摘要:
A method of producing material patterns in which at least one substrate is fixed together with a mask to a substrate holder, and an evaporated film of desired substances is formed on the surface of the substrate by means of evaporation sources provided to confront the substrate. The mask is fabricated to have a plurality of reinforcing bridges formed in the desired portions of the mask openings of desired shape formed in the mask. The mask is held spaced from the substrate by a small distance during the evaporation, so that the evaporation may be effected at least through two pattern openings defined at both sides of each bridge. The evaporation is performed by means of evaporation sources which are located such that the line interconnecting one of the edges of each bridge and the evaporation source located at the same side with respect to the substantial bridging direction of the bridge and another line interconnecting the other edge of the bridge and the evaporation source located at the same side as the other edge intersect each other at a point on the surface of the substrate or in the clearance between the substrate surface and the mask. This method makes it possible to produce patterns which could never be produced by the conventional evaporation method.
摘要:
According to a solid-state imager of this invention, in case where a plurality of color filters are disposed on a semiconductor body for the solid-state imager including a plurality of photosensitive regions and where the color filter of a third color is constructed by the overlapping between filter members of a first color and a second color, that one of the filter members which has a spectral transmittance substantially transmitting light for exposure for use in forming the filter members is arranged as a lower layer closer to a substrate of the semiconductor body. Even when the filter members are formed by the exposure process, a solid-state imager having good characteristics can be manufactured.
摘要:
For obtaining an improved characteristic, particularly an improved after-image characteristic of image pickup tubes, a target of the tube is produced by at first forming a striped transparent conductive film on a substrate such that the angle formed between the surface of the substrate and the edges of cross-section of the film falls within a range below 20.degree., and then forming a photoconductive film on the striped transparent conductive film. In order to control the angle formed between the surface of the substrate and the side edges of cross-section of the transparent conductive film, at first a mask of a predetermined pattern is formed on the transparent conductive film with a posi-type photosensitive material, and is subjected to an ultraviolet ray. The mask is then heat treated so that the side edges of the mask may be suitably tapered. Finally, the transparent conductive film is formed by sputter etching.
摘要:
A color pick-up tube face plate with shading films is disclosed. These shading films are stripe-shaded opaque films, and are formed between the transparent glass plate and the stripe-shaped color filters. As the boundary portions of all the filters are positioned on these shading films, the light incidented around the boundary portions is hindered by the shading films. For this reason, light reflection or scattering around the boundary portions is effectively eliminated, and a pure high quality color picture is obtained.
摘要:
A color solid-state imager comprises a semiconductor body over which are successively laminated a predetermined number of filter layers of any desired shape having predetermined spectral characteristics and, laminated on the filter layers, a predetermined number of layers composed of a transparent, organic high molecular material which is sensitive to radiation, the semiconductor substrate having at least a detector portion composed of an array of a plurality of optical detector elements. The method of making color solid-state imagers can be simplified by at least using the radiation-sensitive high molecular material for the intermediate layers or protection layers which are used for forming a laminate construction of color-decomposing filters.Further, in mounting the color-decomposing filters on the semiconductor substrate, it is particularly preferred to form beforehand a film of an organic high molecular material.
摘要:
A method of manufacturing a target of an image pickup tube comprising the steps of: forming a plurality of groups of transparent conductive signal electrodes on a transparent insulating base plate; forming a first layer on at least a portion constituting an image area of the image pickup tube, said first layer being substantially insoluble in etching liquid used for etching an insulating layer to constitute an intermediate layer insulator in a double layered interconnection structure; forming, after formation of said first layer, an insulating layer to constitute said intermediate-layer insulator; removing a predetermined portion of said insulating layer, removing said first layer together with said insulating layer located thereon; forming bus bars; and forming a photoconductive layer on said plurality of groups of the transparent conductive signal electrodes.This invention provides an excellent method for mass production.
摘要:
A color solid-state imager comprising a semiconductor body which has a photoelectric conversion function and which includes at least photosensitive elements and switching elements, and predetermined color filters which are formed on the body; characterized in that a light absorbing layer is disposed at least over a vicinity of an output terminal of each switching element. The contours of the color filters can be accurately formed, and unnecessary light can be intercepted to stabilize the electrical characteristics of the solid-state imager.
摘要:
Disclosed is a method of producing color filters, which comprises forming a layer of an organic polymeric material having a predetermined light-sensitive characteristic on a substrate, exposing this layer to a predetermined pattern, developing the exposed layer to form a filter base and dyeing the filter base, wherein after the development of the exposed layer, the layer is wetted with a dehydrating solution to remove water from the filter base. By this dehydrating treatment, the filter base can be processed with very high precision.
摘要:
A face plate for a color pick-up tube which comprises a transparent substrate, stripe-like color filters formed on the transparent substrate, a protection layer deposited so as to cover the stripe color filters and the exposed portions of the transparent substrate, stripe-like transparent electrodes formed on predetermined portions of the protection layer, a photoconductive layer, bus bar electrodes and an insulation layer.The insulation layer and the protection layer are, respectively, formed of different materials which have different resistances to an etching solution, whereby the stripe-like filters are protected from the adverse influence of the etching solution used to form the insulation layer by a photoetching treatment.
摘要:
A semiconductor device such as a solar cell, photodiode and solid state imaging device comprises a semiconductor layer made of amorphous silicon formed on a given substrate, and a transparent conductive layer formed by an interfacial reaction between the amorphous silicon and a metallic film directly formed on the amorphous silicon. This transparent conductive layer is used as a transparent electrode of the device and if necessary the remainder after having partially removed the metallic film for the transparent conductive layer is used as a conductive layer and right shielding film.