公开(公告)号：US06935014B2

公开(公告)日：2005-08-30

申请号：US10097625

申请日：2002-03-15

申请人： Kazuya Maekawa ,  Akio Iijima ,  Junichi Sato ,  Hiroyuki Miyamoto

发明人： Kazuya Maekawa ,  Akio Iijima ,  Junichi Sato ,  Hiroyuki Miyamoto

IPC分类号： G03F7/26 ,  C23C14/34 ,  G03F7/40 ,  G03F7/42 ,  G11B5/31 ,  H01F41/30 ,  G11B5/127 ,  H04R31/00

CPC分类号： B82Y25/00 ,  B82Y40/00 ,  G11B5/3116 ,  G11B5/313 ,  G11B5/3163 ,  H01F41/302 ,  Y10T29/49032 ,  Y10T29/49034 ,  Y10T29/49041 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： An electrode film and a protective electrode film are formed on an insulating film and a first magnetic film in turn. Then, a first photoresist layer, an intermediate layer and a second photoresist layer are formed on the protective electrode film in turn. The intermediate layer is formed by a sputtering method so that the surface temperature of the intermediate layer is set to 140° C. or below. Then, the first photoresist layer is exposed and developed, to fabricate a photoresist pattern. Then, the intermediate layer is partially etched and removed via the photoresist pattern as a mask by a reactive ion etching method using a chlorine-based gas.

摘要翻译： 依次在绝缘膜和第一磁性膜上形成电极膜和保护电极膜。 然后依次在保护电极膜上形成第一光致抗蚀剂层，中间层和第二光致抗蚀剂层。 通过溅射法形成中间层，使得中间层的表面温度设定为140℃以下。 然后，第一光致抗蚀剂层被曝光和显影，以制造光致抗蚀剂图案。 然后，通过使用氯系气体的反应离子蚀刻方法，通过作为掩模的光致抗蚀剂图案部分地蚀刻和去除中间层。

公开(公告)号：US06532647B1

公开(公告)日：2003-03-18

申请号：US09506604

申请日：2000-02-18

申请人： Kazuya Maekawa ,  Akio Iijima ,  Tetsuya Mino

发明人： Kazuya Maekawa ,  Akio Iijima ,  Tetsuya Mino

IPC分类号： G11B5129

CPC分类号： G11B5/3967 ,  G11B5/3116 ,  G11B5/313 ,  G11B5/3163 ,  G11B5/332 ,  G11B5/3903 ,  Y10T29/49021 ,  Y10T29/49039 ,  Y10T29/49041 ,  Y10T29/49043 ,  Y10T29/49117

摘要： A manufacturing method of a composite type thin-film magnetic head with a reading head element and an inductive writing head element, includes a step of forming the reading head element and its lead conductor layers on a first insulation layer, a step of forming a second insulation layer to cover the reading head element and the lead conductor layers, a step of forming a second shield layer on the second insulation layer, a step of forming a third insulation layer, and a step of forming via holes and a back gap hole. The via holes and back gap hole forming step is executed by reactive ion etching (RIE) for simultaneously removing the second insulation layer and the third insulation layer located at the via holes and the third insulation layer located at the back gap hole.

摘要翻译： 具有读取头元件和感应写入头元件的复合型薄膜磁头的制造方法包括在第一绝缘层上形成读取头元件及其引线导体层的步骤，形成第二绝缘层的步骤 绝缘层覆盖读头元件和引线导体层，在第二绝缘层上形成第二屏蔽层的步骤，形成第三绝缘层的步骤，以及形成通孔和后间隙孔的步骤。 通孔和后隙孔形成步骤通过反应离子蚀刻（RIE）来执行，用于同时去除位于通孔的第二绝缘层和第三绝缘层以及位于后间隙孔处的第三绝缘层。

公开(公告)号：US07495241B2

公开(公告)日：2009-02-24

申请号：US11048802

申请日：2005-02-03

申请人： Katsumi Ito ,  Kazuya Maekawa ,  Etsuo Takeuchi ,  Nobuo Yajima ,  Junichi Sato

