公开(公告)号：US08933463B2

公开(公告)日：2015-01-13

申请号：US13780876

申请日：2013-02-28

申请人： Kazuhiro Adachi ,  Osamu Kusumoto ,  Masao Uchida ,  Koichi Hashimoto ,  Shun Kazama

发明人： Kazuhiro Adachi ,  Osamu Kusumoto ,  Masao Uchida ,  Koichi Hashimoto ,  Shun Kazama

IPC分类号： H01L29/16 ,  H01L29/66 ,  H01L29/78 ,  H03K17/14 ,  H01L29/45

CPC分类号： H01L29/1608 ,  H01L29/45 ,  H01L29/66068 ,  H01L29/7805 ,  H01L29/7827 ,  H01L29/7828 ,  H03K17/145

摘要： A semiconductor element including an MISFET exhibits diode characteristics in a reverse direction through an epitaxial channel layer. The semiconductor element includes: a silicon carbide semiconductor substrate of a first conductivity type, semiconductor layer of the first conductivity type, body region of a second conductivity type, source region of the first conductivity type, epitaxial channel layer in contact with the body region, source electrode, gate insulating film, gate electrode and drain electrode. If the voltage applied to the gate electrode is smaller than a threshold voltage, the semiconductor element functions as a diode wherein current flows from the source electrode to the drain electrode through the epitaxial channel layer. The absolute value of the turn-on voltage of this diode is smaller than the turn-on voltage of a body diode that is formed of the body region and the first silicon carbide semiconductor layer.

摘要翻译： 包括MISFET的半导体元件通过外延沟道层在相反方向上表现出二极管特性。 半导体元件包括：第一导电类型的碳化硅半导体衬底，第一导电类型的半导体层，第二导电类型的主体区域，第一导电类型的源极区域，与身体区域接触的外延沟道层， 源电极，栅极绝缘膜，栅电极和漏电极。 如果施加到栅电极的电压小于阈值电压，则半导体元件用作二极管，其中电流从源电极通过外延沟道层流到漏电极。 该二极管的导通电压的绝对值小于由体区和第一碳化硅半导体层形成的体二极管的导通电压。

公开(公告)号：US08283973B2

公开(公告)日：2012-10-09

申请号：US13389555

申请日：2010-08-09

申请人： Koichi Hashimoto ,  Kazuhiro Adachi ,  Osamu Kusumoto ,  Masao Uchida ,  Shun Kazama

发明人： Koichi Hashimoto ,  Kazuhiro Adachi ,  Osamu Kusumoto ,  Masao Uchida ,  Shun Kazama

IPC分类号： G05F3/02

CPC分类号： H01L29/7828 ,  H01L29/1608 ,  H01L29/66068 ,  H01L29/78 ,  H01L29/7838 ,  H02M7/5387 ,  Y02B70/1483

摘要： A semiconductor element 100 including an MISFET according to the present invention is characterized by having diode characteristics in a reverse direction through an epitaxial channel layer 50. The semiconductor element 100 includes a semiconductor layer 20 of a first conductivity type, a body region 30 of a second conductivity type, source and drain regions 40 and 75 of the first conductivity type, an epitaxial channel layer 50 in contact with the body region, source and drain electrodes 45 and 70, a gate insulating film 60, and a gate electrode 65. If the voltage applied to the gate electrode of the MISFET is smaller than a threshold voltage, the semiconductor element 100 functions as a diode in which current flows from the source electrode 45 to the drain electrode 70 through the epitaxial channel layer 50. The absolute value of the turn-on voltage of this diode is smaller than that of the turn-on voltage of a body diode that is formed of the body region and the first silicon carbide semiconductor layer.

摘要翻译： 包括根据本发明的MISFET的半导体元件100的特征在于通过外延沟道层50在相反方向上具有二极管特性。半导体元件100包括第一导电类型的半导体层20，第一导电类型的体区30 第二导电类型，第一导电类型的源极和漏极区域40和75，与主体区域接触的外延沟道层50，源极和漏极电极45和70，栅极绝缘膜60和栅电极65.如果 施加到MISFET的栅电极的电压小于阈值电压，半导体元件100用作二极管，其中电流通过外延沟道层50从源电极45流到漏极70。绝对值 该二极管的导通电压小于由体区和第一硅碳化物形成的体二极管的导通电压的导通电压 e半导体层。

公开(公告)号：US20120057386A1

公开(公告)日：2012-03-08

申请号：US13266271

申请日：2010-04-28

申请人： Kazuhiro Adachi ,  Osamu Kusumoto ,  Masao Uchida ,  Koichi Hashimoto ,  Shun Kazama

