Device for venting fumes given off by automatic developing equipment
    3.
    发明授权
    Device for venting fumes given off by automatic developing equipment 失效
    用于排放由自动开发设备发出的烟雾的装置

    公开(公告)号:US4857949A

    公开(公告)日:1989-08-15

    申请号:US218835

    申请日:1988-07-13

    IPC分类号: G03D7/00 G03D13/00 G03D3/00

    CPC分类号: G03D7/00 G03D13/00

    摘要: A device for venting fumes given off by an automatic developing system which includes a developing tank, a fixing tank and a cleansing tank. The device includes a cover for airtight placement over the system and a suction case provided on the inner surface of the cover. The suction case has pores directed toward the developing tank and the fixing tank. Fumes in the system are collected, under suction, through the pores.

    摘要翻译: 用于排放由自动显影系统发出的烟雾的装置,其包括显影槽,定影罐和清洁槽。 该装置包括用于气密地放置在系统上的盖和设置在盖的内表面上的抽吸壳。 抽吸箱具有朝向显影槽和定影槽的孔。 系统中的烟雾被吸入,通过毛孔收集。

    Information retrieval system using hierarchical data-management function
    5.
    发明授权
    Information retrieval system using hierarchical data-management function 失效
    信息检索系统采用分级数据管理功能

    公开(公告)号:US5628009A

    公开(公告)日:1997-05-06

    申请号:US531829

    申请日:1995-09-22

    CPC分类号: G06F17/301

    摘要: A general-information storing unit stores general information sets which are managed by a general-information managing unit which is provided in a network. A plurality of sectional-information storing units store respective sectional information sets which are managed by respective ones of a plurality of sectional-information managing units. The plurality of sectional-information managing units are provided in the network. A plurality of personal-information storing units store respective personal information sets which are managed by respective ones of a plurality of personal-information managing units. The plurality of personal-information managing units are provided in the network. An automatic retrieval unit retrieves a predetermined information unit from among the general information sets, sectional information sets, and personal information sets, in response to a relevant retrieval command being input to said information retrieval system. This retrieval is achieved by searching the above information units in either a bottom-up manner or a top-down manner using directory information for managing all the above information units hierarchically.

    摘要翻译: 通用信息存储单元存储由网络中提供的通用信息管理单元管理的一般信息集。 多个截面信息存储单元存储由多个区段信息管理单元中的各个管理单元管理的各个区段信息集。 多个分段信息管理单元设置在网络中。 多个个人信息存储单元存储由多个个人信息管理单元中的相应个人信息管理单元管理的各个人信息集。 在网络中提供多个个人信息管理单元。 响应于输入到所述信息检索系统的相关检索命令,自动检索单元从一般信息集,分区信息集和个人信息集中检索预定信息单元。 通过以自下而上的方式或自顶向下的方式搜索上述信息单元,使用用于分层管理所有上述信息单元的目录信息来实现该检索。

    Substrate processing apparatus, substrate processing method and storage medium storing substrate processing program
    8.
    发明授权
    Substrate processing apparatus, substrate processing method and storage medium storing substrate processing program 有权
    基板处理装置,基板处理方法和存储基板处理程序的存储介质

    公开(公告)号:US08845262B2

    公开(公告)日:2014-09-30

    申请号:US13159519

    申请日:2011-06-14

    IPC分类号: H01L21/677 B25J9/00 H01L21/67

    摘要: A substrate processing apparatus includes a substrate transit table configured to mount thereon a plurality of substrates; a substrate processing chamber configured to process the substrate one by one; a substrate transfer device capable of loading the substrate into the substrate processing chamber from the substrate transit table and unloading the substrate from the substrate processing chamber to the substrate transit table; and N number of (N is an integer equal to or larger than 3) substrate holding devices provided at the substrate transfer device and configured to hold the substrates one by one. Here, a multiplicity of (2 to N−1 number of) substrates are concurrently held by 2 to N−1 number of substrate holding devices among the N number of substrate holding devices and one substrate is loaded into the substrate processing chamber.

    摘要翻译: 基板处理装置包括:基板转移台,其被配置为在其上安装多个基板; 衬底处理室,被配置为逐个处理衬底; 基板转印装置,其能够从基板运送台将基板加载到基板处理室中,并将基板从基板处理室卸载到基板运送台; 和N个(N是等于或大于3的整数)的基板保持装置,其设置在基板输送装置上并且被配置为逐个保持基板。 这里,在N个基板保持装置中,通过2〜N-1个基板保持装置同时保持多个(2〜N-1个)基板,一个基板被装入基板处理室。

    Substrate transfer apparatus, substrate process system, and substrate transfer method
    10.
    发明申请
    Substrate transfer apparatus, substrate process system, and substrate transfer method 有权
    基板转印装置,基板处理系统和基板转印方法

    公开(公告)号:US20070274811A1

    公开(公告)日:2007-11-29

    申请号:US11790568

    申请日:2007-04-26

    IPC分类号: H01L21/677

    摘要: A substrate transfer apparatus includes forks that are vertically spaced apart from each other with a predetermined distance. When the forks take out the substrates from the first substrate containing part, each of the forks lifts the substrate and supports the same by moving upward from a pre-loading position located below the substrate to be taken out by a predetermined unloading stroke amount. A value of the predetermined distance is set to be equal to the sum of the distance between the substrates contained in the first substrate containing part and the unloading stroke amount.

    摘要翻译: 基板传送装置包括彼此垂直间隔开预定距离的叉。 当叉从第一基板容纳部分取出基板时,每个叉子提升基板并且通过从位于基板下方的预加载位置向上移动以通过预定的卸载行程量被取出来支撑基板。 将预定距离的值设定为等于包含在第一基板容纳部中的基板与卸载行程量之间的距离之和。