发明人： Katsumi Ito ,  Kazuya Maekawa ,  Etsuo Takeuchi ,  Nobuo Yajima ,  Junichi Sato

IPC分类号： H01J27/02

CPC分类号： G21K5/10 ,  H01J37/08 ,  H01J2237/3151

摘要： The frequency of replacement of an insulating spacer disposed between grids of an ion beam irradiation apparatus is to be reduced. In addition, the intervals of the multiple grids in the ion beam irradiation apparatus are to be kept constant. To achieve these objects, in a so-called insulating spacer provided for maintaining insulation between the grids, a groove portion having a bottom onto which sputtered materials are hard to adhere is provided on the central portion of the side surface of the insulating spacer all along its circumference.

摘要翻译： 放置在离子束照射装置的格栅之间的绝缘隔离物的更换频率应降低。 此外，离子束照射装置中的多个栅格的间隔将保持恒定。 为了实现这些目的，在为了保持栅格之间的绝缘而设置的所谓的绝缘间隔件中，在绝缘间隔物的侧面的中心部分上设置有具有溅射材料难以粘附的底部的槽部 它的圆周​​。

公开(公告)号：US20050211926A1

公开(公告)日：2005-09-29

申请号：US11048802

申请日：2005-02-03

申请人： Katsumi Ito ,  Kazuya Maekawa ,  Etsuo Takeuchi ,  Nobuo Yajima ,  Junichi Sato

发明人： Katsumi Ito ,  Kazuya Maekawa ,  Etsuo Takeuchi ,  Nobuo Yajima ,  Junichi Sato

IPC分类号： A61N5/00 ,  G21K5/10 ,  H01J27/02 ,  H01J37/08 ,  H01J37/30

CPC分类号： G21K5/10 ,  H01J37/08 ,  H01J2237/3151

摘要： The frequency of replacement of an insulating spacer disposed between grids of an ion beam irradiation apparatus is to be reduced. In addition, the intervals of the multiple grids in the ion beam irradiation apparatus are to be kept constant. To achieve these objects, in a so-called insulating spacer provided for maintaining insulation between the grids, a groove portion having a bottom onto which sputtered materials are hard to adhere is provided on the central portion of the side surface of the insulating spacer all along its circumference.

摘要翻译： 放置在离子束照射装置的格栅之间的绝缘隔离物的更换频率应降低。 此外，离子束照射装置中的多个栅格的间隔将保持恒定。 为了实现这些目的，在为了保持栅格之间的绝缘而设置的所谓的绝缘间隔件中，在绝缘间隔物的侧面的中心部分上设置有具有溅射材料难以粘附的底部的槽部 它的圆周​​。

公开(公告)号：US06654203B2

公开(公告)日：2003-11-25

申请号：US09930286

申请日：2001-08-16

申请人： Seiji Yari ,  Atsushi Yamaguchi ,  Tetsuya Mino ,  Kazuo Ishizaki ,  Jun-ichi Hokushin ,  Junichi Sato ,  Kazuya Maekawa

发明人： Seiji Yari ,  Atsushi Yamaguchi ,  Tetsuya Mino ,  Kazuo Ishizaki ,  Jun-ichi Hokushin ,  Junichi Sato ,  Kazuya Maekawa

IPC分类号： G11B5147

CPC分类号： G11B5/3163 ,  G11B5/3116 ,  G11B5/313 ,  G11B5/3146 ,  G11B5/3967

摘要： In a method of forming a track width defining layer including a magnetic pole portion, a base film is initially formed on a write gap layer. The base film includes a first layer made of a magnetic material having a saturation magnetic flux density of 1.8 T or more, and a second layer formed on the first layer and made of a magnetic material. The magnetic material forming the second layer is a material containing Fe or Ni as a main component and without containing Co. Then, a frame having an opening of a shape matching with the track width defining layer is formed on the second layer. Subsequently, the track width defining layer is formed within the opening by electroplating, using the base film as an electrode.

