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    Process of Positioning Groups of Contact Structures
    1.
    发明申请
    Process of Positioning Groups of Contact Structures 失效
    定位接触结构组的过程

    公开(公告)号：US20100078206A1

    公开(公告)日：2010-04-01

    申请号：US12240505

    申请日：2008-09-29

    申请人： Li Fan ,  Michael J. Armstrong ,  John K. Gritters

    发明人： Li Fan ,  Michael J. Armstrong ,  John K. Gritters

    IPC分类号： H05K3/36 ,  H05K1/11

    CPC分类号： G01R3/00 ,  G01R1/06727 ,  G01R1/07314 ,  Y10T29/49126 ,  Y10T29/49149

    摘要： A contact apparatus can be made by providing a first substrate with electrically conductive terminals and second substrates each of which can have contact structures. Each of the contact structures can have a contact tip. The second substrates can be aligned such that contact tips of the contact structures are aligned substantially in a plane. An optical system can be used to monitor an actual position of the second substrates, and a mechanical system can be used to move the second substrates to aligned positions. The contact structures can be attached to ones of the terminals on the first substrate while the second substrates are in the aligned positions.

    摘要翻译： 可以通过提供具有导电端子的第一基板和每个可以具有接触结构的第二基板来制造接触装置。 每个接触结构可以具有接触尖端。 第二基板可以对准，使得接触结构的接触尖端基本上在平面中对准。 可以使用光学系统来监测第二基板的实际位置，并且可以使用机械系统将第二基板移动到对准位置。 接触结构可以附接到第一基板上的端子中的一个，而第二基板处于对准位置。

    Process of positioning groups of contact structures
    2.
    发明授权
    Process of positioning groups of contact structures 失效
    定位接触结构组的过程

    公开(公告)号：US08148646B2

    公开(公告)日：2012-04-03

    申请号：US12240505

    申请日：2008-09-29

    申请人： Li Fan ,  Michael J. Armstrong ,  John K. Gritters

    发明人： Li Fan ,  Michael J. Armstrong ,  John K. Gritters

    IPC分类号： H05K1/11

    CPC分类号： G01R3/00 ,  G01R1/06727 ,  G01R1/07314 ,  Y10T29/49126 ,  Y10T29/49149

    摘要： A contact apparatus can be made by providing a first substrate with electrically conductive terminals and second substrates each of which can have contact structures. Each of the contact structures can have a contact tip. The second substrates can be aligned such that contact tips of the contact structures are aligned substantially in a plane. An optical system can be used to monitor an actual position of the second substrates, and a mechanical system can be used to move the second substrates to aligned positions. The contact structures can be attached to ones of the terminals on the first substrate while the second substrates are in the aligned positions.

    摘要翻译： 可以通过提供具有导电端子的第一基板和每个可以具有接触结构的第二基板来制造接触装置。 每个接触结构可以具有接触尖端。 第二基板可以对准，使得接触结构的接触尖端基本上在平面中对准。 可以使用光学系统来监测第二基板的实际位置，并且可以使用机械系统将第二基板移动到对准位置。 接触结构可以附接到第一基板上的端子中的一个，而第二基板处于对准位置。

    Single support structure probe group with staggered mounting pattern
    5.
    发明授权
    Single support structure probe group with staggered mounting pattern 有权
    单支撑结构探头组具有交错安装图案

    公开(公告)号：US08203352B2

    公开(公告)日：2012-06-19

    申请号：US12861984

    申请日：2010-08-24

    申请人： Li Fan ,  John K. Gritters

    发明人： Li Fan ,  John K. Gritters

    IPC分类号： G01R31/00 ,  G01R1/067

    CPC分类号： G01R1/07342 ,  G01R1/06727 ,  G01R1/07378 ,  G01R31/31905

    摘要： A probe group can include multiple probes for testing devices having contact pads. The probes can comprise beams, contact tip structures, and mounting portions. The beams can provide for controlled deflection of the probes. The contact tip structures can be connected to the beams and can include contact portions for contacting with the devices. The mounting portions of the beams can be attached to support structures, which can be arranged in a staggered pattern. The beams located in a first row of the staggered pattern can include narrowing regions that lie substantially in line with the mounting portions of a second row of the beams.

