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    Sensor module
    1.
    发明授权
    Sensor module 有权
    传感器模块

    公开(公告)号：US07323766B2

    公开(公告)日：2008-01-29

    申请号：US10982982

    申请日：2004-11-04

    申请人： Kurt Weiblen ,  Franz Schmich ,  Harald Emmerich ,  Klaus Offterdinger ,  Hansjoerg Beutel ,  Johann Wehrmann ,  Florian Grabmaier

    发明人： Kurt Weiblen ,  Franz Schmich ,  Harald Emmerich ,  Klaus Offterdinger ,  Hansjoerg Beutel ,  Johann Wehrmann ,  Florian Grabmaier

    IPC分类号： H01L23/495

    CPC分类号： B81B7/0064 ,  B81B2201/0235 ,  B81B2201/0242 ,  G01P1/023 ,  H01L2224/32225 ,  H01L2224/48091 ,  H01L2224/48137 ,  H01L2224/48247 ,  H01L2224/48472 ,  H01L2224/73265 ,  H01L2924/01068 ,  H01L2924/3025 ,  H01R13/6594 ,  H01L2924/00014 ,  H01L2924/00

    摘要： A sensor module, in particular for measuring an acceleration or rotational speed, having a housing base body made of a plastic material, a lead frame extending through the housing base body and having leads which have connector pins for attachment to a circuit board, a sensor system having at least one sensor chip, the sensor system being in contact with the lead frame via conductor bonds, a cover, which is connected to the base body and at least one connector pin and is made of a conductive material. A simple construction having a high shielding effect is achieved due to the fact that the conductive cover is connected to the connector pin. The cover, a lid, for example, may be contacted directly via the connector pin together with the other connector pins when the components are mounted on the circuit board. The sensor module may be molded or may have a premolded housing. The edge or a contact of the cover may be welded, soldered, glued, or pressed to a ground lead of the lead frame.

    摘要翻译： 传感器模块，特别是用于测量加速度或转速，具有由塑料材料制成的壳体基体;延伸穿过壳体基体的引线框架，以及具有用于连接到电路板的连接器引脚的引线;传感器 系统具有至少一个传感器芯片，所述传感器系统通过导体接合与所述引线框架接触;盖，其连接到所述基体和至少一个连接器引脚并且由导电材料制成。 由于导电盖连接到连接器针的事实，实现了具有高屏蔽效果的简单结构。 当组件安装在电路板上时，盖子（例如盖子）可以通过连接器销与其它连接器引脚直接接触。 传感器模块可以被模制或者可以具有预成型的壳体。 盖的边缘或接触件可以被焊接，焊接，胶合或压到引线框架的接地引线。

    Acceleration sensor system
    3.
    发明申请
    Acceleration sensor system 审中-公开
    加速度传感器系统

    公开(公告)号：US20050103105A1

    公开(公告)日：2005-05-19

    申请号：US10964291

    申请日：2004-10-13

    申请人： Harald Emmerich ,  Hansjoerg Beutel

    发明人： Harald Emmerich ,  Hansjoerg Beutel

    IPC分类号： B81B7/00 ,  G01P1/02 ,  G01P15/125

    CPC分类号： B81B7/0048 ,  B81B2201/0264 ,  G01P1/023 ,  G01P15/125 ,  H01L2224/48137 ,  H01L2224/48247 ,  H01L2224/73265 ,  H01L2224/8592 ,  H01L2924/16195

    摘要： An acceleration sensor system is especially suitable for measuring low accelerations. The acceleration sensor system has at least: one premold housing made of a plastic material having a housing inner chamber, one lead frame which extends through the premold housing in the housing inner chamber, and one acceleration sensor chip, which is fastened in the housing inner chamber with the aid of an adhesive layer, and is connected to the lead frame with the aid of line bond connections. Advantageous stress decouplings are achieved in this connection by using an adhesive layer having a uniform thickness greater than 50 μm, preferably greater than 100 μm, in particular, the adhesive material of the adhesive layer being softer than the chip material of the acceleration sensor chip.

