Method of producing material patterns by evaporating material through a
perforated mask having a reinforcing bridge
    1.
    发明授权
    Method of producing material patterns by evaporating material through a perforated mask having a reinforcing bridge 失效
    通过具有加强桥的穿孔掩模蒸发材料来生产材料图案的方法

    公开(公告)号:US4273812A

    公开(公告)日:1981-06-16

    申请号:US8587

    申请日:1979-02-01

    CPC分类号: H05K3/143 C23C14/042

    摘要: A method of producing material patterns in which at least one substrate is fixed together with a mask to a substrate holder, and an evaporated film of desired substances is formed on the surface of the substrate by means of evaporation sources provided to confront the substrate. The mask is fabricated to have a plurality of reinforcing bridges formed in the desired portions of the mask openings of desired shape formed in the mask. The mask is held spaced from the substrate by a small distance during the evaporation, so that the evaporation may be effected at least through two pattern openings defined at both sides of each bridge. The evaporation is performed by means of evaporation sources which are located such that the line interconnecting one of the edges of each bridge and the evaporation source located at the same side with respect to the substantial bridging direction of the bridge and another line interconnecting the other edge of the bridge and the evaporation source located at the same side as the other edge intersect each other at a point on the surface of the substrate or in the clearance between the substrate surface and the mask. This method makes it possible to produce patterns which could never be produced by the conventional evaporation method.

    摘要翻译: 一种生产材料图案的方法,其中至少一个基板与掩模一起固定到基板保持器上,并且通过设置成面对基板的蒸发源在基板的表面上形成所需物质的蒸发膜。 掩模被制造成具有形成在形成在掩模中的所需形状的掩模开口的所需部分中的多个加强桥。 掩模在蒸发期间与衬底间隔开一小段距离,使得蒸发可以至少通过限定在每个桥的两侧的两个图案开口进行。 通过蒸发源进行蒸发,所述蒸发源被定位成使得相对于桥的基本桥接方向互连每个桥的边缘之一的线和位于同一侧的蒸发源的线,另一条线与另一边相互连接 和位于与另一边缘相同侧的蒸发源在基板的表面上的点处或基板表面与掩模之间的间隙中彼此相交。 这种方法使得可以产生由常规蒸发方法所不能产生的图案。

    Image pick-up tube target having transparent conductive strips with
shallow sides
    3.
    发明授权
    Image pick-up tube target having transparent conductive strips with shallow sides 失效
    图像拾取管目标具有浅侧透明导电条

    公开(公告)号:US4206384A

    公开(公告)日:1980-06-03

    申请号:US882041

    申请日:1978-02-28

    CPC分类号: H01J29/45 H01J9/233

    摘要: For obtaining an improved characteristic, particularly an improved after-image characteristic of image pickup tubes, a target of the tube is produced by at first forming a striped transparent conductive film on a substrate such that the angle formed between the surface of the substrate and the edges of cross-section of the film falls within a range below 20.degree., and then forming a photoconductive film on the striped transparent conductive film. In order to control the angle formed between the surface of the substrate and the side edges of cross-section of the transparent conductive film, at first a mask of a predetermined pattern is formed on the transparent conductive film with a posi-type photosensitive material, and is subjected to an ultraviolet ray. The mask is then heat treated so that the side edges of the mask may be suitably tapered. Finally, the transparent conductive film is formed by sputter etching.

    摘要翻译: 为了获得改进的特性,特别是图像拾取管的改进的后图像特性,通过首先在衬底上形成带状透明导电膜,使得在衬底的表面和 膜的横截面的边缘落在低于20°的范围内,然后在条状透明导电膜上形成光电导膜。 为了控制基板的表面和透明导电膜的横截面的侧边缘之间形成的角度,首先,在具有posi型感光材料的透明导电膜上形成预定图案的掩模, 并进行紫外线照射。 然后对掩模进行热处理,使得掩模的侧边缘可以适当地变细。 最后,通过溅射蚀刻形成透明导电膜。

    Color pickup tube face plate with opaque shading stripes overlapping
adjacent filters
    4.
    发明授权
    Color pickup tube face plate with opaque shading stripes overlapping adjacent filters 失效
    彩色拾取管面板与不透明的阴影条纹重叠相邻的过滤器

    公开(公告)号:US3997810A

    公开(公告)日:1976-12-14

    申请号:US637574

    申请日:1975-12-04

    CPC分类号: H01J29/45

    摘要: A color pick-up tube face plate with shading films is disclosed. These shading films are stripe-shaded opaque films, and are formed between the transparent glass plate and the stripe-shaped color filters. As the boundary portions of all the filters are positioned on these shading films, the light incidented around the boundary portions is hindered by the shading films. For this reason, light reflection or scattering around the boundary portions is effectively eliminated, and a pure high quality color picture is obtained.

