 在抛光ABS上形成轨道; 并切割每个行条以分离每个磁头部分。 抛光ABS的步骤包括测量每个电阻检测元件的电阻和每个磁阻元件的电阻; 计算电阻检测元件和磁阻元件之间的偏移值; 以及通过使用所计算的偏移值来计算电阻检测元件的最终电阻。 当电阻检测元件的电阻达到最终电阻时，排列的ABS的抛光结束。 还提出了其他方法。

公开(公告)号：US20090316410A1

公开(公告)日：2009-12-24

申请号：US12160744

申请日：2007-05-28

申请人： Kazuo Takeda ,  Hiroji Morimoto

发明人： Kazuo Takeda ,  Hiroji Morimoto

IPC分类号： H01J61/30 ,  F21V7/00

CPC分类号： H01J61/34 ,  H01J5/56 ,  H01J61/50 ,  H01J61/52 ,  H01J61/82 ,  H01J61/827

摘要： A metal vapor discharge lamp and a lighting fixture are downsized without causing breakage of an outer tube because of optimization of a positional relation among the outer tube (34), an inner tube (32), and an arc tube (40). The metal vapor discharge lamp has the arc tube, the inner tube housing the arc tube, and the outer tube housing the inner tube. The positional relation satisfies the relation of 2×A+B≧1.06. In a cross section of the lamp (the cross section of the arc tube is unshown for convenience), A (mm) represents the shortest distance between the arc tube and the inner tube along a line in a radial direction of the inner tube, and B (mm) represents a distance between the inner tube and the outer tube on a line segment C that is extension of the line.

摘要翻译： 由于外管（34），内管（32）和电弧管（40）之间的位置关系的优化，金属蒸汽放电灯和照明器具小型化而不会导致外管破裂。 金属蒸汽放电灯具有电弧管，内管容纳电弧管，外管容纳内管。 位置关系满足2×A + B> = 1.06的关系。 在灯的横截面（为了方便起见，电弧管的横截面未示出），A（mm）表示沿着内管的径向的弧线与内管之间的最短距离， B（mm）表示作为线路延伸的线段C上的内管与外管之间的距离。

公开(公告)号：US07528408B2

公开(公告)日：2009-05-05

申请号：US11342602

申请日：2006-01-31

申请人： Kazuo Takeda ,  Jun Gotou ,  Masakazu Saito ,  Makoto Ohkura ,  Takeshi Satou ,  Hiroshi Fukuda ,  Takeo Shiba

发明人： Kazuo Takeda ,  Jun Gotou ,  Masakazu Saito ,  Makoto Ohkura ,  Takeshi Satou ,  Hiroshi Fukuda ,  Takeo Shiba

IPC分类号： H01L29/10

CPC分类号： C30B29/06 ,  C30B13/00 ,  Y10S117/904

摘要： To improve the laser annealing process for polycrystallizing amorphous silicon to form silicon thin films having large crystal particle diameters at a high throughput, the present invention is directed to a process of crystallization by irradiation of a semiconductor thin film formed on a substrate with pulsed laser light. The process comprises having a means to shape laser light into a linear beam and a means to periodically and spatially modulate the intensity of pulsed laser in the direction of the long axis of the linear beam by passing through a phase-shifting stripy pattern perpendicular to the long axis, and collectively forming for each shot a polycrystalline film composed of crystals which have grown in a certain direction over the entire region irradiated with the linear beam.

摘要翻译： 为了改善多晶非晶硅的激光退火工艺，以高通量形成具有大晶粒直径的硅薄膜，本发明涉及通过用脉冲激光照射形成在基板上的半导体薄膜进行结晶的工艺 。 该方法包括具有将激光成形为线性光束的装置以及通过穿过垂直于线性光束的相移条纹图案来周期性和空间地调制脉冲激光在线性光束的长轴方向上的强度的装置 长轴，并且对于每一次射出，共同形成由在被线束束照射的整个区域上沿一定方向生长的晶体的多晶膜。

公开(公告)号：US07413604B2

公开(公告)日：2008-08-19

申请号：US10942911

申请日：2004-09-17

申请人： Kazuo Takeda ,  Masakazu Saito ,  Yukio Takasaki ,  Hironobu Abe ,  Makoto Ohkura ,  Yoshinobu Kimura ,  Takeo Shiba

发明人： Kazuo Takeda ,  Masakazu Saito ,  Yukio Takasaki ,  Hironobu Abe ,  Makoto Ohkura ,  Yoshinobu Kimura ,  Takeo Shiba

IPC分类号： C30B1/02

CPC分类号： H01L21/02686 ,  C30B13/00 ,  C30B29/06 ,  H01L21/02532 ,  H01L21/02595 ,  H01L21/2026 ,  H01L29/6675 ,  H01L29/78672

摘要： The present invention provides a process for producing a polycrystal silicon film which comprises a step of forming a polycrystal silicon film by light irradiation of a silicon film set on a substrate, and a step of selecting substrate samples having an average grain size in a plane of the sample of 500 nm or more. According to the present invention, stable production of a high-performance poly-silicon TFT liquid crystal display becomes possible.

