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1.发明授权Ultimate analyzer, scanning transmission electron microscope and ultimate analysis method 有权终极分析仪，扫描透射电子显微镜和最终分析方法公开(公告)号：US06794648B2
公开(公告)日：2004-09-21
申请号：US10196577
申请日：2002-07-17
IPC分类号： H01J3726
CPC分类号： G01N23/04 , G01N23/20 , H01J37/05 , H01J37/244 , H01J37/256 , H01J37/265 , H01J37/28 , H01J2237/057 , H01J2237/24475 , H01J2237/24485 , H01J2237/24495 , H01J2237/2522 , H01J2237/2802 , H01J2237/2804 , H01J2237/2809
摘要： An object of the present invention is to provide an ultimate analyzer which can display an element distribution image of an object to be analyzed with high contrast to determine the positions of the element distribution with high accuracy, and a scanning transmission electron microscope and a method of analyzing elements using the ultimate analyzer. The present invention exists in an ultimate analyzer comprising a scattered electron beam detector for detecting an electron beam scattered by an object to be analyzed; an electron spectrometer for energy dispersing an electron beam transmitted through the object to be analyzed; an electron beam detector for detecting said dispersed electron beam; and a control unit for analyzing elements of the object to be analyzed based on an output signal of the electron beam detected by the electron beam detector and an output signal of the electron beam detected by the scattered electron beam detector. Further, the present invention exists in a scanning transmission electron microscope comprising the above ultimate analyzer; an electron beam source; an electron beam scanning coil; a scattered electron beam detector; objective lenses; a focusing lens; a magnifying magnetic field lens; and a focus adjusting electromagnetic lens. Furthermore, the ultimate analyzer or the scanning transmission electron microscope may comprises a control unit which makes it possible that both of an image of element distribution and an STEM image detected and formed by the scatted electron beam detector are observed at a time in real time, and the image of element distribution is corrected by the STEM image detected and formed by the scattered electron beam detector.
摘要翻译： 本发明的目的是提供一种能够以高对比度显示待分析物体的元素分布图像，以高精度地确定元件分布的位置的最终分析器，以及扫描透射电子显微镜和 使用最终分析仪分析元素。 本发明存在于包含用于检测由待分析物体散射的电子束的散射电子束检测器的终极分析仪中; 用于能量分散通过待分析物体的电子束的电子光谱仪; 用于检测所述分散的电子束的电子束检测器; 以及控制单元，用于基于由电子束检测器检测的电子束的输出信号和由散射电子束检测器检测的电子束的输出信号来分析待分析物体的元件。 此外，本发明存在于包含上述极限分析仪的扫描透射电子显微镜中; 电子束源; 电子束扫描线圈; 散射电子束检测器; 物镜; 聚焦镜头; 放大磁场透镜; 和聚焦调整电磁透镜。 此外，最终分析器或扫描透射电子显微镜可以包括控制单元，其使得可以实时地观察由散射电子束检测器检测和形成的元件分布的图像和STEM图像两者， 并且通过由散射电子束检测器检测和形成的STEM图像校正元件分布的图像。
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2.发明授权Ultimate analyzer, scanning transmission electron microscope and ultimate analysis method 有权终极分析仪，扫描透射电子显微镜和最终分析方法公开(公告)号：US06933501B2
公开(公告)日：2005-08-23
申请号：US10798306
申请日：2004-03-12
IPC分类号： G01N23/04 , G01N23/20 , H01J37/256 , H01J37/26 , H11J37/153
CPC分类号： G01N23/04 , G01N23/20 , H01J37/05 , H01J37/244 , H01J37/256 , H01J37/265 , H01J37/28 , H01J2237/057 , H01J2237/24475 , H01J2237/24485 , H01J2237/24495 , H01J2237/2522 , H01J2237/2802 , H01J2237/2804 , H01J2237/2809
摘要： The present invention provides an ultimate analyzer which displays an element distribution image of an object with high contrast and high accuracy. A scanning transmission electron microscope and a method of analyzing elements using the ultimate analyzer is also provided. The ultimate analyzer comprises a scattered electron beam detector for detecting an electron beam scattered by an object; an electron spectrometer for energy dispersing an electron beam transmitted through the object; an electron beam detector for detecting said dispersed electron beam; and a control unit for analyzing elements based on an output signal of the electron beam detected by the electron beam detector and an output signal of the electron beam detected by the scattered electron beam detector.