发明人： Kazuhiro Adachi ,  Osamu Kusumoto ,  Masao Uchida ,  Koichi Hashimoto ,  Shun Kazama

IPC分类号： H02M7/537 ,  H01L29/24

CPC分类号： H01L29/1608 ,  H01L29/45 ,  H01L29/66068 ,  H01L29/7805 ,  H01L29/7827 ,  H01L29/7828 ,  H03K17/145

摘要： A semiconductor element 100 including an MISFET according to the present invention is characterized by having diode characteristics in a reverse direction through an epitaxial channel layer 50. The semiconductor element 100 includes a silicon carbide semiconductor substrate 10 of a first conductivity type, a semiconductor layer 20 of the first conductivity type, a body region 30 of a second conductivity type, a source region 40 of the first conductivity type, an epitaxial channel layer 50 in contact with the body region, a source electrode 45, a gate insulating film 60, a gate electrode 65 and a drain electrode 70. If the voltage applied to the gate electrode of the MISFET is smaller than a threshold voltage, the semiconductor element 100 functions as a diode in which current flows from the source electrode 45 to the drain electrode 70 through the epitaxial channel layer 50. The absolute value of the turn-on voltage of this diode is smaller than that of the turn-on voltage of a body diode that is formed of the body region and the first silicon carbide semiconductor layer.

摘要翻译： 包括根据本发明的MISFET的半导体元件100的特征在于通过外延沟道层50在相反方向上具有二极管特性。半导体元件100包括第一导电类型的碳化硅半导体衬底10，半导体层20 第一导电类型的体区30，第一导电类型的源极区40，与体区接触的外延沟道层50，源电极45，栅极绝缘膜60， 栅电极65和漏电极70.如果施加到MISFET的栅电极的电压小于阈值电压，则半导体元件100用作二极管，其中电流从源电极45流到漏电极70通过 外延沟道层50.该二极管的导通电压的绝对值小于体二的导通电压的绝对值 由所述体区和所述第一碳化硅半导体层形成。

公开(公告)号：US08410489B2

公开(公告)日：2013-04-02

申请号：US13266271

申请日：2010-04-28

申请人： Kazuhiro Adachi ,  Osamu Kusumoto ,  Masao Uchida ,  Koichi Hashimoto ,  Shun Kazama

发明人： Kazuhiro Adachi ,  Osamu Kusumoto ,  Masao Uchida ,  Koichi Hashimoto ,  Shun Kazama

IPC分类号： H01L29/24

CPC分类号： H01L29/1608 ,  H01L29/45 ,  H01L29/66068 ,  H01L29/7805 ,  H01L29/7827 ,  H01L29/7828 ,  H03K17/145

摘要： A semiconductor element 100 including an MISFET according to the present invention is characterized by having diode characteristics in a reverse direction through an epitaxial channel layer 50. The semiconductor element 100 includes a silicon carbide semiconductor substrate 10 of a first conductivity type, a semiconductor layer 20 of the first conductivity type, a body region 30 of a second conductivity type, a source region 40 of the first conductivity type, an epitaxial channel layer 50 in contact with the body region, a source electrode 45, a gate insulating film 60, a gate electrode 65 and a drain electrode 70. If the voltage applied to the gate electrode of the MISFET is smaller than a threshold voltage, the semiconductor element 100 functions as a diode in which current flows from the source electrode 45 to the drain electrode 70 through the epitaxial channel layer 50. The absolute value of the turn-on voltage of this diode is smaller than that of the turn-on voltage of a body diode that is formed of the body region and the first silicon carbide semiconductor layer.

摘要翻译： 包括根据本发明的MISFET的半导体元件100的特征在于通过外延沟道层50在相反方向上具有二极管特性。半导体元件100包括第一导电类型的碳化硅半导体衬底10，半导体层20 第一导电类型的体区30，第一导电类型的源极区40，与体区接触的外延沟道层50，源电极45，栅极绝缘膜60， 栅电极65和漏电极70.如果施加到MISFET的栅电极的电压小于阈值电压，则半导体元件100用作二极管，其中电流从源电极45流到漏电极70通过 外延沟道层50.该二极管的导通电压的绝对值小于体二的导通电压的绝对值 由所述体区和所述第一碳化硅半导体层形成。

公开(公告)号：US20120139623A1

公开(公告)日：2012-06-07

申请号：US13389555

申请日：2010-08-09

申请人： Koichi Hashimoto ,  Kazuhiro Adachi ,  Osamu Kusumoto ,  Masao Uchida ,  Shun Kazama