公开(公告)号：US08148878B2

公开(公告)日：2012-04-03

申请号：US12659997

申请日：2010-03-26

申请人： Kazuya Maekawa ,  Takao Noguchi ,  Kenichi Tochi ,  Ken Unno

发明人： Kazuya Maekawa ,  Takao Noguchi ,  Kenichi Tochi ,  Ken Unno

IPC分类号： H01L41/04

CPC分类号： G01C19/5607 ,  H01L41/0815 ,  H01L41/1876 ,  H01L41/316

摘要： A piezoelectric element having a crystal structure that enables a piezoelectric film to be formed in an unstressed state is provided. The piezoelectric film contains an a-axis oriented crystal and a c-axis oriented crystal, where a difference in lattice constant between the a-axis oriented crystal and the c-axis oriented crystal is not more than 0.06 Å. The present inventors have newly found that a stress accumulated in the piezoelectric film can be reduced while maintaining favorable piezoelectric properties when a condition that the difference in lattice constant between the a-axis oriented crystal and the c-axis oriented crystal is not more than 0.06 Å is satisfied. When the condition is satisfied, the c-axis oriented crystal and the a-axis oriented crystal are properly balanced and as a result crystal particles of the piezoelectric film are closest-packed on its base in an ideal state, which contributes to a reduced stress.

摘要翻译： 提供了具有能够使压电膜形成为无应力状态的晶体结构的压电元件。 压电膜包含a轴取向晶体和c轴取向晶体，其中a轴取向晶体和c轴取向晶体之间的晶格常数差不大于0.06。 本发明人新发现，当a轴取向晶体和c轴取向晶体之间的晶格常数差不大于0.06的条件时，可以在保持良好的压电特性的同时，减小在压电膜中累积的应力 Å满意 当满足条件时，c轴取向晶体和a轴取向晶体被适当地平衡，结果在理想状态下，压电膜的晶体颗粒在其基极上最紧密堆积，这有助于减小应力 。

公开(公告)号：US20090126551A1

公开(公告)日：2009-05-21

申请号：US12355110

申请日：2009-01-16

申请人： Kiyoshi TAKAMATSU ,  Kazuya Maekawa ,  Noriyuki Ogasawara

发明人： Kiyoshi TAKAMATSU ,  Kazuya Maekawa ,  Noriyuki Ogasawara

IPC分类号： B26D3/08

CPC分类号： C03B33/107 ,  B28D1/225 ,  C03B33/027 ,  C03B33/03 ,  C03B33/07 ,  Y10T83/0237 ,  Y10T83/0341 ,  Y10T83/0385 ,  Y10T83/9372 ,  Y10T225/10 ,  Y10T225/12 ,  Y10T225/321 ,  Y10T225/325 ,  Y10T225/371

摘要： In a glass cutter wheel where a blade edge is formed on a disk-shaped wheel, grooves having a predetermined shape are formed at a predetermined pitch in a 1/4 or smaller or 3/4 or smaller blade edge line portion of the entire perimeter of the blade edge. The ratio of the groove portion to the entire perimeter, which largely contributes to a scribing characteristic, is changed such that a desired scribing characteristic can be obtained.

摘要翻译： 在盘形轮上形成叶片边缘的玻璃切割轮中，在整个周边的1/4或更小或3/4或更小的叶片边缘线部分中以预定间距形成具有预定形状的槽 的刀刃。 改变了槽部分与整个周边的比例，这很大程度上有助于划线特性，使得可以获得期望的划线特性。

公开(公告)号：US20060042433A1

公开(公告)日：2006-03-02

申请号：US10532023

申请日：2003-10-23

申请人： Kazuya Maekawa ,  Akira Ejimatani

发明人： Kazuya Maekawa ,  Akira Ejimatani

IPC分类号： B26D1/00 ,  B23D35/00 ,  B27B33/12

CPC分类号： C03B33/023 ,  C03B33/027 ,  C03B33/107 ,  Y02P40/57 ,  Y10T83/0237 ,  Y10T83/04 ,  Y10T83/9341 ,  Y10T83/9403

摘要： A scribe method for a brittle material substrate is a method in which a plurality of scribe lines are formed in directions intersecting with one another in a surface of the brittle material substrate, wherein at least one scribe line in a first direction is formed by a scribe means generating a high-penetration vertical crack in the brittle material substrate by applying impacts of a short period to the point on the surface of the brittle material substrate. After this, at least one scribe line of a second direction in a direction intersecting with the at least one scribe line of the first direction is formed with the scribe means by scribing without producing intersections with the scribe lines of the first direction.