摘要翻译： 本发明提供了一种显示具有高对比度和高精度的对象的元素分布图像的终极分析器。 还提供扫描透射电子显微镜和使用极限分析仪分析元件的方法。 最终分析仪包括用于检测被物体散射的电子束的散射电子束检测器; 用于能量分散透过物体的电子束的电子能谱仪; 用于检测所述分散的电子束的电子束检测器; 以及用于基于由电子束检测器检测的电子束的输出信号和由散射电子束检测器检测的电子束的输出信号来分析元件的控制单元。
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3.发明授权公开(公告)号：US07250601B2
公开(公告)日：2007-07-31
申请号：US11372057
申请日：2006-03-10
IPC分类号： H01J47/00
CPC分类号： G01N23/2251 , H01J37/05 , H01J37/244 , H01J37/252 , H01J37/26 , H01J37/28 , H01J2237/24485 , H01J2237/24495 , H01J2237/2487 , H01J2237/262 , H01J2237/2802 , H05H1/0037
摘要： An electron beam detector detects a peak of a spectrum, and when a peak position is deviated from a reference position on the electron beam detector, a controller for controlling an electron beam position on the electron beam detector is used to correct a deviation. An electron energy loss spectrum is measured while controlling correction a deviation between an electron beam position on a specimen, and a peak position of the spectrum, and a spectrum measuring with the electron beam detector.
摘要翻译： 电子束检测器检测光谱的峰值，并且当峰值位置偏离电子束检测器上的参考位置时，使用用于控制电子束检测器上的电子束位置的控制器来校正偏差。 测量电子能量损失谱，同时控制校正电子束在样本上的位置与光谱的峰值位置之间的偏差，以及用电子束检测器测量的光谱。
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4.发明授权公开(公告)号：US06703613B2
公开(公告)日：2004-03-09
申请号：US09988339
申请日：2001-11-19
IPC分类号： H01J4700
CPC分类号： G01N23/2251 , H01J37/05 , H01J37/244 , H01J37/252 , H01J37/26 , H01J37/28 , H01J2237/24485 , H01J2237/24495 , H01J2237/2487 , H01J2237/262 , H01J2237/2802 , H05H1/0037
摘要： An electron beam detector detects a peak of a spectrum, and when a peak position is deviated from a reference position on the electron beam detector, a controller for controlling an electron beam position on the electron beam detector is used to correct a deviation. An electron energy loss spectrum is measured while controlling correction a deviation between an electron beam position on a specimen, and a peak position of the spectrum, and a spectrum measuring with the electron beam detector.
摘要翻译： 电子束检测器检测光谱的峰值，并且当峰值位置偏离电子束检测器上的参考位置时，使用用于控制电子束检测器上的电子束位置的控制器来校正偏差。 测量电子能量损失谱，同时控制校正电子束在样本上的位置与光谱的峰值位置之间的偏差，以及用电子束检测器测量的光谱。
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5.发明授权Element mapping unit, scanning transmission electron microscope, and element mapping method 有权元素映射单元，扫描透射电子显微镜和元素映射方法公开(公告)号：US07928376B2
公开(公告)日：2011-04-19
申请号：US11232964
申请日：2005-09-23
申请人： Kazutoshi Kaji , Kazuhiro Ueda , Koji Kimoto , Takashi Aoyama , Shunroku Taya , Shigeto Isakozawa
发明人： Kazutoshi Kaji , Kazuhiro Ueda , Koji Kimoto , Takashi Aoyama , Shunroku Taya , Shigeto Isakozawa
IPC分类号： H01J47/00
CPC分类号： H01J37/256
摘要： There is provided an element mapping unit, scanning transmission electron microscope, and element mapping method that enable to acquire an element mapping image very easily. On the scanning transmission electron microscope, the electron beam transmitted through an object to be analyzed enters into the element mapping unit. The electron beam is analyzed of its energy into spectrum by an electron spectrometer and an electron energy loss spectrum is acquired. Because the acceleration voltage data for each element and window data for 2-window method, 3-window method or contrast tuning method are already stored in a database and accordingly the spectrum measurement is carried out immediately even when an element to be analyzed is changed to another, the operator can confirm a two-dimensional element distribution map immediately. Besides, because every electron beam that enters into an energy filter passes through the object point, aberration strain in the electron spectrometer can be minimized and higher energy stability can be achieved. As a result, drift of the electron energy loss spectrum acquired by analyzing the electron beam into spectrum can be minimized and element distribution with higher accuracy can be acquired.