    摘要翻译： 加速度传感器系统特别适用于测量低加速度。 加速度传感器系统至少具有：一个由塑料材料制成的预制外壳，其具有壳体内腔，一个引线框架，其延伸穿过壳体内腔中的预制外壳，以及一个加速度传感器芯片，其紧固在壳体内部 借助于粘合剂层连接到引线框架上。 通过使用具有大于50μm，优选大于100μm的均匀厚度的粘合剂层，特别地，粘合剂层的粘合剂材料比加速度传感器芯片的芯片材料柔软，从而实现了有益的应力解耦。

    Sensor ,Sensor Component and Method for Producing a Sensor
    5.
    发明申请
    Sensor ,Sensor Component and Method for Producing a Sensor 审中-公开
    传感器，传感器组件和生产传感器的方法

    公开(公告)号：US20090193891A1

    公开(公告)日：2009-08-06

    申请号：US12083420

    申请日：2006-11-08

    申请人： Dirk Ullmann ,  Harald Emmerich

    发明人： Dirk Ullmann ,  Harald Emmerich

    IPC分类号： G01D11/24 ,  H05K13/04

    CPC分类号： G01D11/245 ,  H01L2224/45144 ,  H01L2224/48091 ,  H01L2224/48137 ,  H01L2224/48247 ,  H01L2224/8592 ,  H01L2924/07811 ,  H01L2924/181 ,  Y10T29/49826 ,  H01L2924/00014 ,  H01L2924/00 ,  H01L2924/00012

    摘要： A sensor, a sensor component and a method for manufacturing a sensor are provided, in which sensors for measuring absolute values are inserted into cost-effective and technically simple plastic housings of the usual construction type, without having negative effects on the long-term stability of the absolute measuring values supplied by such sensors. In particular, parameter drifts and offsets in the parameters are induced by arranging a sensor element above an application-specific semiconductor element which evaluates the sensor's signals, and is connected to it via a flip-chip connection. Mechanical, thermal and moisture stresses are prevented and compensated for by introducing a suitable quantity of gel into the plastic housing.

    摘要翻译： 提供一种传感器，传感器部件和传感器的制造方法，其中用于测量绝对值的传感器插入到通常结构类型的经济有效且技术上简单的塑料外壳中，而不会对长期稳定性产生负面影响 由这些传感器提供的绝对测量值。 特别地，参数中的参数漂移和偏移通过将传感器元件布置在评估传感器的信号的特定应用的半导体元件之上而被引导，并且通过倒装芯片连接与其连接。 通过将合适量的凝胶引入塑料外壳来防止和补偿机械，热和湿气的应力。

    Acceleration sensor method for operating an acceleration sensor
    7.
    发明授权
    Acceleration sensor method for operating an acceleration sensor 有权
    用于操作加速度传感器的加速度传感器方法

    公开(公告)号：US08752431B2

    公开(公告)日：2014-06-17

    申请号：US13148038

    申请日：2009-12-11

    申请人： Jochen Reinmuth ,  Harald Emmerich

    发明人： Jochen Reinmuth ,  Harald Emmerich

    IPC分类号： G01P15/125

    CPC分类号： G01P15/125 ,  G01P2015/0831

    摘要： An acceleration sensor includes a housing, a first seismic mass which is formed as a first asymmetrical rocker and is disposed in the housing via at least one first spring, a second seismic mass which is formed as a second asymmetrical rocker and is disposed in the housing via at least one second spring, and a sensor and evaluation unit which is designed to ascertain information regarding corresponding rotational movements of the first seismic mass and the second seismic mass in relation to the housing and to determine acceleration information with respect to an acceleration of the acceleration sensor, taking the ascertained information into account. In addition, a method for operating an acceleration sensor is disclosed. The rockers execute opposite rotational movements in response to the presence of an acceleration. A differential evaluation of the signals makes it possible to free the measuring signal of any existing interference signals.