摘要翻译： 用于脆性材料基板的划片方法是在脆性材料基板的表面上彼此相交的方向上形成多条划线的方法，其中通过划线器形成至少一个沿第一方向的划线 意味着通过施加短时间对脆性材料基板的表面上的点的冲击，在脆性材料基板中产生高穿透垂直裂纹。 在此之后，通过划线而在与第一方向的划线相交的方向上与划线装置形成与第一方向的至少一个划线交叉的方向上的第二方向的至少一个划线。

公开(公告)号：US06796212B2

公开(公告)日：2004-09-28

申请号：US09924465

申请日：2001-08-09

申请人： Kazuya Maekawa ,  Haruo Wakayama

发明人： Kazuya Maekawa ,  Haruo Wakayama

IPC分类号： B26D308

CPC分类号： C03B33/107 ,  Y10T83/0385 ,  Y10T83/9403

摘要： A cutter wheel for brittle materials includes a disk with two side planes and an outer peripheral portion between the planes. The outer peripheral portion includes two bevel portions and a ridge portion between the bevel portions. The ridge portion has a plurality of peaks aligned along a circumferential line. For example, the ridge portion includes a straight line connecting two adjacent peaks in the plurality of peaks. Alternatively, the ridge portion is a depression between two adjacent peaks in the plurality of peaks, and the depth of the depression is deeper than the straight line connecting the two adjacent peaks. Preferably, the peaks are spaced apart at an equal distance.

摘要翻译： 用于脆性材料的切割轮包括具有两个侧面的盘和在该平面之间的外周部分。 外周部包括两个斜面部和斜边部之间的脊部。 脊部具有沿圆周线排列的多个峰。 例如，脊部包括连接多个峰中的两个相邻峰的直线。 或者，脊部是多个峰中的两个相邻峰之间的凹陷，并且凹陷的深度比连接两个相邻峰的直线更深。 优选地，峰以相等的距离间隔开。

公开(公告)号：US08292142B2

公开(公告)日：2012-10-23

申请号：US12669298

申请日：2008-06-16

申请人： Hirotake Haraguchi ,  Kazuya Maekawa

发明人： Hirotake Haraguchi ,  Kazuya Maekawa

IPC分类号： B26F3/00

CPC分类号： C03B33/12 ,  B28D1/00 ,  B28D1/225 ,  Y10T225/379

摘要： A manual breaker for cutting sheet glass. The manual breaker includes a rotational shaft (6) that rotatably holds first and second arms (2) and (4). A sheet glass having a scribe line formed thereon in advance is pinched among rollers (24) and (45). When handles (20) and (40) are actuated to narrow a distance between rollers (24) and (45), the roller (45) moves in a Y-axis direction and an impact shaft (51) impacts the sheet glass, accordingly. The sheet glass can be thereby easily cut into pieces along the scribe line and a sectional quality having a smooth cut surface can be ensured for the sheet glass.

摘要翻译： 用于切割玻璃板的手动断路器。 手动断路器包括可旋转地保持第一和第二臂（2）和（4）的旋转轴（6）。 预先在其上形成有划线的平板玻璃被夹在辊（24）和（45）中。 当手柄（20）和（40）被致动以缩小辊（24）和（45）之间的距离时，辊（45）沿Y轴方向移动，冲击轴（51）相应地冲击玻璃板 。 因此，能够将片状玻璃沿着划线容易地切断，能够确保平板玻璃具有平滑切削面的部分质量。