发明人： Koichi Hashimoto ,  Kazuhiro Adachi ,  Osamu Kusumoto ,  Masao Uchida ,  Shun Kazama

IPC分类号： G05F3/02 ,  H01L29/78

CPC分类号： H01L29/7828 ,  H01L29/1608 ,  H01L29/66068 ,  H01L29/78 ,  H01L29/7838 ,  H02M7/5387 ,  Y02B70/1483

摘要： A semiconductor element 100 including an MISFET according to the present invention is characterized by having diode characteristics in a reverse direction through an epitaxial channel layer 50. The semiconductor element 100 includes a semiconductor layer 20 of a first conductivity type, a body region 30 of a second conductivity type, source and drain regions 40 and 75 of the first conductivity type, an epitaxial channel layer 50 in contact with the body region, source and drain electrodes 45 and 70, a gate insulating film 60, and a gate electrode 65. If the voltage applied to the gate electrode of the MISFET is smaller than a threshold voltage, the semiconductor element 100 functions as a diode in which current flows from the source electrode 45 to the drain electrode 70 through the epitaxial channel layer 50. The absolute value of the turn-on voltage of this diode is smaller than that of the turn-on voltage of a body diode that is formed of the body region and the first silicon carbide semiconductor layer.

摘要翻译： 包括根据本发明的MISFET的半导体元件100的特征在于通过外延沟道层50在相反方向上具有二极管特性。半导体元件100包括第一导电类型的半导体层20，第一导电类型的体区30 第二导电类型，第一导电类型的源极和漏极区域40和75，与主体区域接触的外延沟道层50，源极和漏极电极45和70，栅极绝缘膜60和栅电极65.如果 施加到MISFET的栅电极的电压小于阈值电压，半导体元件100用作二极管，其中电流通过外延沟道层50从源电极45流到漏极70。绝对值 该二极管的导通电压小于由体区和第一硅碳化物形成的体二极管的导通电压的导通电压 e半导体层。

公开(公告)号：US20080265260A1

公开(公告)日：2008-10-30

申请号：US11570269

申请日：2005-06-10

申请人： Makoto Kitabatake ,  Osamu Kusumoto ,  Masao Uchida ,  Kunimasa Takahashi ,  Kenya Yamashita ,  Koichi Hashimoto

发明人： Makoto Kitabatake ,  Osamu Kusumoto ,  Masao Uchida ,  Kunimasa Takahashi ,  Kenya Yamashita ,  Koichi Hashimoto

IPC分类号： H01L29/24

CPC分类号： H01L29/7828 ,  H01L29/0696 ,  H01L29/0847 ,  H01L29/105 ,  H01L29/1608 ,  H01L29/365

摘要： A power device having a transistor structure is formed by using a wide band gap semiconductor. A current path 20 of the power device includes: a JFET (junction) region 2, a drift region 3, and a substrate 4, which have ON resistances exhibiting a positive temperature dependence; and a channel region 1, which has an ON resistance exhibiting a negative temperature dependence. A temperature-induced change in the ON resistance of the entire power device is derived by allowing a temperature-induced change ΔRp in the ON resistance in the JFET (junction) region 2, the drift region 3, and the substrate 4, which have ON resistances exhibiting a positive temperature dependence, and a temperature-induced change ΔRn in the ON resistance in the channel region 1, which has an ON resistance exhibiting a negative temperature dependence, to cancel out each other. With respect to an ON resistance of the entire power device at −30° C., a ratio of change in the ON resistance of the entire power device when a temperature of the power device is varied from −30° C. to 100° C. is 50% or less.

摘要翻译： 通过使用宽带隙半导体形成具有晶体管结构的功率器件。 功率器件的电流通路20包括：具有呈现正温度依赖性的导通电阻的JFET（结）区域2，漂移区域3和衬底4; 以及具有呈现负温度依赖性的导通电阻的沟道区域1。 通过使JFET（结）区域2，漂移区域3中的导通电阻中的温度感应变化ΔR

<！ - SIPO - >于高电平，导致整个功率器件的导通电阻的温度引起的变化， 并且具有呈现正温度依赖性的导通电阻的基板4和沟道区域1中的导通电阻中的温度感应变化ΔR ，其具有呈现负温度依赖性的导通电阻 ，取消对方。 关于整个功率器件在-30℃的导通电阻，当功率器件的温度从-30℃变化到100℃时，整个功率器件的导通电阻的变化率 50％以下。