摘要翻译： 提供了能够非常容易地获取元素映射图像的元素映射单元，扫描透射电子显微镜和元件映射方法。 在扫描透射电子显微镜上，通过待分析物体传输的电子束进入元件映射单元。 电子束通过电子光谱仪将其能量分析成光谱，并获得电子能量损失光谱。 因为用于2窗口方法，3窗口方法或对比度调整方法的每个元素和窗口数据的加速电压数据已经存储在数据库中，因此即使当要分析的元素被改变为 另一方面，操作者可以立即确认二维元素分布图。 此外，由于进入能量过滤器的每个电子束通过物点，所以可以使电子光谱仪中的像差应变最小化并且可以实现更高的能量稳定性。 结果，可以将通过将电子束分析成光谱而获得的电子能量损耗光谱的漂移最小化，并且可以获得具有更高精度的元素分布。
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公开(公告)号：US20060163479A1
公开(公告)日：2006-07-27
申请号：US11372057
申请日：2006-03-10
IPC分类号： G21K7/00
CPC分类号： G01N23/2251 , H01J37/05 , H01J37/244 , H01J37/252 , H01J37/26 , H01J37/28 , H01J2237/24485 , H01J2237/24495 , H01J2237/2487 , H01J2237/262 , H01J2237/2802 , H05H1/0037
摘要： An electron beam detector detects a peak of a spectrum, and when a peak position is deviated from a reference position on the electron beam detector, a controller for controlling an electron beam position on the electron beam detector is used to correct a deviation. An electron energy loss spectrum is measured while controlling correction a deviation between an electron beam position on a specimen, and a peak position of the spectrum, and a spectrum measuring with the electron beam detector.
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7.发明申请Element mapping unit, scanning transmission electron microscope, and element mapping method 有权元素映射单元，扫描透射电子显微镜和元素映射方法公开(公告)号：US20060011836A1
公开(公告)日：2006-01-19
申请号：US11232964
申请日：2005-09-23
申请人： Kazutoshi Kaji , Kazuhiro Ueda , Koji Kimoto , Takashi Aoyama , Shunroku Taya , Shigeto Isakozawa
发明人： Kazutoshi Kaji , Kazuhiro Ueda , Koji Kimoto , Takashi Aoyama , Shunroku Taya , Shigeto Isakozawa
CPC分类号： H01J37/256
摘要： There is provided an element mapping unit, scanning transmission electron microscope, and element mapping method that enable to acquire an element mapping image very easily. On the scanning transmission electron microscope, the electron beam transmitted through an object to be analyzed enters into the element mapping unit. The electron beam is analyzed of its energy into spectrum by an electron spectrometer and an electron energy loss spectrum is acquired. Because the acceleration voltage data for each element and window data for 2-window method, 3-window method or contrast tuning method are already stored in a database and accordingly the spectrum measurement is carried out immediately even when an element to be analyzed is changed to another, the operator can confirm a two-dimensional element distribution map immediately. Besides, because every electron beam that enters into an energy filter passes through the object point, aberration strain in the electron spectrometer can be minimized and higher energy stability can be achieved. As a result, drift of the electron energy loss spectrum acquired by analyzing the electron beam into spectrum can be minimized and element distribution with higher accuracy can be acquired.