摘要翻译： 本发明提供一种多晶硅膜的制造方法，其特征在于，包括通过在基板上设置硅膜的光照射形成多晶硅膜的步骤，以及选择平均粒径在 500nm以上的样品。 根据本发明，可以稳定地生产高性能多晶硅TFT液晶显示器。

公开(公告)号：US20060279744A1

公开(公告)日：2006-12-14

申请号：US11407905

申请日：2006-04-21

申请人： Kazuo Takeda ,  Jun Gotoh ,  Daisuke Mutou

发明人： Kazuo Takeda ,  Jun Gotoh ,  Daisuke Mutou

IPC分类号： G01B11/02

CPC分类号： G01B11/0683 ,  G01B11/0633

摘要： A laser light is projected to a thin film deposited on a transparent substrate, and measurement is performed on the entire measurement area of the substrate, and transmission intensity is measured by a transmission light intensity monitor and reflection light intensity is measured by a reflection light intensity monitor at the same points and at the same number of points on the substrate. From the value of “A=1−(R+T)” where R represents reflectivity and T is transmissivity, film thickness is measured and evaluated from the relation of the value A with film thickness. By this procedure, film thickness can be determined on 10,000 substrates or more per minute and film thickness of thin film can be measured over the entire substrate surface.

公开(公告)号：US20060137959A1

公开(公告)日：2006-06-29

申请号：US11315343

申请日：2005-12-23

申请人： Nobuyuki Iida ,  Noboru Yamagishi ,  Kazuo Takeda ,  Yukio Ito

发明人： Nobuyuki Iida ,  Noboru Yamagishi ,  Kazuo Takeda ,  Yukio Ito

IPC分类号： G07D7/00 ,  G07F7/04 ,  G06K9/00 ,  G06K7/00

CPC分类号： G07F7/04 ,  G07D7/04 ,  G07D7/12

摘要： The bill discriminating device includes: a body; and a mask portion, the body includes a main substrate having a light source, the mask portion includes a bill insertion port formed to be placed in a front surface of the bill discriminating device, and a bill chute passage having one end connected to a bill conveying passage and the other end extending to the bill insertion port, at least one surface of the bill chute passage is formed of a light guide member including a portion extending from the light source to the bill insertion port, and light emitted from the light source is optically connected to the bill insertion port via the light guide member.

摘要翻译： 票据识别装置包括：身体; 以及掩模部，所述主体包括具有光源的主基板，所述掩模部包括形成为放置在所述纸币识别装置的前表面中的纸币插入口，以及一个纸币通道，其一端连接到纸币 输送通道，另一端延伸到纸币插入口，纸币滑槽通道的至少一个表面由导光构件形成，导光构件包括从光源延伸到纸币插入口的部分，以及从光源发出的光 经由导光部件与纸币插入口光学连接。

公开(公告)号：US20060049765A1

公开(公告)日：2006-03-09

申请号：US11197850

申请日：2005-08-05

申请人： Isao Ota ,  Kazuo Takeda ,  Kazushige Sakamoto

发明人： Isao Ota ,  Kazuo Takeda ,  Kazushige Sakamoto

IPC分类号： H01J17/20

CPC分类号： H01J61/125 ,  H01J61/827

摘要： Provided is a metal halide lamp capable of being dimmed, which is prevented from non-lighting due to leakage of an arc tube attributable to a crack occurring at thin tubes, as well as realizing a desired color characteristic. The metal halide lamp has an arc tube that includes an envelope made of translucent ceramic, a pair of electrodes, and metal halides, the metal halides including rare earth metal halide, sodium halide, and magnesium halide, the rare earth metal halide being at least one of dysprosium halide, thulium halide, holmium halide, cerium halide, and praseodymium halide, and the magnesium halide being at least one of magnesium iodide and magnesium bromide, where when a maximum lamp power P (W) is in a range of 70 W to 250 W, the following relations are satisfied: 0.0345A+0.0028B

摘要翻译： 提供一种能够变暗的金属卤化物灯，由于由于在细管发生的裂纹而导致的电弧管的泄漏，防止了非点亮，并且实现了所需的颜色特性。 金属卤化物灯具有包括由半透明陶瓷制成的外壳，一对电极和金属卤化物的电弧管，所述金属卤化物包括稀土金属卤化物，卤化钠和卤化镁，所述稀土金属卤化物至少为 卤化镝，卤化钌，卤化钬，卤化铈和卤化镨中的至少一种，卤化镁是碘化镁和溴化镁中的至少一种，其中当最大灯功率P（W）在70W的范围内时 至250W，满足以下关系：0.0345A + 0.0028B <0.0015P + 0.0475; A> = 0.021P + 0.313; 和B> = 10.0，其中A（mg）表示金属卤化物的总含量，B（mol％）表示卤化镁与金属卤化物的含量比。