    摘要翻译： 探针组可以包括用于测试具有接触垫的设备的多个探针。 探针可以包括梁，接触尖端结构和安装部分。 梁可以提供探头的可控偏转。 接触尖端结构可以连接到梁，并且可以包括用于与装置接触的接触部分。 梁的安装部分可以附接到可以以交错图案布置的支撑结构。 位于交错图案的第一行中的光束可以包括基本上与第二排光束的安装部分成一直线的变窄区域。

    SINGLE SUPPORT STRUCTURE PROBE GROUP WITH STAGGERED MOUNTING PATTERN
    6.
    发明申请
    SINGLE SUPPORT STRUCTURE PROBE GROUP WITH STAGGERED MOUNTING PATTERN 有权
    单一支撑结构探头组与STAGGERED MOUNTING PATTERN

    公开(公告)号：US20100315111A1

    公开(公告)日：2010-12-16

    申请号：US12861984

    申请日：2010-08-24

    申请人： Li Fan ,  John K. Gritters

    发明人： Li Fan ,  John K. Gritters

    IPC分类号： G01R31/00

    CPC分类号： G01R1/07342 ,  G01R1/06727 ,  G01R1/07378 ,  G01R31/31905

    摘要： A probe group can include multiple probes for testing devices having contact pads. The probes can comprise beams, contact tip structures, and mounting portions. The beams can provide for controlled deflection of the probes. The contact tip structures can be connected to the beams and can include contact portions for contacting with the devices. The mounting portions of the beams can be attached to support structures, which can be arranged in a staggered pattern. The beams located in a first row of the staggered pattern can include narrowing regions that lie substantially in line with the mounting portions of a second row of the beams.

    摘要翻译： 探针组可以包括用于测试具有接触垫的设备的多个探针。 探针可以包括梁，接触尖端结构和安装部分。 梁可以提供探头的可控偏转。 接触尖端结构可以连接到梁，并且可以包括用于与装置接触的接触部分。 梁的安装部分可以附接到可以以交错图案布置的支撑结构。 位于交错图案的第一行中的光束可以包括基本上与第二排光束的安装部分成一直线的变窄区域。

    Single support structure probe group with staggered mounting pattern
    7.
    发明授权
    Single support structure probe group with staggered mounting pattern 有权
    单支撑结构探头组具有交错安装图案

    公开(公告)号：US07782072B2

    公开(公告)日：2010-08-24

    申请号：US11535859

    申请日：2006-09-27

    申请人： Li Fan ,  John K. Gritters

    发明人： Li Fan ,  John K. Gritters

    IPC分类号： G01R31/02

    CPC分类号： G01R1/07342 ,  G01R1/06727 ,  G01R1/07378 ,  G01R31/31905

    摘要： A probe group can include multiple probes for testing devices having contact pads. The probes can comprise beams, contact tip structures, and mounting portions. The beams can provide for controlled deflection of the probes. The contact tip structures can be connected to the beams and can include contact portions for contacting with the devices. The mounting portions of the beams can be attached to support structures, which can be arranged in a staggered pattern. The beams located in a first row of the staggered pattern can include narrowing regions that lie substantially in line with the mounting portions of a second row of the beams.

    摘要翻译： 探针组可以包括用于测试具有接触垫的设备的多个探针。 探针可以包括梁，接触尖端结构和安装部分。 梁可以提供探头的可控偏转。 接触尖端结构可以连接到梁，并且可以包括用于与装置接触的接触部分。 梁的安装部分可以附接到可以以交错图案布置的支撑结构。 位于交错图案的第一行中的光束可以包括基本上与第二排光束的安装部分成一直线的变窄区域。

    SINGLE SUPPORT STRUCTURE PROBE GROUP WITH STAGGERED MOUNTING PATTERN
    8.
    发明申请
    SINGLE SUPPORT STRUCTURE PROBE GROUP WITH STAGGERED MOUNTING PATTERN 有权
    单一支撑结构探头组与STAGGERED MOUNTING PATTERN

    公开(公告)号：US20080074132A1

    公开(公告)日：2008-03-27

    申请号：US11535859

    申请日：2006-09-27

    申请人： Li Fan ,  John K. Gritters

    发明人： Li Fan ,  John K. Gritters

    IPC分类号： G01R31/02

    CPC分类号： G01R1/07342 ,  G01R1/06727 ,  G01R1/07378 ,  G01R31/31905

    摘要： A probe group can include multiple probes for testing devices having contact pads. The probes can comprise beams, contact tip structures, and mounting portions. The beams can provide for controlled deflection of the probes. The contact tip structures can be connected to the beams and can include contact portions for contacting with the devices. The mounting portions of the beams can be attached to support structures, which can be arranged in a staggered pattern. The beams located in a first row of the staggered pattern can include narrowing regions that lie substantially in line with the mounting portions of a second row of the beams.