    摘要翻译: 公开了一种带有遮光膜的拾色管面板。 这些遮光膜是条纹阴影不透明膜,并且形成在透明玻璃板和条形滤色器之间。 当所有滤光器的边界部分位于这些遮光膜上时,入射到边界部分周围的光被遮光膜阻挡。 为此,有效地消除了边界部分附近的光反射或散射,并且获得纯净的高质量彩色图像。

    Color solid-state imager and method of making the same
    5.
    发明授权
    Color solid-state imager and method of making the same 失效
    彩色固态成像仪及其制作方法

    公开(公告)号:US4285007A

    公开(公告)日:1981-08-18

    申请号:US123085

    申请日:1980-02-20

    摘要: A color solid-state imager comprises a semiconductor body over which are successively laminated a predetermined number of filter layers of any desired shape having predetermined spectral characteristics and, laminated on the filter layers, a predetermined number of layers composed of a transparent, organic high molecular material which is sensitive to radiation, the semiconductor substrate having at least a detector portion composed of an array of a plurality of optical detector elements. The method of making color solid-state imagers can be simplified by at least using the radiation-sensitive high molecular material for the intermediate layers or protection layers which are used for forming a laminate construction of color-decomposing filters.Further, in mounting the color-decomposing filters on the semiconductor substrate, it is particularly preferred to form beforehand a film of an organic high molecular material.

    摘要翻译: 彩色固态成像器包括半导体本体,其上依次层叠具有预定光谱特性的任意所需形状的预定数量的滤光层,并且层叠在滤光层上,预定数量的层由透明的有机高分子 对辐射敏感的材料,所述半导体衬底至少具有由多个光学检测器元件的阵列组成的检测器部分。 通过至少使用辐射敏感的高分子材料用于形成分色滤光片的层叠结构的中间层或保护层,可以简化制备彩色固态成像器的方法。 此外,在将分色滤光片安装在半导体基板上时,特别优选预先形成有机高分子材料的膜。

    Method of manufacturing target of image pickup tube
    6.
    发明授权
    Method of manufacturing target of image pickup tube 失效
    摄像管目标的制造方法

    公开(公告)号:US4331506A

    公开(公告)日:1982-05-25

    申请号:US212213

    申请日:1980-12-02

    IPC分类号: H01J9/233 H01J31/46 H01J31/26

    CPC分类号: H01J31/46 H01J9/233

    摘要: A method of manufacturing a target of an image pickup tube comprising the steps of: forming a plurality of groups of transparent conductive signal electrodes on a transparent insulating base plate; forming a first layer on at least a portion constituting an image area of the image pickup tube, said first layer being substantially insoluble in etching liquid used for etching an insulating layer to constitute an intermediate layer insulator in a double layered interconnection structure; forming, after formation of said first layer, an insulating layer to constitute said intermediate-layer insulator; removing a predetermined portion of said insulating layer, removing said first layer together with said insulating layer located thereon; forming bus bars; and forming a photoconductive layer on said plurality of groups of the transparent conductive signal electrodes.This invention provides an excellent method for mass production.

    摘要翻译: 一种制造图像拾取管的目标的方法,包括以下步骤:在透明绝缘基板上形成多组透明导电信号电极; 在构成图像拾取管的图像区域的至少一部分上形成第一层,所述第一层基本上不溶于用于蚀刻绝缘层的蚀刻液,以构成双层互连结构中的中间层绝缘体; 在形成所述第一层之后形成构成所述中间层绝缘体的绝缘层; 去除所述绝缘层的预定部分,与位于其上的所述绝缘层一起去除所述第一层; 形成母线; 以及在所述多个透明导电信号电极组上形成光电导层。 本发明提供了一种很好的批量生产方法。

    Face plate for color pick-up tube
    9.
    发明授权
    Face plate for color pick-up tube 失效
    拾色管面板

    公开(公告)号:US4107568A

    公开(公告)日:1978-08-15

    申请号:US524274

    申请日:1974-11-15

    IPC分类号: H01J9/233 H01J29/89 H01J31/46

    CPC分类号: H01J29/89 H01J31/46

    摘要: A face plate for a color pick-up tube which comprises a transparent substrate, stripe-like color filters formed on the transparent substrate, a protection layer deposited so as to cover the stripe color filters and the exposed portions of the transparent substrate, stripe-like transparent electrodes formed on predetermined portions of the protection layer, a photoconductive layer, bus bar electrodes and an insulation layer.The insulation layer and the protection layer are, respectively, formed of different materials which have different resistances to an etching solution, whereby the stripe-like filters are protected from the adverse influence of the etching solution used to form the insulation layer by a photoetching treatment.

    摘要翻译: 一种用于拾色管的面板,其包括透明基板,形成在透明基板上的条状滤色器,沉积以覆盖条形滤色器的保护层和透明基板的暴露部分, 形成在保护层的预定部分上的透明电极,光电导层,母线电极和绝缘层。