公开(公告)号：US20070158778A1

公开(公告)日：2007-07-12

申请号：US10588960

申请日：2005-08-26

申请人： Makoto Kitabatake ,  Osamu Kusumoto ,  Masao Uchida ,  Kunimasa Takahashi ,  Kenya Yamashita ,  Ryoko Miyanaga ,  Koichi Hashimoto

发明人： Makoto Kitabatake ,  Osamu Kusumoto ,  Masao Uchida ,  Kunimasa Takahashi ,  Kenya Yamashita ,  Ryoko Miyanaga ,  Koichi Hashimoto

IPC分类号： H01L23/58

CPC分类号： H02M7/538 ,  H01L21/8213 ,  H01L21/8252 ,  H01L24/73 ,  H01L27/0605 ,  H01L27/0727 ,  H01L2224/0603 ,  H01L2224/32145 ,  H01L2224/32225 ,  H01L2224/32245 ,  H01L2224/48091 ,  H01L2224/48137 ,  H01L2224/48247 ,  H01L2224/73265 ,  H01L2924/12032 ,  H01L2924/13055 ,  H01L2924/13062 ,  H01L2924/13063 ,  H01L2924/13091 ,  H01L2924/14 ,  H02M7/003 ,  H03K17/063 ,  H03K17/6871 ,  Y02B70/1483 ,  H01L2924/00012 ,  H01L2924/00 ,  H01L2924/00014

摘要： A semiconductor device according to this invention includes: two level shift switches (28A and 28B) each having first and second electrodes, a control electrode, a signal output electrode, and a first semiconductor region forming a transistor device section (28a,28b) which intervenes between the first electrode and the signal output electrode and is brought into or out of conduction according to a signal inputted to the control electrode and a resistor device section (Ra,Rb) which intervenes between the signal output electrode and the second electrode, the first semiconductor region comprising a wide bandgap semiconductor; and a diode (23) having a cathode-side electrode, an anode-side electrode, and a second semiconductor region comprising a wide bandgap semiconductor.

摘要翻译： 根据本发明的半导体器件包括：具有第一和第二电极的两个电平移位开关（28A和28B），控制电极，信号输出电极和形成晶体管器件部分（28a， 28b），其介于所述第一电极和所述信号输出电极之间，并且根据输入到所述控制电极的信号和介于所述信号输出电极和所述信号输出电极之间的电阻器部分（Ra，Rb）而导通或导通; 第二电极，第一半导体区域包括宽带隙半导体; 以及具有阴极侧电极，阳极侧电极和包括宽带隙半导体的第二半导体区域的二极管（23）。

公开(公告)号：US07671409B2

公开(公告)日：2010-03-02

申请号：US11570269

申请日：2005-06-10

申请人： Makoto Kitabatake ,  Osamu Kusumoto ,  Masao Uchida ,  Kunimasa Takahashi ,  Kenya Yamashita ,  Koichi Hashimoto

发明人： Makoto Kitabatake ,  Osamu Kusumoto ,  Masao Uchida ,  Kunimasa Takahashi ,  Kenya Yamashita ,  Koichi Hashimoto

IPC分类号： H01L29/24

CPC分类号： H01L29/7828 ,  H01L29/0696 ,  H01L29/0847 ,  H01L29/105 ,  H01L29/1608 ,  H01L29/365

摘要： A field-effect transistor power device includes a source electrode, a drain electrode, a wide gap semiconductor including a channel region and a drift region, the channel region and the drift region forming a series current path between the source electrode and the drain electrode, a gate insulating film that covers the channel region, and a gate electrode formed on the gate insulating film. In the series current path which is electrically conducting when the field-effect transistor power device is in an ON state, any region other than the channel region has an ON resistance exhibiting a positive temperature dependence, and the channel region has an ON resistance exhibiting a negative temperature dependence. A ratio ΔRon/Ron(−30° C.) is 50% or less.

摘要翻译： 场效晶体管功率器件包括源电极，漏电极，包括沟道区和漂移区的宽间隙半导体，沟道区和漂移区在源电极和漏电极之间形成串联电流路径， 覆盖沟道区的栅极绝缘膜和形成在栅极绝缘膜上的栅电极。 在场效应晶体管功率器件处于导通状态时导通的串联电流路径中，通道区域以外的任何区域具有呈现正温度依赖性的导通电阻，并且沟道区域具有呈现出导通电阻 负温度依赖性。 比率＆Dgr; Ron / Ron（-30℃）为50％以下。

公开(公告)号：US07436031B2

公开(公告)日：2008-10-14

申请号：US10588960

申请日：2005-08-26

申请人： Makoto Kitabatake ,  Osamu Kusumoto ,  Masao Uchida ,  Kunimasa Takahashi ,  Kenya Yamashita ,  Ryoko Miyanaga ,  Koichi Hashimoto