    摘要翻译： 探针组可以包括用于测试具有接触垫的设备的多个探针。 探针可以包括梁，接触尖端结构和安装部分。 梁可以提供探头的可控偏转。 接触尖端结构可以连接到梁，并且可以包括用于与装置接触的接触部分。 梁的安装部分可以附接到可以以交错图案布置的支撑结构。 位于交错图案的第一行中的光束可以包括基本上与第二排光束的安装部分成一直线的变窄区域。

    Process For Manufacturing Contact Elements For Probe Card Assembles
    9.
    发明申请
    Process For Manufacturing Contact Elements For Probe Card Assembles 审中-公开
    制造用于探针卡组件的接触元件的工艺

    公开(公告)号：US20100140793A1

    公开(公告)日：2010-06-10

    申请号：US12470971

    申请日：2009-05-22

    申请人： Li Fan ,  John K. Gritters

    发明人： Li Fan ,  John K. Gritters

    IPC分类号： H01L23/48 ,  C23F1/00

    CPC分类号： G01R3/00 ,  G01R1/06711 ,  H01L2924/0002 ,  Y10T29/49002 ,  H01L2924/00

    摘要： A process for making contact elements for a probe card assembly includes steps of forming a first continuous trench in a substrate along a first direction, and forming simultaneously a plurality of tip structures adjacent one to another in the first continuous trench in a second direction substantially normal to the first direction, each of the tip structures being part of, or adapted to be part of at least one corresponding contact element capable of forming an electrical contact with a terminal of an electronic device.

    摘要翻译： 用于制造探针卡组件的接触元件的方法包括以下步骤：沿着第一方向在衬底中形成第一连续沟槽，同时在第一连续沟槽中沿第二方向同时形成多个尖端结构 到第一方向，每个尖端结构是能够形成与电子设备的端子的电接触的至少一个对应的接触元件的一部分或者适于其中的一部分。

    Switch for use in microelectromechanical systems (MEMS) and MEMS devices incorporating same
    10.
    发明授权
    Switch for use in microelectromechanical systems (MEMS) and MEMS devices incorporating same 失效
    开关用于微机电系统（MEMS）和结合其的MEMS器件

    公开(公告)号：US08138859B2

    公开(公告)日：2012-03-20

    申请号：US12106364

    申请日：2008-04-21

    申请人： John K. Gritters ,  Eric D. Hobbs ,  Sangtae Park ,  Jun Jason Yao

    发明人： John K. Gritters ,  Eric D. Hobbs ,  Sangtae Park ,  Jun Jason Yao

    IPC分类号： H01H51/22 ,  H01H57/00

    CPC分类号： H01H1/60 ,  H01H1/0036 ,  H01H59/0009 ,  H01H2001/0047 ,  H01H2001/0052 ,  H01H2001/0078

    摘要： Embodiments of the present invention provide microelectromechanical systems (MEMS) switching methods and apparatus having improved performance and lifetime as compared to conventional MEMS switches. In some embodiments, a MEMS switch may include a resilient contact element comprising a beam and a tip configured to wipe a contact surface; and a MEMS actuator having an open position that maintains the tip and the contact surface in a spaced apart relation and a closed position that brings the tip into contact with the contact surface, wherein the resilient contact element and the MEMS actuator are disposed on a substrate and are movable in a plane substantially parallel to the substrate. In some embodiments, various contact elements are provided for the MEMS switch. In some embodiments, various actuators are provided for control of the operation of the MEMS switch.

    摘要翻译： 与常规MEMS开关相比，本发明的实施例提供了具有改进的性能和寿命的微机电系统（MEMS）开关方法和装置。 在一些实施例中，MEMS开关可以包括弹性接触元件，其包括梁和构造成擦拭接触表面的尖端; 以及MEMS致动器，其具有将尖端和接触表面保持间隔开的关闭位置和使尖端与接触表面接触的闭合位置，其中弹性接触元件和MEMS致动器设置在基板上 并且可以在基本上平行于基板的平面中移动。 在一些实施例中，为MEMS开关提供各种接触元件。 在一些实施例中，提供各种致动器用于控制MEMS开关的操作。