摘要翻译： 提供了能够非常容易地获取元素映射图像的元素映射单元，扫描透射电子显微镜和元件映射方法。 在扫描透射电子显微镜上，通过待分析物体传输的电子束进入元件映射单元。 电子束通过电子光谱仪将其能量分析成光谱，并获得电子能量损失光谱。 因为用于2窗口方法，3窗口方法或对比度调整方法的每个元素和窗口数据的加速电压数据已经存储在数据库中，因此即使当要分析的元素被改变为 另一方面，操作者可以立即确认二维元素分布图。 此外，由于进入能量过滤器的每个电子束通过物点，所以可以使电子光谱仪中的像差应变最小化并且可以实现更高的能量稳定性。 结果，可以将通过将电子束分析成光谱而获得的电子能量损耗光谱的漂移最小化，并且可以获得具有更高精度的元素分布。
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公开(公告)号：US07067805B2
公开(公告)日：2006-06-27
申请号：US10778327
申请日：2004-02-17
IPC分类号： H01J47/00
CPC分类号： G01N23/2251 , H01J37/05 , H01J37/244 , H01J37/252 , H01J37/26 , H01J37/28 , H01J2237/24485 , H01J2237/24495 , H01J2237/2487 , H01J2237/262 , H01J2237/2802 , H05H1/0037
摘要： An electron beam detector detects a peak of a spectrum, and when a peak position is deviated from a reference position on the electron beam detector, a controller for controlling an electron beam position on the electron beam detector is used to correct a deviation. An electron energy loss spectrum is measured while controlling correction a deviation between an electron beam position on a specimen, and a peak position of the spectrum, and a spectrum measuring with the electron beam detector.
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公开(公告)号：US6150657A
公开(公告)日：2000-11-21
申请号：US138995
申请日：1998-08-25
申请人： Koji Kimoto , Yoshifumi Taniguchi , Shunroku Taya , Shigeto Isakozawa , Takashi Aoyama , Masakazu Saito , Tomoko Sekiguchi
发明人： Koji Kimoto , Yoshifumi Taniguchi , Shunroku Taya , Shigeto Isakozawa , Takashi Aoyama , Masakazu Saito , Tomoko Sekiguchi
CPC分类号： H01J49/44 , H01J37/05 , H01J2237/24485 , H01J2237/28
摘要： An energy filter has a plurality of deflection means and is constructed by using the plural deflection means so that an average track of an electron beam is symmetric and the normal line to a symmetric plane is inclined against an incident direction of the electron beam.
摘要翻译： 能量滤波器具有多个偏转装置，并且通过使用多个偏转装置来构造，使得电子束的平均轨迹对称，并且对称平面的法线相对于电子束的入射方向倾斜。
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10.发明申请公开(公告)号：US20070252091A1
公开(公告)日：2007-11-01
申请号：US11775894
申请日：2007-07-11
申请人： Shohei Terada , Kazutoshi Kaji , Shigeto Isakozawa
发明人： Shohei Terada , Kazutoshi Kaji , Shigeto Isakozawa
IPC分类号： G01N23/00
CPC分类号： H01J37/20 , G01N23/2251 , G01N23/2252 , H01J37/26 , H01J2237/2008 , H01J2237/206 , H01J2237/2802
摘要： An object of the invention is to provide a method and apparatus for observing inside structures and a specimen holder, wherein aging degradation of a good sample to a bad sample can be tracked in the same field of view, using the same specimen in order to determine the mechanism of failure. The present invention is a method for observing inside structures. The method comprises irradiating a specimen with a corpuscular beam generated from a corpuscular beam source, detecting transmitted particles transmitted by the specimen, applying a voltage to a portion of the specimen, and observing of a detection status of the transmitted particles in the voltage-applied portion as needed.
摘要翻译： 本发明的目的是提供一种用于观察内部结构和样本保持器的方法和装置，其中可以使用相同的样本在相同的视野中跟踪良好样本的老化劣化到不良样本，以确定 失败的机制。 本发明是用于观察内部结构的方法。 该方法包括用从粒子束源产生的粒子束照射样本，检测由样本透射的透射粒子，向样本的一部分施加电压，并观察施加电压的透射粒子的检测状态 部分。
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