发明人： Makoto Kitabatake ,  Osamu Kusumoto ,  Masao Uchida ,  Kunimasa Takahashi ,  Kenya Yamashita ,  Ryoko Miyanaga ,  Koichi Hashimoto

IPC分类号： H01L29/76 ,  H01L29/94 ,  H01L31/00

CPC分类号： H02M7/538 ,  H01L21/8213 ,  H01L21/8252 ,  H01L24/73 ,  H01L27/0605 ,  H01L27/0727 ,  H01L2224/0603 ,  H01L2224/32145 ,  H01L2224/32225 ,  H01L2224/32245 ,  H01L2224/48091 ,  H01L2224/48137 ,  H01L2224/48247 ,  H01L2224/73265 ,  H01L2924/12032 ,  H01L2924/13055 ,  H01L2924/13062 ,  H01L2924/13063 ,  H01L2924/13091 ,  H01L2924/14 ,  H02M7/003 ,  H03K17/063 ,  H03K17/6871 ,  Y02B70/1483 ,  H01L2924/00012 ,  H01L2924/00 ,  H01L2924/00014

摘要： A semiconductor device according to this invention includes: two level shift switches (28A and 28B) each having first and second electrodes, a control electrode, a signal output electrode, and a first semiconductor region forming a transistor device section (28a,28b) which intervenes between the first electrode and the signal output electrode and is brought into or out of conduction according to a signal inputted to the control electrode and a resistor device section (Ra,Rb) which intervenes between the signal output electrode and the second electrode, the first semiconductor region comprising a wide bandgap semiconductor; and a diode (23) having a cathode-side electrode, an anode-side electrode, and a second semiconductor region comprising a wide bandgap semiconductor.

摘要翻译： 根据本发明的半导体器件包括：具有第一和第二电极的两个电平移位开关（28A和28B），控制电极，信号输出电极和形成晶体管器件部分（28a， 28b），其介于所述第一电极和所述信号输出电极之间，并且根据输入到所述控制电极的信号和介于所述信号输出电极和所述信号输出电极之间的电阻器部分（Ra，Rb）而导通或导通; 第二电极，第一半导体区域包括宽带隙半导体; 以及具有阴极侧电极，阳极侧电极和包括宽带隙半导体的第二半导体区域的二极管（23）。

公开(公告)号：US07846828B2

公开(公告)日：2010-12-07

申请号：US12338395

申请日：2008-12-18

申请人： Osamu Kusumoto ,  Makoto Kitabatake ,  Masao Uchida ,  Kunimasa Takahashi ,  Kenya Yamashita ,  Masahiro Hagio ,  Kazuyuki Sawada

发明人： Osamu Kusumoto ,  Makoto Kitabatake ,  Masao Uchida ,  Kunimasa Takahashi ,  Kenya Yamashita ,  Masahiro Hagio ,  Kazuyuki Sawada

IPC分类号： H01L21/28 ,  H01L21/44

CPC分类号： H01L29/7828 ,  H01L21/046 ,  H01L21/0475 ,  H01L21/0485 ,  H01L21/30625 ,  H01L29/1029 ,  H01L29/105 ,  H01L29/1608 ,  H01L29/365 ,  H01L29/41766 ,  H01L29/66068 ,  H01L29/7838 ,  H01L29/812

摘要： Ion implantation is carried out to form a p-well region and a source region in parts of a high resistance SiC layer on a SiC substrate, and a carbon film is deposited over the substrate. With the carbon film deposited over the substrate, annealing for activating the implanted dopant ions is performed, and then the carbon film is removed. Thus, a smooth surface having hardly any surface roughness caused by the annealing is obtained. Furthermore, if a channel layer is epitaxially grown, the surface roughness of the channel layer is smaller than that of the underlying layer. Since the channel layer having a smooth surface is provided, it is possible to obtain a MISFET with a high current drive capability.

摘要翻译： 进行离子注入以在SiC衬底上的高电阻SiC层的部分中形成p阱区域和源极区域，并且在衬底上沉积碳膜。 通过沉积在基板上的碳膜，进行用于激活注入的掺杂离子的退火，然后除去碳膜。 因此，获得了退火几乎没有表面粗糙度的光滑表面。 此外，如果沟道层外延生长，则沟道层的表面粗糙度小于下层的表面粗糙度。 由于提供了具有平滑表面的沟道层，所以可以获得具有高电流驱动能力的MISFET。