    摘要翻译： 加速度传感器包括壳体，第一抗震块，其形成为第一不对称摇臂，并且经由至少一个第一弹簧设置在壳体中，第二抗震块形成为第二不对称摇臂并设置在壳体中 经由至少一个第二弹簧以及传感器和评估单元，该传感器和评估单元被设计成确定关于第一地震质量块和第二地震质量块相对于壳体的相应旋转运动的信息，并且确定相对于壳体的加速度的加速度信息 加速度传感器，考虑确定的信息。 此外，公开了一种用于操作加速度传感器的方法。 响应于加速度的存在，摇臂执行相反的旋转运动。 信号的差分评估使得可以释放任何现有干扰信号的测量信号。

    ACCELERATION SENSOR AND METHOD FOR OPERATING AN ACCELERATION SENSOR
    8.
    发明申请
    ACCELERATION SENSOR AND METHOD FOR OPERATING AN ACCELERATION SENSOR 有权
    加速度传感器和运行加速度传感器的方法

    公开(公告)号：US20140083190A1

    公开(公告)日：2014-03-27

    申请号：US13627450

    申请日：2012-09-26

    申请人： Rolf Kaack ,  Dietrich Schubert ,  Harald Emmerich ,  Patrick Wellner

    发明人： Rolf Kaack ,  Dietrich Schubert ,  Harald Emmerich ,  Patrick Wellner

    IPC分类号： G01P15/03 ,  G01P15/135

    CPC分类号： G01P15/032 ,  G01P15/125 ,  G01P15/135 ,  G01P2015/0814 ,  G01P2015/0817 ,  G01P2015/0857

    摘要： An acceleration sensor has a substrate, a seismic mass and a detection unit. The seismic mass is configured to be deflected based on an external acceleration acting on the acceleration sensor, the deflection being in the form of a deflection motion with respect to the substrate along a deflection direction. The detection unit is configured to be deflected for the detection of a deflection of the seismic mass, the detection being in the form of a detection motion with respect to the substrate along a detection direction. The detection unit is connected to the seismic mass in such a way that the amplitude of the deflection motion along the deflection direction is greater than the amplitude of the detection motion along the detection direction.

    摘要翻译： 加速度传感器具有基板，地震块和检测单元。 地震质量被构造为基于作用在加速度传感器上的外部加速度而偏转，所述偏转以相对于基板沿着偏转方向的偏转运动的形式。 检测单元被配置为偏转以检测地震质量块的偏转，该检测是沿检测方向相对于基板的检测运动的形式。 检测单元以使得沿着偏转方向的偏转运动的振幅大于沿着检测方向的检测运动的幅度的方式连接到地震质量。

    Method and device for the electrical zero balancing for a micromechanical component
    10.
    发明申请
    Method and device for the electrical zero balancing for a micromechanical component 审中-公开
    用于微机械部件的电零平衡的方法和装置

    公开(公告)号：US20050066704A1

    公开(公告)日：2005-03-31

    申请号：US10381992

    申请日：2001-06-01

    申请人： Leo Tanten ,  Jochen Franz ,  Martin Schoefthaler ,  Marius Rohr ,  Harald Emmerich ,  Matthias Maute ,  Thomas Walker

    发明人： Leo Tanten ,  Jochen Franz ,  Martin Schoefthaler ,  Marius Rohr ,  Harald Emmerich ,  Matthias Maute ,  Thomas Walker

    IPC分类号： G01C19/56 ,  G01P15/125 ,  G01P21/00

    CPC分类号： G01P15/125 ,  G01C19/56 ,  G01P21/00

    摘要： A method for the electrical zero balancing of a micro mechanical component including a first capacitor electrode rigidly suspended over a substrate, a second capacitor electrode rigidly suspended over the substrate, and a third capacitor electrode disposed there between, resiliently and deflectably suspended over the substrate, as well as a differential-capacitance detector for measuring a differential capacitance of the capacitances of the variable capacitors configured in this manner. In this context, a first electric potential is applied to the first capacitor electrode; a second electric potential is applied to the second capacitor electrode; a third electric potential is applied to the third capacitor electrode; and a fourth electric potential is applied to the substrate. The fourth electrical potential applied to the substrate for the electrical zero-point balancing is changed for the operation of the differential-capacitance detector.

    摘要翻译： 一种用于微机械部件的电零平衡的方法，所述微机械部件包括刚性地悬挂在基板上的第一电容器电极，刚性地悬挂在所述基板上的第二电容器电极和布置在其上的第三电容器电极，弹性地和偏转地悬挂在所述基板上， 以及用于测量以这种方式配置的可变电容器的电容的差分电容的差分电容检测器。 在本文中，第一电位被施加到第一电容器电极; 第二电位施加到第二电容器电极; 向第三电容器电极施加第三电位; 向基板施加第四电位。 施加到用于电气零点平衡的基板的第四电位被改变用于差分电容检测器的操作。