摘要:
An ink jet print head is disclosed which includes a flow path unit with nozzles, a pressure generating unit disposed on the flow path unit and having ink pressure chambers formed behind the respective nozzles, and piezoelectric/electrostrictive elements each disposed on a wall defining a corresponding ink pressure chamber, for deforming the wall to change a pressure of the ink pressure chamber, whereby the ink in the ink pressure chamber is jetted through the corresponding nozzle. The pressure generating unit includes a spacer plate having windows which closed by a closure plate and a connecting plate disposed on the spacer plate, so as to give the respective ink pressure chambers. The connecting plate has communication holes through which the ink pressure chambers communicate with the nozzles. The spacer plate, closure plate and connecting plate are formed from respective ceramic green sheets, which are laminated on each other and fired into an integral ceramic structure as the pressure generating unit. The piezoelectric/electrostrictive element includes a pair of electrodes and a piezoelectric/electrostrictive layer, which are formed by a film-forming method on an outer surface of the closure plate.
摘要:
An ink jet print head is disclosed which includes a flow path unit with nozzles, a pressure generating unit disposed on the flow path unit and having ink pressure chambers formed behind the respective nozzles, and piezoelectric/electrostrictive elements each disposed on a wall defining a corresponding ink pressure chamber, for deforming the wall to change a pressure of the ink pressure chamber, whereby the ink in the ink pressure chamber is jetted through the corresponding nozzle. The pressure generating unit includes a spacer plate having windows which closed by a closure plate and a connecting plate disposed on the spacer plate, so as to give the respective ink pressure chambers. The connecting plate has communication holes through which the ink pressure chambers communicate with the nozzles. The spacer plate, closure plate and connecting plate are formed from respective ceramic green sheets, which are laminated on each other and fired into an integral ceramic structure as the pressure generating unit. The piezoelectric/electrostrictive element includes a pair of electrodes and a piezoelectric/electrostrictive layer, which are formed by a film-forming method on an outer surface of the closure plate.
摘要:
An ink jet print head is disclosed which includes an ink nozzle member with nozzles, an ink pump member disposed on the ink nozzle member and having ink chambers formed behind the respective nozzles, and piezoelectric/electrostrictive elements each disposed on a wall defining the corresponding ink chamber, for deforming the wall to change a pressure of the ink chamber, whereby the ink in the ink chamber is jetted through the corresponding nozzle. The ink pump member consists of a spacer plate having windows which are closed by a closure plate and a connecting plate disposed on the spacer plate, so as to give the respective ink chambers. The connecting plate has communication holes through which the ink chambers communicate with the nozzles. The spacer plate, closure plate and connecting plate are formed from respective ceramic green sheets, which are laminated on each other and fired into an integral ceramic structure as the ink pump member. The piezoelectric/electrostrictive element includes a pair of electrodes and a piezoelectric/electrostrictive layer, which are formed by a film-forming method on an outer surface of the closure plate.
摘要:
A method of producing a piezoelectric/electrostrictive actuator including preparing first, second and third ceramic green sheets, and laminating the green sheets to form an unfired ceramic body which is then fired. The first, second and third green sheets form spacer, closure, and connecting plates, respectively, the spacer plate having a plurality of windows. An outer surface of the connecting plate that is remote from the spacer plate is machined so as to have a maximum waviness of not larger than 50 .mu.m. Additionally, piezoelectric/electrostrictive elements are formed on an outer surface of the closure plate over respective pressure chambers defined by the windows in the spacer plate.
摘要:
An actuator including a ceramic substrate and at least one piezeoelectric/electrostrictive element formed on the substrate is disclosed. The ceramic substrate includes a spacer plate having at least one window which provides at least one pressure chamber, each window being substantially closed by a closure plate and a connecting plate. The spacer plate, closure plate and connecting plate are formed from respective ceramic green sheets which are laminated on each other and fired into an integral ceramic structure as the ceramic substrate. The connecting plate has at least one slit which corresponds to each pressure chamber. Each piezoelectric/electrostrictive element is disposed on a portion of the closure plate defining the corresponding pressure chamber, so as to change a pressure of the corresponding pressure chamber. Also disposed is an ink jet print head using the actuator as described above.
摘要:
A piezoelectric/electrostrictive actuator including a ceramic base member having a pressure chamber or chambers, and a piezoelectric/electrostrictive element or elements is disclosed. The base member includes a spacer plate having at least one window which provides the pressure chamber(s), and which is closed by a closure plate and a connecting plate disposed on the opposite surfaces of the spacer plate. The spacer plate, closure plate and connecting plate are formed from respective ceramic green sheets which are laminated on each other and fired into an integral ceramic structure as the ceramic base member. Each piezoelectric/electrostrictive element is disposed on a wall partially defining the corresponding pressure chamber, for deforming the wall so as to change a pressure of the corresponding chamber. The element has a piezoelectric/electrostrictive unit consisting of a pair of electrodes and a piezoelectric/electrostrictive layer, which are formed by a film-forming method on an outer surface of the closure plate of the base member.
摘要:
A piezoelectric actuator includes comb teeth-shaped piezoelectric actuators, each comprising plural piezoelectric layers. A side surface of each tooth is fired. Actuators are made by (1) preparing a plurality of piezoelectric material green sheets on which electrode films are formed and forming slits on a first green sheet using a punch and a die, (2) pulling up the first green sheet using a stripper, (3) pulling up a top portion of the punch slightly from the lowest portion of the pulled up first green sheet, (4) forming second slits in a second green sheet by the punch, (5) pulling up the second green sheet jointly with the first green sheet, and (6) pulling up the top portion of the punch slightly from the lowest portion of the pulled up second green sheet, and thereafter laminating green sheets by repeating steps (4) through (6). The layers can thereafter be fired.
摘要:
A piezoelectric actuator includes comb teeth-shaped piezoelectric actuators, each comprising plural piezoelectric layers. A side surface of each tooth is fired. Actuators are made by (1) preparing a plurality of piezoelectric material green sheets on which electrode films are formed and forming slits on a first green sheet using a punch and a die, (2) pulling up the first green sheet using a stripper, (3) pulling up a top portion of the punch slightly from the lowest portion of the pulled up first green sheet, (4) forming second slits in a second green sheet by the punch, (5) pulling up the second green sheet jointly with the first green sheet, and (6) pulling up the top portion of the punch slightly from the lowest portion of the pulled up second green sheet, and thereafter laminating green sheets by repeating steps (4) through (6). The layers can thereafter be fired.
摘要:
A micropipette is provided including at least one substrate, an inlet port through which a sample is delivered from the outside, a cavity to be poured and filled with the sample, an introduction hole, and an injection port for expelling the sample are formed on the at least one substrate. The substrate for forming the cavity is made of ceramics, a piezoelectric/electrostrictive element is provided for at least one wall surface of the substrate, and the sample moves as a laminar flow in the cavity. The volume of the cavity is changed by driving the piezoelectric/electrostrictive element to expell a certain amount of the sample in the cavity from the injection port. According to the micropipette, it is possible to form microspots with high accuracy and high speed. According to a dispenser including the micropipette, it is possible to efficiently dispense hundreds to ten thousands of different samples at one time and form microspots. Therefore, productivity is remarkably improved.
摘要:
An optical switch disposed in intermediate positions of optical paths to define a channel of a light signal constitutes a cell member in whose interior cells are formed and a waveguide member having fine slits; and a gas is filled in cells of which side walls are formed by piezoelectric/electrostrictive elements or antiferroelectric elements, a liquid is filled in the fine slits, and the cells and the fine slits are communicated to each other via a communicating hole; optical waveguides intersect at the fine slits, and the cells are disposed at the crossing locations, and said side walls are expanded/constricted by applying an electric field to the piezoelectric/electrostrictive elements or antiferroelectric elements which form the side walls of the cells, and a part of the gas stored in each cell is ejected at a corresponding intersection area from said communicating hole into the corresponding fine slit.